JPH0637739U - Pressure sensor - Google Patents

Abstract

(57) [Abstract] [Purpose] To reduce the number of parts and facilitate assembly. [Configuration] to close the pressure opening 3 formed at one end of the body 2, a metal diaphragm 4 arranged inside the body 2, the pressure provided to the metal diaphragm 4
A pressure sensor 1 having a detection element including a circuit board 5 for processing a signal generated according to the pressure introduced into the pressure introduction port 3 and an output means for taking out the signal processed by the circuit board 5 to the outside. Therefore, a space is formed in the circuit board 5, the metal diaphragm 4 is disposed inside the space of the circuit board 5, and a space between the circuit board 5 and the metal diaphragm 4 is formed into a metal diaphragm 4. A pressure sensor connected by the first flexible circuit 7 provided.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a pressure sensor, and more particularly to a pressure sensor having a small number of parts and easy to assemble.

[0002]

[Prior Art and Problems to be Solved]

 Conventionally, a pressure sensor 51 as shown in FIG. 12 is known as a pressure sensor for detecting the pressure of a fluid.

That is, the pressure sensor 51 has a body 52 having a pressure introduction port 53 formed at one end, and a metal diaphragm 54 is provided in an internal space of the body 52 so as to close the pressure introduction port 53. It is located and is fixed by the top stop ring 56.

A diaphragm element is disposed on the upper surface of the metal diaphragm 54, and a first flexible circuit 57 for guiding a signal generated by the diaphragm element to the circuit board 55 is provided on the diaphragm element. Of the first flexible circuit 57, and the other end of the first flexible circuit 57 extends upward and is connected to the circuit board 55.

The circuit board 55 is connected to the second flexible circuit 58 via a pin 63 that penetrates the feedthrough capacitor 60 provided on the plate 59, and is further connected to a connector pin 61 provided on the connector 62. It is designed to be output to the outside.

In the pressure sensor 51 configured as described above, the metal diaphragm 54 is displaced according to the pressure from the pressure introduction port 53 of the body 52, and the metal diaphragm 54 is displaced on the metal diaphragm 54 according to the displacement of the metal diaphragm 54. The diaphragm element of is displaced and generates a signal according to the pressure.

Then, the signal of the diaphragm element is detected by the circuit board 55 through the first flexible circuit 57 and is output to the outside through the pin 63, the second flexible circuit 58 and the connector pin 61. The pressure introduced by the pressure introducing port 53 is detected.

However, the conventional pressure sensor 51 configured as described above has a problem that the number of parts is large and the assembly is complicated.

The present invention solves the above-mentioned problems of the conventional one, and an object thereof is to provide a pressure sensor in which the number of parts is reduced and the assembling is facilitated. .

[0010]

[Means for Solving the Problems]

 In order to achieve the above-mentioned object, the present invention comprises a metal diaphragm disposed inside the body and a diaphragm element provided on the metal diaphragm so as to close a pressure introducing port formed at one end of the body. A pressure sensor comprising a circuit board for processing a signal generated according to the pressure introduced into the pressure introducing port, and an output means for taking out the signal processed by the circuit board to the outside. Forming a void, disposing the metal diaphragm inside the void of the circuit board, and connecting the circuit board and the metal diaphragm by a first flexible circuit provided on the metal diaphragm, The output means is connected to the second flexible circuit, one end of which is connected to the circuit board, and the other end of the second flexible circuit. A feedthrough capacitor disposed in the plate is obtained by employing the means that has and a connector pin which passes through the through capacitors.

[0011]

[Action]

 By adopting the above means, the present invention causes the metal diaphragm to be displaced in response to the pressure acting on the pressure introducing port, and the diaphragm element formed on the upper surface of the metal diaphragm to generate a signal. Then, this signal is output to the circuit board via the first flexible circuit, and the signal processed by the circuit board is output to the outside via the second flexible circuit and the connector pin, so that the pressure acting on the pressure inlet port is output. The force can be detected.

[0012]

【Example】

 An embodiment of the present invention shown in the drawings will be described below. FIG. 1 shows an embodiment of the pressure sensor according to the present invention, and the structure thereof will be described below according to the assembling procedure of the pressure sensor 1 shown in FIGS.

That is, the pressure sensor 1 has a body 2 in which a pressure inlet 3 provided at one end communicates with an internal space, and the internal space of the body 2 has the body 2 as shown in FIG. A metal diaphragm 4 is positioned so as to close the pressure introducing port 3, and a peripheral portion of the metal diaphragm 4 is caulked and fixed to the body 2.

As shown in FIGS. 3 and 4, a first flexible circuit including an annular pad portion 7a and two connecting portions 7b standing upright from the pad portion 7a is provided on the upper portion of the metal diaphragm 4. 7 is disposed by thermocompression bonding or the like, and the diaphragm element disposed on the upper surface of the metal diaphragm 4 is connected to the pad portion 7a by wire bonding or the like to form a bridge.

As shown in FIGS. 5 and 6, an annular circuit board 5 is located on the outer periphery of the metal diaphragm 4, and the circuit board 5 and the connection portion 7b of the first flexible circuit 7 are connected to each other. Soldered and laser trimmed. It should be noted that the circuit board 5 does not necessarily have to be annular, as long as a space into which the metal diaphragm 4 and the first flexible circuit 7 can be inserted is formed.

On the other hand, on the connector 12 side, as shown in FIGS. 7 and 8, a plate 9, a feedthrough capacitor 10 and a stop ring 6 are attached to the connector 12.

That is, as shown in FIGS. 9 and 10, the feedthrough capacitor 10 is inserted into the hole 9 a of the plate 9 and soldered between them, and further, the stop ring 6 is arranged on the periphery of the plate 9. What is provided is attached to the connector 12.

At this time, the connector pin 11 is attached to the feedthrough capacitor 10 in a penetrating state, and the connector pin 11 and the feedthrough capacitor 10 are soldered.

Then, as shown in FIG. 11, one end of the second flexible circuit 8 is connected to the circuit board 5 on the body 2 side, and the other end is connected to the feedthrough capacitor 10 on the connector 12 side by soldering. , The potting agent is arranged on the body 2 side, the body 2 and the connector 12 are combined, the end portion of the body 2 is caulked, and the pressure sensor 1 is assembled.

In the pressure sensor 1 configured as described above, the metal diaphragm 4 is displaced in accordance with the pressure from the pressure introducing port 3 provided at one end of the body 2, and the displacement of the metal diaphragm 4 is changed. The diaphragm element formed on the upper surface of the metal diaphragm 4 is displaced according to the amount, and a signal corresponding to the pressure is generated.

Then, the signal of the diaphragm element is output to the circuit board 5 via the first flexible circuit 7 and to the outside via the second flexible circuit 8 and the connector pin 11, whereby the pressure introducing port 3 It is designed to detect the pressure introduced into the.

In addition, the circuit board 5 is formed in an annular shape, and the first flexible circuit 7 is arranged on the outer periphery of the metal diaphragm 4 and is thermocompression bonded to the metal diaphragm 4, and the circuit board 5 and the metal diaphragm 4 are connected to each other. Since the connecting parts are connected, parts such as stoppers are reduced, the number of parts is small, assembly is easy, and the installation space can be reduced.

Further, since the connector pin 11 and the feedthrough capacitor 10 are directly connected, the number of parts such as pins is reduced, the number of parts is small, the assembling is easy, and the assembling space can be reduced. .

Therefore, the number of parts as a whole can be reduced, the assembly can be facilitated, the assembling space can be reduced, and the pressure sensor can be downsized.

[0025]

[Effect of device]

 In this invention, as described above, a cavity is formed in the circuit board, a metal diaphragm is disposed inside the cavity of the circuit board, and the circuit board and the metal diaphragm are connected by the first flexible circuit. Thus, it is possible to eliminate an unnecessary space between the circuit board and the metal diaphragm and reduce the number of parts (stop ring etc.).

Further, since the connector pin is directly penetrated through the feedthrough capacitor and the feedthrough capacitor and the circuit board are connected by the second flexible circuit, the number of parts (pins) can be reduced and the plate and the connector can be connected. It is possible to eliminate wasted space between them, making it easier to assemble as a whole, and to achieve miniaturization and other outstanding effects.

[Submission date] March 17, 1993

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0004

[Correction method] Change

[Correction content]

A pressure detecting element is disposed on the upper surface of the metal diaphragm 54, and a first signal for guiding a signal generated by the pressure detecting element to the circuit board 55 is provided on the pressure detecting element . One end of the flexible circuit 57 is connected, and the other end of the first flexible circuit 57 extends upward and is connected to the circuit board 55.

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0006

[Correction method] Change

[Correction content]

In the pressure sensor 51 configured as described above, the metal diaphragm 54 is displaced according to the pressure from the pressure introduction port 53 of the body 52, and the metal diaphragm 54 is displaced on the metal diaphragm 54 according to the displacement of the metal diaphragm 54. The pressure detection element of the is displaced to generate a signal corresponding to the pressure.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0007

[Correction method] Change

[Correction content]

Then, the signal of the pressure detecting element is detected by the circuit board 55 through the first flexible circuit 57 and is output to the outside through the pin 63, the second flexible circuit 58 and the connector pin 61. The pressure introduced by the pressure introducing port 53 is detected.

[Procedure Amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0010

[Correction method] Change

[Correction content]

[0010]

[Means for Solving the Problems]

In order to achieve the above-mentioned object, the present invention provides a metal diaphragm disposed inside a body so as to close a pressure inlet formed at one end of the body, and a pressure detection element provided on the metal diaphragm. Is a pressure sensor comprising a circuit board for processing a signal generated in response to the pressure introduced into the pressure introducing port, and an output means for taking out the signal processed by the circuit board to the outside. A space is formed in the circuit board, the metal diaphragm is arranged inside the space of the circuit board, and the circuit board and the metal diaphragm are connected by a first flexible circuit provided in the metal diaphragm. The output means has a second flexible circuit whose one end is connected to the circuit board and the other end of the second flexible circuit. A feedthrough capacitor disposed over bets, is obtained by employing the means that has and a connector pin which penetrations the feedthrough capacitor.

[Procedure correction 6]

[Document name to be amended] Statement

[Correction target item name] 0011

[Correction method] Change

[Correction content]

[0011]

[Action]

By adopting the above means, the present invention causes the metal diaphragm to be displaced in response to the pressure acting on the pressure introducing port, and the pressure detecting element formed on the upper surface of the metal diaphragm to generate a signal. Then, this signal is output to the circuit board via the first flexible circuit, and the signal processed by the circuit board is output to the outside via the second flexible circuit and the connector pin to act on the pressure introducing port. The pressure can be detected.

[Procedure Amendment 7]

[Document name to be amended] Statement

[Correction target item name] 0014

[Correction method] Change

[Correction content]

As shown in FIGS. 3 and 4, a first flexible circuit including an annular pad portion 7a and two connecting portions 7b standing upright from the pad portion 7a is provided on the upper portion of the metal diaphragm 4. 7 is arranged by thermocompression bonding, and the pressure detecting element arranged on the upper surface of the metal diaphragm 4 is connected to the pad portion 7a by wire bonding or the like to form a bridge.

[Procedure Amendment 8]

[Document name to be amended] Statement

[Correction target item name] 0020

[Correction method] Change

[Correction content]

In the pressure sensor 1 configured as described above, the metal diaphragm 4 is displaced according to the pressure from the pressure introduction port 3 provided at one end of the body 2, and the displacement of the metal diaphragm 4 is changed. pressure detecting element which is formed on the upper surface of the metal diaphragm 4 is displaced according to the amount, and generates a signal corresponding to the pressure.

[Brief description of drawings]

FIG. 1 is a schematic sectional view showing an embodiment of a pressure sensor according to the present invention.

FIG. 2 is a schematic cross-sectional view showing a state in which a metal diaphragm provided with a first flexible circuit is attached to a body.

FIG. 3 is a schematic view showing how a first flexible circuit is attached to a metal diaphragm.

FIG. 4 is a schematic view showing a state in which a first flexible circuit is attached to a metal diaphragm and connected by wire bonding.

FIG. 5 is a schematic cross-sectional view showing how a circuit board is attached to a body.

FIG. 6 is a schematic cross-sectional view showing a state in which the first flexible circuit and the circuit board are connected.

FIG. 7 is a schematic cross-sectional view showing how a plate having a through capacitor and a stop ring is attached to a connector.

FIG. 8 is a schematic cross-sectional view showing a state in which a plate provided with a through capacitor and a stop ring is attached to the connector.

FIG. 9 is a schematic cross-sectional view showing how a through capacitor and a stop ring are attached to a plate.

FIG. 10 is a schematic cross-sectional view showing a state in which a through capacitor and a stop ring are attached to a plate.

FIG. 11 is a schematic cross-sectional view showing how to attach a connector to a body.

FIG. 12 is a schematic sectional view showing a conventional pressure sensor.

[Explanation of symbols]

 1, 51 ... Pressure sensor 2, 52 ... Body 3, 53 ... Pressure inlet 4, 54 ... Metal diaphragm 5, 55 ... Circuit board 6, 56 ... Stop ring 7, 57 ... First flexible Circuit 7a ... Pat section 7b ... Connecting section 8,58 ... Second flexible circuit 9,59 ... Plate 9a ... Hole 10,60 ... Through-through capacitor 11,61 ... Connector pin 12,62 ... Connector 63 ... pin

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[Procedure amendment]

[Submission date] March 17, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] Claim 1

[Correction method] Change

[Correction content]

Claims (2)

[Scope of utility model registration request] 1. A metal diaphragm (4) disposed inside a body (2) so as to close a pressure inlet (3) formed at one end of the body (2), and the metal diaphragm (4). The diaphragm element provided in the circuit board (5) processes a signal generated according to the pressure introduced into the pressure introduction port (3) and the signal processed by the circuit board (5) is taken out to the outside. A pressure sensor (1) having output means, wherein a void is formed in the circuit board (5), and the metal diaphragm (4) is disposed inside the void of the circuit board (5). The pressure sensor is characterized in that the circuit board (5) and the metal diaphragm (4) are connected by a first flexible circuit (7) provided on the metal diaphragm (4). 2. The second flexible circuit (8), wherein the output means has one end connected to the circuit board (5).
And a feedthrough capacitor (10) connected to the other end of the second flexible circuit (8) and arranged on the plate (9), and a connector pin (11) penetrating the feedthrough capacitor (10). The pressure sensor according to claim 1, wherein