JPH08204479A - Manufacture of vibrator - Google Patents

Abstract

PURPOSE: To improve working efficiency by performing mirror grinding after the etching removal of a working alteration layer. CONSTITUTION: A diaphragm 1 and first and second covers 2 and 3 for covering the front and back of the diaphragm 1 and holding the outer periphery part of a vibration part 7 there between in the outer periphery part are provided. Also, the vibration part 7 is provided with the vibration part 7 of a tongue piece shape on the inner part of a crimping part by the first and second covers 2 and 3 and a cut groove 6 is formed on the outer periphery of the vibration part 7 so as to form the vibration part 7 of the tongue piece shape. Then, the diaphragm 1 provided with the vibration part 7 is etched, thereafter the front and back surfaces of the diaphragm 1 are mirror ground and then, the first and second covers 2 and 3 are abutted respectively to the front and back surfaces of the diaphragm 1 and directly joined.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator manufacturing method.

[0002]

2. Description of the Related Art A vibrating plate is provided with first and second covers for covering the front and back of the vibrating plate and sandwiching the outer peripheral part of the vibrating part with the outer peripheral part thereof. A conventional method of manufacturing a vibrator having a tongue-shaped vibrating portion inside the holding portion by the second cover, and directly contacting the first and second covers to the front and back surfaces of the vibrating plate, respectively. Was as follows.

That is, since the first and second vibrating plates are directly joined to the front and back surfaces of the vibrating plate, the outer periphery of the vibrating portion of the vibrating plate must maintain a mirror surface, and thus the vibrating plate is manufactured as shown in FIG. Was there.

First, the vibrating plate is precision-polished (A), then the front and back surfaces thereof are mirror-polished (B), and then a U-shaped groove is formed by sandblasting (C) to form a tongue-shaped vibrating portion. Set up.

Next, a mask is formed (D) on the front and back surfaces of the vibrating plate on the outer periphery of the vibrating portion, which is a joint surface of the first and second vibrating plates, and then the vibrating plate is etched (E), whereby kerf The work-affected layer formed by etching on the outer periphery of the vibrating portion facing to is removed.

After that, the mask was removed (F), and the first and second covers were brought into contact with the front and back surfaces of the outer periphery of the vibrating portion of the vibrating plate whose mirror surface was kept by the mask, and were directly joined to each other.

[0007]

However, in order to keep the mirror surface for direct bonding, forming a mask (D) and removing it (F) later is not easy to work with.

Therefore, the present invention aims to improve workability.

[0009]

In order to achieve this object, the present invention forms a kerf on the outer periphery of the vibrating portion to form the tongue-shaped vibrating portion, and then forms the vibrating portion. The vibrating plate included therein is etched, and then the front and back surfaces of this vibrating plate are mirror-polished, and then the first and second covers are respectively brought into contact with the front and back surfaces of this vibrating plate to directly bond them.

[0010]

According to the above manufacturing method, the outer periphery of the vibrating portion of the vibrating plate is mirror-finished so that the outer periphery of the vibrating portion is directly joined to the first and second covers. Since it is performed by mirror polishing after etching removal of the work-affected layer by kerf processing formed on the outer peripheral portion of the portion, it is not necessary to form a mask on the outer periphery of the vibrating portion of this diaphragm and remove the mask after etching as in the conventional case. Workability is extremely good.

Further, by mirror-polishing the vibrating plate, the plate thickness on the outer periphery of the vibrating portion is thinned, thereby suppressing the generation of unnecessary vibration.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In FIG. 1, reference numeral 1 is a vibrating plate having a plate thickness of 100 μm.
It is composed of m crystal plates. On the front and back surfaces of the diaphragm 1, covers 2 and 3 made of a crystal plate having a plate thickness of 400 μm are directly bonded by the crystals. Note that external electrodes 4 and 5 in FIG. 1 are arranged on both sides of the back surface of the cover 3. The diaphragm 1 is shown in FIGS.
As shown in, a U-shaped kerf 6 is formed inside thereof,
As a result, the tongue-shaped vibrating portion 7 is formed. Excitation electrodes 8 and 9 are formed on the front and back surfaces of the vibrating portion 7, and the lead electrode 1 is provided via the root portion 10 of the vibrating portion 7, respectively.
1, 12 are pulled out. As shown in FIGS. 2 to 5, the end of the inner lead electrode 11 penetrates the diaphragm 1 by the through hole 13, and then passes through the side of the vibrating section 7 as shown in FIG. The connection portion 14 is formed by extending to the side. Further, the lead electrode 12 forms a connecting portion 15 on the side of the root portion 10. Then, they are connected to the external electrodes 4 and 5, respectively, via the conductors 18 in the through holes 16 and 17 formed in the cover 3 corresponding to these connecting portions 14 and 15, respectively. The outer peripheral portions of the covers 2 and 3 sandwich the outer peripheral portions of the front and back surfaces of the diaphragm 1 and are directly bonded to each other by the crystals, which is the outer peripheral portion of the kerf 6 of the diaphragm 1. In the above, the portion where the lead electrode 11 passes through the side of the vibrating portion 7 and is joined is joined to the cover 3 at the outside thereof. Then, in order to form the lead electrode 11 on the side of the vibrating portion 7 on the rear surface side of the diaphragm 1 as described above, as is apparent from FIGS.
The plate thickness is made thick only at the sandwiching part with 3, and the plate thickness is made thin by etching the parts forming the vibrating part 7 and the lead electrodes 11, 12. FIG. 4 clearly shows the diaphragm 1 after this etching step, in which the back surface portion corresponding to the frame line 19 is thinned by etching. Further, the outer peripheral portion of the frame line 19 is a portion which is sandwiched and joined by the covers 2 and 3. As is apparent from FIG. 4, the sandwiching width 2 on the longitudinal side of the diaphragm 1 is also increased.
0 is wider than the sandwiching width 21 in the short direction.

Since the lead electrode 11 is provided on the side of the vibrating portion 7 as shown in FIG.
Are displaced from the center of the diaphragm 1 to one side.

The cut groove 6 at the root 10 minutes has a semi-circular shape as shown in FIG. 4, so that cracks are less likely to occur even when an excessive impact is applied.

Next, a method of manufacturing the diaphragm 1 will be described. In the flat plate state, the vibrating plate 1 is first roughly ground with No. 2000 SiC abrasive grains, and further No. 4000 SiC.
It is precisely polished with abrasive grains (G in FIG. 8). After this, the electrodes 8,
9, lead electrodes 11 and 12 are provided, and then a film resist is laminated on the vibrating plate 1 and bonded, and then, through the exposure and development steps, only the portion corresponding to the kerf 6 has no resist. Perform patterning. Then 25
Sand blasting in which No. 00 SiC abrasive grains are blown onto the vibration plate 1 at high speed with high pressure air from a vertical direction (see FIG. 8).
H) is performed and the cut groove 6 of the diaphragm 1 is processed. The vibrating plate 1 on which the kerfs 6 have been processed is chemically etched with ammonium fluoride solution (I in FIG. 8) to remove the work-affected layers on both sides of the kerfs 6 by sandblasting. At this time, if a large amount of chemical etching is performed, anisotropy peculiar to the quartz crystal AT plate occurs, and the diaphragm 1
An edge-like portion may be formed in the cut groove 6 of the root portion 10 of the and may be broken at the time of a drop impact. For this reason, the etching was carried out only until it became one-third or less of the average grain size by the abrasive grain jetting process, but the process-altered layer was completely deleted even with this. Next, mirror polishing is performed with cerium oxide (J in FIG. 8), and the mask is removed by sandblasting.
The electrodes 8 and 9 and the lead electrodes 11 and 12 may be formed after the mirror polishing. When mirror polishing is carried out for a long time, the cut groove 6 part becomes a liquid pool, and especially the tip of the vibrating part 7 can be thinned as shown in FIG. By thus reducing the plate thickness at the tip of the vibrating portion 7, it is possible to suppress the generation of unnecessary vibration. If the tip side of the vibrating portion 7 is set to the plus X direction side of the crystal of quartz and the width of the kerf 6 corresponding to the tip portion is widened, a large amount of etching liquid accumulates in the wide portion and the minus X Due to the fact that the etching in the direction is easy, the thinning process of the plate thickness is easy. Further, if the abrasive grains are made too small during the sandblasting (H), the machining efficiency is lowered, so the abrasive grains are made large, but the sandblasting is performed on the kerf 6 of the diaphragm 1 with the small abrasive grains. As a result, the work-affected layer can be reduced, and the time for chemical etching (I) can be shortened accordingly.

In the above embodiment, the same structure and processing could be carried out even if the covers 2 and 3 were replaced with glass. By using glass for the covers 2 and 3, the temperature of direct bonding could be lowered to 300 ° C.

[0017]

As described above, the present invention includes the diaphragm, and the first and second covers that cover the front and back of the diaphragm and sandwich the outer peripheral portion of the vibrating portion with the outer peripheral portion. , The vibrating portion has a tongue-shaped vibrating portion inside the holding portion by the first and second covers, and a cut groove is formed on the outer periphery of the vibrating portion to form the tongue-shaped vibrating portion, Next, the diaphragm having this vibrating portion is etched, then the front and back surfaces of this diaphragm are mirror-polished, and then the first and second covers are respectively brought into contact with the front and back surfaces of this diaphragm to directly bond them. It is what makes me.

According to the above-described manufacturing method, the mirror surface of the outer periphery of the vibrating portion is directly mirror-finished to directly join the outer periphery of the vibrating portion of the diaphragm to the first and second covers. Since the mirror-polishing is performed after etching removal of the work-affected layer by the kerf processing formed on the outer periphery of the vibrating portion, it is not necessary to form a mask on the outer periphery of the vibrating portion of this diaphragm and remove the mask after etching as in the conventional case. , The workability is extremely good.

Further, by mirror-polishing the vibrating plate, the plate thickness on the outer periphery of the vibrating portion is thinned, thereby suppressing generation of unnecessary vibration.

[Brief description of drawings]

FIG. 1 is a perspective view of one embodiment of the present invention.

FIG. 2 is an exploded perspective view of FIG.

FIG. 3 is an exploded perspective view of FIG.

FIG. 4 is a top view of the diaphragm.

5 is a cross-sectional view taken along the line AA of the vibrator in which the covers 2 and 3 are joined to the diaphragm of FIG.

6 is a cross-sectional view taken along the line BB of the vibrator in which the covers 2 and 3 are joined to the diaphragm of FIG.

FIG. 7 is a perspective view showing a manufacturing method according to an embodiment of the present invention.

FIG. 8 is a diagram showing a manufacturing process according to an embodiment of the present invention.

FIG. 9 is a diagram showing a manufacturing process of a conventional example.

[Explanation of symbols]

 1 Vibration Plate 2 Cover 3 Cover 6 Groove 7 Vibrating Part 9 Excitation Electrode 10 Root 11 Lead Electrode 12 Lead Electrode

Claims (5)

[Claims] 1. A vibrating plate comprising: a vibrating plate; first and second covers that cover the front and back of the vibrating plate and sandwich the outer peripheral part of the vibrating part at the outer peripheral part thereof. The second cover has a tongue-shaped vibrating portion inside the holding portion, and a cut groove is formed on the outer periphery of the vibrating portion to form the tongue-shaped vibrating portion, and then the vibration having the vibrating portion is formed. A method of manufacturing a vibrator, wherein a plate is etched, and then the front and back surfaces of this diaphragm are mirror-polished, and then the first and second covers are brought into contact with the front and back surfaces of this diaphragm to directly bond them. 2. The method of manufacturing a vibrator according to claim 1, wherein the vibrating plate and the first and second covers are made of crystal plates, and the crystals are directly bonded to each other. 3. The method according to claim 1, wherein the vibrating plate is made of a quartz plate, and the first and second covers are made of glass plates. 4. The method for manufacturing a vibrator according to claim 1, wherein the vibrating plate is made of a quartz plate, and the tip side of the vibrating portion is in the plus X-axis direction of the crystal. 5. The method of manufacturing a vibrator according to claim 1, wherein the width of the kerf on the tip side of the diaphragm is wider than the width of the kerf on the side.