JP3814458B2 - Quartz crystal bevel processing method - Google Patents

Quartz crystal bevel processing method Download PDF

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Publication number
JP3814458B2
JP3814458B2 JP2000090867A JP2000090867A JP3814458B2 JP 3814458 B2 JP3814458 B2 JP 3814458B2 JP 2000090867 A JP2000090867 A JP 2000090867A JP 2000090867 A JP2000090867 A JP 2000090867A JP 3814458 B2 JP3814458 B2 JP 3814458B2
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JP
Japan
Prior art keywords
crystal
crystal piece
processing method
processing
bevel processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000090867A
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Japanese (ja)
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JP2001285000A (en
Inventor
三十四 梅木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
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Nihon Dempa Kogyo Co Ltd
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は水晶振動子(水晶片)のベベル加工方法を産業上の技術分野とし、特に加工時間を短縮したエッチングによるベベル加工方法に関する。
【0002】
【従来の技術】
(発明の背景)水晶振動子は周波数及び時間の基準源やフィルタ素子として、通信機器を含む電子機器に広く用いられている。このようなものの一つに、外周を斜めに切除して振動特性を良好にした水晶振動子がある。
【0003】
(従来技術の一例)第5図乃至第7図は従来例を説明する図で第5図は水晶片の切断方位図、第6図はベベル加工用の金属筒の図、第7図は水晶片の図である。
水晶振動子はATカットの水晶片1からなり、例えば短冊状に形成される。ATカットは結晶軸(XYZ)のY軸に直交する主面がZ軸からY軸に方向に35゜15'傾斜した切断角度である。新たにできた軸をY'及びZ'軸とする。この例では、短冊状の水晶片1はZ'軸方向に長く形成される。
【0004】
そして、一般には、第6図に示す金属筒2や図示しない球に多数の水晶片1を研磨剤とともに投入して回転し、水晶片1の特に両端部を曲面に沿った斜面に切除する所謂ベベル加工を施す(第7図)。
【0005】
このようなものでは、振動エネルギーが中央領域の平坦部に集中し、また外周の境界が分散するので、クリスタルインピーダンスを小さくして輪郭系のスプリアスを抑圧する。なお、通常では、水晶片1の両主面には対向する励振電極を形成して、両端部に引出電極を延出する。そして、両端部を保持して容器内に密閉封入される(未図示)。
【0006】
【発明が解決しようとする課題】
(従来技術の問題点)しかしながら、上記のベベル加工方法では、水晶片1の重量、重力、遠心力及び研磨剤の粒径等をパラメータにして加工量が決定される。このことから、加工時間が長い、長辺方向の両端部(側)は加工されるが短辺方向の両側は加工されにくい、加工バラツキが大きい、水晶片1に傷がつきやすい等の問題があった。
【0007】
(発明の目的)本発明は、特に加工時間を短縮して加工性に優れた水晶振動子のベベル加工方法を提供することを目的とする。
【0008】
【課題を解決するための手段】
本発明は、ATカットからなる短冊状とした水晶片における厚み方向の両主面の外周を斜めに切除してなる水晶振動子のベベル加工方法において、前記水晶片を前記厚み方向に接合して一体化水晶体を形成し、前記一体化水晶体をエッチング液中に投入して前記一体化水晶体における接合面の外周を斜めに切除し前記水晶片の外周に凹状となる傾斜面を形成したことを基本的な解決手段とする。
【0009】
【作用】
本発明では、一体化水晶体の外周部をエッチングにより切除するので、加工速度が速い。また、エッチング液中での加工なので、長辺及び短辺の両側がほぼ均等に切除される。そして、加工バラツキが小さく、水晶片1に傷をつけない。以下、本発明の一実施例を説明する。
【0010】
【実施例】
第1図は本発明の一実施例であるベベル加工方法を説明する図である。なお、前従来例図と同一部分には同番号を付与してその説明は簡略又は省略する。
先ず、ATカットからなる短冊状とした多数の水晶片1を接着剤(未図示)によって接合し、直方体状の一体化水晶体3を形成する。この例でも、水晶片1はZ'軸方向に長い。次に、フッ酸等のエッチング液中に一体化水晶片1を投入する。
【0011】
このようなものでは、一体化水晶体3における各水晶片1の接合面にエッチング液が侵入し、両主面の各辺で水晶片1の稜線部から中央部に向かってほぼ均等に浸食する(第2図〜第4図)。厳格には、エッチング速度は水晶の結晶軸の方向によって異なり、Z軸方向が最も速い。したがって、この場合には、長辺(Z'軸)方向での加工量が若干多くなる。そして、傾斜面はやや凹面となる。なお、ベベル加工は、エッチング液の組成やエッチング時間等で制御される。
【0012】
このようなことから、化学的なエッチングによってベベル加工するので、加工速度は前述の機械的な加工に比較して格段に速い。ちなみに、水晶片1の長辺方向の加工量を同一として比較すると、エッチングの方が約10〜100倍速くなる。
【0013】
また、長辺方向の両端部のみならず短辺方向の両側もほぼ均一に加工されるので、振動エネルギーを中央部に閉じ込めやすく振動特性の向上が望める。また、各水晶片1間での加工量も均一なのでバラツキも小さい。さらには、エッチング液中での加工なので、水晶片1に傷がつきにくい。
【0014】
【他の事項】
上記実施例では、水晶片1の両主面の4辺の全てをベベル加工したが、例えば長辺方向の両端部のみをベベル加工する場合には、一体化水晶体3における短辺方向の両側面にレジスト膜を設けて遮蔽すればよく、任意の辺のみにベベル加工を施すことができる。
【0015】
また、水晶片1はATカットとしてZ'軸方向に長い短冊状としたが、X軸方向に長くても、円板状でも、さらにはBTやSCカットでもよく、要はベベル加工及び単なる傾斜面を必要とする水晶片1に適用できる。なお、ベベルは斜めに切除するとしたが、直線(平面)状でも曲面状であってもよい。また、水晶片1は接着剤によって接合したが、両主面を鏡面研磨して直接に接合したとしてもよい。
【0016】
【発明の効果】
本発明は、ATカットからなる短冊状とした水晶片における厚み方向の両主面の外周を斜めに切除してなる水晶振動子のベベル加工方法において、前記水晶片を前記厚み方向に接合して一体化水晶体を形成し、前記一体化水晶体をエッチング液中に投入して前記一体化水晶体における接合面の外周を斜めに切除し前記水晶片の外周に凹状となる傾斜面を形成したので、特に加工時間を短縮して加工性に優れた水晶振動子のベベル加工方法を提供できる。
【図面の簡単な説明】
【図1】 本発明の一実施例を説明する一体化水晶体の図である。
【図2】本発明の一実施例による水晶片の図である。
【図3】本発明の一実施例を説明する水晶片の長辺方向の側面図である。
【図4】本発明の一実施例を説明する水晶片の短片方向の側面図である。
【図5】従来例を説明する水晶片の切断方位図である。
【図6】従来例を説明するベベル加工用の金属筒の図である。
【図7】従来例を説明する水晶片の図である。
【符号の説明】
1 水晶片、2 金属筒、3 一体化水晶体.
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a bevel processing method for a crystal resonator (crystal piece), which is an industrial technical field, and more particularly, to a bevel processing method by etching with reduced processing time.
[0002]
[Prior art]
BACKGROUND OF THE INVENTION Crystal resonators are widely used in electronic devices including communication devices as frequency and time reference sources and filter elements. One of these is a crystal unit having a good vibration characteristic by obliquely cutting the outer periphery.
[0003]
(Example of Prior Art) FIGS. 5 to 7 are diagrams for explaining a conventional example. FIG. 5 is a cutting direction view of a crystal piece, FIG. 6 is a diagram of a metal tube for bevel processing, and FIG. FIG.
The crystal resonator is formed of an AT-cut crystal piece 1 and is formed in, for example, a strip shape. The AT cut is a cutting angle at which the principal plane perpendicular to the Y axis of the crystal axis (XYZ) is inclined by 35 ° 15 ′ from the Z axis to the Y axis. The newly created axes are designated as Y ′ and Z ′ axes. In this example, the strip-shaped crystal piece 1 is formed long in the Z′-axis direction.
[0004]
In general, a large number of crystal pieces 1 are put together with a polishing agent into a metal cylinder 2 shown in FIG. 6 or a sphere (not shown) and rotated, so that both ends of the crystal piece 1 are cut into slopes along a curved surface. Bevel processing is performed (FIG. 7).
[0005]
In such a case, the vibration energy is concentrated on the flat portion in the central region and the boundary of the outer periphery is dispersed, so that the crystal impedance is reduced to suppress the spurious of the contour system. Normally, opposing excitation electrodes are formed on both main surfaces of the crystal piece 1, and extraction electrodes are extended to both ends. Then, both ends are held and hermetically sealed in a container (not shown).
[0006]
[Problems to be solved by the invention]
(Problems of the prior art) However, in the above-described bevel processing method, the processing amount is determined using the weight of the crystal piece 1, gravity, centrifugal force, abrasive particle size, and the like as parameters. Therefore, there are problems such as long processing time, both ends (sides) in the long side direction are processed, but both sides in the short side direction are difficult to be processed, processing variation is large, and the crystal piece 1 is easily damaged. there were.
[0007]
The object of the present invention is to provide a bevel processing method for a crystal resonator which is particularly excellent in workability by shortening the processing time.
[0008]
[Means for Solving the Problems]
The present invention provides a beveling process of the crystal oscillator formed by ablating the outer periphery of both main surfaces in the thickness direction at a strip and the crystal blank made of AT-cut obliquely, by joining the crystal piece in the thickness direction to form an integrated lens, in that the integral lens was put in the etching solution was excised outer peripheral bonding surface of the integrated lens obliquely, to form an inclined surface which becomes concave outer periphery of the crystal piece Let it be a basic solution.
[0009]
[Action]
In the present invention, since the outer peripheral portion of the integrated crystalline lens is removed by etching, the processing speed is high. Further, since the processing is performed in an etching solution, both the long side and the short side are cut off almost evenly. And the processing variation is small and the crystal piece 1 is not damaged. An embodiment of the present invention will be described below.
[0010]
【Example】
FIG. 1 is a diagram for explaining a bevel processing method according to an embodiment of the present invention. In addition, the same number is attached | subjected to the same part as a prior art example figure, and the description is abbreviate | omitted or abbreviate | omitted.
First, a large number of rectangular crystal pieces 1 made of AT cut are joined together by an adhesive (not shown) to form a rectangular parallelepiped integrated crystal body 3. Also in this example, the crystal piece 1 is long in the Z′-axis direction. Next, the integrated crystal piece 1 is put into an etching solution such as hydrofluoric acid.
[0011]
In such a case, the etching solution penetrates into the joint surface of each crystal piece 1 in the integrated crystal body 3 and erodes almost uniformly from the ridge line portion of the crystal piece 1 toward the center portion on each side of both main surfaces ( 2 to 4). Strictly speaking, the etching rate varies depending on the direction of the crystal axis of quartz, and the Z-axis direction is the fastest. Therefore, in this case, the machining amount in the long side (Z ′ axis) direction is slightly increased. The inclined surface is slightly concave. The bevel processing is controlled by the composition of the etching solution, the etching time, and the like.
[0012]
For this reason, since the bevel processing is performed by chemical etching, the processing speed is much faster than the mechanical processing described above. Incidentally, when the processing amount in the long side direction of the crystal piece 1 is the same, the etching is about 10 to 100 times faster.
[0013]
In addition, since both ends in the long side direction as well as both sides in the short side direction are processed substantially uniformly, it is easy to confine the vibration energy in the central part, and an improvement in vibration characteristics can be expected. Further, since the amount of processing between the crystal pieces 1 is uniform, the variation is small. Furthermore, since the processing is performed in the etching solution, the crystal piece 1 is hardly damaged.
[0014]
[Other matters]
In the above-described embodiment, all four sides of both main surfaces of the crystal piece 1 are beveled. However, for example, when only both ends in the long side direction are beveled, both side surfaces in the short side direction of the integrated crystalline lens 3. A resist film may be provided and shielded, and only an arbitrary side can be beveled.
[0015]
Further, the crystal piece 1 is formed as a long strip in the Z′-axis direction as an AT cut, but it may be long in the X-axis direction, a disk shape, or a BT or SC cut. It can be applied to the crystal piece 1 that requires a surface. Although the bevel is cut obliquely, it may be straight (planar) or curved. Further, although the crystal piece 1 is bonded with an adhesive, both main surfaces may be mirror-polished and bonded directly.
[0016]
【The invention's effect】
The present invention provides a beveling process of the crystal oscillator formed by ablating the outer periphery of both main surfaces in the thickness direction at a strip and the crystal blank made of AT-cut obliquely, by joining the crystal piece in the thickness direction Since the integrated crystalline lens is formed, the integrated crystalline lens is put into an etching solution, the outer periphery of the joint surface in the integrated crystalline lens is obliquely cut , and the inclined surface that is concave is formed on the outer periphery of the crystal piece. In particular, it is possible to provide a bevel processing method for a crystal resonator that has a short processing time and excellent workability.
[Brief description of the drawings]
FIG. 1 is a view of an integrated crystalline lens for explaining an embodiment of the present invention.
FIG. 2 is a diagram of a crystal piece according to an embodiment of the present invention.
FIG. 3 is a side view in the long side direction of a crystal piece for explaining an embodiment of the present invention.
FIG. 4 is a side view of a crystal piece in the short piece direction for explaining an embodiment of the present invention.
FIG. 5 is a cutting direction view of a crystal piece for explaining a conventional example.
FIG. 6 is a diagram of a metal tube for bevel processing for explaining a conventional example.
FIG. 7 is a diagram of a crystal piece for explaining a conventional example.
[Explanation of symbols]
1 crystal piece, 2 metal cylinder, 3 integrated crystal.

Claims (1)

ATカットからなる短冊状とした水晶片における厚み方向の両主面の外周を斜めに切除してなる水晶振動子のベベル加工方法において、前記水晶片を前記厚み方向に接合して一体化水晶体を形成し、前記一体化水晶体をエッチング液中に投入して前記一体化水晶体における接合面の外周を斜めに切除し前記水晶片の外周に凹状となる傾斜面を形成したことを特徴とする水晶振動子のベベル加工方法。In beveling process of the crystal oscillator formed by ablating the outer periphery of both main surfaces in the thickness direction at an angle in the strip and the crystal blank made of AT-cut, integrated lens by bonding the crystal piece in the thickness direction formed, the integrated lens was excised periphery of the joint surface in an etching solution wherein the integral lens was put in obliquely, characterized in that the formation of the inclined surface to be concave on the outer periphery of the crystal piece crystal How to bevel a vibrator.
JP2000090867A 2000-03-29 2000-03-29 Quartz crystal bevel processing method Expired - Fee Related JP3814458B2 (en)

Priority Applications (1)

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JP2000090867A JP3814458B2 (en) 2000-03-29 2000-03-29 Quartz crystal bevel processing method

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JP3814458B2 true JP3814458B2 (en) 2006-08-30

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4305542B2 (en) 2006-08-09 2009-07-29 エプソントヨコム株式会社 AT cut quartz crystal resonator element and manufacturing method thereof
JP6371733B2 (en) 2015-04-02 2018-08-08 日本電波工業株式会社 AT cut crystal piece and crystal resonator
JP6555779B2 (en) * 2015-12-28 2019-08-07 日本電波工業株式会社 AT cut crystal piece and crystal resonator

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