JPH08181367A - Air cooled ion laser tube - Google Patents
Air cooled ion laser tubeInfo
- Publication number
- JPH08181367A JPH08181367A JP32266794A JP32266794A JPH08181367A JP H08181367 A JPH08181367 A JP H08181367A JP 32266794 A JP32266794 A JP 32266794A JP 32266794 A JP32266794 A JP 32266794A JP H08181367 A JPH08181367 A JP H08181367A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- air
- thin tube
- ion laser
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、空冷式イオンレーザ管
に関し、特にその放熱板の構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air-cooled ion laser tube, and more particularly to the structure of its heat sink.
【0002】[0002]
【従来の技術】イオンレーザ管は、ガスを放電励起させ
る時にでる熱により高温となるレーザ管を冷却する方式
によって、空冷式イオンレーザ管と水冷式イオンレーザ
管がある。空冷式インオンレーザ管は、比較的低出力の
レーザに用いられる構造で、小形にすることができるた
め広く一般に用いられている。2. Description of the Related Art Ion laser tubes include air-cooled ion laser tubes and water-cooled ion laser tubes depending on the method of cooling a laser tube which is heated to a high temperature by heat generated when a gas is discharged and excited. The air-cooled in-on laser tube has a structure used for a laser having a relatively low output, and is widely used because it can be made small.
【0003】従来の空冷式イオンレーザ管の中心軸を通
った断面図を図6(a)に、中心軸に垂直な放熱板の部
分の断面図を図6(b)に示す。図6に示すように、従
来の空冷式インオンレーザ管は、レーザ媒質を封入する
外囲器1とレーザ媒質を放電励起するための電極である
アノード2およびカソード3と、アノード2とカソード
3の間にありレーザ媒質が放電状態に励起保持されるセ
ラミック製の細管4と、この細管4の外部にラジアル方
向に複数ろう付けされ放電により発生する熱を放熱する
放熱板5と、外囲器1の両端に位置し励起されたレーザ
媒質からレーザ光を取り出す共振器を構成する全反射ミ
ラー6と、一定の透過率を有しレーザ光を出力する出力
ミラー7とから構成されている。FIG. 6 (a) shows a cross-sectional view of the conventional air-cooled ion laser tube passing through the central axis, and FIG. 6 (b) shows a cross-sectional view of a heat radiating plate portion perpendicular to the central axis. As shown in FIG. 6, a conventional air-cooled in-on laser tube includes an envelope 1 enclosing a laser medium, an anode 2 and a cathode 3 which are electrodes for discharge-exciting the laser medium, an anode 2 and a cathode 3. A ceramic thin tube 4 between which the laser medium is excited and held in a discharge state, a plurality of radial plates are brazed to the outside of the thin tube 4 to radiate heat generated by the discharge, and an envelope. It is composed of a total reflection mirror 6 which is located at both ends of 1 and constitutes a resonator for taking out laser light from the excited laser medium, and an output mirror 7 which outputs laser light having a constant transmittance.
【0004】放熱板5は熱伝導のよい金属、例えば銅が
用いられるが、セラミック細管4には絶縁材であるセラ
ミックが用いられるため、金属とセラミックとの熱膨張
差によるセラミック割れが生じる問題があった。これに
対して、図6に示すように放熱板5を管軸方向に複数に
分割してろう付けし、熱膨張差により生じる応力を緩和
してセラミック割れを防いでいる。The heat dissipation plate 5 is made of a metal having a good thermal conductivity, for example, copper. However, since the ceramic thin tube 4 is made of ceramic, which is an insulating material, there is a problem that a ceramic crack occurs due to a difference in thermal expansion between the metal and the ceramic. there were. On the other hand, as shown in FIG. 6, the heat radiating plate 5 is divided into plural pieces in the tube axis direction and brazed to relax the stress caused by the difference in thermal expansion and prevent ceramic cracking.
【0005】また、特開平2−47895では、高伝導
金属製放熱板に取り付け面を区切るスリットを形成し、
放熱板が取り付けられるセラミックス製回路基板との熱
膨張差による熱応力を軽減して、両者の接着剥離防止技
術が開示されている。Further, in Japanese Patent Laid-Open No. 2-47895, a high conductive metal heat sink plate is formed with slits for partitioning the mounting surface,
There is disclosed a technology of reducing the thermal stress due to the difference in thermal expansion from the ceramic circuit board to which the heat dissipation plate is attached and preventing the adhesion and peeling of the two.
【0006】また、特開昭60−175499ではアル
ミナ基板に取り付けられた放熱ファィンがアルミナ基板
との接着面に複数本のスリットを形成され、アルミナ基
板と放熱フィンとの熱膨張差による熱応力を軽減して、
基板上に反りやひび割れが発生することを防止する構成
が開示されている。Further, in Japanese Patent Laid-Open No. 60-175499, a radiation fin attached to an alumina substrate has a plurality of slits formed on an adhesive surface of the alumina substrate to prevent thermal stress due to a difference in thermal expansion between the alumina substrate and the radiation fin. Alleviate
A structure is disclosed that prevents warpage or cracking on the substrate.
【0007】また、実開昭62−51754では発熱部
品が取り付けられる金属基体に一定間隔で形成されたス
リットにツズラ折り状放熱フィンを挿入して、熱膨張差
で発生する反発力でフィンを固定する技術が開示されて
いる。In Japanese Utility Model Laid-Open No. 62-51754, a zigzag folded fin is inserted into a slit formed at regular intervals in a metal base on which a heat-generating component is attached, and the fin is fixed by a repulsive force generated by a difference in thermal expansion. Techniques for doing so are disclosed.
【0008】[0008]
【発明が解決しようとする課題】この従来の空冷式イオ
ンレーザ管は、放熱板の形状がセラミック細管全体にわ
たって一様な形状をしていた。一方、セラミック細管か
ら発生する熱量は細管の場所により異なっている。この
ため、一様な形状をしている放熱板による冷却ではセラ
ミックの温度分布を一様にすることができず、この結
果、セラミックに応力が生じるため、細管のねじれやミ
ラーの角度ズレを引き起こすこととなり、レーザ出力の
立ち上がりや安定度特性を向上させることが困難であっ
た。In this conventional air-cooled ion laser tube, the heat dissipation plate has a uniform shape over the entire ceramic capillary tube. On the other hand, the amount of heat generated from the ceramic capillary varies depending on the location of the capillary. For this reason, the temperature distribution of the ceramic cannot be made uniform by cooling with a heat dissipation plate having a uniform shape, and as a result, stress is generated in the ceramic, which causes twisting of the thin tube and misalignment of the mirror. Therefore, it is difficult to improve the rise of the laser output and the stability characteristics.
【0009】[0009]
【課題を解決するための手段】本発明の空冷式インオン
レーザ管は、外囲器内にレーザ媒質であるガスと放電電
極であるアノードとカソードと、このアノードとカソー
ドの間に位置し、レーザ媒質が放電状態に励起保持され
るセラミック細管部と、このセラミック細管外部にろう
付けされ、放電時に発生する熱を放熱する放熱板と、外
囲器の両端に位置し、励起されたレーザ媒質からレーザ
光を取り出す共振器を構成する全反射ミラーと、一定の
透過率を有する出力ミラーから成る空冷式イオンレーザ
管であって、放熱板はセラミック細管の温度分布が一様
となるようにセラミック細管のろう付け面に不等間隔の
複数のスリットを備えている。また、放熱板はセラミッ
ク細管の温度分布が一様となるようにろう付け面に幅の
異なる複数のスリットを備えている。また、放熱板は細
管の温度分布が一様となるようにセラミック細管のろう
付け面に深さの異なる複数のスリットを備えている。ま
た、放熱板は細管の温度分布が一様となるように複数の
スリットは一定形状、一定ピッチのままで、面積がカソ
ードからアノードに向かって小さくなっている。また、
放熱板は細管の温度分布が一様となるように複数のスリ
ットは一定形状、一定ピッチのままで、厚みがカソード
からアノードに向かって薄くなっている。An air-cooled in-on laser tube according to the present invention comprises a gas as a laser medium, an anode and a cathode as discharge electrodes, and an anode and a cathode located between the anode and the cathode. A ceramic thin tube portion where the laser medium is excited and held in a discharge state, a heat radiating plate which is brazed to the outside of the ceramic thin tube and radiates heat generated during discharge, and the excited laser medium located at both ends of the envelope An air-cooled ion laser tube comprising a total reflection mirror that constitutes a resonator for extracting laser light from an output mirror and an output mirror having a constant transmittance. The brazing surface of the thin tube is provided with a plurality of slits at irregular intervals. Further, the heat radiating plate is provided with a plurality of slits having different widths on the brazing surface so that the temperature distribution of the ceramic thin tube becomes uniform. Further, the heat radiating plate is provided with a plurality of slits having different depths on the brazing surface of the ceramic thin tube so that the temperature distribution of the thin tube becomes uniform. Further, in the heat dissipation plate, the plurality of slits have a constant shape and a constant pitch so that the temperature distribution of the thin tubes becomes uniform, and the area becomes smaller from the cathode to the anode. Also,
In the heat dissipation plate, the plurality of slits have a constant shape and a constant pitch so that the temperature distribution of the thin tubes becomes uniform, and the thickness decreases from the cathode to the anode.
【0010】[0010]
【実施例】次に本発明について図面を参照して説明す
る。図1は本発明の第1の実施例を示す図で、図1
(a)は空冷式イオンレーザ管の中心軸を通った断面
図、図1(b)は中心軸に垂直な放熱板の部分の断面図
である。外囲器1に封入されたレーザ媒質がアノード2
とカソード3の間で放熱励起し、得られた光が全反射ミ
ラー6と出力ミラー7で構成される光共振器によって共
振し、共振された光の一部が出力ミラー7を透過してレ
ーザ光として出力される。このとき、セラミック細管4
の内部は放電状態となっており、熱を発生するため細管
4の外部には冷却用の放熱板5aをラジアル方向に複数
取り付け放熱を行っている。ここで、放熱板5aには複
数のスリット8が設けられており、発熱量の大きいカソ
ード3側のスリットの密度を疎にして放熱量を大きく
し、発熱量が小さくなるアノード2側に近づくに従って
密になるようにして放熱量を制限し、セラミック細管の
温度を一様にする形状となっている。The present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a first embodiment of the present invention.
1A is a cross-sectional view of the air-cooled ion laser tube passing through the central axis, and FIG. 1B is a cross-sectional view of a heat dissipation plate portion perpendicular to the central axis. The laser medium enclosed in the envelope 1 is the anode 2
Heat is excited between the cathode 3 and the cathode 3, and the obtained light resonates by the optical resonator composed of the total reflection mirror 6 and the output mirror 7, and a part of the resonated light passes through the output mirror 7 to cause laser light. Output as light. At this time, the ceramic thin tube 4
Since the inside of the tube is in a discharged state and a plurality of heat radiating plates 5a for cooling are attached in the radial direction to the outside of the thin tube 4 to generate heat, heat is radiated. Here, the heat dissipation plate 5a is provided with a plurality of slits 8, and the density of the slits on the cathode 3 side, which has a large amount of heat generation, is made sparse to increase the amount of heat dissipation, and as the amount of heat generation becomes smaller, it approaches the anode 2 side. The shape is made dense so that the amount of heat radiation is limited and the temperature of the ceramic thin tube is made uniform.
【0011】図2は本発明の第2の実施例を示す図で、
図2(a)は空冷式イオンレーザ管の中心軸を通った断
面図、図2(b)は中心軸に垂直な放熱板の部分の断面
図である。この実施例では図2に示すように放熱板5b
を発熱量の大きいカソード3側のスリット8の幅をアノ
ード2側よりも小さくすることによりセラミック細管の
温度を一様にしている。FIG. 2 is a diagram showing a second embodiment of the present invention.
FIG. 2A is a cross-sectional view through the center axis of the air-cooled ion laser tube, and FIG. 2B is a cross-sectional view of a heat dissipation plate portion perpendicular to the center axis. In this embodiment, as shown in FIG.
By making the width of the slit 8 on the side of the cathode 3 having a large heat generation smaller than that on the side of the anode 2, the temperature of the ceramic thin tube is made uniform.
【0012】図3は本発明の第3の実施例を示す図で、
図3(a)は空冷式イオンレーザ管の中心軸を通った断
面図、図3(b)は中心軸に垂直な放熱板の部分の断面
図である。この実施例では図3に示すように放熱板5c
を、発熱量の大きいカソード3側のスリット8の深さを
アノード2側よりも浅くした形状にすることによりセラ
ミック細管の温度を一様にしている。FIG. 3 is a diagram showing a third embodiment of the present invention.
FIG. 3A is a cross-sectional view through the center axis of the air-cooled ion laser tube, and FIG. 3B is a cross-sectional view of a heat dissipation plate portion perpendicular to the center axis. In this embodiment, as shown in FIG.
By making the depth of the slit 8 on the cathode 3 side, which has a large amount of heat generation, smaller than that on the anode 2 side, the temperature of the ceramic thin tube is made uniform.
【0013】図4は本発明の第4の実施例を示す図で、
図4(a)は空冷式イオンレーザ管の中心軸を通った断
面図、図4(b)は中心軸に垂直な放熱板の部分の断面
図である。この実施例では図に示すように放熱板5dは
細管の温度分布が一様となるように複数のスリット8の
各々が一定形状、一定ピッチのままで、面積がカソード
3からアノード2に向かって小さくなっている。FIG. 4 is a diagram showing a fourth embodiment of the present invention.
FIG. 4A is a cross-sectional view through the center axis of the air-cooled ion laser tube, and FIG. 4B is a cross-sectional view of a heat dissipation plate portion perpendicular to the center axis. In this embodiment, as shown in the figure, in the heat dissipation plate 5d, each of the plurality of slits 8 has a constant shape and a constant pitch so that the temperature distribution of the thin tubes is uniform, and the area is from the cathode 3 to the anode 2. It is getting smaller.
【0014】図5は本発明の第5の実施例を示す図で、
図5(a)は空冷式インオンレーザ管の中心軸を通った
断面図、図5(b)は中心軸に垂直なカソード側の放熱
板の部分の断面図、図5(c)は中心軸に垂直なアノー
ド側の放熱板の部分の断面図である。この実施例では放
熱板5eは細管の温度部分が一様となるように複数のス
リット8は一定形状、一定ピッチのままで、厚みがカソ
ード3からアノード2に向かって薄くなっている。FIG. 5 is a diagram showing a fifth embodiment of the present invention.
5 (a) is a cross-sectional view through the center axis of the air-cooled in-on laser tube, FIG. 5 (b) is a cross-sectional view of the cathode side heat sink plate perpendicular to the center axis, and FIG. 5 (c) is the center. FIG. 6 is a cross-sectional view of a portion of a heat dissipation plate on the anode side perpendicular to the axis. In this embodiment, the heat radiating plate 5e has a plurality of slits 8 having a constant shape and a constant pitch so that the temperature portion of the thin tube is uniform, and the thickness decreases from the cathode 3 to the anode 2.
【0015】さらに、上記実施例の任意の組み合わせと
することもできる。なお、スリットの密度、幅、深さ
は、セラミック細管の温度分布が一様になるような形状
に決める。Further, any combination of the above embodiments can be used. The density, width, and depth of the slits are determined so that the temperature distribution of the ceramic thin tube is uniform.
【0016】[0016]
【発明の効果】以上説明したように、本発明は空冷式イ
オンレーザ管の放熱板の構造をセラミック細管の温度分
布が一様になるように工夫したので、レーザ出力のスタ
ート時の立ち上がりや安定度特性が向上するという結果
を生ずる。As described above, according to the present invention, the structure of the heat dissipation plate of the air-cooled ion laser tube is devised so that the temperature distribution of the ceramic thin tube becomes uniform, so that the laser output rises and stabilizes at the start. The result is that the degree characteristics are improved.
【図1】(a)は本発明の第1の実施例を示す空冷式イ
ンオンレーザ管の断面図、(b)は放熱板部分の断面図
である。1A is a sectional view of an air-cooled in-on laser tube showing a first embodiment of the present invention, and FIG. 1B is a sectional view of a heat radiating plate portion.
【図2】(a)は本発明の第2の実施例を示す空冷式イ
オンレーザ管の断面図、(b)は放熱板部分の断面図で
ある。2A is a cross-sectional view of an air-cooled ion laser tube showing a second embodiment of the present invention, and FIG. 2B is a cross-sectional view of a heat dissipation plate portion.
【図3】(a)は本発明の第3の実施例を示す空冷式イ
オンレーザ管の断面図、(b)は放熱板部分の断面図で
ある。FIG. 3A is a sectional view of an air-cooled ion laser tube showing a third embodiment of the present invention, and FIG. 3B is a sectional view of a heat radiating plate portion.
【図4】(a)は本発明の第4の実施例を示す空冷式イ
オンレーザ管の断面図、(b)は放熱板部分の断面図で
ある。4A is a sectional view of an air-cooled ion laser tube showing a fourth embodiment of the present invention, and FIG. 4B is a sectional view of a heat radiating plate portion.
【図5】(a)は本発明の第5の実施例を示す空冷式イ
オンレーザ管の断面図、(b),(c)は放熱板部分の
断面図である。5A is a sectional view of an air-cooled ion laser tube showing a fifth embodiment of the present invention, and FIGS. 5B and 5C are sectional views of a heat radiating plate portion.
【図6】(a)は従来技術による空冷式イオンレーザ管
の断面図、(b)は放熱板部分の断面図である。6A is a cross-sectional view of an air-cooled ion laser tube according to a conventional technique, and FIG. 6B is a cross-sectional view of a heat dissipation plate portion.
1 外囲器 2 アノード 3 カソード 4 セラミック細管 5,5a〜5e 放熱板 6 全反射ミラー 7 出力ミラー 8 スリット 1 Enclosure 2 Anode 3 Cathode 4 Ceramic Capillary Tube 5, 5a to 5e Heat Dissipator 6 Total Reflection Mirror 7 Output Mirror 8 Slit
Claims (4)
電電極であるアノードとカソードと、このアノードとカ
ソードの間に位置しレーザ媒質が放電状態となるセラミ
ック細管部と、このセラミック細管部にろう付けされ放
電時に発生する熱を放熱する複数の放熱板と、外囲器の
両端に位置し放電励起されたレーザ媒質からレーザ光を
取り出す共振器を構成する全反射ミラーと、一部の光を
透過させる出力ミラーとを有する空冷式イオンレーザ管
において、前記放熱板は、前記セラミック細管にラジア
ル方向にろう付けされ、カソード側からアノード側に向
かって熱容量が小さくなる構造とされていることを特徴
とする空冷式イオンレーザ管。1. A gas which is a laser medium, an anode and a cathode which are discharge electrodes, a ceramic thin tube portion located between the anode and the cathode, in which the laser medium is in a discharge state, and the ceramic thin tube. A plurality of heat dissipation plates that are brazed to the part to dissipate the heat generated during discharge, a total reflection mirror that forms a resonator that extracts laser light from the laser medium that is positioned at both ends of the envelope and is excited by discharge, and part In the air-cooled ion laser tube having an output mirror for transmitting the light, the heat dissipation plate is brazed to the ceramic thin tube in the radial direction so that the heat capacity decreases from the cathode side to the anode side. An air-cooled ion laser tube characterized in that
う付け面に不等間隔の複数のスリットを有することを特
徴とする請求項1記載の空冷式イオンレーザ管。2. The air-cooled ion laser tube according to claim 1, wherein the heat radiating plate has a plurality of slits on the brazing surface of the ceramic thin tube at unequal intervals.
う付け面に幅の異なる複数のスリットを有するこを特徴
とする請求項1記載の空冷式イオンレーザ管。3. The air-cooled ion laser tube according to claim 1, wherein the heat dissipation plate has a plurality of slits having different widths on a brazing surface of the ceramic thin tube.
深さの異なる複数のスリットを有することを特徴とする
請求項1記載の空冷式イオンレーザ管。4. The air-cooled ion laser tube according to claim 1, wherein the heat dissipation plate has a plurality of slits having different depths on a brazing surface of the thin tube.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32266794A JPH08181367A (en) | 1994-12-26 | 1994-12-26 | Air cooled ion laser tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32266794A JPH08181367A (en) | 1994-12-26 | 1994-12-26 | Air cooled ion laser tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH08181367A true JPH08181367A (en) | 1996-07-12 |
Family
ID=18146266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32266794A Pending JPH08181367A (en) | 1994-12-26 | 1994-12-26 | Air cooled ion laser tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH08181367A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000013267A1 (en) * | 1998-09-01 | 2000-03-09 | Jds Uniphase Corporation | Power efficient gas ion laser system, associated laser tube and method |
CN113889840A (en) * | 2021-12-06 | 2022-01-04 | 山东建荣教学设备有限公司 | Semiconductor laser for eye protection display screen |
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JPH0249147B2 (en) * | 1985-02-18 | 1990-10-29 | Daihatsu Motor Co Ltd | TSUYAKESHITOSOHOHO |
JPH04339300A (en) * | 1991-05-16 | 1992-11-26 | Shimadzu Corp | X-ray mirror with heat radiator |
JPH05206543A (en) * | 1992-01-24 | 1993-08-13 | Nec Corp | Ion laser tube |
-
1994
- 1994-12-26 JP JP32266794A patent/JPH08181367A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6245584B2 (en) * | 1977-12-19 | 1987-09-28 | Hitachi Ltd | |
JPH0249147B2 (en) * | 1985-02-18 | 1990-10-29 | Daihatsu Motor Co Ltd | TSUYAKESHITOSOHOHO |
JPH04339300A (en) * | 1991-05-16 | 1992-11-26 | Shimadzu Corp | X-ray mirror with heat radiator |
JPH05206543A (en) * | 1992-01-24 | 1993-08-13 | Nec Corp | Ion laser tube |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000013267A1 (en) * | 1998-09-01 | 2000-03-09 | Jds Uniphase Corporation | Power efficient gas ion laser system, associated laser tube and method |
US6324202B1 (en) | 1998-09-01 | 2001-11-27 | Uniphase Corporation | Power efficient gas ion laser system, associated laser tube, and method |
CN113889840A (en) * | 2021-12-06 | 2022-01-04 | 山东建荣教学设备有限公司 | Semiconductor laser for eye protection display screen |
CN113889840B (en) * | 2021-12-06 | 2022-03-01 | 山东建荣教学设备有限公司 | Semiconductor laser for eye protection display screen |
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