JPH08180317A - Core thin-film magnetic head - Google Patents

Core thin-film magnetic head

Info

Publication number
JPH08180317A
JPH08180317A JP32436094A JP32436094A JPH08180317A JP H08180317 A JPH08180317 A JP H08180317A JP 32436094 A JP32436094 A JP 32436094A JP 32436094 A JP32436094 A JP 32436094A JP H08180317 A JPH08180317 A JP H08180317A
Authority
JP
Japan
Prior art keywords
magnetic
thin film
magnetic head
core
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32436094A
Other languages
Japanese (ja)
Other versions
JP2882299B2 (en
Inventor
Noriaki Mukaide
徳章 向出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP32436094A priority Critical patent/JP2882299B2/en
Publication of JPH08180317A publication Critical patent/JPH08180317A/en
Application granted granted Critical
Publication of JP2882299B2 publication Critical patent/JP2882299B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a magnetic head which does not saturate the magnetic metallic thin film on the trailing side of the core thin-film magnetic head having a steep recording magnetic field even if the core thin-film magnetic head has an extremely small gap depth. CONSTITUTION: This head consists of a winding window 5 which is formed on the opposite surfaces of a pair of nonmagnetic substrates 3, 3, the magnetic metallic thin films 2 which are formed on the opposite surfaces of these nonmagnetic substrates 3, 3 including the winding window 5 and a magnetic gap 14 which is formed by disposing the magnetic metallic thin films 2, 2 of the apex part of the winding window 5 across a magnetic gap material. The depth in the gap depth direction of the opposite parts of the magnetic metallic thin films 2 forming the magnetic gap 14 is formed deeper at the magnetic metallic thin film 12 on the trailing side than the magnetic metallic thin film 13 on the leading side.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、HDD等の磁気記録
装置に用いられる磁気ヘッドであって、主に金属磁性薄
膜を磁気コアとする磁気ヘッドに係り特にギャップデプ
スが小さい高密度記録に適したコア薄膜磁気ヘッドに関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a magnetic recording device such as an HDD, and mainly relates to a magnetic head using a metal magnetic thin film as a magnetic core, and is particularly suitable for high density recording with a small gap depth. Core thin film magnetic head.

【0002】[0002]

【従来の技術】近年磁気記録分野においては高記録密度
化の要請が高まり、又、データの高速性も求められるよ
うになってきている。この点から、特に高透磁率,高飽
和磁束密度の磁性材料を用いて磁気コアを形成し、又、
インダクタンスの小さい磁気ヘッドが求められるように
なった。
2. Description of the Related Art In recent years, in the field of magnetic recording, there is an increasing demand for higher recording density, and higher data speed is also required. From this point, in particular, a magnetic core is formed by using a magnetic material having high magnetic permeability and high saturation magnetic flux density, and
A magnetic head with a small inductance has been demanded.

【0003】特に最近では従来のいわゆるバルク型磁気
ヘッドの製法を流用しつつ上記の性能を満足できる磁気
ヘッドとしてコア薄膜磁気ヘッドが注目されている。コ
ア薄膜磁気ヘッドは,非磁性基板上に金属磁性薄膜で磁
気コアを形成するもので各種のタイプが提案されている
がインダクタンスを小さくすると言う観点から特に、特
公平6−54528号公報に記載のものが注目されてい
る。この磁気ヘッドは図6示すように一対の非磁性基板
3,3の対向面に設けられる巻線窓5に沿って金属磁性
薄膜2,2を形成し、この金属磁性薄膜2,2でギャッ
プ材を狭持して磁気ギャップ14としガラス等4で一体
化してコア薄膜磁気ヘッドを形成するものである。
Particularly, recently, a core thin film magnetic head has been attracting attention as a magnetic head which can satisfy the above-mentioned performance while diverting the conventional method of manufacturing a bulk type magnetic head. The core thin-film magnetic head is one in which a magnetic core is formed of a metal magnetic thin film on a non-magnetic substrate, and various types have been proposed, but from the viewpoint of reducing the inductance, it is described in Japanese Patent Publication No. 6-54528. Things are receiving attention. As shown in FIG. 6, this magnetic head forms metal magnetic thin films 2 and 2 along a winding window 5 provided on the opposing surfaces of a pair of non-magnetic substrates 3 and 3. The metal magnetic thin films 2 and 2 form a gap material. To form a magnetic gap 14 and are integrated with glass 4 or the like to form a core thin film magnetic head.

【0004】この種のコア薄膜磁気ヘッドの製法は,図
7示すように、一対の非磁性体ブロック9,9の対向面
にダイサー等を用いて巻線溝15,15を形成し
(a)、この面にFeAlSi,FeTaN,FeNi
等の金属磁性薄膜2,2を形成し(b)、巻線溝15,
15を対向させて巻線溝15,15にガラス等の棒40
を挿入して溶着炉で溶着し、両者をボンディングして一
体化し(c),スライサーでスライスしてコア薄膜磁気
ヘッド8を形成している(d)。この一体化工程(c)
においては、ギャップデプスエンド部分11は、できる
だけずれないように一体化していた。この部分がずれる
と余分なインダクタンスを生じるからである。
In this type of core thin film magnetic head manufacturing method, as shown in FIG. 7, winding grooves 15, 15 are formed on the opposing surfaces of a pair of non-magnetic blocks 9, 9 using a dicer or the like (a). , FeAlSi, FeTaN, FeNi on this surface
(B) by forming metal magnetic thin films 2, 2 of
15 facing each other, and the rods 40 made of glass or the like in the winding grooves 15, 15.
Is inserted and welded in a welding furnace, both are bonded and integrated (c), and the core thin film magnetic head 8 is formed by slicing with a slicer (d). This integration step (c)
In the above, the gap depth end portion 11 was integrated so as not to shift as much as possible. This is because if this portion shifts, extra inductance will occur.

【0005】又,最近では媒体摺動面に露出する金属磁
性薄膜の面積を全体に小さくする傾向が大きく、図8に
示すように、媒体の記録磁化の磁化遷移領域を小さくす
る目的、即ち、磁気ヘッドの記録磁界を急峻にする目的
で磁気ヘッドに対する媒体の出口側、即ち、トレーリン
グ側の金属磁性薄膜22の媒体摺動面に露出する面積T
を磁気ヘッドに対する媒体の入り口側、即ち、リーディ
ング側の金属磁性薄膜23の媒体摺動面に露出する面積
Uよりも小さくしたものも作られている。このようにす
るのは、磁気コアのうち媒体への書き込みを決定するの
がこのトレーリング側の金属磁性薄膜22だからであ
り、この金属磁性薄膜の媒体への露出面積を小さくして
磁束を絞り,記録磁界の垂直成分を大きくするためであ
る。このような磁気ヘッドとして、例えば、特開平2−
193307号公報記載のようなものがある。
Recently, there is a large tendency to reduce the area of the metal magnetic thin film exposed on the sliding surface of the medium as a whole, and as shown in FIG. 8, the purpose is to reduce the magnetization transition region of the recording magnetization of the medium, that is, The area T exposed on the medium sliding surface of the metal magnetic thin film 22 on the medium outlet side, that is, on the trailing side, for the purpose of making the recording magnetic field of the magnetic head steep.
Is also made smaller than the area U exposed on the medium sliding surface of the metal magnetic thin film 23 on the medium entrance side of the magnetic head, that is, on the leading side. This is because it is the trailing-side metal magnetic thin film 22 that determines writing to the medium in the magnetic core, and the exposed area of the metal magnetic thin film to the medium is reduced to reduce the magnetic flux. , To increase the vertical component of the recording magnetic field. As such a magnetic head, for example, Japanese Patent Laid-Open No.
There is one described in Japanese Patent No. 193307.

【0006】[0006]

【発明が解決しようとする課題】ところで上記のコア薄
膜磁気ヘッドは、最近の磁気記録技術の動向によりギャ
ップデプスを小さくする必要性が高まったがギャップデ
プスの小さなコア薄膜磁気ヘッドの録再特性が不十分で
あると言う問題が表面化してきた。例えば、最近の磁気
ヘッドでは、ギャップデプスが4μm以下のもの特にハ
ードディスク装置に用いられるものとしてはギャップデ
プスが1μm以下のものも製造されるようになってきて
いる。
In the above-mentioned core thin film magnetic head, the need for reducing the gap depth has increased due to recent trends in magnetic recording technology. However, the recording / reproducing characteristics of the core thin film magnetic head with a small gap depth are increased. The problem of being inadequate has surfaced. For example, in recent magnetic heads, those having a gap depth of 4 μm or less, particularly those having a gap depth of 1 μm or less are being manufactured as those used in hard disk devices.

【0007】その結果、たとえ、現在知られている最も
高飽和磁束密度の材料を用いてもギャップデプスの小さ
なコア薄膜磁気ヘッドではヘッド先端部、特に、磁気記
録の磁界の垂直成分を大きくするために媒体摺動面積が
小さいトレーリング側の磁気コアの金属磁性薄膜部分で
磁気飽和が顕著になってきた。これは、この部分の金属
磁性薄膜の体積が小さくなり過ぎているからである。こ
のことは磁気ヘッドの記録再生能力、特に記録能力に大
きな支障を来し、高記録密度化の妨げとなっていた。
As a result, the core thin film magnetic head having a small gap depth increases the head tip portion, especially the vertical component of the magnetic field of magnetic recording, even if the currently known material having the highest saturation magnetic flux density is used. In addition, magnetic saturation has become remarkable in the metal magnetic thin film portion of the magnetic core on the trailing side where the medium sliding area is small. This is because the volume of the metal magnetic thin film in this portion is too small. This seriously hinders the recording / reproducing ability of the magnetic head, particularly the recording ability, and hinders the increase in recording density.

【0008】[0008]

【課題を解決するための手段】この発明は、上記課題を
解決するために一対の非磁性基板と、この一対の非磁性
基板に形成される金属磁性薄膜と、からなるコア薄膜磁
気ヘッドであって、前記一対の非磁性基板の対向面に巻
線窓が形成され、前記金属磁性薄膜は、前記巻線窓のエ
ーペックス部を含む内周面に形成され、前記巻線窓のエ
ーペックス部の前記金属磁性薄膜を磁気ギャップ材を狭
持して対向させて磁気ギャップを形成し、前記磁気ギャ
ップを形成する前記金属磁性薄膜の対向部分のギャップ
デプス方向深さが、リーディング側よりトレーリング側
のほうが深く形成される、コア薄膜磁気ヘッドを提供す
る。
To solve the above problems, the present invention provides a core thin film magnetic head comprising a pair of non-magnetic substrates and a metal magnetic thin film formed on the pair of non-magnetic substrates. Then, a winding window is formed on the opposing surfaces of the pair of non-magnetic substrates, the metal magnetic thin film is formed on an inner peripheral surface including the apex portion of the winding window, and the apex portion of the winding window is formed. A magnetic gap is formed by sandwiching a metal magnetic thin film with a magnetic gap material sandwiched between them, and the depth in the gap depth direction of the facing portion of the metal magnetic thin film forming the magnetic gap is larger on the trailing side than on the leading side. A deeply formed core thin film magnetic head is provided.

【0009】また、前記金属磁性薄膜の媒体摺動面に露
出する部分の面積がリーディング側よりトレーリング側
のほうが小さいことを特徴とする上記のコア薄膜磁気ヘ
ッドを提供する。
The core thin film magnetic head is characterized in that the area of the portion of the metal magnetic thin film exposed on the medium sliding surface is smaller on the trailing side than on the leading side.

【0010】さらにまた、前記金属磁性薄膜の媒体摺動
面との接触角度が、トレーリング側のほうがリーディン
グ側より大きいことを特徴とする上記のコア薄膜磁気ヘ
ッドを提供する。
Furthermore, the core thin film magnetic head is provided in which the contact angle of the metal magnetic thin film with the medium sliding surface is larger on the trailing side than on the leading side.

【0011】そして、前記磁気ギャップを形成する前記
金属磁性薄膜のトレーリング側の媒体摺動面との接触角
度が20〜60度である上記のコア薄膜磁気ヘッドを提
供する。
The core thin film magnetic head is provided in which the contact angle of the metal magnetic thin film forming the magnetic gap with the trailing side medium sliding surface is 20 to 60 degrees.

【0012】[0012]

【作用】この発明は、上述のような構成を採ったため金
属磁性薄膜の媒体摺動面に露出する面積を従来通り小さ
くしつつ、磁気ギャップ部分のトレーリング側の金属磁
性薄膜のギャップデプス方向深さが深くなり、この部分
の体積を大きく出来るのでギャップデプスが極めて小さ
い場合でも磁気飽和を起こすことがない。従って、磁気
コアが磁気飽和を生ずることなくコア薄膜磁気ヘッドか
らの記録磁界の垂直成分を大きく出来る。
Since the present invention has the above-described structure, the area exposed to the medium sliding surface of the metal magnetic thin film is made small as usual, and the depth of the metal magnetic thin film on the trailing side of the magnetic gap portion in the gap depth direction is reduced. Since the depth becomes deep and the volume of this portion can be made large, magnetic saturation does not occur even when the gap depth is extremely small. Therefore, the perpendicular component of the recording magnetic field from the core thin film magnetic head can be increased without causing magnetic saturation of the magnetic core.

【0013】又、本発明はトレーリング側の金属磁性薄
膜の媒体摺動面に対する角度をリーディング側の金属磁
性薄膜の媒体摺動面に対する角度より大きくすることに
よってトレーリング側の金属磁性薄膜の体積を大きくし
たのでかかる効果を非常に単純な製法によって実現する
ことができる。
Further, according to the present invention, the angle of the trailing side metal magnetic thin film with respect to the medium sliding surface is made larger than the angle of the leading side metal magnetic thin film with respect to the medium sliding surface, whereby the volume of the trailing side metal magnetic thin film is increased. Since the value is increased, such an effect can be realized by a very simple manufacturing method.

【0014】さらに、トレーリング側の金属磁性薄膜の
媒体摺動面となす角度を20〜60度としたのでギャッ
プデプスが充分小さい場合でも磁気飽和を起こすことが
無い上にコア薄膜磁気ヘッドの巻線窓の上部の機械的強
度も充分に確保できる。
Further, since the angle formed between the trailing side metal magnetic thin film and the medium sliding surface is set to 20 to 60 degrees, magnetic saturation does not occur even when the gap depth is sufficiently small and the core thin film magnetic head is wound. The mechanical strength of the upper part of the wire window can be sufficiently secured.

【0015】[0015]

【実施例】以下この発明について図面を参照して説明す
る。なお、従来と同一部分には同一符号を付してその説
明を省略する。図1に示すように、この発明のコア薄膜
磁気ヘッドは,一対の非磁性基板3,3にダイサー等を
用いて巻線窓5を形成しこの非磁性基板3,3の対向面
のうち巻線窓5の内周面にFeTaN,FeTaC,F
eTaNCu,FeTaNC,FeMoN,FeCo
N,FeCN,FeTaNAg,FeAlSi,NiF
e等の金属磁性薄膜2,2をスパッタ、蒸着等によって
形成し、磁気ギャップ材をこの金属磁性薄膜2,2で対
向狭持し磁気ギャップ14を形成し,ガラス等4を用い
て両基板を溶着し一体化してコア薄膜磁気ヘッド20を
形成したものである。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. Incidentally, the same parts as those of the conventional one are designated by the same reference numerals, and the description thereof will be omitted. As shown in FIG. 1, the core thin film magnetic head of the present invention has a winding window 5 formed on a pair of non-magnetic substrates 3 and 3 by using a dicer or the like, and a winding window 5 is formed on the opposing surfaces of the non-magnetic substrates 3 and 3. FeTaN, FeTaC, F on the inner peripheral surface of the wire window 5
eTaNCu, FeTaNC, FeMoN, FeCo
N, FeCN, FeTaNAg, FeAlSi, NiF
The metal magnetic thin films 2 and 2 such as e are formed by sputtering, vapor deposition, etc., the magnetic gap material is sandwiched between the metal magnetic thin films 2 and 2 to form the magnetic gap 14, and both substrates are formed using glass 4 or the like. The core thin film magnetic head 20 is formed by welding and integration.

【0016】この際、図3の拡大図に示すように金属磁
性薄膜のうち磁気ギャップ14を形成するエーペックス
部50にある金属磁性薄膜の対向部分は、トレーリング
側の金属磁性薄膜12をリーディング側の金属磁性薄膜
13よりわずかに下方にずらして両基板を一体化する。
このようにすれば、トレーリング側のギャップデプス方
向深さDが深くなって結果としてこの体積を増加できる
ので、トレーリング側の金属磁性薄膜が媒体摺動面に露
出する部分Sが小さいにもかかわらず、このトレーリン
グ側の金属磁性薄膜12が磁気的に飽和することはな
い。このときギャップデプスエンド部分19のズレ量
は、ギャップデプスに対して10〜50%ずらせば、飽
和しない程度の充分の金属磁性薄膜の体積を確保できる
ので大抵の場合、0.2μm〜2.0μm程度ずらせば
良い。
At this time, as shown in the enlarged view of FIG. 3, the metal magnetic thin film 12 on the trailing side is the leading side of the metal magnetic thin film 12 facing the apex portion 50 forming the magnetic gap 14 of the metal magnetic thin film. The two substrates are integrated by being shifted slightly below the metal magnetic thin film 13.
By doing so, the depth D in the gap depth direction on the trailing side becomes deeper, and as a result, this volume can be increased, so that the portion S where the metal magnetic thin film on the trailing side is exposed on the medium sliding surface is small. Nevertheless, the metal magnetic thin film 12 on the trailing side is never magnetically saturated. At this time, if the gap depth end portion 19 is displaced by 10 to 50% with respect to the gap depth, a sufficient volume of the metal magnetic thin film that does not saturate can be secured, so in most cases 0.2 μm to 2.0 μm. It is enough to shift it.

【0017】さらに具体的にこのコア薄膜磁気ヘッドの
製法に関して説明すると、コア薄膜磁気ヘッドは量産の
ために長尺のブロックをスライスして形成するのでその
工程は図9に示すようになる。即ち、長尺の非磁性体ブ
ロック30,30から成るブロックの長さ方向に沿って
ダイサー等で巻線溝35,35を加工する(a)。そし
て、両ブロックの対向面に金属磁性薄膜32,32、例
えばFeTaN合金を形成しさらにギャップ材となるS
iO2 等33を形成し(b)、その巻線溝35,35が
対向して巻線窓が形成されるように両ブロックを位置調
整してその後、ガラス棒40を合わされた巻線溝35,
35に配置して溶着炉に入れて溶着し一体化する
(c)。
More specifically, the method of manufacturing the core thin film magnetic head will be described. Since the core thin film magnetic head is formed by slicing a long block for mass production, the process is as shown in FIG. That is, the winding grooves 35, 35 are processed by a dicer or the like along the length direction of the block composed of the long nonmagnetic blocks 30, 30 (a). Then, metal magnetic thin films 32, 32, for example, FeTaN alloy are formed on the opposing surfaces of both blocks to form a gap material S.
iO2 or the like 33 is formed (b), and the positions of both blocks are adjusted so that the winding windows are formed so that the winding grooves 35, 35 face each other, and then the glass rod 40 is fitted into the winding groove 35,
It is placed at 35 and put in a welding furnace to be fused and integrated (c).

【0018】溶着炉にいれる前の位置調整の段階で両ブ
ロックは、図4に示すように溶着治具41に半固定し
て、この溶着治具41を位置調整治具44に配置し溶着
治具固定ネジ46でこれを固定し、マイクロメータ45
及び、非磁性体ブロックの反対側にあるバネ42で非磁
性体ブロック30,30のギャップデプスエンド部分3
1を側方から顕微鏡(図示せず。)で観察してトレーリ
ング側が0.2μm程度のズレ量で媒体摺動面側から見
て下側に位置合わせする。位置合わせが終了したらブロ
ック固定ねじ43で非磁性体ブロック30,30を固定
し、巻線溝47にガラス棒等(図示せず。)を挿入し、
溶着治具固定ネジ46をゆるめて溶着治具41を溶着炉
(図示せず。)に入れて、両ブロックを溶着一体化す
る。
At the stage of position adjustment before entering the welding furnace, both blocks are semi-fixed to the welding jig 41 as shown in FIG. 4, and the welding jig 41 is placed on the position adjusting jig 44 to fix the welding. This is fixed with the tool fixing screw 46, and the micrometer 45
Also, the gap 42 on the gap depth end 3 of the non-magnetic material block 30, 30 is formed by the spring 42 on the opposite side of the non-magnetic material block.
1 is observed from the side with a microscope (not shown), and the trailing side is aligned to the lower side when viewed from the medium sliding surface side with a deviation amount of about 0.2 μm. When the alignment is completed, the non-magnetic blocks 30, 30 are fixed with the block fixing screws 43, and a glass rod or the like (not shown) is inserted into the winding groove 47,
Loosen the welding jig fixing screw 46 and put the welding jig 41 in a welding furnace (not shown) to integrally weld both blocks.

【0019】このようにして一体化されたブロックをス
ライサー等でスライスすれば図9(d)に示すように全
て同一のギャップデプスエンドのズレ量のコア薄膜磁気
ヘッド20を一度に複数得ることが出来る。なお、この
コア薄膜磁気ヘッドに用いる非磁性基板としては各種セ
ラミックスや各種ガラス基板を用いることが出来る。
又、ギャップ材としてはSiO2 やAl2O3等あるい
は、これらと一定の金属材料との積層膜を用いることが
出来る。
If the blocks thus integrated are sliced by a slicer or the like, a plurality of core thin film magnetic heads 20 having the same gap depth end deviation can be obtained at a time as shown in FIG. 9D. I can. Various ceramics and various glass substrates can be used as the non-magnetic substrate used in the core thin film magnetic head.
As the gap material, SiO2, Al2O3 or the like, or a laminated film of these and a certain metal material can be used.

【0020】トレーリング側の金属磁性薄膜の媒体摺動
面に露出する面積を、リーディング側の金属磁性薄膜の
媒体摺動面に露出する面積より小さくするには、上記工
程(b)において、トレーリング側の金属磁性薄膜の形
成膜厚をリーディング側の金属磁性薄膜の形成膜厚より
薄くする。具体的には、例えば、トラック幅1μm場合
にリーディング側の金属磁性薄膜の膜厚を1μmにトレ
ーリング側の金属磁性薄膜の膜厚を0.2〜0.5μm
程度にすれば良い。
In order to make the area of the trailing-side metal magnetic thin film exposed on the medium sliding surface smaller than the area of the leading-side metal magnetic thin film exposed on the medium sliding surface, in the above step (b), The film thickness of the metal magnetic thin film on the ring side is made thinner than that of the metal magnetic thin film on the leading side. Specifically, for example, when the track width is 1 μm, the film thickness of the metal magnetic thin film on the leading side is 1 μm, and the film thickness of the metal magnetic thin film on the trailing side is 0.2 to 0.5 μm.
It should be about.

【0021】トレーリング側の金属磁性薄膜の媒体摺動
面となす角度をリーディング側の金属磁性薄膜の媒体摺
動面となす角度より大きくしたり、さらに又、トレーリ
ング側の金属磁性膜の媒体摺動面との接触角度を20〜
60度にして、トレーリング側の金属磁性薄膜の体積を
大きくする場合には、図9の工程(a)において長尺の
ブロック30,30にダイサー等で溝加工する際に図5
に示すようにダイサーの刃の金属支持部36,38の外
周のダイヤモンド刃部分37,39の形状が所望の先端
角度α,βを有するものによって長尺ブロックの溝加工
をすれば良い。こうすれば図2に示すように、この上に
スパッタ等で形成される金属磁性薄膜もこれに倣って媒
体とα,βの角度、即ち、20〜60度の所望の角度に
形成される。
The angle formed by the trailing-side metal magnetic thin film with the medium sliding surface is made larger than the angle formed by the leading-side metal magnetic thin film with the medium sliding surface, and furthermore, the trailing-side metal magnetic film medium is formed. The contact angle with the sliding surface is 20 ~
When the volume of the metal magnetic thin film on the trailing side is increased to 60 degrees, when the grooves are formed in the long blocks 30 by a dicer or the like in the step (a) of FIG.
As shown in FIG. 5, the long block may be grooved by using the diamond blade portions 37, 39 on the outer periphery of the metal supporting portions 36, 38 of the dicer blades having desired tip angles α, β. In this way, as shown in FIG. 2, the metallic magnetic thin film formed by sputtering or the like is also formed on the medium at an angle α, β with the medium, that is, a desired angle of 20 to 60 degrees.

【0022】このようにトレーリング側の金属磁性薄膜
17の媒体摺動面との接触角度βをリーディング側の金
属磁性薄膜18の媒体摺動面との接触角度αよりも大き
くすれば先に述べた実施例と異なって、ギャップデプス
エンド部分19を正確に一致することが出来るので先に
図1に示して述べた実施例の利点を保ちつつギャップデ
プスエンド部分19がずれることによる不利益、例えば
不要インダクタンスの増加や磁気ギャップ部分での磁気
抵抗の低下等を低く押さえることが出来る。
As described above, if the contact angle β of the trailing-side metal magnetic thin film 17 with the medium sliding surface is made larger than the contact angle α of the leading-side metal magnetic thin film 18 with the medium sliding surface, the above description will be given. In contrast to the embodiment described above, the gap depth end portion 19 can be precisely aligned, so that the disadvantages of the gap depth end portion 19 being displaced while maintaining the advantages of the embodiment shown in FIG. An increase in unnecessary inductance and a decrease in magnetic resistance at the magnetic gap can be suppressed.

【0023】なお、このトレーリング側の金属磁性薄膜
17の媒体摺動面との接触角度βは20度以下にすると
巻線窓上部21の構造的強度が弱くなり60度以上にす
ると巻線窓部分で磁束の短絡(矢印で示す。)が生じ好
ましくない。
When the contact angle β of the metal magnetic thin film 17 on the trailing side with the sliding surface of the medium is 20 degrees or less, the structural strength of the winding window upper portion 21 becomes weaker, and when it is 60 degrees or more, the winding window is reduced. Short-circuiting of the magnetic flux (shown by the arrow) occurs at the portion, which is not preferable.

【0024】[0024]

【発明の効果】以上のコア薄膜磁気ヘッドの構成によれ
ば非常に小さな磁気ギャップデプスであっても磁気飽和
することなしに磁気記録再生が出来るので高記録密度の
記録再生が可能となる。
According to the above-described structure of the core thin film magnetic head, even if the magnetic gap depth is very small, magnetic recording and reproduction can be performed without magnetic saturation, so that recording and reproduction with high recording density can be performed.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明によるコア薄膜磁気ヘッドの側面図FIG. 1 is a side view of a core thin film magnetic head according to the present invention.

【図2】 本発明によるコア薄膜磁気ヘッドのリーディ
ング側よりトレーリング側の角度が大きいコア薄膜磁気
ヘッドの側面図
FIG. 2 is a side view of a core thin film magnetic head in which the trailing side angle is larger than the leading side of the core thin film magnetic head according to the present invention.

【図3】 本発明によるコア薄膜磁気ヘッドのギャップ
部の拡大図
FIG. 3 is an enlarged view of a gap portion of a core thin film magnetic head according to the present invention.

【図4】 本発明によるコア薄膜磁気ヘッドを位置調整
し、治具で溶着する様子を示す斜視図
FIG. 4 is a perspective view showing how the core thin film magnetic head according to the present invention is positionally adjusted and welded by a jig.

【図5】 本発明によるコア薄膜磁気ヘッドの巻線窓加
工ブレードの先端形状を示す部分拡大正面図 (a)は、リーディング側の巻線溝を加工するブレード
の先端形状を示す (b)は,トレーリング側の巻線溝を加工するブレード
の先端形状を示す
FIG. 5 is a partially enlarged front view showing a tip shape of a winding window processing blade of a core thin-film magnetic head according to the present invention. FIG. 5 (a) shows a tip shape of a blade for processing a winding groove on a leading side. , Shows the tip shape of the blade that processes the winding groove on the trailing side

【図6】 従来技術による磁気ヘッドの一例の側面図FIG. 6 is a side view of an example of a conventional magnetic head.

【図7】 従来技術による磁気ヘッドの製造工程を示す
斜視図 (a)は、溝加工工程を示す図。(b)は、金属磁性薄
膜形成工程を示す図。(c)は、溶着工程を示す図。
(d)は、磁気ヘッドチップをスライスする工程を示す
図。
FIG. 7 is a perspective view showing a magnetic head manufacturing process according to a conventional technique. FIG. (B) is a figure which shows a metal magnetic thin film forming process. (C) is a figure which shows a welding process.
FIG. 6D is a diagram showing a step of slicing the magnetic head chip.

【図8】 従来技術による磁気ヘッドの他の例の側面図FIG. 8 is a side view of another example of the conventional magnetic head.

【図9】 本発明によるコア薄膜磁気ヘッドの製造工程
を示す斜視図 (a)は、溝加工工程を示す図。(b)は、金属磁性薄
膜形成工程を示す図。(c)は、溶着工程を示す図。
(d)は、コア薄膜磁気ヘッドチップをスライスする工
程を示す図。
FIG. 9A is a perspective view showing a manufacturing process of the core thin-film magnetic head according to the present invention, and FIG. 9A is a view showing a groove processing process. (B) is a figure which shows a metal magnetic thin film forming process. (C) is a figure which shows a welding process.
FIG. 3D is a diagram showing a step of slicing the core thin film magnetic head chip.

【符号の説明】[Explanation of symbols]

2 金属磁性薄膜 3 非磁性基板 5 巻線窓 12 トレーリング側の金属磁性薄膜 13 リーディング側の金属磁性薄膜 14 磁気ギャップ 16 ギャップデプスエンド部分 2 Metal magnetic thin film 3 Non-magnetic substrate 5 Winding window 12 Metal magnetic thin film on trailing side 13 Metal magnetic thin film on leading side 14 Magnetic gap 16 Gap depth end part

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】一対の非磁性基板と、 この一対の非磁性基板に形成される金属磁性薄膜と、か
らなるコア薄膜磁気ヘッドであって、 前記一対の非磁性基板の対向面に巻線窓が形成され、 前記金属磁性薄膜は、前記巻線窓のエーペックス部を含
む内周面に形成され、 前記巻線窓のエーペックス部の前記金属磁性薄膜を磁気
ギャップ材を狭持して対向させて磁気ギャップを形成
し、 前記磁気ギャップを形成する前記金属磁性薄膜の対向部
分のギャップデプス方向深さが、リーディング側よりト
レーリング側のほうが深く形成される、コア薄膜磁気ヘ
ッド。
1. A core thin-film magnetic head comprising a pair of non-magnetic substrates and a metal magnetic thin film formed on the pair of non-magnetic substrates, wherein a winding window is provided on an opposing surface of the pair of non-magnetic substrates. And the metal magnetic thin film is formed on an inner peripheral surface including an apex portion of the winding window, and the metal magnetic thin film of the apex portion of the winding window is faced with a magnetic gap material sandwiched therebetween. A core thin-film magnetic head in which a magnetic gap is formed, and a depth of a facing portion of the metal magnetic thin film forming the magnetic gap is deeper on a trailing side than on a leading side.
【請求項2】前記金属磁性薄膜の媒体摺動面に露出する
部分の面積がリーディング側よりトレーリング側のほう
が小さいことを特徴とする請求項1記載のコア薄膜磁気
ヘッド。
2. The core thin film magnetic head according to claim 1, wherein the area of the portion of the metal magnetic thin film exposed on the medium sliding surface is smaller on the trailing side than on the leading side.
【請求項3】前記金属磁性薄膜の媒体摺動面との接触角
度が、トレーリング側のほうがリーディング側より大き
いことを特徴とする請求項2記載のコア薄膜磁気ヘッ
ド。
3. The core thin film magnetic head according to claim 2, wherein the contact angle of the metal magnetic thin film with the medium sliding surface is larger on the trailing side than on the leading side.
【請求項4】前記磁気ギャップを形成する前記金属磁性
薄膜のトレーリング側の媒体摺動面との接触角度が20
〜60度である請求項3記載のコア薄膜磁気ヘッド。
4. The contact angle of the metal magnetic thin film forming the magnetic gap with the sliding surface of the medium on the trailing side is 20.
4. The core thin film magnetic head according to claim 3, wherein the core thin film magnetic head is about 60 degrees.
JP32436094A 1994-12-27 1994-12-27 Core thin film magnetic head Expired - Lifetime JP2882299B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32436094A JP2882299B2 (en) 1994-12-27 1994-12-27 Core thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32436094A JP2882299B2 (en) 1994-12-27 1994-12-27 Core thin film magnetic head

Publications (2)

Publication Number Publication Date
JPH08180317A true JPH08180317A (en) 1996-07-12
JP2882299B2 JP2882299B2 (en) 1999-04-12

Family

ID=18164921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32436094A Expired - Lifetime JP2882299B2 (en) 1994-12-27 1994-12-27 Core thin film magnetic head

Country Status (1)

Country Link
JP (1) JP2882299B2 (en)

Also Published As

Publication number Publication date
JP2882299B2 (en) 1999-04-12

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