JPH081689B2 - Thin film magnetic head - Google Patents

Description

The present invention relates to a thin film magnetic head.

[Conventional technology]

As shown in FIG. 2, the conventional thin film magnetic head includes a lower insulating film 2, a lower magnetic film 3, a gap film 4, a first insulating film 5 and a spiral type first film on a substrate 1 which constitutes a magnetic head slider. Coil 6, second insulating film 7, spiral type second
The coil 8, the third insulating film 13, the upper magnetic film 21, and the protective film 22 are sequentially laminated.

[Problems to be Solved by the Invention]

Since the above-described conventional thin film magnetic head has a structure in which the first insulating film 5, the second insulating film 7, and the third insulating film 13 are sequentially stacked, the side surfaces of these three insulating films are insulated from each other. The boundary of the film causes a step. That is, since the upper magnetic film 11 is formed on these three insulating films, the step difference is directly reflected in the upper magnetic film 11, and thus the upper magnetic film 11 is formed.
Results in a highly uneven shape, resulting in a marked deterioration of the electromagnetic conversion characteristics of the thin film magnetic head.

As means for solving this, for example, JP-A-62-42311
There is. However, in this example, the outermost peripheral portion of the second coil cannot be sufficiently covered with the third insulating film, and there is a risk that the upper magnetic film and the outermost peripheral portion of the second coil are electrically short-circuited. In addition, the gap depth of 0 that seriously affects the electromagnetic conversion characteristics
Since the position of is determined by the third insulating film, the patterning accuracy of the third insulating film is very strict and the yield is low.

As described above, the conventional thin film magnetic head has the drawbacks that the electromagnetic conversion characteristics are poor, the magnetic film and the coil may be short-circuited, and the product yield is low.

[Means for solving the problem]

In the thin-film magnetic head of the present invention, the insulating film covering the uppermost layer coil of the plurality of layers has a double structure, and the size of the insulating film above the insulating film covers the lowermost layer coil. It is formed to be larger than the size of the insulating film present and smaller than the size of the insulating film immediately below the lowermost layer coil.

[Action]

The insulating film that covers the uppermost layer coil has a double structure, and the size of the insulating film above the insulating film is larger than the size of the insulating film that covers the lowermost layer coil, and directly below the lowermost layer coil. Since the size of the insulating film is smaller than the size of the upper insulating film, the smooth upper magnetic film is obtained without being affected by the step due to each insulating film covering the coil, and the electromagnetic conversion characteristics are not deteriorated. There is no possibility of electrical short-circuit with the outermost peripheral part of the above, and the position of the gap depth 0 is determined by the insulating film immediately below the lowermost layer coil, so patterning is easy and the yield does not deteriorate.

〔Example〕

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a sectional view of an embodiment of the thin film magnetic head of the present invention.

This thin film magnetic head is the third thin film magnetic head of FIG.
Instead of the insulating film 13, a third insulating film 9 and a fourth insulating film 10 are stacked, and an upper magnetic film 11 and a protective film 12 are sequentially stacked on the third insulating film 9 and the fourth insulating film 10. The size of the fourth insulating film 10 is smaller than the size of the first insulating film 5 and larger than the size of the second insulating film 7.

Since the fourth insulating film 10 is formed on the third insulating film 9 in the thin-film magnetic head of this embodiment, three layers of insulation consisting of the first insulating film 5, the second insulating film 7 and the third insulating film 9 are insulated. The unevenness of the film is eliminated and the surface is smooth. Therefore, the upper magnetic film 11
Thus, a thin film magnetic head having excellent electromagnetic conversion characteristics can be provided. In addition, the second coil 8 is connected to the third insulating film 9
Since it is covered with two layers of insulating films, that is, the fourth insulating film 10 and the fourth insulating film 10, the outermost peripheral portion 14 of the second coil 8 and the upper magnetic film 11 are never electrically short-circuited. Further, since the size of the fourth insulating film 10 is smaller than that of the first insulating film 5 and larger than that of the second insulating film 7, the position of the gap depth 0 is determined by the first insulating film 5 as in the conventional case. It does not deteriorate the yield.

〔The invention's effect〕

As described above, in the present invention, the structure of the insulating film that covers the uppermost coil is a two-layer structure, and the size of the insulating film that is the upper layer of this insulating film is smaller than the size of the insulating film that covers the lowermost coil. Is also large and smaller than the insulating film directly below the lowermost coil, the step due to each insulating film that covers the coil does not affect the upper magnetic film, resulting in excellent electromagnetic conversion characteristics. There is no risk of electrical short circuit between the magnetic film and the outermost circumference of the uppermost coil, and
Since the position where the gap depth is 0 is determined by the insulating film immediately below the lowermost layer coil, there is an effect that patterning is easy and the yield is stable.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment of the thin film magnetic head of the present invention,
FIG. 2 is a sectional view of a conventional example of a thin film magnetic head. 1 ... Substrate, 2 ... Lower insulating film, 3 ... Lower magnetic film, 4
...... Gap film, 5 ... First insulating film, 6 ... First coil, 7 ... Second insulating film, 8 ... Second coil, 9 ... Third
Insulating film, 10 ... Fourth insulating film, 11 ... Upper magnetic film, 12 ...
Protective film, 14 ... Outermost part.

Claims (1)

[Claims] 1. A thin film magnetic head formed by sequentially laminating a lower magnetic film, a gap film, a plurality of layers of coils, an insulating film, an upper magnetic film, etc. on a substrate, and covering the uppermost coil of the coils. The insulating film has a double structure, the size of the insulating film above the insulating film is larger than the size of the insulating film covering the lowermost layer coil, and the size of the insulating film immediately below the lowermost layer coil is large. A thin film magnetic head characterized in that it is formed smaller than the above.