JPS63253513A - Thin-film magnetic head - Google Patents

Abstract

PURPOSE:To prevent influences of shapes of plural nonmagnetic insulating layers from being exerted to the above part, by making the plural nonmagnetic insulating layers successively smaller upward from a lower magnetic layer side and covering the nonmagnetic insulating layers with the uppermost nonmagnetic insulating layer. CONSTITUTION:A thin-film magnetic head 10 is provided with a lower magnetic layer 2 formed on a base plate 1 and magnetic gap layer 3 formed on the layer 2. Nonmagnetic insulating layers 4 and conductor coils 5 are alternately piled up on the layer 3 and an upper magnetic layer 6, whose edge sections are formed on the layer 3 and intermediate section is put on the uppermost insulating layer 4, is formed on the layers 3 and 4. The nonmagnetic insulating layers 41-44 and conductor coils 5 provided between the layers 2 and 6 are provided in such a way that the layers 41-43 are made successively smaller as going upward and the layer 44 is caused to cover the layers 41-43. Therefore, no level difference is produced on the slope of the layers 41-44 and influences of the shapes of the layers 41-44 are not exerted to the layer 6. As a result, the magnetic characteristic of this thin-film magnetic head can be improved.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a thin-film magnetic head equipped with a plurality of layers of conductive coils, and the present invention relates to a thin-film magnetic head equipped with a plurality of layers of conductor coils. I tried to avoid it.

[Conventional technology]

A thin film magnetic head is one of the magnetic heads used for recording and reproducing information on magnetic recording media such as magnetic disks.

This thin-film magnetic head uses photolithography technology to form magnetic layers and conductor coils, and due to the manufacturing method,
Compared to manufacturing bulk magnetic heads by machining, this method is suitable for miniaturization, and has features such as low high-frequency loss and low inter-track leakage when used with multi-tracks.

Among such thin-film magnetic heads, there is a multilayer R-film magnetic head in which conductor coils are formed in multiple layers in order to improve recording and reproducing efficiency.For example, the structure of a four-layer thin-film magnetic head is as follows.
As shown in FIG. 3, a lower magnetic layer 2 is formed by vapor-depositing or sputtering permalloy, sendust, etc. on a magnetic or non-magnetic substrate 1, and a non-magnetic layer 2 is formed on the lower magnetic layer m2 to form a magnetic gap. A magnetic material is deposited to form a magnetic gap layer 3, non-magnetic insulating WJ 4 for living room insulation and a conductor coil 5 are alternately laminated to form a 4-layer conductor coil layer, and permalloy, sendust, etc. is evaporated on the top. Alternatively, the upper magnetic layer 6 is formed by forming a film by sputtering or the like.

In such a four-layer thin film magnetic head, the non-magnetic insulating layer 4, which insulates and protects the four-layer conductor coil 5 placed between the upper magnetic layer 6 and the lower magnetic layer 2, is made smaller in size as the upper layer increases. (facet v4).

[Problem that the invention seeks to solve]

However, when the non-magnetic insulating layer 4 is made gradually smaller toward the upper layer in this way, steps are created between each layer, and if a photoresist developer is used when forming the non-magnetic insulating layer 4, the bottom non-magnetic insulating layer 4 will be exposed to this liquid four times, and as shown in FIG. 3(b), the shape will collapse and minute irregularities will be formed. For this reason, the uppermost magnetic layer 6 is not formed smoothly, resulting in deterioration of magnetic properties.

Therefore, when forming a nonmagnetic insulation diagram, as shown in FIG. 4, the adjacent lower nonmagnetic insulation layer 4 is covered with the upper nonmagnetic insulation layer 4, and the nonmagnetic insulation layer 4 is exposed to a chemical such as a photoresist developer only once, but the layer 4 is exposed from the tip of the bottom non-magnetic insulating layer 4 on the magnetic gap layer 3 to the top non-magnetic insulating layer 4. The length D to the tip of the magnetic head becomes too long, and the magnetic path length of the magnetic head becomes long, resulting in deterioration of magnetic properties.

This invention has been made in view of the problems of the prior art, and aims to provide a thin-film magnetic head with excellent magnetic properties in which the shape of a plurality of non-magnetic insulating layers does not affect the upper magnetic layer. It is.

[Means for solving problems]

In order to solve the above problems, the present invention comprises a magnetic gap layer that forms a magnetic gap between the upper and lower magnetic layers, a plurality of conductor coils, and a plurality of nonmagnetic insulating layers that insulate and protect them. In a thin film magnetic head, a plurality of nonmagnetic insulating layers are formed to insulate and protect the conductor coils in each layer, and adjacent layers are successively formed in small areas toward the upper magnetic layer. It is characterized by being laminated so as to cover it.

(Function) The multiple non-magnetic insulating layers are made smaller sequentially from the bottom magnetic layer side, and the top non-magnetic insulating layer is made larger than the bottom non-magnetic insulating layer to cover each non-magnetic insulating layer. The difference in level between each layer is absorbed by the uppermost non-magnetic insulating layer, and an increase in magnetic path length is prevented, resulting in a thin-film magnetic head with excellent magnetic properties.

〔Example〕

Hereinafter, one embodiment of the present invention will be described in detail based on the drawings.

FIGS. 1 and 2 are a cross-sectional view and a plan view of an embodiment of the thin-film magnetic head of the present invention having a four-layer structure.

This thin film magnetic head 10 has a lower magnetic layer 2 formed on a magnetic or non-magnetic substrate 1, and a non-magnetic magnetic gap layer 3 forming a magnetic gap formed on the lower magnetic layer 2. On this magnetic gap layer 3, non-magnetic insulating layers 4 for interlayer insulation and conductor coils 5 are alternately laminated in four layers, the tip portion is located on the magnetic gap layer 3, and the middle portion is located on the top layer. An upper magnetic layer 6 is formed so as to be arranged along the non-magnetic insulating R layer 4, and to form a magnetic path by being connected at a coupling portion 6a with its base end located on the lower magnetic layer 2. .

The four non-magnetic insulating layers 41 to 44 provided between the lower magnetic layer 2 and the upper magnetic layer 6 and the conductor coil 5 are as follows:
The first to third non-magnetic insulating layers 41 to 43 on the magnetic gap layer 3 are gradually made smaller as they move toward the upper layer, and are formed into v4 layers so as to have a small area. The nonmagnetic insulating layer 44 of the first layer is larger than the nonmagnetic insulating layer 41 of the first layer so as to cover the nonmagnetic insulating layers 4 to 43 from the first layer to the third layer.

The size of each layer of the non-magnetic insulating R layer 4 having such a four-layer structure is determined according to the angle of the slope portion 6b of the uppermost magnetic layer 6 of the thin-film magnetic head 10. Conversely, by appropriately changing the size of each layer, the angle of the inclined portion 6b can be arbitrarily changed, and the magnetic properties of the upper magnetic layer 6 can be optimized. Also, the thickness of the fourth non-magnetic insulating layer 44, which is the top layer of the non-magnetic insulating layer 4, is changed, especially the length that covers the tip of the first non-magnetic insulating layer 41 on the magnetic gap side. By doing this, the distance from the tip of the first non-magnetic insulating layer 4 to the tip of the fourth non-magnetic insulating layer 44 can be changed arbitrarily, and the increase in magnetic path length can be minimized. can be used without causing deterioration of magnetic properties.

As a method for forming such a non-magnetic insulating layer 4, for example, a method may be employed in which a positive type photoresist is spin-coated, exposed and developed into a predetermined shape, and then hard-baked.

In the above embodiment, a four-layer structure has been described, but the structure is not limited to this.
It can be widely applied to cases with more than one layer.

〔Effect of the invention〕

As described above in detail along with one embodiment, the thin Il! According to the 1IF41 magnetic head, multiple non-magnetic insulating layers are made smaller in size from the bottom magnetic layer side to make the area smaller, and the top non-magnetic insulating layer is made larger than the bottom non-magnetic insulating layer to make each non-magnetic insulating layer smaller. Since the structure covers the insulating layer, there are no steps on the slopes of the multilayer non-magnetic insulating layer, and the slopes can be made gentle, and the upper magnetic layer formed thereon can also have a gentle shape with no steps. , magnetic properties can be improved.

In addition, the nonmagnetic insulating layer laminated at the tip of the first nonmagnetic insulating layer is only the top layer, and the increase in the magnetic path length formed by the upper and lower magnetic layers is It does not become too long and is not affected by the number of laminated nonmagnetic insulating layers.

Roughly speaking, even if you arbitrarily select a ratio that decreases the area toward the top of the non-magnetic insulating layer, it is covered with the top non-magnetic insulating layer, so the step formed between the layers can be reduced, and the non-magnetic insulating By arbitrarily selecting the slope of the slope around the layer, the angle of the slope of the upper magnetic layer can be changed and the magnetic properties can be improved.

[Brief explanation of drawings]

1 and 2 show an embodiment of the thin film magnetic head of the present invention, and are a cross-sectional view and a plan view of a four-layer structure, and FIG. 3 shows a conventional example, and (a) is a cross-sectional view. FIG. 4B is a plan view of the laminated state of the nonmagnetic insulating layers, and FIG. 4 is a sectional view of the conventional example. 10... Thin film magnetic head, 1... Parking plate, 2... Lower magnetic layer, 3... Magnetic gear hub, 4.4. ~44・
. . . Nonmagnetic insulating layer, 5 . . . Body coil, 6 . . .

Claims (1)

[Claims] In a thin-film magnetic head that is composed of a magnetic gap layer that forms a magnetic gap between the upper and lower magnetic layers, multiple layers of conductor coils, and multiple layers of non-magnetic insulating layers that insulate and protect them, the conductor coils of each layer are insulated. A thin film magnetic film characterized in that a plurality of protective non-magnetic insulating layers are stacked such that adjacent layers are successively formed in small areas toward the upper magnetic layer, and these non-magnetic insulating layers are covered by a top non-magnetic insulating layer. head.