JPH08128916A - Oil leak detection device - Google Patents

Abstract

PURPOSE: To determine the kinds of oil and the quantity of leak by irradiating ultraviolet light and visible light alternately, providing a wavelength selection means in an image pickup means, and comparing images respectively when the ultraviolet light and the visible light are irradiated. CONSTITUTION: The regions of the ultraviolet light and the visible light light are selected form the light of the light source 1 by a wavelength filter 2, and a sample face 4 is alternately irradiated thereby using a switching mechanism 3. The certain wavelength reflected light is selected by a filter 5 so as to pickup an image via a lens 6 using an ITV camera 7. The output is switched by a change-over switch 8 synchronizing with the mechanism 3 so as to divide into video memories 9 and 10. When the ultraviolet light is selected, the oil adhesion portion of the sample face 4 generates fluorescence so as to increase brightness, and in the other portion, brightness distribution is decided based on reflectance at a certain wavelength. When the visible light is selected, the oil adhesion portion 4 absorbs the light, and in the other portion, the brightness distribution is decided based on reflectance at a certain wavelength. A finite difference treatment is conducted on both image data by a computing device 11, the brightness signal level of the oil adhesion portion is emphasized. The brightness change of the other portion is offset so that the automatic detection of oil leak can be performed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an oil leak detecting device for detecting oil leak from equipments and pipes installed in various plants.

[0002]

2. Description of the Related Art As a technique of this kind, Japanese Patent Laid-Open No. 3-199
There is a liquid leakage inspection method described in Japanese Patent No. 938. FIG. 38 shows a configuration diagram of the liquid leakage inspection method. In the figure, 201 is an object to be inspected, 202 is a dark room, 203 is a light source, 20
Reference numeral 4 denotes an image pickup device, 205 denotes a monitor, and 206 denotes a bright spot generated on the monitor obtained as a detection result.

Next, the operation will be described. 20 to be inspected
1 is installed in the dark room 202, and the phosphor is mixed with the oil circulating in the inspection object 201. Upon detection, the inspection object 201 is irradiated with ultraviolet light from the light source, and the inspection object 201 is observed by the imaging device 204. When oil leaks on the surface of the object 201 to be inspected, the phosphor mixed in the oil emits light and is observed by the imaging device 204 as a bright spot 206 on the screen of the monitor 205. In this way, the oil leak is detected by detecting the bright spots generated on the monitor screen.

[0004]

Since the conventional oil leak detection device is constructed as described above, when detecting the oil leak, it is necessary to measure the object to be inspected, for example, by installing it in a dark room. In addition to various constraint conditions for this, there were problems such as quantification of the amount of oil leakage and inability to determine the type of oil.

The present invention has been made to solve the above-mentioned problems, and oil leaks can be detected under normal lighting in a room, and it is possible to determine the type of oil and quantify the leak amount. The purpose is to obtain a measurement method.

[0006]

According to a first aspect of the present invention, there is provided illumination means for alternately irradiating ultraviolet light and visible light, image pickup means provided with wavelength selection means for selecting light of a predetermined wavelength, and ultraviolet light. The image data storage means for storing the data of the fluorescence image and the light absorption image obtained at the time of irradiation and the irradiation of visible light, and the data operation means for comparing the data of both images are provided.

According to the second aspect of the present invention, illumination means for alternately irradiating ultraviolet light and visible light, image pickup means provided with a wavelength selecting means for selecting light of a predetermined wavelength, ultraviolet light irradiation and visible light irradiation. Image data storage means for storing the fluorescence image and light absorption image data obtained at some time, a level calculation means for calculating the average luminance level of both images, a coefficient calculation means for comparing the luminance levels of both images and calculating a calculation coefficient, The brightness correction means for correcting the brightness level of the image data by the coefficient value and the data calculation means for comparing the two images are provided.

According to the third aspect of the invention, illumination means for alternately irradiating ultraviolet light and visible light, image pickup means provided with a wavelength selecting means for selecting light of a predetermined wavelength, ultraviolet light irradiation and visible light irradiation. Image data storage means for storing the fluorescence image and light absorption image data obtained at some time, a level calculation means for calculating the average luminance level of both images, a coefficient calculation means for comparing the luminance levels of both images and calculating a calculation coefficient, The aperture variable means for changing the aperture value of the image pickup lens according to the coefficient value and the arithmetic means for comparing the data of both images are provided.

According to another aspect of the invention, illumination means for alternately irradiating ultraviolet light and visible light, image pickup means provided with a wavelength selection means for selecting light of a predetermined wavelength, ultraviolet light irradiation and visible light irradiation. Image data storage means for storing fluorescence image data and absorption image data obtained at times, comparison calculation means for comparing and calculating data of both images, normal image data storage means for storing comparison calculation image data under normal conditions, by measurement A data determination circuit for comparing the obtained comparative calculation image data and the normal comparison comparison image data is provided.

According to the invention of claim 5, illumination means for alternately irradiating ultraviolet light and visible light, image pickup means provided with a wavelength selecting means for selecting light of a predetermined wavelength, ultraviolet light irradiation and visible light irradiation. Image data storage means for storing the fluorescence image data and the absorption image data obtained at some time, a comparison operation means for performing a comparison operation on the data of both images, and extracting the comparison operation image data at a certain time interval and updating the data. The image data storage means and the data determination circuit for comparing the comparison calculation image data obtained by the measurement with the comparison calculation image data in the normal state are provided.

According to the sixth aspect of the present invention, illumination means for alternately irradiating ultraviolet light and visible light, image pickup means provided with a wavelength selecting means for selecting light of a predetermined wavelength, ultraviolet light irradiation and visible light irradiation. Image data storage means for accumulating the data of the fluorescence image and the light absorption image obtained at some time, a comparison calculation means for comparing and calculating the data of both images, a leak portion detection means for detecting an oil leak portion from the comparison calculation image, a light absorption image of the leak portion The image data extracting means for extracting data and the leak amount calculating means for calculating the leak amount from the extracted light absorption image data are provided.

According to a seventh aspect of the invention, an illumination means for alternately irradiating ultraviolet light and visible light, an image pickup means provided with a wavelength selection means for selecting light of a predetermined wavelength, an ultraviolet light irradiation time and a visible light irradiation time. Image data accumulation means for accumulating the data of the fluorescence image and the absorption image obtained at some time, a comparison operation processing means for comparing the data of both images, a leak portion detection means for detecting an oil leak portion from the comparison operation image, a fluorescence image of the leak portion , Image data extraction means for extracting the data of the absorption image, calculation means for calculating the ratio of the extracted fluorescence image and the data of the absorption image, and comparing the obtained calculation result with the data stored in advance to identify the oil. It is provided with a determination means for performing.

According to an eighth aspect of the present invention, an illumination means for irradiating ultraviolet light having a linear polarization characteristic, an image pickup means having a function of alternately switching two analyzers having polarization directions orthogonal to each other, and a polarization direction An image data storage means for storing two orthogonal image data and a comparison operation processing means for performing a comparison operation on the data of both images are provided.

According to a ninth aspect of the present invention, illumination means for irradiating ultraviolet light having a linear polarization characteristic, the same scene is independently imaged on the image pickup element surface through two windows, and the windows are orthogonal to each other. And an image pickup means having a stereo optical system having an analyzer for the polarization direction, an image data storage means for storing two image data of orthogonal polarization directions, and a comparison calculation processing means for comparing and calculating the data of both images. It is a thing.

According to a tenth aspect of the present invention, an illumination means for irradiating ultraviolet light having a linear polarization characteristic, an optical path which is branched into two, and an analyzer having polarization directions orthogonal to each other are attached on the branched optical path. An image pickup means for forming images on separate image pickup element surfaces, an image data storage means for storing two image data whose polarization directions are orthogonal to each other, and a comparison calculation processing means for comparing and calculating data of both images are provided.

In the invention of claim 11, illumination means for alternately irradiating ultraviolet light and visible light, image pickup means provided with wavelength selection means capable of selecting light of a predetermined single wavelength or the entire visible light wavelength, ultraviolet light Image data accumulation means for accumulating each data of fluorescence image and absorption image obtained at a predetermined single wavelength during light irradiation and visible light irradiation and visible image obtained when the entire visible light wavelength range is selected, fluorescence image and absorption A comparison calculation processing means for comparing and calculating image data, and an image synthesizing means for superimposing the comparison calculation processed image and the visible image are provided.

According to the twelfth aspect of the present invention, an illumination means for irradiating light in a continuous wavelength range from the ultraviolet region to the visible region, and the same scene is imaged independently on the image pickup device surface through two windows. In addition, an image pickup means provided with a stereo optical system having two wavelength filters each having a wavelength having a light absorption property and a wavelength having no light absorption property as a transmission wavelength in each window, an image accumulating two image data having different wavelengths A data storage means and a comparison calculation processing means for comparing and calculating the data of both images are provided.

In the thirteenth aspect of the present invention, an illumination means for irradiating light in a continuous wavelength range from the ultraviolet region to the visible region and an optical path are branched into two, and the sample has an absorption characteristic on the branched optical path. An image pickup means for setting a wavelength filter having a wavelength and a wavelength not having an absorption characteristic as a transmission wavelength and forming an image on a separate image pickup element surface, an image data storage means for storing two image data having different wavelengths,
The comparison calculation processing means for comparing and calculating the data of both images is provided.

[0019]

According to the first aspect of the invention, in the light receiving section, a wavelength at which the light absorption phenomenon occurs and the emission spectrum of the fluorescence overlap are selected as the light receiving wavelength. In the image obtained upon irradiation with ultraviolet rays, the brightness of the oil portion is increased by the generated fluorescence, and the brightness of the other portion is equal to the selected wavelength in normal illumination. In addition, in the image obtained during irradiation with visible light,
The oil part absorbs light due to the absorption phenomenon and the brightness decreases,
In the other portions, the brightness corresponding to the reflectance at the selected wavelength can be obtained.

As described above, the polarities of the brightness level of the oil portion with respect to the peripheral portion are reversed during the irradiation of ultraviolet rays and the irradiation of visible light. On the other hand, since the peripheral region is observed at the same wavelength during irradiation with ultraviolet light and during irradiation with visible light, the obtained luminance has a similar distribution. Therefore, when the difference between the two images is calculated, the luminance is added to the oil portion, while the luminance is canceled in the peripheral area, so that the luminance signal S of the oil portion is S.
It is possible to improve / N. In addition, by adjusting the brightness levels of the parts other than oil in both images, it is possible to cancel out the change in the brightness level due to the difference in reflectance of the parts other than oil in the difference image, and maintain a constant level.

According to the second aspect of the present invention, the average brightness level of the fluorescence image and the light absorption image obtained as a result of the measurement is calculated, the calculation coefficient at the time of the difference processing is determined according to the level value, and the average of both images is calculated. The processing is performed according to the brightness level.

According to a third aspect of the present invention, in the first aspect of the present invention, the aperture value of the lens is changed at the time average luminance level so that the average luminance levels of the two images coincide with each other and the difference between the two images is calculated. To take.

According to a fourth aspect of the invention, in the first aspect of the invention, the brightness levels of the difference image obtained by the measurement and the difference image data stored in advance at the normal time are compared, and the difference levels are compared. The place where the oil leak has occurred is determined to have occurred.

According to a fifth aspect of the invention, in the invention of the fourth aspect, the difference image data at the normal time is updated at every set time interval and compared with the difference image data obtained by the measurement, and the difference between them is determined. The location where the oil leak occurs is determined as the oil leak location.

According to a sixth aspect of the present invention, in the first aspect of the invention, the oil leak position is detected by determining the brightness level in the difference image obtained by the measurement, and the drop level of the brightness level is detected in the absorption image. The amount of oil leakage is calculated.

According to a seventh aspect of the present invention, the ratio of the brightness level in each part of the fluorescent image obtained when the ultraviolet ray is irradiated to the brightness level of the light absorption image obtained when the visible light is irradiated is taken, and each part of the image is calculated from the obtained ratio. The surface condition of is also judged, and in the case of oil leakage, the kind of oil is also judged.

The invention according to claim 8 utilizes the preservability of the polarization characteristics of fluorescence, in which the sample surface is irradiated with ultraviolet light having linear polarization characteristics, and only the polarization component whose polarization direction is parallel to the irradiation light is applied. A comparison calculation process such as difference, addition, and ratio calculation is performed between the selected image and the selected polarization component in the direction orthogonal to the irradiation light, and the oil leak is detected based on the calculation result. Is.

According to a ninth aspect of the present invention, in the above eight aspect of the invention, a stereo mirror that allows the same scene to pass through two windows and forms images on the same image pickup device surface independently of each other is provided in front of the image pickup camera. Installed on each of the two windows and attached an analyzer whose polarization direction is orthogonal to the analyzer whose polarization direction is parallel to the illumination light, and by comparing the left and right screens of the obtained images, two images with orthogonal polarization directions are displayed. Is compared to detect oil leakage.

According to a tenth aspect of the present invention, in the above-mentioned eighth aspect, an optical path is divided into two in front of the image pickup element, and an analyzer whose polarization plane is orthogonal to an analyzer whose polarization plane is parallel to the irradiation light is provided on the divided optical path. Each of them is installed and an image is formed on the surface of the image sensor. The oil leak is detected by comparing the two images thus obtained.

According to the eleventh aspect of the present invention, the image in which the oil leak is detected and the visible image of the same scene obtained in the visible region of light are superimposed.

According to a twelfth aspect of the present invention, in a two-wavelength absorption method in which oil has a light absorption wavelength that absorbs light and a light that does not absorb light, the same scene is passed through two windows,
A stereo mirror that images each independently on the same image pickup device surface is installed in front of the image pickup camera, and a wavelength filter for selecting an absorption wavelength and light that does not absorb light is attached to each of the two windows. The oil leak is detected by comparing left and right of the image.

According to a thirteenth aspect of the present invention, in the two-wavelength absorption system, the optical path is divided into two in front of the image pickup device, and a wavelength filter for selecting an absorption wavelength and a wavelength that does not absorb light is installed on the divided optical path. , Image on the surface of the image sensor. The oil leak is detected by comparing the two images thus obtained.

[0033]

【Example】

Example 1. Example 1 will be described with reference to the drawings. 1 is a block diagram showing an oil leak detection device according to a first embodiment of the present invention, FIG.
Is a spectrum diagram showing a fluorescence spectrum and an absorption spectrum of oil, FIG. 3 is a spectrum diagram showing an ultraviolet irradiation light spectrum and a normal illumination light spectrum and a wavelength selected in the light receiving system, and FIG. 4 is a fluorescence spectrum at the time of fluorescence generation and a normal illumination light. FIG. 5 shows an example of an image obtained by irradiation with ultraviolet light, FIG. 6 shows a luminance distribution on one horizontal scanning line in the image obtained by irradiation with ultraviolet light, and FIG. 7 shows visible illumination light. FIG. 8 shows an image obtained by capturing the same scene as the above image at the time of visible light irradiation, and FIG. 9 shows an image obtained at the time of visible light irradiation. 10 shows the luminance distribution on the horizontal scanning line of FIG. 10, and FIG. 10 shows the luminance distribution on the horizontal scanning line of the image obtained by performing the difference processing of the two images. .

In the figure, 1 is an irradiation light source, 2 is a wavelength selection filter, 3 is a filter switching mechanism, 4 is a sample surface, 5 is a wavelength selection filter, 6 is an imaging lens, and 7 is an image pickup lens.
Is an ITV camera for receiving light, 8 is a signal switching circuit,
Reference numerals 9 and 10 are video memories for temporarily storing video signals, 11 is an arithmetic circuit for performing difference processing of the image data accumulated in the video memories 9, 10, and 12 is video signal conversion for converting operation results into video signals. Circuit, 13 is a monitor, 14 is an oil absorption spectrum, 15 is an oil fluorescence spectrum, 16 is a selected wavelength in the light receiving system, 17 is an ultraviolet irradiation light spectrum, and 18 is a spectrum of normal illumination light.
Book, 19 is one horizontal scanning line in the measurement image, 20 is a fluorescence spectrum, 21 is an image of the oil-wetting area of the sample surface during irradiation with ultraviolet light, and 22 is ultraviolet light in the region where the reflectance at the selected wavelength is r _1. image at the time of irradiation, image 23 is the surface reflectance at a selected wavelength at UV light irradiation in the region of r _2, 24 is an image at the time of ultraviolet light irradiation of the region's surface reflectivity of r ₃ at a selected wavelength, 25 Is the brightness distribution of the surface image obtained upon irradiation with ultraviolet light, 26 is the brightness distribution curve of the fluorescence generation portion in the image, 27 is the spectrum of visible illumination light, and 28 is the oil leakage area of the sample surface during irradiation of visible light. An image, 29 is an image at the time of visible light irradiation in the region of reflectance r _{1 at} the selected wavelength, 30 is an image at the time of irradiation of visible light in the region of reflectance r ₂ at the selected wavelength, and 31 is an image at the selected wavelength. Reflectance is r
An image at the time of visible light irradiation in the region ₃ is shown, 32 is the brightness distribution of the surface image obtained under visible illumination, and 33 is the brightness distribution of the difference image.

Next, the operation will be described. Oil has a characteristic of emitting fluorescence when irradiated with ultraviolet light, and the absorption spectrum 14 and the fluorescence spectrum 15 have a wavelength relationship as shown in FIG. If the wavelength to be received here is selected to be the wavelength 16, it becomes possible to observe the fluorescence and the light absorption phenomenon at the same time. That is, at the selected wavelength 16, fluorescence is observed when irradiated with ultraviolet light, and absorbed by oil when irradiated with light having the selected wavelength 16. In the present invention, the ultraviolet light and the visible light are alternately emitted, and the wavelength of the received light is selected to be 16 so that the fluorescence and the light absorption phenomenon are simultaneously utilized.

The light source 1 emits light having a wavelength from the ultraviolet light region to the visible light region. The ultraviolet light region or the visible light region is selected by the wavelength filter 2 for the light emitted from the light source 1, and the sample surface 4 is alternately irradiated by the filter switching mechanism 3. The surface illuminated by the light source 1 is imaged by the ITV camera 7 via the wavelength filter 5 and the imaging lens 6. The wavelength filter 5 has a characteristic of transmitting light in a narrow band centered on the selected wavelength 16. The signal switch 8 distributes the output signal from the ITV camera 7 to the video memories 9 and 10 in synchronization with the wavelength switching of the illumination.

As shown in FIG. 5, the surface of the sample is covered with the oil-deposited portion 2
1, the region 22 where the reflectance at wavelength 16 is r ₁ , wavelength 1
Assume a model that can be divided into a region 23 having a reflectance of r ₂ at 6 and a region 24 having a reflectance of r _{3 at} the wavelength 16. When ultraviolet light is selected by the filter 2 and the filter switching mechanism 3, the light that illuminates the surface is light in which the ultraviolet light 17 selected from the light source 1 and the normal illumination light 18 for indoor illumination overlap. When only the wavelength 16 is selected in the light receiving system, the obtained image has a luminance distribution which is determined by the reflectance at the wavelength 16 while the fluorescence is raised in the oil portion due to the ultraviolet light irradiation and the luminance is increased.

The luminance on one horizontal scanning line 19 in the image has a distribution indicated by the curve 25, and the fluorescence generation region due to oil leakage has a luminance distribution indicated by 26.

On the other hand, when visible light is selected by the filter 2 and the filter switching mechanism 3, the light for illuminating the surface is the light in which the visible light 27 selected from the light source 1 and the normal illumination light 18 are overlapped. When the wavelength 16 is focused on the surface of the sample illuminated with such light, light is absorbed in the oil adhesion region and light having an intensity corresponding to the reflectance of each portion is reflected in the other regions. The brightness on the horizontal scanning line 19 which is the same as that when the ultraviolet light is irradiated is as shown by the curve 32.
The luminance drops in the oil-attached area, and the luminance corresponding to the reflectance at the wavelength 16 is obtained in the other areas.

The two images thus obtained during UV irradiation and visible light irradiation are stored in video memories 9 and 10, respectively.
Is input to The input image data is subjected to difference processing by the arithmetic unit 11. By performing the difference processing between the two images, as shown by the luminance distribution curve 33, the luminance signal level is emphasized in the oil-adhered portion as compared with other areas, while the luminance changes in the areas other than the oil-adhered portion. Offset. Here, the calculation process between the images during irradiation of visible light and during irradiation of ultraviolet light has been described as difference processing, but any method that can compare the two may be used, and similar effects can be obtained even with addition processing and division processing, for example. can get. Further, although the light source has been described as a single light source, the same effect can be obtained by using two light sources that differ depending on the wavelength band of the light source.

Example 2. Example 2 will be described with reference to the drawings. 11 is a configuration diagram showing an oil leak detection device according to a second embodiment of the present invention, FIG. 12 is a schematic diagram showing monitor points in an image, and FIG. 13 is a luminance on one horizontal scanning line of an image obtained during irradiation with ultraviolet light. FIG. 14 is a distribution chart, FIG. 14 is a luminance distribution chart on one horizontal scanning line of an image obtained when visible light is irradiated, and FIG. 15 is a luminance distribution obtained by performing a difference process on the two images.

In the figure, 40 and 41 are image data extraction circuits, 42 is a coefficient calculation circuit, 43 is a multiplication circuit, 44 is an image data monitor point, and 45 is 1 when ultraviolet light is radiated.
A luminance distribution on a horizontal scanning line, 46 is a luminance distribution on the same horizontal scanning line obtained when visible light is radiated, 47 is a luminance distribution after luminance level correction, and 48 is a luminance distribution on one horizontal scanning line obtained after difference processing. .

The light source 1 emits light having a wavelength from the ultraviolet light region to the visible light region. The ultraviolet light region or the visible light region is selected by the wavelength filter 2 for the light emitted from the light source 1, and the sample surface 4 is alternately irradiated by the filter switching mechanism 3. The surface illuminated by the light source 1 is imaged by the ITV camera 7 via the wavelength filter 5 and the imaging lens 6. The wavelength filter 5 has a characteristic of transmitting light in a narrow band centered on the selected wavelength 16. The signal switch 8 distributes the output signal from the ITV camera 7 to the video memories 9 and 10 in synchronization with the wavelength switching of the illumination.

When the ultraviolet light is selected by the filter 2 and the filter switching mechanism 3, as described in the first embodiment, an image having a brightness distribution 45 in which the brightness of the oil adhered portion is high is obtained. On the other hand, when visible light is selected by the filter 2 and the filter switching mechanism 3, an image having a brightness distribution 46 in which the brightness of the oil-adhered portion is lowered is obtained. The two images thus obtained are input to the video memories 9 and 10, respectively.

The image data extraction circuit includes a video memory 9,
The preset data of the monitor point 44 is extracted from the image data stored in 10, and is output to the coefficient calculation circuit 42. The coefficient calculation circuit 42 calculates the ratio of the data values at each point (UV light irradiation / visible light irradiation) and compares them at all points. Of the calculation results of the ratio,
The value that occupies the majority is determined and used as the coefficient value. The obtained coefficient value is output to the multiplier 43 to set the multiplication rate. The multiplier 43 performs a multiplication process on the image data value in the video memory 9 based on the set magnification to change from the brightness distribution 46 to the brightness distribution 47, and the ultraviolet irradiation image and the visible irradiation change the brightness level of the image. Match. The arithmetic unit 11 cancels the luminance change on the surface other than the oil-adhered portion by performing the difference processing between the two images, and calculates the luminance distribution 48 emphasizing only the luminance change of the oil-adhered portion.

Example 3. A third embodiment will be described with reference to the drawings. FIG. 16 is a configuration diagram showing an oil leak detection device according to a third embodiment of the present invention. In the figure, 49 is an adjusting mechanism for adjusting the aperture value of the image pickup lens.

Next, the operation will be described. The light source 1 emits light having a wavelength from the ultraviolet light region to the visible light region.
The ultraviolet light region or the visible light region is selected by the wavelength filter 2 for the light emitted from the light source 1, and the sample surface 4 is alternately irradiated by the filter switching mechanism 3. The surface illuminated by the light source 1 is imaged by the ITV camera 7 via the wavelength filter 5 and the imaging lens 6. The wavelength filter 5 has a characteristic of transmitting light in a narrow band centered on the selected wavelength 16. The signal switcher 8 is I
The output signal from the TV camera 7 is distributed to the video memories 9 and 10 in synchronization with the wavelength switching of the illumination.

When the ultraviolet light is selected by the filter 2 and the filter switching mechanism 3, as described in the first embodiment, an image having the brightness distribution 45 in which the brightness of the oil adhered portion is high is obtained. On the other hand, when visible light is selected by the filter 2 and the filter switching mechanism 3, an image having a brightness distribution 46 in which the brightness of the oil-adhered portion is lowered is obtained. The two images thus obtained are input to the video memories 9 and 10, respectively.

The image data extraction circuit includes a video memory 9,
The preset data of the monitor point 44 is extracted from the image data stored in 10, and is output to the coefficient calculation circuit 42. The coefficient calculation circuit 42 calculates the ratio of the data values at each point (UV light irradiation / visible light irradiation) and compares them at all points. Of the obtained ratio values,
The value that occupies the majority is determined and used as the coefficient value. The obtained coefficient value is input to the diaphragm adjusting mechanism 49. Adjustment mechanism 49
Adjusts the aperture value of the imaging lens based on the input coefficient value so that the brightness level of the visible light irradiation image matches the ultraviolet light irradiation image, and captures the visible light irradiation image again. The arithmetic unit 11 performs difference processing between the two images to cancel the luminance change in the area other than the oil-adhered portion, and calculates the luminance distribution 48 emphasizing only the luminance change in the oil-adhered portion.

Example 4. Example 4 will be described with reference to the drawings. FIG. 17 is a configuration diagram showing an oil leak detection device according to a fourth embodiment of the present invention. In the figure, 50 is a reference image database, and 51 is a determination circuit.

Next, the operation will be described. The light source 1 emits light having a wavelength from the ultraviolet light region to the visible light region.
The light emitted from the light source 1 is selected by the wavelength filter 2 in the ultraviolet light region or the visible light region, and the sample surface 4 is alternately irradiated by the filter switching mechanism 3.
The sample illuminated by the light source 1 has a wavelength filter 5,
An image is taken by the ITV camera 7 via the imaging lens 6. The wavelength filter 5 has a characteristic of transmitting light in a narrow band centered on the selected wavelength 16. Signal switch 8
Distributes the output signal from the ITV camera 7 to the video memories 9 and 10 in synchronization with the wavelength switching of the illumination.

When the ultraviolet light is selected by the filter 2 and the filter switching mechanism 3, as described in the first embodiment, an image having the brightness distribution 45 in which the brightness of the oil adhered portion is high is obtained. On the other hand, when visible light is selected by the filter 2 and the filter switching mechanism 3, an image having a brightness distribution 46 in which the brightness of the oil-adhered portion is lowered is obtained. The two images thus obtained are input to the video memories 9 and 10, respectively.

As described in the first embodiment, the arithmetic circuit 11 outputs image data in which only the oil adhered portion is emphasized. The determination circuit 52 compares the image data output from the arithmetic circuit 11 with the normal difference image data stored in advance in the database 50, and determines a point where the difference exceeds a predetermined value as an oil leak occurrence position. . In addition, a signal is generated by the video signal generation circuit so that the generation position can be clearly identified and displayed on the monitor. Even if the image data in the database has a constant value for the entire screen, the same effect can be obtained.

Example 5. Example 5 will be described with reference to the drawings. FIG. 18 is a configuration diagram showing an oil leak detection device according to a fifth embodiment of the present invention. In the figure, reference numeral 52 designates an image data capturing circuit for extracting image data at set time intervals, and 5
Reference numeral 3 indicates a reference data setting circuit.

Next, the operation will be described. The light source 1 emits light having a wavelength from the ultraviolet light region to the visible light region.
The light emitted from the light source 1 is selected by the wavelength filter 2 in the ultraviolet light region or the visible light region, and the sample surface 4 is alternately irradiated by the filter switching mechanism 3.
The sample illuminated by the light source 1 has a wavelength filter 5,
An image is taken by the ITV camera 7 via the imaging lens 6. The wavelength filter 5 has a characteristic of transmitting light in a narrow band centered on the selected wavelength 16. Signal switch 8
Distributes the output signal from the ITV camera 7 to the video memories 9 and 10 in synchronization with the wavelength switching of the illumination.

When the ultraviolet light is selected by the filter 2 and the filter switching mechanism 3, as described in the first embodiment, the brightness distribution 45 in which the brightness of the oil adhered portion is high is obtained. On the other hand, when the visible light is selected by the filter 2 and the filter switching mechanism 3, the brightness distribution 46 in which the brightness of the oil adhered portion is lowered is obtained. The two images thus obtained are input to the video memories 9 and 10, respectively.

The arithmetic unit 11 performs difference processing on the image data stored in the video memories 9 and 10 and outputs the difference image data. The image data capturing circuit 52 sends the output image data of the computing unit 11 to the reference data setting circuit 53 at preset time intervals. At this time, the difference processing between the ultraviolet irradiation image and the visible light irradiation image is continuously performed. The determination circuit 51 compares the output image data of the arithmetic unit 11 with the image data stored in the reference data setting circuit 53, and an oil leak has occurred in a portion where the difference between the two image data exceeds a preset predetermined value. Judge as a part.

Example 6. Example 6 will be described with reference to the drawings. FIG. 19 is a configuration diagram showing an oil leak detection device according to a sixth embodiment of the present invention. In the figure, 54 is a leak area detection circuit, 55 is a measurement image data extraction circuit, 56 is a reference image data extraction circuit, and 57 is an oil film thickness calculation circuit.

Next, the operation will be described. The light source 1 emits light having a wavelength from the ultraviolet light region to the visible light region.
The ultraviolet light region or the visible light region is selected by the wavelength filter 2 for the light emitted from the light source 1, and the sample surface 4 is alternately irradiated by the filter switching mechanism 3. The sample illuminated by the light source 1 is imaged by the ITV camera 7 via the wavelength filter 5 and the imaging lens 6. The wavelength filter 5 has a characteristic of transmitting light in a narrow band centered on the selected wavelength 16. The signal switcher 8 is I
The output signal from the TV camera 7 is distributed to the video memories 9 and 10 in synchronization with the wavelength switching of the illumination.

When the ultraviolet light is selected by the filter 2 and the filter switching mechanism 3, the brightness distribution 45 in which the brightness of the oil adhered portion is high as described in the first embodiment.
An image with is obtained. On the other hand, when visible light is selected by the filter 2 and the filter switching mechanism 3, an image having a brightness distribution 46 in which the brightness of the oil-adhered portion is lowered is obtained. The two images thus obtained are input to the video memories 9 and 10, respectively.

The arithmetic unit 11 performs difference processing on the image data stored in the video memories 9 and 10 and outputs the difference image data. The oil leak area detection circuit 54 detects the area where oil leak has occurred based on the obtained difference image data by the method described in the fourth or fifth embodiment. The position information of the detected area is sent to the measurement image data extraction circuit 55 and the reference image data extraction circuit 56, respectively. The measurement image extraction circuit 55 extracts the data of the detected oil leak occurrence region from the absorption image obtained during irradiation of visible light during measurement, and outputs the data to the oil film thickness calculation circuit. Further, the reference image extraction circuit 56 extracts the data of the oil leak region from the normal image data that has been captured in advance and outputs it to the oil film thickness calculation circuit 57. The oil film thickness calculation circuit 57 calculates the ratio between the brightness value of the measurement image data and the brightness value of the reference image data, and determines the film thickness level based on the size of the calculation result.

Example 7. Example 7 will be described with reference to the drawings. 20 is a configuration diagram showing an oil leak detection device according to a seventh embodiment of the present invention. In the figure, 58 is an ultraviolet irradiation image data extraction circuit, 59 is a visible light irradiation image data extraction circuit, 60 is an arithmetic circuit, 61 is a determination circuit, and 62 is a data memory.

Next, the operation will be described. The light source 1 emits light having a wavelength from the ultraviolet light region to the visible light region.
The ultraviolet light region or the visible light region is selected by the wavelength filter 2 for the light emitted from the light source 1, and the sample surface 4 is alternately irradiated by the filter switching mechanism 3. The surface illuminated by the light source 1 is imaged by the ITV camera 7 via the wavelength filter 5 and the imaging lens 6. The wavelength filter 5 has a characteristic of transmitting light in a narrow band centered on the selected wavelength 16. The signal switcher 8 is I
The output signal from the TV camera 7 is distributed to the video memories 9 and 10 in synchronization with the wavelength switching of the illumination.

When the ultraviolet light is selected by the filter 2 and the filter switching mechanism 3, as described in the first embodiment, an image having a brightness distribution 45 in which the brightness of the oil adhered portion is high is obtained. On the other hand, when visible light is selected by the filter 2 and the filter switching mechanism 3, an image having a brightness distribution 46 in which the brightness of the oil-adhered portion is lowered is obtained. The two images thus obtained are input to the video memories 9 and 10, respectively.

The calculator 11 performs difference processing on the image data stored in the video memories 9 and 10 and outputs the difference image data. The oil leak area detection circuit 54 detects the area where oil leak has occurred based on the obtained difference image data by the method described in the fourth or fifth embodiment. The position information of the detected region is sent to the ultraviolet light irradiation image data extraction circuit 58 and the visible light irradiation image data extraction circuit 59, respectively. The ultraviolet light irradiation image data extraction circuit 58 extracts only the data of the oil leak occurrence region detected by the oil leak region detection circuit 54 from the image data obtained during the ultraviolet light irradiation, and outputs it to the arithmetic circuit 60. Further, the visible light irradiation image data extraction circuit 58 extracts only the image data of the oil leakage region detected by the oil leakage region detection circuit 54 from the image obtained during the irradiation of visible light and outputs it to the arithmetic circuit 60. The arithmetic circuit 60 calculates the ratio of data for each pixel corresponding to both images by the input data of the ultraviolet irradiation image and the visible light irradiation image. The calculated ratio value is compared with the reference data stored in the data memory 62, and the closest reference data value is searched. In the data memory 62, the value of the ratio between the ultraviolet irradiation image data and the visible light irradiation image data by different types of oils or other phosphors is input in advance. The determination circuit 61 determines whether or not the substance in the detected area is oil and the type of oil based on the search result.

Example 8. Example 8 will be described with reference to the drawings. 21 is a configuration diagram showing an oil leak detection device according to an eighth embodiment of the present invention, FIG. 22 is a schematic diagram showing a surface state of a sample,
23 is a luminance distribution on one horizontal scanning line of a detection image obtained by light having a polarization direction parallel to the irradiation light, and FIG. 24 is one of a detection image obtained by light having a polarization component orthogonal to the irradiation light.
FIG. 25 shows the luminance distribution on the horizontal scanning line, and FIG. 25 shows the luminance distribution of the difference image between the two images. In the figure, 100 is a wavelength filter, 101 is a polarizer, 102 is an analyzer rotation plate, and 103.
Is an analyzer installed so that the irradiation light and the polarization direction are parallel to each other, 104 is an analyzer installed so that the irradiation light and the polarization direction are orthogonal to each other, 105 is a rotary plate drive circuit, 106 and 107 are video memories, and 108 is Oil leakage area on the sample surface, 109
Is a region of the sample surface having a reflectance of r _{10 at} the selected receiving wavelength, 110 is a region of the sample surface having a reflectance of r _{11 at} the receiving wavelength, 111 is a region of the sample surface having reflectance of r _{12 at} the receiving wavelength, 112 Is one horizontal scanning line in the obtained image, 113 is a luminance distribution on one horizontal scanning line 112 in the image obtained by light having a polarization component parallel to the irradiation light, 114
Is the luminance distribution on one horizontal scanning line 112 in the image obtained by the light of the polarization component orthogonal to the irradiation light, and 115 is the above 2
The luminance distribution on one horizontal scanning line 112 in the image difference image is shown.

Next, the operation will be described. The ultraviolet light region is selected by the wavelength filter 100 for the light emitted from the light source 1, and only the linearly polarized light component in only one direction is passed by the polarizer 101, and the sample 4 is irradiated with the light. The image of the irradiated sample 4 passes through the analyzer 103 or 104 and is formed on the ITV camera 7 via the wavelength filter 5 and the imaging lens 6. The wavelength filter 5 matches the transmission wavelength with the center wavelength of the fluorescence emission spectrum. The analyzer 103 is arranged so that the polarization direction is parallel to the irradiation light.
Reference numerals 04 are attached to the rotary plate 102 so that the irradiation light and the polarization direction are orthogonal to each other.
Thus, the analyzers are alternately switched and installed in front of the imaging lens. The image signal from the ITV camera is synchronized with the switching of the two analyzers 103 and 104 by the rotary plate drive circuit 105, and the image data having a polarization component parallel to the irradiation light is stored in the video memory 106, and is output to the irradiation light 107. Image data having orthogonal polarization components are distributed and input.

It is generally known that fluorescence preserves the polarization characteristics of irradiation light well. On the other hand, the scattered light from the rough surface forming the surface of the general structure does not maintain the polarization property of the irradiation light. Due to such polarization characteristics, when light having linear polarization characteristics is irradiated, the fluorescence generated from oil has a high intensity of light having a polarization component parallel to the irradiation light, while on the other hand, scattered light from rough surfaces other than oil, etc. Has components in both directions parallel and orthogonal to the irradiation light. As a result, the brightness distribution of the image data obtained by the light of the polarization component parallel to the irradiation light is shown by 113, and the oil leakage portion 108 emits fluorescence to have a high brightness, and in other areas, the respective reflections occur. The brightness corresponding to the rate is obtained. On the other hand, in the image with the polarization component orthogonal to the irradiation light, the fluorescence is cut by the analyzer 104, so the brightness is low in the oil leakage portion,
In the other regions, the brightness distribution 114 corresponding to the reflectance is obtained as in the case of having parallel polarization components. The image data stored in the video memories 106 and 107 is output to the subtractor 11 to perform a difference process between the two images. as a result,
A brightness distribution 115 in which the oil leakage portion is emphasized is obtained. The difference image thus obtained is displayed on the monitor 13 through the video conversion circuit 12.

Example 9. Example 9 will be described with reference to the drawings. 26 is a configuration diagram showing an oil leak detection device according to a ninth embodiment of the present invention, FIG. 27 is a configuration diagram showing a stereo image pickup system of a light receiving unit, and FIG. 28 is an explanatory diagram of an image obtained by the stereo image pickup system. In the figure, 120 is a stereo image pickup system, and 12
1, 122 are analyzers, 123 is a video memory, 124 is a calculator, 125 and 126 are windows in a stereo imaging system, 12
Reference numerals 7, 128, 129, and 130 denote mirrors, 131 denotes a whole image obtained by a stereo mirror, and 132 and 133, right and left half images of the whole image.

Next, the operation will be described. The ultraviolet light region is selected by the wavelength filter 100 from the light emitted from the light source 1, and only the linearly polarized light component in only one direction is taken out by the polarizer 101 and is irradiated on the sample 4. The image of the irradiated sample 4 is formed on the ITV camera 7 via the stereo image pickup system 120, the wavelength filter 5, and the image pickup lens 6. The stereo image pickup system 120 displays the same scene in two windows 1.
25 and 126, and images are independently formed on the same image sensor surface through the mirrors 127 and 128 for the window 125 and the mirrors 129 and 130 for the other window 126. As a result, as shown in FIG. 28, the scene viewed through the window 125 is imaged on the left screen 133 of the image 131, and the scene viewed through the window 126 is imaged on the right screen 132 of the image 131. Further, the analyzer 121 is installed in the window 125 of the stereo imaging system 120 so that the irradiation light and the polarization direction are parallel to each other, and the other window 126 is
The analyzer 122 is installed so that the irradiation light and the polarization direction are orthogonal to each other.

As a result, the image 113 formed by the component in which the irradiation light and the polarization characteristics are parallel to each other is displayed on the left screen 133, and the image 114 formed by the component in which the irradiation light and the polarization characteristics are orthogonal to each other is displayed in the right screen 132. Overall image 131 displayed above
Is obtained. In this way, the image data obtained by simultaneously obtaining the image obtained by the light having the polarization direction parallel to the irradiation light and the image obtained by the light perpendicular to the irradiation light is accumulated in the video memory 123. The image data from the video memory 123 is the arithmetic unit 1
It is possible to obtain the image 115 in which only the oil spill portion is emphasized by being subjected to the difference processing for each of the corresponding pixels input to the right and left 24. The difference image is displayed on the monitor 13 via the video conversion circuit 12.

Example 10. Example 10 will be described with reference to the drawings. FIG. 29 is a configuration diagram showing an oil leak detection device according to a tenth embodiment of the present invention. In the figure, 140 is a beam splitter, 141 and 142 are image pickup devices, 143 and 14
Reference numeral 4 represents a video memory.

Next, the operation will be described. The ultraviolet light region is selected by the wavelength filter 100 from the light emitted from the light source 1, and only the linearly polarized light component in only one direction is taken out by the polarizer 101 and is irradiated on the sample 4. In the light receiving section, a beam splitter is installed behind the image pickup lens 6 to split the light incident on the image pickup lens into two. The branched light passes through the analyzers 121 and 122, respectively, and is imaged on the image pickup devices 141 and 142. At this time, the analyzer 121 is installed so that the polarization property is parallel to the irradiation light, and the analyzer 122 is installed so that the polarization property is orthogonal to the irradiation light. As a result, on the image sensor 141, the image 113 of the sample 4 formed by the light having a component whose polarization direction is parallel to the irradiation light.
However, the image 114 of the sample 4 is formed on the image sensor 142 by the light having a component in which the irradiation light and the polarization direction are direct light. The image data from each of the image pickup devices 141 and 142 is input to the video memories 143 and 144, and the subtracter 11 takes the difference between the two images. As a result, a difference image in which the oil portion is emphasized is obtained and displayed on the monitor 13 via the video conversion circuit 12.

Example 11. Example 11 will be described with reference to the drawings. FIG. 30 is a configuration diagram showing an oil leak detection device according to an eleventh embodiment of the present invention. In the figure, 2 is a wavelength filter for selecting ultraviolet light, 2-1 is a wavelength filter for selecting visible light, 150 is a window, 151 is an image data selection circuit for allocating image data to each video memory, 152
Is a video memory for storing visible image data, and 153 is an image synthesizing circuit for superimposing images.

Next, the operation will be described. Similar to the first embodiment, the light emitted from the light source 1 is converted into the wavelength filter 2,
By switching 2-1 and alternately irradiating ultraviolet light and visible light, the wavelength filter 5 selects a wavelength at which fluorescence and absorption can be simultaneously observed, and the ITV camera 7 observes the fluorescence image and the absorption of light. Images can be acquired alternately. These image data are input to the video memories 9 and 10 in synchronization with the wavelength switching. Based on this image data, the subtracter 11 calculates the difference between the fluorescence image and the absorption image to obtain a difference image in which the oil leak portion is emphasized.

Next, in the irradiation section, the wavelength filter 2-
The visible image of the sample surface is observed by the ITV camera by selecting the visible light at 1 and the window 150 at the light receiving portion. The obtained image data is input to the video memory 152 via the selection circuit 151. The visible image data from the video memory is superimposed on the difference image by the image synthesizing circuit 153, and is displayed on the monitor 13 via the video converting circuit 12.

Example 12 Example 12 will be described with reference to the drawings. 31 is a configuration diagram showing an oil leak detection apparatus according to a twelfth embodiment of the present invention. FIG. 32 is a spectrum diagram showing the wavelength distribution of the light transmittance of oil, FIG. 33 is a schematic diagram showing the state of the surface of the sample, and FIG. 34 is 1 in the image obtained when a wavelength having a low light transmittance of oil is selected. Luminance distribution on horizontal scanning line, FIG.
Shows the luminance distribution on one horizontal scanning line in the image obtained when a wavelength having a high light transmittance of oil is selected, and FIG. 36 shows the luminance distribution on one horizontal scanning line in the difference image between the two images. In the figure, 160 and 161 are wavelength filters, 162 is a transmittance curve, 163 is a wavelength λ ₁ having a low transmittance, 164 is a wavelength λ ₂ having a high oil transmittance, 165 is an oil leak portion on the surface, 16
6 is a surface other than oil, 167 is a horizontal scanning line, 168
Is the luminance distribution on the horizontal scanning line 167 at the wavelength λ ₁ , 1
Reference numeral 69 denotes a luminance distribution on the horizontal scanning line 167 at the wavelength λ ₂ , and 170 denotes a luminance distribution on the horizontal scanning line 167 in the difference image of the images at the above two wavelengths.

Next, the operation will be described. The light emitted from the light source 1 is selected by the wavelength filter 2-1 from the ultraviolet region to the visible region, and is irradiated onto the sample 4. The oil has a transmittance characteristic as shown by the curve 162 in this wavelength range. Therefore, when observed at the wavelength λ ₁ having a low transmittance, the brightness is low in the stray area 165, and the brightness distribution on the horizontal scanning line 167 becomes a curve 168. On the other hand, when observed at the wavelength λ ₂ having a high transmittance, the oil leakage region changes similarly to the regions other than the oil, and the luminance distribution 169 corresponding to the reflectance of the sample surface is obtained.

By installing the stereo image pickup system 120 in front of the image pickup lens 6 in the light receiving portion, as described in the ninth embodiment, the same scenes seen by the two windows are independently displayed on the same image pickup element surface. It becomes possible to form an image. The wavelength λ ₁ 163 is displayed on _one of the two windows of the stereo imaging system.
The wavelength filter 161 for selecting is installed, and the wavelength filter 160 for selecting the wavelength λ ₂ is installed in the other window.
As a result, among the images obtained by the ITV camera 7, an image having a luminance distribution 168 on the left screen and an image having a luminance distribution 169 on the right screen are obtained.

The image data from the ITV camera 7 is input to the video memory 123, and the arithmetic unit 124 performs difference processing between the left and right images. As a result, it is possible to obtain a difference image having a brightness distribution 170 in which the oil leak portion is emphasized, and the description has been given here in the wavelength band from the ultraviolet region to the visible region via the video conversion circuit 12, but the oil is It also has an absorption characteristic in the infrared region, and the same effect is obtained even when the infrared region is used, and the same effect is displayed on the monitor 13.

Example 13 Example 13 will be described with reference to the drawings. FIG. 37 is a configuration diagram showing an oil leak detection device according to a thirteenth embodiment of the present invention.

Next, the operation will be described. Of the light emitted from the light source 1, visible light is selected by the wavelength filter 2-1 and irradiated on the sample 4. In the light receiving section, a beam splitter is installed behind the image pickup lens 6 to split the light incident on the image pickup lens into two. The branched light passes through the wavelength filters 160 and 161, respectively, and is imaged on the image pickup devices 141 and 142. At this time, the wavelength filter has a wavelength λ ₁ 16 where the light transmittance of oil is low.
3 is selected, and the wavelength filter 160 selects the wavelength λ ₂ 164 having a high light transmittance of oil. As a result, the image sensor 14
Images 168 and 169 in which the wavelength λ ₁ and the wavelength λ ₂ are selected are formed on the images ₁ and 142, respectively. The obtained image data is input to the video memories 143 and 144, and the subtracter 11 performs a difference process on the two images to obtain an image in which the oil leak portion is emphasized. The obtained image is displayed on the monitor 13 via the video conversion circuit 12.

[0083]

The oil leak detection device according to claim 1 of the present invention uses the fluorescence phenomenon and the light absorption phenomenon at the same time,
There is an effect that the influence of the reflectance other than the oil-adhered surface is removed, and the oil leak can be detected under normal illumination.

Further, the oil leakage detecting apparatus according to the second aspect of the present invention is configured to automatically determine the calculation coefficient of the fluorescence image and the light absorption image, and thus there is an effect that the oil leak can be automatically detected. .

Further, in the oil leakage detection device according to the third aspect of the present invention, the optical system is constructed so that the lens aperture value for capturing the absorption image can be automatically determined, so that there is an effect that optical adjustment is unnecessary.

Further, in the oil leakage detection device according to the fourth aspect of the present invention, since the processing unit is configured to determine the abnormality by comparing the difference result with the previously stored normal time data, Stable oil leak detection is possible.

Further, in the oil leak detecting apparatus according to the fifth aspect of the present invention, since the processing unit is configured so that the normal data to be compared can be updated with time, it is stable without being affected by factors that change with time. This can be detected.

Further, the oil leakage detection apparatus according to claim 6 of the present invention is configured so that the oil leakage position is detected by the fluorescence image and the oil leakage amount is quantified by the light absorption image. There is an effect that the position and leakage can be quantified at the same time.

Further, the oil leak detection apparatus according to the seventh aspect of the present invention makes it possible to determine whether the oil is the target oil or specify the oil by comparing the appearances of the fluorescence image and the absorption image.

Further, the oil leakage detection device according to claim 8 of the present invention improves the S / N of the detection signal by utilizing the difference in the polarization characteristics of the fluorescence and the surface scattered light, and improves the S / N of the peripheral adhesion surface. It has the effect of removing the influence.

Further, in the oil leak detection device according to the ninth and tenth aspects of the present invention, the image input section is configured so that images having different polarization directions can be obtained at the same time, so that the processing speed can be increased.

Further, the oil leak detecting apparatus according to the eleventh aspect of the present invention has the effect of clarifying the leaked portion by superimposing the detection result and the visible image.

Further, in the oil leakage detection device according to the twelfth and thirteenth aspects of the present invention, the image input section is configured so that images having different wavelengths can be obtained at the same time, so that the processing speed can be increased.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an oil leak detection device according to a first embodiment of the present invention.

FIG. 2 is a spectrum diagram showing a fluorescence spectrum and an absorption spectrum of oil.

FIG. 3 is a spectrum diagram showing an ultraviolet irradiation light spectrum, a normal illumination light spectrum, and a wavelength selected in a light receiving system.

FIG. 4 is a spectrum diagram showing a fluorescence spectrum at the time of fluorescence generation, a normal illumination light spectrum, and a wavelength selected in a light receiving system.

FIG. 5 is a diagram showing an example of an image obtained during irradiation with ultraviolet light.

FIG. 6 is a luminance distribution on one horizontal scanning line in an image obtained by irradiation with ultraviolet light.

FIG. 7 is a spectrum diagram showing a visible illumination light spectrum, a normal illumination light spectrum, and a wavelength selected in a light receiving system.

FIG. 8 is a diagram showing an example of an image obtained during visible light irradiation.

FIG. 9 is a luminance distribution on one horizontal scanning line of an image obtained by irradiation with visible light.

FIG. 10 is a luminance distribution on a horizontal scanning line obtained by performing difference processing.

FIG. 11 is a configuration diagram showing an oil leak detection device according to a second embodiment of the present invention.

FIG. 12 is a schematic diagram showing monitor points in an image.

FIG. 13 is a luminance distribution on one horizontal scanning line of an image obtained by irradiation with ultraviolet light.

FIG. 14 is a luminance distribution on one horizontal scanning line of an image obtained by irradiation with visible light.

FIG. 15 is a luminance distribution obtained by performing difference processing of images during irradiation with ultraviolet light and irradiation with visible light.

FIG. 16 is a configuration diagram showing an oil leak detection device according to a third embodiment of the present invention.

FIG. 17 is a configuration diagram showing an oil leak detection device according to a fourth embodiment of the present invention.

FIG. 18 is a configuration diagram showing an oil leak detection device according to a fifth embodiment of the present invention.

FIG. 19 is a configuration diagram showing an oil leak detection device according to a sixth embodiment of the present invention.

FIG. 20 is a configuration diagram showing an oil leak detection device according to a seventh embodiment of the present invention.

FIG. 21 is a configuration diagram showing an oil leak detection device according to an eighth embodiment of the present invention.

FIG. 22 is a schematic diagram showing a surface state of a sample.

FIG. 23 is a luminance distribution on one horizontal scanning line of a detection image obtained by light having a polarization direction parallel to the irradiation light.

FIG. 24 is a luminance distribution on one horizontal scanning line of a detection image obtained by light having a polarization component orthogonal to the irradiation light.

FIG. 25 is a luminance distribution of a difference image of two images.

FIG. 26 is a configuration diagram showing an oil leak detection device according to a ninth embodiment of the present invention.

FIG. 27 is a configuration diagram showing a stereo imaging system of a light receiving unit.

FIG. 28 is an image obtained by a stereo imaging system.

FIG. 29 is a configuration diagram showing an oil leak detection device according to a tenth embodiment of the present invention.

FIG. 30 is a configuration diagram showing an oil leak detection device according to an eleventh embodiment of the present invention.

FIG. 31 is a configuration diagram showing an oil leak detection device according to a twelfth embodiment of the present invention.

FIG. 32 is a spectrum diagram showing a wavelength distribution of light transmittance of oil.

FIG. 33 is a schematic diagram showing the state of the sample surface.

FIG. 34 is a luminance distribution on one horizontal scanning line in an image obtained when a wavelength having a low light transmittance of oil is selected.

FIG. 35 is a luminance distribution on one horizontal scanning line in an image obtained when a wavelength having a high light transmittance of oil is selected.

FIG. 36 is a luminance distribution on one horizontal scanning line in a difference image of two images.

FIG. 37 is a configuration diagram showing an oil leak detection device according to a thirteenth embodiment of the present invention.

FIG. 38 is a configuration diagram showing a conventional liquid leakage detection device.

[Explanation of symbols]

1 irradiation light source, 2 wavelength selection filter, 3 filter switching mechanism, 4 sample surface, 5 wavelength selection filter, 6 imaging lens, 7 ITV camera, 8 signal switch, 9 video memory, 10 video memory, 11
Arithmetic circuit, 12 video signal conversion circuit, 13 monitor, 40 image data extraction circuit, 41 image data extraction circuit, 42 coefficient calculation circuit, 43 multiplication circuit, 49 aperture adjustment mechanism, 50 database, 51 determination circuit, 5
2 image data capturing circuit, 53 reference data setting circuit, 54 leak area detecting circuit, 55 measurement image data extracting circuit, 56 reference image data extracting circuit, 57 oil film thickness calculating circuit, 58 ultraviolet irradiation image data extracting circuit, 59
Visible light irradiation image data extraction circuit, 60 arithmetic circuit 61
Judgment circuit, 62 data memory, 100 wavelength filter, 101 polarizer, 102 analyzer rotating plate, 103
Analyzer, 104 Analyzer, 105 Rotating plate drive circuit, 1
06 video memory, 107 video memory, 120
Stereo imaging system, 121 analyzer, 122 analyzer, 1
23 video memory, 124 arithmetic unit, 125, 126
Windows in stereo imaging system 127,128,129,1
30 mirrors, 140 beam splitters, 141,
142 image sensor, 143, 144 video memory, 1
50 windows, 151 image data selection circuit, 152 video memory, 153 image composition circuit, 160, 161 wavelength filter.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI technical display location G01N 21/84 Z

Claims (13)

[Claims] 1. An illuminating means for alternately irradiating ultraviolet light and visible light, an imaging means equipped with a wavelength selecting means for selecting light of a predetermined wavelength, and an image capturing means for irradiating ultraviolet light and visible light. An oil leak detection device comprising: an image data storage unit for storing data; and a data calculation unit for comparing data of both images. 2. Illuminating means for alternately irradiating ultraviolet light and visible light, image pickup means equipped with a wavelength selecting means for selecting light of a predetermined wavelength, and image data obtained during ultraviolet light irradiation and visible light irradiation. Image data accumulating means for accumulating, level calculating means for calculating an average luminance level of images, coefficient calculating means for comparing the luminance levels of both images and calculating a calculation coefficient, and correcting the luminance level of image data by the obtained coefficient values. An oil leak detection device, comprising: a brightness correction means for performing the operation; and a data operation means for comparing the data of both images. 3. Illuminating means for alternately irradiating ultraviolet light and visible light, image pickup means provided with a wavelength selecting means for selecting light of a predetermined wavelength, and image data obtained during ultraviolet light irradiation and visible light irradiation. Image data accumulating means for accumulating, level calculating means for calculating an average luminance level of images, coefficient calculating means for comparing the luminance levels of both images and calculating a calculation coefficient, and the aperture value of the imaging lens is changed according to the obtained coefficient values. An oil leak detection device, comprising: an aperture variable means for controlling and an arithmetic means for comparing data of both images. 4. Illuminating means for alternately irradiating ultraviolet light and visible light, image pickup means provided with a wavelength selecting means for selecting light of a predetermined wavelength, image data obtained during ultraviolet light irradiation and visible light irradiation. Image data storage means for storing, comparison calculation means for comparing and calculating data of the image, normal image data storage means for storing comparison calculation image data in normal time, comparison calculation image data obtained by measurement and comparison in normal time An oil leak detection device comprising a data determination circuit for comparing the calculated image data. 5. Illuminating means for alternately irradiating ultraviolet light and visible light, image pickup means equipped with a wavelength selecting means for selecting light of a predetermined wavelength, and image data obtained during ultraviolet light irradiation and visible light irradiation. Image data accumulating means for accumulating, comparison calculating means for comparing and calculating the data of both images, reference image data accumulating means for extracting the image data subjected to the comparison operation at certain time intervals and updating the data, comparison operation obtained by measurement An oil leak detection device comprising a data determination circuit for comparing image data and comparison operation image data in a normal state. 6. Illuminating means for alternately irradiating ultraviolet light and visible light, image pickup means equipped with a wavelength selecting means for selecting light of a predetermined wavelength, and image data obtained during ultraviolet light irradiation and visible light irradiation. Image data accumulating means for accumulating, comparison calculating means for comparing and calculating data of both images, leak portion detecting means for detecting an oil leak portion from the comparison operation image, image data extracting means for extracting absorption image data of the leak portion, extracted An oil leak detection device comprising a leak amount calculation means for calculating a leak amount from absorption image data. 7. Illuminating means for alternately irradiating ultraviolet light and visible light, image pickup means provided with a wavelength selecting means for selecting light of a predetermined wavelength, and image data obtained during ultraviolet light irradiation and visible light irradiation. Image data accumulating means for accumulating, comparison calculation processing means for comparing data of both images, leak portion detecting means for detecting oil leak portion from comparison calculation image, image data extracting means for extracting data of leak portion in image, extraction An oil leak detection apparatus comprising: a calculation unit that calculates the ratio of the data of the image, and a determination unit that identifies the oil by comparing the obtained calculation result with the data stored in advance. 8. An illumination means for irradiating ultraviolet light having a linear polarization characteristic, an image pickup means having a function of alternately switching two analyzers having polarization directions orthogonal to each other, and two image data having polarization directions orthogonal to each other. An oil leak detection device comprising: image data storage means for storing data; and comparison calculation processing means for comparing and calculating data of both images. 9. An illuminating means for irradiating ultraviolet light having a linear polarization characteristic, having a function of independently forming an image of the same scene on an image pickup element surface through two windows, and having a polarization direction orthogonal to each window. An oil characterized by comprising an image pickup means having an optical system with an analyzer attached, an image data storage means for storing two image data whose polarization directions are orthogonal to each other, and a comparison calculation processing means for comparing and calculating data of both images. Leak detection device. 10. An illuminating means for irradiating ultraviolet light having a linear polarization characteristic, an optical element for branching an optical path into two, and an optical element for selecting a polarization direction orthogonal to each other on the branched optical path are attached respectively to separate image pickup element surfaces. Imaging means for forming an image on the top,
An oil leak detection device comprising: an image data storage means for storing two image data whose polarization directions are orthogonal to each other; and a comparison calculation processing means for comparing and calculating data of both images. 11. Illuminating means for alternately irradiating ultraviolet light and visible light, image pickup means provided with a wavelength selecting means capable of selecting light of a predetermined single wavelength or the entire visible light wavelength, ultraviolet light irradiation and visible light irradiation Image data storage means for storing each data of an image obtained with a predetermined single wavelength and a visible image obtained when the entire visible light wavelength range is selected, comparison calculation processing means for comparing and calculating image data, comparison calculation processing An oil leak detection device comprising an image synthesizing means for superimposing an image and a visible image. 12. An illumination unit for irradiating light in a continuous wavelength range from the ultraviolet region to the visible region or from the visible region to the infrared region, and the same scene is independently imaged on the image pickup element surface through two windows. An image pickup means equipped with an optical system that has a function and a wavelength that the sample has an absorption characteristic and a wavelength that does not have an absorption characteristic in each window. An oil leak detection device, comprising: an image data storage means for performing a comparison operation processing means for performing a comparison operation on the data of both images. 13. An illuminating means for irradiating light in a continuous wavelength range from the ultraviolet region to the visible region or from the visible region to the infrared region, an optical path is branched into two, and the sample has an absorption characteristic on the branched optical path. An image pickup means for setting a wavelength filter having a wavelength and a wavelength not having an absorption characteristic as a transmission wavelength and forming an image on a separate image pickup element surface, an image data storage means for storing two image data having different wavelengths,
An oil leak detection device comprising a comparison calculation processing means for comparing and calculating data of both images.