JPH10311771A - Oil detecting apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To lower an erroneous oil detection due to a disturbance and due to the degradation of the apparatus and to specify the existence of a leak and a film thickness with high sensitivity by a method wherein pulsed light containing the absorption wavelength of an oil to be detected is irradiated, the oil is excited so as to emit light and the fluorescent wavelength and the light-emitting time of the oil are selected so as to be observed and detected. SOLUTION: Pulsed light 12 from a pulse light source 11 is narrowed down by a lens 14, it is introduced into an optical fiber 13, and it is guided to an irradiation head 15. In the head 15, an irradiation-wavelength selection device 16 selects an irradiation wavelength containing the absorption wavelength of a leaked oil 39, and the leaked oil 39 is irradiated. The leaked oil 39 absorbs the pulsed light 12, it emits fluorescence, and the florescence the leaked oil 39 is observed by a photomultiplier 23 at an observation device 20 in which an observation filter 21 is set at a prescribed observation wavelength. Then, a detection signal is sent to a processor 30. In this case, after irradiation with the pulsed liquid 12 based on a timing control device 31, only a signal at a time in which the leaked oil 39 emits fluorescence is extracted. By a leaked-oil detection signal, a film-thickness computing device 34 finds a film thickness. As a result, the fluorescence of the leaked oil 39 can be detected with high accuracy.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention detects oil leakage from components such as equipment in a plant and a vehicle, and calculates the leakage film thickness, leakage area, and leakage amount of the oil, and also detects the leakage. The present invention relates to an oil detection device that can specify the type and location of oil.

[0002]

2. Description of the Related Art Conventionally, as a technique for measuring the film thickness of oil using a fluorescence method, there is a "method and apparatus for measuring the amount of oil applied to the surface of a steel sheet" disclosed in Japanese Patent Publication No. 4-18763. Can be In this conventional example, the surface of an oiled steel plate or a steel plate is irradiated with laser light to fluoresce, and among the fluorescence from the steel plate surface, the fluorescence spectrum intensity of a component contained only in the oil is measured. Since the strength is proportional to the film thickness, the applied oil film can be obtained.

However, when the oil film is actually measured in the above-described conventional example, the measured value of the fluorescence intensity is affected by the surface roughness of the base steel sheet or the steel strip. A calibration curve showing the relationship between the amounts is prepared, and the amount of oil applied is determined from the calibration curve and the measurement result of the fluorescence intensity. Therefore, if the application area is known, the film thickness can be easily estimated from the oil application amount.

On the other hand, the technology for measuring the leak area is disclosed in
JP-A-1229987 discloses a “judgment device for oil vesicles such as citrus”. In this conventional example, the apparatus and the citrus to be inspected are placed in a dark room to prevent the influence of disturbance such as a fluorescent lamp, and the surface of the citrus is irradiated with ultraviolet light to fluoresce the damaged portion of the oil vesicle. . Then, using a filter, a spectral region having a high intensity is selected from the fluorescence, observed with a high-sensitivity camera or a light detection sensor, and image processing or signal processing is performed to determine the fluorescent area of the damaged part.

[0005] Further, if a minute damaged portion exists in the equipment in the plant and the high-pressure hydraulic oil leaks from the damaged portion, the oil blows out from the damaged portion at high pressure and becomes mist-like fine particles and scatters over a wide area. May leak. As the technology for detecting mist oil leakage, there are known a visual inspection of equipment by patrol, an oil sensor whose capacitance or resistance changes by oil contact, and an optical fiber type sensor whose refractive index changes by mist oil leakage. ing.

Further, a technique for monitoring oil spill at a drain of a plant or a building involves irradiating a laser beam onto the water surface and detecting the reflected light to detect the oil spill due to the difference in reflectance between water and oil. There is known a method of detecting the.

[0007]

Problems to be Solved by the Invention
When the oil film measuring device disclosed in Japanese Patent No. 18763 or the oil sac judging device disclosed in Japanese Patent Application Laid-Open No. 6-129987 is applied to the detection of oil leaks from components such as plant equipment and vehicles, the following problems arise. Occurs.

That is, in each of the above-mentioned conventional examples, first, it cannot be applied in a bright environment where disturbance light such as sunlight or illumination exists. This is because disturbance light increases,
This is because the ratio of disturbance light to the fluorescence intensity of the oil to be detected increases, and the S / N ratio decreases.

Second, the accuracy of film thickness measurement may be reduced due to aging of the irradiation apparatus. That is, the fluorescence intensity of the oil depends on the irradiation intensity of the irradiation device in addition to the film thickness. For this reason, as the irradiation device deteriorates and the irradiation intensity decreases, the fluorescence intensity generated by the oil becomes weak even if the film thickness is the same. As a result, the oil detection device calculates the film thickness from the above-mentioned fluorescence intensity. Therefore, when the irradiation intensity decreases, the film thickness is determined to be smaller than the original film thickness.

[0010] In addition to the above-mentioned problems, the conventional oil detection technology using the fluorescence method, in response to oil leaks from components such as equipment in a plant and a vehicle, detects the film thickness distribution, leaked area, and leaked oil. It is not possible to calculate the amount and specify the type of leaked oil.

On the other hand, in the visual inspection of the equipment in the plant, it is not preferable from the viewpoint of safety that the inspector patrols the atmosphere of the mist oil leak. Is difficult to identify.

The detection sensitivity of the capacitance type or resistance type oil sensor is an amount of oil that leaks from the device and drops.
In the case of mist oil in which the oil becomes mist fine particles and scatters over a wide area,
Since the amount of oil detected by the oil sensor is very small, it is difficult to detect it.

Further, in the optical fiber type sensor, a portion where oil has adhered to the optical fiber is determined as a leak site. In the optical fiber type detection, there is a problem that it is difficult to specify a leaked portion because the mist oil scatters over a wide area and adheres widely to the optical fiber.

[0014] In the reflection type oil detection technology for monitoring the oil spill from a drain of a plant or a building based on the difference in the reflectance between water and oil, the reflectance of the oil floating on the water surface and forming a thin film is measured. Is detected using the fact that the reflectance is greater than For this reason, there is a problem that if the reflectance is higher than water, it is possible to detect other than oil. In addition, the reflection type oil detection technique has a problem that it is impossible to grasp the film thickness, the outflow area, the outflow amount, and the type of outflow oil of the outflow oil.

Accordingly, the present invention has been made in view of the above-mentioned circumstances, and it has been found that oil leaks from components such as equipment and vehicles in a plant, atomized oil leaking as atomized fine particles, and floating on the water surface. It can detect thin film oil that flows out, and there are few erroneous detections due to restrictions on the detection location and detection atmosphere, disturbances such as sunlight and fluorescent lights, and deterioration of irradiation equipment.
An object of the present invention is to provide an oil detection device capable of specifying a leak area, a film thickness and its distribution, a leak amount, a leak oil type and a leak site.

[0016]

In order to achieve the above object, the invention of claim 1 irradiates a pulse light including an absorption wavelength of an oil to be detected to excite molecules constituting the oil. An irradiating device that emits fluorescence, a wavelength selection element that selects a fluorescence wavelength of oil excited by the irradiating device, an observing device that selects and observes a time during which the oil emits fluorescence by the irradiating device, And a processing device for performing one of image processing and signal processing on the output of.

According to a second aspect of the present invention, in the oil detector according to the first aspect, the irradiation device has a pulse light source and a wavelength selection element for selecting an irradiation wavelength of the pulse light from the pulse light source. The wavelength selection element is formed in a curved shape.

According to a third aspect of the present invention, in the oil detecting device according to the first aspect, the observing device has a light detecting element having a gate function for observing the light emission of the oil. A signal integration processing device for integrating detection signals is provided in the processing device.

According to a fourth aspect of the present invention, in the oil detection device according to the first aspect, the observation device has an image intensifier having a high-speed shutter and an image intensifier, and the image intensifier performs fluorescence of oil. The image processing device is provided with an image integration processing device that integrates the detected image that has detected the image.

According to a fifth aspect of the present invention, in the oil detecting device according to the first aspect, the processing device includes a film thickness calculating device for calculating a film thickness of the leaked oil.

According to a sixth aspect of the present invention, in the oil detecting device according to the first or fifth aspect, the irradiating device includes an irradiating wavelength selecting device capable of selecting an irradiating wavelength of the pulsed light and adjusting a film thickness range capable of measurement. It is characterized by.

According to a seventh aspect of the present invention, in the oil detecting device according to the first or fifth aspect, the irradiation device measures the irradiation intensity of the pulse light to correct the measurement accuracy of the film thickness of the leaked oil. It is characterized by having.

According to an eighth aspect of the present invention, in the oil detector according to the fifth aspect, the film thickness calculating device calculates the film thickness based on the fluorescence intensity of the oil observed by the observation device.

According to a ninth aspect of the present invention, in the oil detecting device according to the fifth aspect, the film thickness calculating device performs an integrating process until the oil leakage detection signal observed by the observing device reaches a constant value, and calculates the oil based on the integrated frequency. Is characterized by estimating the thickness of the film.

According to a tenth aspect of the present invention, in the oil detecting device according to the first aspect, the processing device obtains a fluorescence intensity distribution by correcting the fluorescence intensity of the detected image from the distance information with respect to the monitoring target, and obtains the fluorescence intensity distribution from the fluorescence intensity distribution. It is characterized by comprising a film thickness distribution calculating device for calculating the thickness distribution of the oil film.

The invention of claim 11 is the invention of claim 1 or 10
In the oil detector described, the observation device has a high-speed shutter and an image intensifier having an image intensifier,
The processing device includes an oil amount calculating device that extracts a fluorescent region of oil from the detected image and calculates a leakage amount from the result of the calculation of the film thickness by the film thickness distribution calculating device.

According to a twelfth aspect of the present invention, in the oil detector according to the first aspect, the observation device has a high-speed shutter and an image intensifier having an image intensifying function, while the processing device is a mist-like particle. A leak location specifying device for specifying a leak location from a detection image of oil that has scattered and leaked.

According to a thirteenth aspect of the present invention, in the oil detector according to the first aspect, the irradiating device has an irradiating head for irradiating the target monitoring area with the pulse light, and a predetermined interval is provided in front of the irradiating head. And a reflector is attached.

According to a fourteenth aspect of the present invention, in the oil detector according to the first aspect, the observation device observes the oil at two or more types of observation wavelengths, and determines the oil type based on the ratio of the fluorescence intensity. Is provided in the processing device.

[0030]

Embodiments of the present invention will be described below with reference to the drawings.

[First Embodiment] FIGS. 1 to 11 show a first embodiment of an oil detecting device according to the present invention, and FIG. 1 is a configuration diagram thereof. The oil detecting device according to the first embodiment detects oil leakage in various devices in a thermal power plant.

As shown in FIG. 1, the oil detecting device of the present embodiment irradiates a pulse light containing the absorption wavelength of the oil to be detected to excite molecules constituting the oil to fluoresce. And an observation device 20 having a wavelength selection element for selecting the fluorescence wavelength of the oil excited by the irradiation device 10 and selecting and observing the time during which the oil emits fluorescence. It is roughly constituted by a processing device 30 for performing image processing or signal processing.

The irradiation device 10 includes, for example, a pulse light source 11 such as a Xe (xenon) flash lamp, a lens 14 for introducing a pulse light 12 radiated from the pulse light source 11 into an aperture optical fiber 13, and a lens 1
The optical fiber 13 transmits the pulsed light 12 introduced into the optical fiber 4 to the vicinity of the monitoring area, and the irradiation head 15 irradiates the pulsed light 12 transmitted through the optical fiber 13 to a target monitoring area. ing.

The irradiation head 15 includes a plurality of wavelength selection elements, and is capable of selecting the irradiation wavelength of the pulse light 12, and the irradiation head 15 irradiates the pulse light 12 transmitted by the optical fiber 13. It comprises a light source deterioration correction device 17 for measuring the intensity to correct the film thickness measurement accuracy, and an irradiation lens 18 for irradiating the pulsed light 12 transmitted by the optical fiber 13 while enlarging it to the area of the monitoring area. Have been.

The observation device 20 is an observation filter 21 which is a wavelength selection element for selecting and observing the emission wavelength of oil.
A lens 22 for matching an observation area to a monitoring area;
It comprises a photomultiplier tube 23 as a photodetector that has a gate function while observing the emission of oil.
The observation device 20 is connected to the processing device 30 via the signal transmission line 24.

The processing device 30 includes a timing control device 31 for controlling the irradiation timing of the pulse light source 11, a timing signal transmission line 32 for transmitting a timing signal from the timing control device 31 to the pulse light source 11, a photomultiplier tube. A signal integration processor 33 for integrating the output signals of the output signal 23, and a film thickness calculator 34 for calculating the film thickness of the leaked oil.
An output monitoring device 35 for displaying the processing result of the signal integration processing device 33 and the film thickness obtained by the film thickness calculating device 34;
A warning device 36 for notifying the presence or absence of oil leakage. Further, the processing device 30 is connected to the irradiation head 15 via a signal transmission line 37.

The oil 39 leaked from the device 38 (hereinafter referred to as oil leak) 39 is an oil used in a thermal power plant as an example. Oils used in thermal power plants include gas turbine oil (G / T oil) and steam turbine oil (S / T
Oil) and electric hydraulic oil (EHC oil) as high-pressure hydraulic oil. Here, it is assumed that the leaked oil 39 to be detected is leaking from a device 38 installed under normal illumination such as a fluorescent lamp as gas turbine oil. In addition, such oil leaks 39 include oil leaks having dirt or dust attached to the surface, oil leaks that have changed into a lard shape after the leak, oil leaks of semi-solid lubricants such as grease, and solid lubricants. Oil leaks are also included.

Next, the operation and effect of the first embodiment will be described.

It is desirable that the pulse light source 11 has a short light emission pulse width and high output. If the light emission pulse width is short, the time during which the oil after the irradiation of the pulse light 12 is emitted is selected to be longer. This is because the S / N ratio increases because observation is possible. If the output is high, the monitoring area can be expanded. Here, X is applied to the pulse light source 11.
An example will be described in which an e (xenon) flash lamp is used.

First, the pulse light source 11 is caused to emit light by the timing control device 31. The repetition timing of this light emission can be arbitrarily determined according to the time interval to be monitored, and is set to 3 Hz. And the pulse light source 11
The pulse light 12 emitted from the optical fiber 13 is converged by the lens 14 and introduced into the optical fiber 13. Then, the pulse light 12 is guided to the irradiation head 15 by the optical fiber 13. The optical fiber 13 only needs to be able to transmit the pulsed light 12, and here is a silica core optical fiber.
With this optical fiber 13, the pulsed light 12 can be easily guided to the irradiation head 15 installed in a remote and narrow part.

The irradiation head 15 is provided with a plurality of wavelength selection elements, and the irradiation wavelength is selected by an irradiation wavelength selection device 16 which can select the irradiation wavelength of the pulse light 12.
As the wavelength selection element of the irradiation wavelength selection device 16, for example, a color glass filter or an interference filter is selected,
The shape is a general flat plate shape, and the irradiation wavelength includes the absorption wavelength of the oil leak 39 whose oil type is gas turbine oil, and the wavelength at which the oil can be excited to emit light and the film thickness can be calculated from the fluorescence intensity. There is a need to.

By the way, the excitation light absorbed by the oil having the film thickness d and the fluorescence emitted by the excitation light have a relationship represented by the formula (1). That is,

(Equation 1)

This equation (1) is graphed and shown in FIG.
As shown in FIG. 2, when the film thickness d is small, the film thickness d and the fluorescence intensity I
_f is a one-to-one correspondence, and the fluorescence intensity _If
Can be calculated, but as the film thickness d increases, the fluorescence intensity I
The calculation of the film thickness becomes impossible because _f is saturated. At this time,
The saturation of the fluorescence intensity _If depends greatly on the absorption coefficient β of the e ^−βd term in the equation (1). Therefore, the desired film thickness d
Is measured, the fluorescence intensity _If is not saturated in the measurement range,
It is necessary to select an irradiation wavelength at which the film thickness d and the fluorescence intensity _If have a one-to-one correspondence.

Therefore, an appropriate absorption coefficient β is determined, and an irradiation wavelength satisfying the absorption coefficient β is selected based on the absorption characteristics of the oil to be detected. First, in the film thickness calculating device 34, when the fluorescence intensity _If of the equation (1) is equal to or less than Ia · α · (1-e- ¹ ) / β, the fluorescence intensity has a one-to-one correspondence and the fluorescence intensity I _It is set so that the calculation of the film thickness d from _f becomes possible.
Therefore, β · d needs to satisfy Expression (2) from the e ^−βd term.

[0045]

## EQU2 ## d · β ≦ 1 (2)

The target measurement range is 0 to 10 ^-4 m.
(100 μm), β needs to satisfy Expression (3).

[0047]

[Equation 3] β ≦ 10 ⁴ m ⁻¹ (3)

FIG. 3 shows the absorption wavelength of gas turbine oil measured using a spectrophotometer. The absorbance A has the relationship shown in equation (4).

[0049]

(Equation 4)

In FIG. 3, the oil concentration c = 0.002
6. The optical path length L = 0.01 m.
Is substituted into equation (4), the absorbance A ≦ 0.26. Here, when the wavelength having this value is selected from the absorption characteristics shown in FIG.
It can be selected that the vicinity of 60 nm is desirable.

Therefore, in order to measure a gas turbine oil having a film thickness of 0 to 100 μm, a wavelength selecting element having an irradiation wavelength of 360 nm is provided in the irradiation wavelength selecting element 16, The film thickness calculation conditions for the excitation light intensity Ia, the fluorescence efficiency α, and the absorption coefficient β at this time are stored so that the film thickness d can be obtained from the measured value of the fluorescence intensity and the expression (1).

According to the same procedure, a film thickness of 0 was obtained for various oils.
Table 1 shows the irradiation wavelengths determined for measuring １００100 μm.

[0053]

[Table 1]

FIG. 4 shows the absorption wavelength of steam turbine oil, and FIG. 5 shows the absorption wavelength of electric hydraulic oil (EHC oil) as high-pressure hydraulic oil. From Table 1, the irradiation wavelength is 280n
m, a wavelength selection element having a wavelength of 360 nm is provided in the irradiation wavelength selection device 16. Then, the film thickness calculating device 3
4 stores the film thickness calculation conditions of each oil so that the film thickness can be obtained from the film thickness calculation conditions and equation (1).

As described above, the oil leak 39 is irradiated from the irradiation head 15 with the pulse light 12 whose irradiation wavelength is selected to be 360 nm using the irradiation wavelength selection device 16. The oil leak 39 absorbs the pulse light 12 and emits fluorescence. This fluorescence
Since it is a gas turbine oil, it has an emission wavelength shown in FIG. On the other hand, in the monitoring area, in addition to the fluorescence of the oil leak 39, disturbance light such as the sun and a fluorescent lamp and light emission of the device 38 serving as a background exist.

Therefore, the observation wavelength of the observation filter 21 is set to 4
The fluorescence of the oil leak 39 is observed by the photomultiplier tube 23 of the observation device 20 set at 00 to 450 nm. Observation device 2
The 0 observation filter 21 is selected so that the emission wavelength of the gas turbine oil can be selected and observed. However, the irradiation wavelength of 360 nm for fluorescence of the oil leak 39 and the observation filter 2
Consideration was made so that the observation wavelengths selected by 1 did not overlap. Here, the emission wavelengths of the electric hydraulic oil and the steam turbine oil are shown in FIGS. 6 and 8, respectively, for reference. Therefore, by selecting the observation wavelength of the observation filter 21 for each oil type, it is possible to selectively detect only a specific oil type.

The emission time of the oil leakage of the steam turbine oil, the gas turbine oil, and the electric hydraulic oil as the high-pressure hydraulic oil is shown in FIGS. 9, 10 and 11, respectively.
It attenuates within approximately 500 ns. Therefore, S / N
In order to increase the ratio, it is advantageous that the time width of the pulse light 12 is sufficiently shorter than the light emission time of the oil.

Next, the photomultiplier tube 23 of the observation device 20
Is transmitted to the processing device 30 via the signal transmission line 24. The processing device 30 extracts only the signal of the time during which the oil leak 39 is fluorescent after the irradiation of the pulse light 12 based on the irradiation timing of the timing control device 31. This signal is oil leak 3
9 is an oil leakage detection signal obtained by detecting the fluorescence of No. 9; If this oil leakage detection signal is sent to the film thickness calculating device 34, the film thickness can be obtained from the film thickness calculating condition stored in advance by the film thickness calculating device 34 and the equation (1).

As a result of the above-described operation, the function of selecting the observation wavelength by the observation filter 21 of the observation device 20 and the function of selecting the observation time by the processing device 30 become disturbance light and background such as the sun and a fluorescent lamp. Even if the device 38 emits light, the fluorescence of the oil leak 39 can be detected with high sensitivity.

When the irradiation wavelength is selected by the irradiation wavelength selection device 16 and the oil leakage 39 is caused to fluoresce, the film thickness calculation device 34 storing the film thickness calculation conditions and the equation (1) allows the sun, a fluorescent lamp, or the like to be used. Even if there is disturbance light or light emission from the device 38 serving as a background, the film thickness of the oil leak 39 can be obtained by adjusting the range of the film thickness that can be measured. The oil type at this time includes, for example, gas turbine oil, steam turbine oil, and high-pressure hydraulic oil.

Further, the presence or absence of oil leakage can be determined from this film thickness, and the presence / absence of oil leakage, the film thickness, and the oil leakage detection signal can be displayed on the output monitor 35 as necessary. . Then, a warning lamp or a warning sound can be emitted by the warning device 36 to notify the oil leak.

Next, the operation and effect of the light source deterioration correcting device 17 in this embodiment will be described.

When the irradiation intensity Ia of the pulse light source 11 decreases due to aging or the like, the fluorescence intensity _If decreases from the equation (1) even with the same film thickness. In this case, the processing device 30 cannot recognize the decrease in the irradiation intensity Ia, and the fluorescence intensity _If
It is determined that the film thickness of the oil leak 39 has decreased. For this reason, the measurement accuracy of the film thickness decreases due to the decrease in the pulse light source 11.

Therefore, in the present embodiment, this decrease in measurement accuracy is improved by the light source deterioration correction device 17 provided in the irradiation head 15. That is, the light source deterioration correction device 17 measures the illumination intensity I _m of the pulsed light 12 emitted from the irradiation head 15. Then, using the reference radiation intensity I _b stored in advance, obtains the deterioration rate γ according to equation (5).

[0065]

(Equation 5)

The signal of the deterioration rate γ is sent to the processing device 30 via the signal transmission line 37, and the detection signal of the photomultiplier tube 23 is multiplied by the deterioration rate γ. Considering this operation by equation (1),
It decreased fluorescence intensity in the reference illumination intensity I _b from when the irradiation intensity I _m were made that were calculated. A deterioration rate γ is calculated from the detection signal of the photomultiplier tube 23, an oil leakage detection signal is extracted based on a correction detection signal obtained by calibrating a decrease in the irradiation intensity of the pulse light source 11, and is sent to the film thickness calculating device. Then, the film thickness is obtained from the previously stored film thickness calculation conditions and the equation (1).

As a result of the above operation, the photomultiplier tube 2
By calculating the film thickness of the oil leak 39 based on the correction detection signal obtained by calculating the deterioration rate γ to the detection signal of No. 3, it is possible to calibrate a decrease in the irradiation intensity of the pulse light source 11 due to aging or the like, It is possible to prevent a decrease in film thickness measurement accuracy.

Next, the operation and effect of the signal integration processing device 33 in this embodiment will be described.

The deterioration rate γ is obtained by the light source deterioration correction device 17, and the irradiation wavelength is set to 360 nm using the irradiation wavelength selection device 16.
Oil light 39 from the irradiation head 15
Irradiation. The oil leak 39 absorbs the pulse light 12 and emits fluorescence.

Therefore, the observation wavelength of the observation filter 21 is set to 4
The fluorescence of the oil leak 39 is observed by the photomultiplier tube 23 using the observation device 20 set at 00 to 450 nm.

The photomultiplier tube 23 of the observation device 20
Is transmitted to the processing device 30 via the signal transmission line 24. In this processing device 30, first, the detection signal is added to the light source deterioration correction device 1
The correction detection signal is obtained by calculating the deterioration rate γ obtained in step 7. As a result, it is possible to improve a decrease in film thickness measurement accuracy due to the deterioration of the pulse light source 11.

Next, based on the irradiation timing of the timing controller 31, only the correction detection signal of the time during which the oil leak 39 is fluorescent after the irradiation of the pulse light 12 is extracted. Since the repetition timing of the pulse light source 11 is 3 Hz, this correction detection signal is obtained every 1/3 second and is sequentially sent to the signal integration processing device 33. Then, the signal integration processing device 33 integrates the correction detection signal by the integration number to obtain an oil leakage detection signal. Here, the number of times of integration is 2 ⁰
Times, 2 ^once, 2 ^twice, ... 2 ⁷ times, optionally you can vary 2 ⁸ times, leakage oil detection signal is the following formula (6).

[0073]

(Equation 6)

By obtaining the oil leak detection signal, in addition to the oil detection signal, the emission wavelength is close to the fluorescence wavelength of the oil, a high intensity, temporally random disturbance is detected, and an erroneous detection signal is observed. Also, the effect of the erroneous detection signal can be reduced by the effect of the integration processing. The oil leakage detection signal is sent to the film thickness calculating device 33, and the film thickness is obtained from the previously stored film thickness calculating condition and equation (1).

As a result of the above-described operations, oil leakage is determined based on the oil leakage detection signal obtained by integrating the correction detection signal for the set number of times. Therefore, in addition to the oil fluorescence, the emission wavelength is close to the oil fluorescence wavelength and high intensity. Even if a random disturbance is detected in time and an erroneous detection signal is observed, the effect of the erroneous detection signal can be reduced by the effect of the integration processing. Also,
The output monitor device 35 can monitor and display the set number of times of integration and the oil leakage detection signal as necessary.

[Second Embodiment] FIG. 12 is a view showing the configuration of a second embodiment of the oil detector according to the present invention. The same parts as those in the first embodiment will be described with the same reference numerals. The same applies to the following embodiments.

As shown in FIG. 12, the oil leakage detecting device of the present embodiment comprises an irradiation device 10 and
It is roughly composed of an observation device 20 and a processing device 30. The irradiation device 10 includes a pulse light source 11, a pulse light 12 radiated from the pulse light source 11, and an optical fiber 1.
3, the optical fiber 13 for transmitting the pulsed light 12 introduced to the lens 14 to the vicinity of the monitoring region, and the pulsed light 12 transmitted through the optical fiber 13 for the target monitoring region. And an irradiation head 15 for irradiating the light.

The irradiation head 15 measures the irradiation intensity of the pulse light 12 to correct the measurement accuracy of the film thickness, and irradiates the pulse light 12 while enlarging the pulse light 12 to the area of the monitoring area. Lens 18 for optical fiber 13
Select the irradiation wavelength from the pulse light 12 transmitted by
And a wavelength selection element 40 formed in a curved shape.

The observation device 20 includes an observation filter 21 which is a wavelength selection element for selecting and observing the emission wavelength of oil.
A lens 22 for matching an observation area to a monitoring area;
An avalanche photodiode 41 as a photodetector having a high-speed shutter function for observing light emission of oil is provided. The observation device 20 is connected to the signal transmission line 2.
4 and a processing device 30.

The processing device 30 includes a timing control device 31 for controlling the irradiation timing of the pulse light source 11, a timing signal transmission line 32 for transmitting a timing signal from the timing control device 31 to the pulse light source 11, and an avalanche photodiode 41. A film thickness calculating device 42 for calculating the film thickness of the leaked oil from the number of times of integration, an output monitor device 35 for displaying the film thickness obtained by the film thickness calculating device 42, And a warning device 36 for indicating the presence or absence of leakage. Processing device 3
0 is connected to the irradiation head 15 via a signal transmission line 37.

Here, it is assumed that the leaked oil 39 to be detected in the present embodiment is gas turbine oil and leaks from a device 38 under normal illumination such as a fluorescent lamp.

Next, the operation and effect of the second embodiment will be described.

As in the first embodiment, the pulse light source 11 is a Xe flash lamp, the irradiation wavelength of which includes the absorption wavelength of the oil leak 39 to be detected, excites the oil leak 39 to emit light, and its fluorescence intensity is reduced. The wavelength is proportional to the film thickness. Therefore, Expression (1) showing the relationship between the excitation light absorbed by the oil having the film thickness d and the fluorescence generated by the excitation light is approximated as shown in Expression (7).

[0084]

(Equation 7)

[0085] In this case, fluorescence intensity I _f and thickness d is proportional. The approximation formula holds when the formula (8) holds.

[0086]

## EQU8 ## β · d << 1 (8)

Assuming that the target measurement range is 0 to 100 μm, β satisfying the expression (8) is selected under the condition of 0 ≦ d ≦ 10 ⁻⁴ . β can be arbitrarily selected. Here, β = 10 ²
And

By substituting β = 10 ² into equation (4), the absorbance is determined, and a wavelength satisfying the absorbance is selected from the absorption wavelengths of the gas turbine oil as the detection target oil shown in FIG. The absorbance A is obtained from the equation (4).

[0089]

(Equation 9)

Then, from the absorption wavelength shown in FIG.
= 0.0026, the irradiation wavelength is 3
It can be selected that the vicinity of 80 nm is desirable. Therefore, in order to measure gas turbine oil having a film thickness of 0 to 100 μm, the irradiation wavelength needs to be 380 nm. In addition, the film thickness calculating device 42 stores the fluorescence intensity of the oil leakage determination film thickness determined to be oil leakage as a reference fluorescence intensity value.

According to the same procedure, a film thickness of 0
Table 2 shows the irradiation wavelengths determined for measuring １００100 μm.

[0092]

[Table 2]

As shown in Table 2, the irradiation wavelength was 300 nm, 330
nm, 380 nm. Similarly, a reference fluorescence intensity value of each oil determined to be oil leakage is stored in the film thickness calculating device 42.

As a result of the above operation, the pulse light source 11
Irradiation wavelength is set to 380 nm and the film thickness is 0 to 100 μm.
When the gas turbine oil, the steam turbine oil, and the high-pressure hydraulic oil of the above are caused to emit fluorescence, a relationship in which the fluorescence intensity is proportional to the film thickness can be obtained as shown in Expression (8).

Next, the wavelength selection element 4 in the present embodiment
The operation and effect of 0 will be described.

As shown in FIG. 12, in order to detect a gas turbine oil leak 39 from a device 38 under normal illumination such as a fluorescent lamp, the pulse light source 11 is controlled by the timing control device 31 in the same manner as in the first embodiment. At a repetition timing of 3 Hz. The pulse light 12 emitted from the pulse light source 11 is converged by a lens 14 and introduced into an optical fiber 13. Then, the pulse light 12 is guided to the irradiation head 15 by the optical fiber 13. In the irradiation head 15, first, a deterioration rate γ is obtained by the light source deterioration correction device 17 in order to improve a decrease in measurement accuracy due to deterioration of the pulse light source 11.

Thereafter, the irradiation wavelength of the pulse light 12 is selected and irradiated by the curved-surface-shaped wavelength selection element 40 in accordance with the type of oil leakage. Since the leak oil 39 is gas turbine oil, the wavelength selection element 4 having an irradiation wavelength of 380 nm is used.
0 was set. At this time, by making the wavelength selection element 40 have a curved surface structure, all the angle components of the pulsed light 12 emitted from the optical fiber 13 and spread inside the irradiation head 15 always enter the wavelength selection element 40 vertically. Become like

The wavelength selection element 40 has a characteristic that the selected wavelength deviates from a target wavelength unless light is incident perpendicularly on the wavelength selection element. For this reason, when a plate-shaped wavelength selecting element is applied, the pulsed light 12 emitted from the optical fiber 13 spreads, and there is an angle component that does not enter the wavelength selecting element perpendicularly. I will.

As a result of the above-described operation, the use of the curved surface-shaped wavelength selection element 40 changes the selected wavelength of the wavelength selection element 40 depending on the incident angle of the pulsed light 12, and the irradiation wavelength of the irradiation head 15 caused by this. Can remove the angle dependence of the irradiation wavelength that changes depending on the irradiation angle, and the irradiation wavelength can be uniformly set to 380 nm in all directions. Examples of the curved-surface-shaped wavelength selection element 40 include a color glass filter and an interference filter.

Next, the operation and effect of the avalanche photodiode 41 and the film thickness calculator 42 in the present embodiment will be described.

The oil leak 39 absorbs the pulse light emitted from the irradiation head 15 and emits fluorescence. As described above, this fluorescence has the emission wavelength shown in FIG. 7 and the emission time shown in FIG. Therefore, the avalanche photodiode 41 of the observation device 20 in which the observation wavelength of the observation filter 21 is set to 400 to 450 nm is gate-operated using the timing control device 31, and fluorescence is observed only for 200 ns after pulsed light irradiation.

The detection signal observed by the avalanche photodiode 41 of the observation device 20 is transmitted to the processing device 30. The processing device 30 calculates a deterioration rate γ obtained by the light source deterioration correction device 17 on the detection signal to obtain a correction detection signal. As a result, it is possible to improve a decrease in film thickness measurement accuracy due to the deterioration of the pulse light source 11. This correction detection signal has a repetition timing of the pulse light source 11 of 3H.
z, it is obtained every 1/3 second, and in order, the film thickness calculating device 4
2 is sent.

The film thickness calculator 42 integrates the correction detection signal and calculates the fluorescence intensity at each integration count. This integration process is performed until the measured value of the fluorescence intensity reaches the reference fluorescence intensity value stored in advance, and the integration count value at this time is obtained. The film thickness is determined by the equation (10) using the integrated count value and utilizing the fact that the film thickness is proportional to the fluorescence intensity.

[0104]

(Equation 10)

The presence or absence of the oil leak 39 is determined from this film thickness.
When the set oil leakage determination film thickness is reached, it is determined that oil leakage has occurred. The output monitor device 35 can monitor and display the presence / absence of oil leakage, the film thickness, the integrated count value, the correction detection signal, the reference fluorescence intensity value, and the film thickness as necessary. It is also possible to use a warning device 36 to emit a warning lamp or sound to indicate oil leakage.

As a result of the above operation, the observation filter 2
By observing the oil fluorescence for a certain period after the pulse irradiation by selecting the observation wavelength according to 1 and gate-operating the avalanche photodiode 41, even if there is disturbance of the fluorescent lamp or light emission of the device 38 as the background, By selecting the emission wavelength of the oil, only the emission time can be observed. Further, by selecting an irradiation wavelength that satisfies the expression (7), the fluorescence of the oil and the film thickness can be made proportional. Then, if the detection signal of the avalanche photodiode 41 is integrated until a pre-stored reference fluorescence intensity value is reached and the integrated count value is obtained, the film thickness of the oil leakage can be calculated by equation (10). .

[Third Embodiment] FIG. 13 is a block diagram showing a third embodiment of the oil detector according to the present invention.

As shown in FIG. 13, the oil leakage detecting device of the present embodiment comprises the irradiation device 10 and the
It is roughly composed of an observation device 20 and a processing device 30. The irradiation device 10 includes a pulse light source 11, a pulse light 12 radiated from the pulse light source 11, and an optical fiber 1.
3, the optical fiber 13 for transmitting the pulsed light 12 introduced to the lens 14 to the vicinity of the monitoring region, and the pulsed light 12 transmitted through the optical fiber 13 for the target monitoring region. And an irradiation head 15 for irradiating the light.

The irradiation head 15 includes a plurality of wavelength selection elements, and is capable of selecting the irradiation wavelength of the pulse light 12. It comprises a light source deterioration correction device 17 for measuring the intensity to correct the film thickness measurement accuracy, and an irradiation lens 18 for irradiating the pulsed light 12 transmitted by the optical fiber 13 while enlarging it to the area of the monitoring area. Have been.

The observation device 20 includes an observation filter 21 which is a wavelength selection element for selecting and observing the emission wavelength of oil.
A lens 22 for matching an observation area to a monitoring area;
An image intensifier 43 with a high-speed gate, which is an image intensifier having a high-speed shutter function and an image multiplication function for selecting and observing only the light emission time of oil, and an image intensifier with this high-speed gate An image fiber 44 for transmitting an image of the oil fluorescence observed at 43, and a CCD camera 4 for imaging the image transmitted by the image fiber 44 for display on a monitor.
And 5.

The processing device 30 controls the irradiation timing of the pulse light source 11 and the shutter timing of the image intensifier 43 with a high-speed gate to select only the time during which the oil after the irradiation of the pulse light 12 is emitting light. A timing control device 31 for observation, a timing signal transmission line 32 for transmitting a timing signal from the timing control device 31 to the pulse light source 11, an image integration processing device 46 for integrating the output image of the CCD camera 45, A film thickness distribution calculating device 47 that corrects the fluorescence intensity of the oil from the distance information between the monitoring target and the irradiation head 15 and the distance information between the monitoring target and the observation device 20 to calculate the film thickness distribution of the leaked oil; The processing result of the oil amount calculating device 48 for obtaining the oil leakage amount and the image integration processing device 46, the film thickness distribution obtained by the film thickness distribution calculating device 47, An image monitor 49 for displaying the leakage amount determined by the arithmetic unit 48, and a warning device 36. informing the presence or absence of oil leakage. Further, it is assumed that the leaked oil 39 to be detected is gas turbine oil and is leaked from a device 38 under normal illumination such as a fluorescent lamp.

Next, the operation and effect of the third embodiment will be described.

As the pulse light source 11, a Xe flash lamp is used as in the first and second embodiments, and the timing controller 31 emits light at a repetition timing of 3 Hz. Pulsed light 12 emitted from pulsed light source 11
Is squeezed by the lens 14 and introduced into the optical fiber 13. The pulse light 12 is guided to the irradiation head 15 by the optical fiber 13. In the irradiation head 15, first, an irradiation wavelength is selected. Since the leakage oil 39 is gas turbine oil, the irradiation wavelength was set to 380 nm by the wavelength selection element of the irradiation wavelength selection device 16.

Further, in order to improve the deterioration of the measurement accuracy due to the deterioration of the pulse light source 11, the light source deterioration correcting device 17 obtains the deterioration rate γ in advance. Thereafter, irradiation is performed after adjusting the size to an arbitrary size according to the size of the monitoring area. The oil leak 39 absorbs the pulse light irradiated from the irradiation head 15 and emits fluorescence. This fluorescence has the emission time shown in FIG. 10 at the emission wavelength shown in FIG. 7 as described above.

Therefore, the observation wavelength of the observation filter 21 is set to 4
The wavelength is set to 00 to 450 nm, and the image intensifier 43 with the high-speed gate is operated for a shutter operation for 200 ns after the pulse light irradiation by the timing control device 31 to observe the fluorescence of the oil leak 39. As a result of the above-described operations, when the emission wavelength of oil is selected and only the emission time is observed by the observation filter 21 and the image intensifier 43 with a high-speed gate, the disturbance 38 such as a fluorescent lamp and the device 38 serving as a background are observed. Even if there is light emission, only the fluorescence of the oil can be selectively observed.

The detected image of the oil leak 39 observed by the image intensifier 43 with the high-speed gate is transmitted through the image fiber 44 and then transmitted to the CCD camera 45.
Will be taken at Thereafter, the detected image is sent to the processing device 30 as an image signal.

The processing device 30 first calculates the deterioration rate γ obtained by the light source deterioration correction device 17 on the detected image to obtain a corrected detected image. As a result, it is possible to improve the deterioration of the film thickness measurement accuracy due to the deterioration of the pulse light source 11. The correction detection image is obtained every 1/3 second because the repetition timing of the pulse light source 11 is 3 Hz, and is sequentially sent to the image integration processing device 46.

Then, the correction detection image is integrated by the number of integration times by the image integration processing device 46 to obtain an oil leakage detection image.
Here, the number of integrations can be arbitrarily changed by 1-2 ⁸ times, leakage oil detection image are the following equation (11).

[0119]

[Equation 11]

As a result of the above operation, by obtaining this oil leakage detection image, in addition to the oil detection image, it is possible to detect a temporally random disturbance having a high emission wavelength close to the fluorescence wavelength of the oil and a high intensity. Even if an erroneously detected image is observed, the effect of the erroneously detected image can be reduced by the effect of the integration processing.

Next, the operation and effect of the film thickness distribution calculating device 47 in this embodiment will be described.

In the oil leak detection image observed by the image intensifier 43, the position of each pixel is represented by a horizontal x and a vertical y, and 1 ≦ x ≦ X and 1 ≦ y ≦ Y. Here, X is the maximum value of the horizontal pixels of the image monitor 49, and Y is the image monitor 49.
Indicates the maximum value of the vertical pixels.

By the way, the film thickness distribution is obtained from the fluorescence intensity distribution of the oil leakage detection image. When the actual monitoring site corresponding to the pixel (x, y) changes, the distance to the observation device 20 and the pulse light to be irradiated are changed. Since the intensities are different, the film thickness distribution cannot be simply obtained from the fluorescence intensity of each pixel.

Therefore, in order to obtain the film thickness distribution by correcting the fluorescence intensity, the film thickness distribution calculating device 47 stores the detection distance condition and the reference film thickness condition. Here, the detection distance condition includes the distance L _p (x, y) between the monitoring part corresponding to the pixel (x, y) and the irradiation head 15, the monitoring part and the observation device 2.
The distance between the 0 L _o (x, y) is. The above-mentioned reference film thickness conditions are the film thickness of the reference distance L _pb between the monitoring part and the irradiation head 15, the excitation light intensity Ia at the reference distance L _ob between the monitoring part and the observation device 20, the fluorescence efficiency α, and the absorption coefficient β. Calculation conditions. Then, according to the following equation (12), the fluorescence intensity distribution _If (x, y) corrected from the fluorescence intensity I (x, y) of each pixel.
y).

[0125]

(Equation 12)

Equation (12) takes advantage of the fact that the pulsed light irradiation intensity of the monitored part is inversely proportional to the square of the distance, and the intensity of the fluorescent light emitted thereby is also inversely proportional to the square of the distance. , Y) to determine the fluorescence intensity distribution _If (x, y). Then, this fluorescence intensity distribution I _f (x, y)
From Equation (1), the film thickness distribution F (x, y) is obtained.

As a result of the above-described operation, the fluorescence intensity of the detected image is corrected using the film thickness distribution calculation device 47 based on the distance information between the monitoring target and the oil detection device, and the fluorescence intensity distribution I _f (x,
y), the thickness distribution F (x, y) of the oil film can be obtained from the fluorescence intensity distribution and equation (1).

Next, the oil amount calculating device 4 in the present embodiment.
8 will be described.

In order to obtain the leak amount by the oil amount calculating device 48, first, the fluorescent region of the oil leak is extracted from the oil leak detection image, and 1 (x) X and 1 (y) Y are defined below as S ( x,
y).

[0130]

(Equation 13)

Then, the leakage amount V is calculated by the equation (14).

[0132]

[Equation 14]

The area D of oil leakage can be calculated by the following equation (15).

[0134]

(Equation 15)

As a result of the above operation, the oil amount calculating device 4
8 to calculate the film thickness distribution calculated by the film thickness distribution calculating device 47 and the fluorescent region extracted from the oil leakage detection image,
The amount of leakage shown in the equation (14) and the area of the oil leak shown in the equation (15) can be obtained.

The presence or absence of oil leakage is determined by the film thickness distribution F of oil leakage.
The determination can be made from any of (x, y), the area D, and the leak amount V. In any case, if the set value is exceeded, it can be determined that the oil leaks. The oil leak detection image can be sequentially monitored by the image monitor 49 for displaying the image.
At the same time, the oil film thickness distribution F (x, y), the area D, and the leakage amount V can be displayed on the image monitor 49.

Then, a warning lamp or a sound may be emitted by the warning device 36 for notifying the oil leak to notify the oil leak. In addition, since the oil film thickness distribution F (x, y), the area D, and the leakage amount V can be grasped, if the lubricating portion of the device or the vehicle which is being manufactured or used is monitored, the oil application state and the like can be monitored. The lubrication state can be monitored.

[Fourth Embodiment] FIG. 14 is a block diagram showing a fourth embodiment of the oil detector according to the present invention.

As shown in FIG. 14, the oil leakage detecting device of the present embodiment includes the irradiation device 10 and the
It is roughly composed of an observation device 20 and a processing device 30. The irradiation device 10 includes a pulse light source 11, a pulse light 12 radiated from the pulse light source 11, and an optical fiber 1.
3, the optical fiber 13 for transmitting the pulsed light 12 introduced to the lens 14 to the vicinity of the monitoring region, and the pulsed light 12 transmitted through the optical fiber 13 for the target monitoring region. And an irradiation head 15 for irradiating the light. The irradiation head 15 includes an irradiation lens 18 for irradiating the pulsed light 12 with the pulsed light 12 being enlarged to the area of the monitoring area.

The observation device 20 has an observation filter 21 which is a wavelength selection element for selecting and observing the emission wavelength of oil.
A lens 22 for matching an observation area to a monitoring area;
An image intensifier 43 with a high-speed gate having a high-speed shutter function and an image multiplication function for selecting and observing only the light emission time of oil, and an oil intensifier 43 observed with the image intensifier 43 with this high-speed gate An image fiber 44 for transmitting a fluorescent image,
A CCD camera 45 is provided for taking an image of the image transmitted by the image fiber 44 for display on a monitor.

The processing device 30 controls the irradiation timing of the pulse light source 11 and the shutter timing of the image intensifier 43 with a high-speed gate to select only the time during which the oil after the irradiation of the pulse light 12 is emitting light. A timing control device 31 for observation, a timing signal transmission line 32 for transmitting a timing signal from the timing control device 31 to the pulse light source 11, and a leak location for identifying a portion of oil leakage from a time change of the observed oil particles. Specific device 5
0, an image monitor 49 for displaying an image of the leak site specified by the leak site specifying device 50, and a warning device 36 for notifying the presence or absence of an oil leak.

Incidentally, the oil leak of the present embodiment is caused by the fact that the steam turbine oil is under the normal lighting such as a fluorescent lamp.
It is assumed that the particles become mist-like particles and scatter and leak. This atomized oil leak 51 may occur when oil used for high-pressure operation in equipment in a plant leaks.

Next, the operation and effect of the fourth embodiment will be described.

The pulse light source 11 is a pulse laser. The selection of the pulse laser is determined by the emission wavelength, and the emission wavelength includes the absorption wavelength of the mist oil 51 to be detected. It is necessary to have a wavelength at which excitation light is emitted.

Considering the absorption wavelengths of the respective oils shown in FIGS. 3 to 5, it is understood that the emission wavelength of the pulse laser should be in the ultraviolet region of 200 to 280 nm in order to excite and emit all the oils. In addition, it is desirable that the pulse laser has a high output and a short pulse so that the laser light itself does not disturb since the monitoring area is expanded.

From the viewpoints of emission wavelength, output, and pulse as described above, pulse light sources that can be used in the oil detector include a titanium sapphire laser, an excimer laser, a nitrogen laser, and a YAG laser. Here, the fourth harmonic of a YAG laser (emission wavelength: 266 nm, pulse width: 5 ns: FWHM (full width at half maximum)) is used as the pulse light source 11.
Was used.

Based on the emission wavelength of the steam turbine oil shown in FIG. 8, the observation wavelength of the observation filter 21 was changed to 350 to 400 nm.
The mist leak oil 51 of the steam turbine oil is detected from the equipment 38 under normal illumination such as a fluorescent lamp shown in FIG. Then, the pulse light source 11 is caused to emit light by the timing control device 31. The repetition timing of light emission at this time can be arbitrarily determined according to the time interval to be monitored, and is set to 10 Hz.

The pulse light 12 emitted from the pulse light source 11
Is squeezed by the lens 14 and introduced into the optical fiber 13. The pulse light 12 is guided to the irradiation head 15 by the optical fiber 13. The irradiation head 15 irradiates the pulse light by the irradiation lens 18 while adjusting the pulse light to an arbitrary size in accordance with the size of the monitoring area. Then, the atomized oil leakage 51 absorbs the pulse light emitted from the irradiation head 15 and emits fluorescence. This fluorescence has the emission time shown in FIG. 9 at the emission wavelength shown in FIG. 8 as described above.

Therefore, the timing control device 31 uses the observation device 20 only for 200 ns after the pulse light irradiation.
Of the image intensifier 43 with a high-speed gate is operated as a shutter. As described above, when the emission wavelength of the oil is selected using the observation filter 21 and the image intensifier 43 with the high-speed gate and observed only for the emission time,
Even if there is disturbance such as a fluorescent lamp or light emission of the device 38 as a background, only the fluorescence of the oil can be selectively observed.

Next, the oil leakage detection image observed by the image intensifier 43 with the high-speed gate is transmitted through the image fiber 44 and photographed by the CCD camera 45. This detection image is obtained every 1/10 second because the repetition timing of the pulse light source 11 is 10 Hz, and is sequentially sent as an image signal to the leak location specifying device 50 of the processing device 30.

In this leak location specifying device 50, 1/10
The leak site is identified from the time change of the detection image transmitted every second. Since the detected image is the mist-like oil leakage 51, the image is an image in which countless small oil particles emit fluorescence in the image. Therefore, a certain detected image is compared with a detected image after 1/10 second. By comparing these two detection images, the moving direction of each oil particle can be obtained from the trajectory of each oil particle. Then, by following the movement direction of each oil particle, it is possible to identify the leak site of the device 38.

Further, an image monitor 4 for displaying an image is provided.
9, the detected image can be monitored sequentially. On the image monitor 49, it is possible to obtain a detection image in which only oil leakage is fluorescent, and it is possible to detect even a small amount of leakage if it is fluorescent, so that early detection is possible. Further, the leakage site can be specified if necessary. In addition, a warning lamp or a sound may be emitted by the warning device 36 indicating the oil leak to notify the oil leak.

As a result of the above operation, the observation filter 2
1 and image intensifier 43 with fast gate
Thus, if only the emission wavelength of the oil is selected and only the emission time is observed, only the fluorescence of the oil can be selected and observed even if there is disturbance such as a fluorescent lamp or light emission of the device 38 as a background. Then, since the detected image is an image in which countless small oil particles fluoresce in the image, the moving direction of each mist oil particle is calculated by comparing the detected image with the detected image after a certain period of time. Then, by tracing the movement source, the leakage site of the device 38 can be specified.

[Fifth Embodiment] FIG. 15 is a block diagram showing a fifth embodiment of the oil detector according to the present invention.

As shown in FIG. 15, the oil leakage detecting device of the present embodiment comprises the irradiation device 10 and the
It is roughly composed of an observation device 20 and a processing device 30. The irradiation device 10 includes a pulse light source 11, a pulse light 12 radiated from the pulse light source 11, and an optical fiber 1.
3, the optical fiber 13 for transmitting the pulsed light 12 introduced to the lens 14 to the vicinity of the monitoring region, and the pulsed light 12 transmitted through the optical fiber 13 for the target monitoring region. And an irradiation head 15 for irradiating the light. The irradiation head 15 includes an irradiation lens 18 for irradiating the pulsed light 12 with the pulsed light 12 being enlarged to the area of the monitoring area.

The observation device 20 has an observation filter 21 which is a wavelength selection element for selecting and observing the emission wavelength of oil.
A lens 22 for matching an observation area to a monitoring area;
An image intensifier 43 with a high-speed gate having a high-speed shutter function and an image multiplication function for selecting and observing only the light emission time of oil, and an oil intensifier 43 observed with the image intensifier 43 with this high-speed gate An image fiber 44 for transmitting a fluorescent image,
A CCD camera 45 is provided for taking an image of the image transmitted by the image fiber 44 for display on a monitor.

In addition, four support members 54 are attached to the front part of the observation device 20, and the reflector 53 is fixed to the support members 54. Thus, the reflection plate 53 is disposed at a predetermined distance from the front of the observation device 20.

The processing device 30 controls the irradiation timing of the pulse light source 11 and the shutter timing of the image intensifier 43 with a high-speed gate to select only the time during which oil is emitted after the irradiation of the pulse light 12. A timing control device 31 for observation, a timing signal transmission line 32 for transmitting a timing signal from the timing control device 31 to the pulse light source 11, an image monitor 49 for displaying an image of an oil leak state, an oil leak And a warning device 36 for notifying the presence or absence of the presence.

By the way, the oil leak to be detected in the present embodiment is steam turbine oil flowing out from a drain of a plant or a building. The oil spilled from the drain port is a very thin oil film having a thickness of about several μm, and often flows out as a thin film oil 52 floating on the surface of the sewage. Therefore, in order to improve the detection sensitivity of the apparatus, a reflecting plate 53 that reflects the fluorescence of oil leakage is installed on the bottom surface of the drain port of the monitoring site, and the fluorescence of oil leakage reflected on the bottom surface is also observed.

Next, the operation and effect of the fifth embodiment will be described.

Using the oil detecting device of the present embodiment, the thin film-like oil leakage 52 of the steam turbine oil flowing out from the drain port shown in FIG. 15 is detected. Then, the pulse light source 11 is caused to emit light by the timing control device 31. The repetition timing of light emission at this time can be arbitrarily determined according to the time interval to be monitored, and is set to 10 Hz.

The pulse light 12 emitted from the pulse light source 11
Is squeezed by the lens 14 and introduced into the optical fiber 13. The pulse light 12 is guided to the irradiation head 15 by the optical fiber 13. The irradiation head 15 irradiates the pulse light by the irradiation lens 18 while adjusting the pulse light to an arbitrary size in accordance with the size of the monitoring area. Then, the thin film oil 52 absorbs the pulse light emitted from the irradiation head 15 and emits fluorescence. At this time, the observation device 20 can observe not only the fluorescence directly observed from the thin film oil 52 but also the fluorescence reflected on the bottom surface of the drain port by the reflector 53 installed on the bottom surface of the drain port. Can be done. This fluorescence has the emission time shown in FIG. 9 at the emission wavelength shown in FIG. 8 as described above.

Therefore, the observation wavelength of the observation filter 21 is set to 3
The image intensifier 4 with the high-speed gate of the observation device 20 is set by the timing control device 31 for 200 ns after the irradiation of the pulse light.
3 is operated as a shutter and the fluorescence of the thin film oil 52 is observed.

As described above, the amount of observation light is increased by the reflection plate 53, and the emission wavelength of oil is selected using the observation filter 21 and the image intensifier 43 with a high-speed gate, and observation is performed for the emission time. Even if there is reflected light, such as reflected light, or other disturbance light, a small amount of oil leakage in a thin film form can be detected with high sensitivity.

Next, the oil leakage detection image observed by the image intensifier 43 with the high-speed gate is transmitted through the image fiber 44 and photographed by the CCD camera 45. This detection image is obtained every 1/10 second because the repetition timing of the pulse light source 11 is 10 Hz, and is sequentially sent to the processing device 30 as an image signal.

In the processing device 30, the detected images can be sequentially monitored by the image monitor 49 for displaying images. On the image monitor 49, it is possible to obtain a detection image in which only oil leakage is fluorescent, and it is possible to detect even a small amount of leakage if it is fluorescent, so that early detection is possible. Furthermore, it is also possible to emit an alarm lamp or sound to notify the oil leak by the alarm device 36 for indicating the oil leak.

As a result of the above operation, the oil leakage 52
In addition to the fluorescence directly observed from the bottom, the fluorescence reflected on the bottom surface of the drain port by the reflector 53 provided on the bottom surface of the drain port can be observed, so that the amount of observation light can be increased.
When the observation filter 21 and the image intensifier 43 with a high-speed gate are used to select the emission wavelength of the oil and observe only the emission time with respect to the fluorescence of the thin film oil 52, a fluorescent lamp or the like appears on the water surface. Even if there is reflected light or other light that causes disturbance, a small amount of thin film-like oil leakage 52 in the form of a thin film can be detected with high sensitivity.

[Sixth Embodiment] FIG. 16 is a block diagram showing a sixth embodiment of the oil detector according to the present invention.

As shown in FIG. 16, the oil leakage detecting device of the present embodiment comprises the irradiation device 10 and the
It is roughly composed of an observation device 20 and a processing device 30. The irradiation device 10 includes a pulse light source 11, a pulse light 12 radiated from the pulse light source 11, and an optical fiber 1.
3, the optical fiber 13 for transmitting the pulsed light 12 introduced to the lens 14 to the vicinity of the monitoring region, and the pulsed light 12 transmitted through the optical fiber 13 for the target monitoring region. And an irradiation head 15 for irradiating the light. The irradiation head 15 includes an irradiation lens 18 for irradiating the pulsed light 12 with the pulsed light 12 being enlarged to the area of the monitoring area.

The observation device 20 has an observation wavelength selection device 55 for selecting an observation wavelength in order to determine the type of the leaked oil.
A lens 22 for matching an observation area to a monitoring area;
An image intensifier 43 with a high-speed gate having a high-speed shutter function and an image multiplication function for selecting and observing only the light emission time of oil, and an oil intensifier 43 observed with the image intensifier 43 with this high-speed gate An image fiber 44 for transmitting a fluorescent image,
It comprises a CCD camera 45 for displaying the detected image transmitted by the image fiber 44 on a monitor. The observation wavelength selection device 55 includes a plurality of wavelength selection elements, and can select an observation wavelength.

The processing unit 30 controls the irradiation timing of the pulse light source 11 and the shutter timing of the image intensifier 43 with a high-speed gate to select only the time during which oil is emitted after the irradiation of the pulse light 12. A timing control device 31 for observing, a timing signal transmission line 32 for transmitting a timing signal from the timing control device 31 to the pulse light source 11, and an oil leaked by correcting the fluorescence intensity of the oil based on distance information with respect to a monitoring target. Film thickness distribution calculating device 47 for calculating the film thickness distribution of the oil, oil type determining device 56 for determining the oil type of the leaked oil, and film thickness distribution calculating device 4
The system comprises an image monitor 49 for displaying an image of the film thickness distribution obtained in step 7 and the oil type determined by the oil type determination device 56, and a warning device 36 for notifying the presence or absence of oil leakage.

Here, it is assumed that the type of the leaked oil 39 to be detected is unknown, and that the leaked oil 39 leaks from a device under normal illumination such as a fluorescent lamp.

Next, the function and effect of the sixth embodiment will be described.

The oil type discriminating device 56 observes oil leakage at two observation wavelengths, and discriminates the oil type from the ratio of the fluorescence intensities. This is based on the fact that the fluorescence wavelength of the oil is specific to the oil type, so that the fluorescence intensity ratio has a value specific to the oil type. For example, the observation wavelength 300n defined by the equation (16)
Table 3 shows the fluorescence intensity ratio between m and the observation wavelength of 400 nm.
As shown in (1), the fluorescence intensity ratio becomes a value unique to the oil type, and the oil type can be determined. The two types of observation wavelengths can be arbitrarily selected.

[0175]

(Equation 16)

[0176]

[Table 3]

As a result of the above action, oil leakage was observed at two types of observation wavelengths, and the ratio of the fluorescence intensity was obtained. Oil type discrimination becomes possible.

Using the oil detection device of the present embodiment, the fourth harmonic (YAG laser) of the YAG laser is used to determine the type of oil leaked from the device 38 under normal illumination such as a fluorescent lamp shown in FIG. Emission wavelength 266 nm, pulse width 5 ns: FW
HM) was used. In addition, by setting the emission wavelength to 266 nm, it becomes possible to cause all the oil types to be detected to emit excited light regardless of the oil type.

First, the timing control device 31
Emit light at 0 Hz. The pulse light emitted from the pulse light source 11 is converged by the lens 14 and introduced into the optical fiber 13. The optical fiber 13 causes the pulsed light 12
Is guided to the irradiation head 15. The irradiation head 15 irradiates the pulse light by the irradiation lens 18 while adjusting the pulse light to an arbitrary size in accordance with the size of the monitoring area. Then
The oil leak 39 absorbs the pulse light irradiated from the irradiation head 15 and emits fluorescence.

Therefore, first, the observation wavelength of the observation wavelength selecting device 55 is set to 300 nm, and the image intensifier 43 with the high-speed gate of the observation device 20 is shuttered for 200 ns after the irradiation of the pulse light by the timing control device 31. To observe a detection image at an observation wavelength of 300 nm. The detected image observed by the image intensifier 43 with the high-speed gate is an image fiber 44
The image is transmitted by the CCD camera 45 and photographed by the CCD camera 45. Thereafter, the detected image is sent to the processing device 30. Similarly, when the observation wavelength of the observation wavelength selection device 55 is set to 400 nm, a detection image of the observation wavelength of 400 nm is similarly observed, and the image signal is sent to the processing device 30.

In the processing device 30, the film thickness distribution calculating device 47
The fluorescence intensity distribution I ₃₀₀ (x, y) in the detected image at the observation wavelength of 300 nm is obtained by
The fluorescence intensity I ₄₀₀ (x, y) of m is obtained, and these signals are sent to the oil type discrimination device 56. In the oil type discrimination device 56, the observation wavelength 300 nm and the observation wavelength 4
A fluorescence intensity ratio distribution R (x, y) of 00 nm is obtained, and the pixel (x, y) is obtained from the fluorescence intensity ratio distribution R (x, y) and Table 3.
The type of the leaked oil at the leak site corresponding to is determined.

[0182]

[Equation 17]

The leaked oil type, the detected image, the fluorescence intensity distribution, and the fluorescence intensity ratio distribution determined in this manner can be sequentially displayed on the image monitor 49. On this image monitor 49, it is possible to obtain a detection image in which only oil leakage is fluorescent, and it is also possible to detect even a small amount of leakage by fluorescent light.
Early detection becomes possible. Further, a warning lamp or a sound may be emitted by the warning device 36 indicating the oil leak to notify the oil leak and the oil type.

As a result of the above operation, the observation filter 2
1 and image intensifier 43 with fast gate
Therefore, if only the emission wavelength of the oil is selected and only the emission time is observed, only the fluorescence of the oil can be selected and observed even if there is disturbance such as a fluorescent lamp or the emission of the device 38 as a background. Oil leakage is observed at the observation wavelength of the species, and the ratio of the fluorescence intensity is obtained. Since the ratio of the fluorescence intensity is a value specific to the oil type, the oil type of the oil leakage can be determined.

[0185]

As described above, according to the first aspect of the present invention, there is provided an irradiation apparatus which irradiates a pulse light including an absorption wavelength of an oil to be detected to excite molecules constituting the oil to fluoresce. A wavelength selection element for selecting the fluorescence wavelength of the oil excited by the irradiation device, an observation device for selecting and observing the time during which the oil emits fluorescence by the irradiation device, and performing image processing and output of the observation device. With the provision of the processing device for performing any of the signal processing, the irradiation device can emit pulse light including the absorption wavelength of the oil to be detected, and the oil can be excited to emit light. Equipped with a wavelength selection element for selecting the fluorescence wavelength of this oil, the oil emission wavelength and emission time can be selected and observed by detecting with an observation device that selects and observes the oil emission time. It is also possible to selectively detect the weak fluorescence of the oil to be detected from among the light emitted from various devices and substances and disturbance light such as a fluorescent lamp.

Further, by performing signal processing or image processing on the detection result by the processing device, the detection sensitivity is improved and the detection place and the detection atmosphere are not limited, and erroneous detection due to disturbance such as a fluorescent lamp or deterioration of the irradiation device is performed. And the leakage area, film thickness and distribution, leakage amount, leakage oil type and leakage location can be specified.

According to a second aspect of the present invention, in the oil detecting device according to the first aspect, the irradiation device has a pulse light source and a wavelength selection element for selecting an irradiation wavelength of the pulse light from the pulse light source. Since the wavelength selection element is formed into a curved shape, the pulse light emitted from the point light source can always be perpendicularly incident on the wavelength selection element, and the selected wavelength of the wavelength selection element depends on the incident angle of the pulse light. It is possible to provide an irradiation device that can prevent the change and can emit a target wavelength in any direction.

According to the third aspect of the present invention, in the oil detecting device according to the first aspect, the observing device has a light detecting element having a gate function for observing the light emission of the oil, and the leakage detected by the light detecting element. By installing a signal integration processing device that integrates the oil detection signal in the processing device, the detection signal of the observation device is integrated for a fixed period of time, and the processing signal is used to determine oil leaks. Even if the emission wavelength is close to the fluorescence wavelength of the oil and a high-temporal random disturbance occurs, the presence / absence of oil leakage is determined by the processing signal for a certain period of time, so that erroneous detection can be reduced.

According to the fourth aspect of the present invention, in the oil detecting device according to the first aspect, the observation device has a video intensifier having a high-speed shutter and a video intensifier, and the video intensifier uses the video intensifier. By installing an image integration processing device that integrates detection images that have detected the fluorescence of the observation device in the processing device, the detection images from the observation device are integrated over a certain period of time, and oil leaks are determined based on this processing image to monitor Even if the emission wavelength is close to the fluorescence wavelength of the oil in the region and a high-intensity, temporally random disturbance occurs, an oil leak is determined based on a processed image for a certain period of time, so that erroneous detection can be reduced.

According to the fifth aspect of the present invention, in the oil detecting device according to the first aspect, the processing device is provided with a film thickness calculating device for calculating the film thickness of the leaked oil, so that the detection intensity of the observation device is reduced. The oil film thickness can be calculated by performing signal processing or image processing in the processing device utilizing the dependence on the oil film thickness.

According to a sixth aspect of the present invention, in the oil detecting device according to the first or fifth aspect, the irradiating device is provided with an irradiating wavelength selecting device capable of selecting an irradiating wavelength of the pulse light and adjusting a film thickness range in which measurement is possible. Therefore, in the irradiation device, the relationship between the irradiation intensity and the fluorescence intensity does not saturate at the film thickness to be measured,
Adjusting the measurable film thickness range when calculating the oil film thickness by using the correspondence between the film thickness and the fluorescence intensity in the processing equipment by selecting the irradiation wavelength of the condition that has a corresponding relationship Can be.

According to the seventh aspect of the present invention, in the oil detecting device according to the first or fifth aspect, the irradiation device measures the irradiation intensity of the pulse light to correct the measurement accuracy of the film thickness of the leaked oil. By providing the correction device, it is possible to improve a decrease in the accuracy of the film thickness measurement due to a decrease in the irradiation intensity and a decrease in the fluorescence intensity of the oil.

According to the eighth aspect of the present invention, in the oil detecting device according to the fifth aspect, the film thickness calculating device calculates the film thickness based on the fluorescence intensity of the oil observed by the observation device, so that the processing device can , The film thickness and the fluorescence intensity correspond,
The oil film thickness can be determined from the observed fluorescence intensity.

According to the ninth aspect of the present invention, in the oil detecting device according to the fifth aspect, the film thickness calculating device performs integration processing until the oil leakage detection signal observed by the observation device becomes a constant value, The processing unit stores the fluorescence intensity of the oil leakage determination film thickness that determines oil leakage in the processing unit by estimating the oil film thickness, and integrates and integrates until the detection signal of the observation device reaches this fluorescence intensity. The number of times is obtained, and the oil film thickness can be obtained by (oil leakage determination film thickness) / (integrated number) utilizing the fact that the film thickness is proportional to the fluorescence intensity.

According to the tenth aspect of the present invention, in the oil detecting device according to the first aspect, the processing device obtains a fluorescence intensity distribution by correcting the fluorescence intensity of the detected image from the distance information with respect to the monitoring target. With a film thickness distribution calculation device that calculates the oil film thickness distribution from the distribution, the fluorescence intensity of the detected image is corrected based on the distance relationship with the monitoring target, and the fluorescence intensity distribution is calculated. By doing so, the film thickness distribution of the oil can be obtained.

According to the eleventh aspect of the present invention, in the oil detector according to the first or tenth aspect, the observation device has a high-speed shutter and an image intensifier having an image intensifying function, while the processing device has an image intensifier. By extracting a fluorescent region of oil from the image and providing an oil amount calculating device for calculating the amount of leakage from the calculation result of the film thickness with the film thickness distribution calculating device, the fluorescent region of oil is extracted from the detected image, By calculating the film thickness distribution calculated by the film thickness distribution calculator, the amount of leakage can be obtained.

According to the twelfth aspect of the present invention, in the oil detecting device according to the first aspect, the observation device has a high-speed shutter and an image intensifier having an image intensifying function, while the processing device has mist-like fine particles. By providing a leak location identification device that identifies the leak site from the detection image of oil that has scattered and leaked, by comparing the detection image and the detection image after a certain period of time, each mist oil particle By calculating the movement direction and tracing the movement source, it is possible to specify the leakage site of the device.

According to a thirteenth aspect of the present invention, in the oil detecting device according to the first aspect, the irradiating device has an irradiating head for irradiating the target monitoring area with the pulse light, and a predetermined interval is provided in front of the irradiating head. Since the reflector was installed at the bottom, this reflector was placed on the bottom of the drain port of the plant or building to reflect the fluorescence of the oil. Can be observed, and the detection sensitivity can be improved.

According to a fourteenth aspect of the present invention, in the oil detecting device according to the first aspect, the observation device observes the oil at two or more types of observation wavelengths, and determines the oil type from the ratio of the fluorescence intensity. Since the discriminator is provided in the processing unit, oil is observed at two or more types of observation wavelengths, and when the ratio of the fluorescence intensities is determined, the ratio of the fluorescence intensities becomes a value specific to the oil type. Can be determined.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a first embodiment of an oil detection device according to the present invention.

FIG. 2 is a graph showing the relationship between film thickness and fluorescence intensity of oil.

FIG. 3 is a waveform chart showing absorption spectrum measurement data of a gas turbine oil as a detection target oil.

FIG. 4 is a waveform chart showing absorption spectrum measurement data of a steam turbine oil as a detection target oil.

FIG. 5 is a waveform diagram showing absorption spectrum measurement data of an electric hydraulic oil which is a high-pressure hydraulic oil as a detection target oil.

FIG. 6 is a waveform chart showing a measurement result of an emission spectrum of an electric hydraulic oil which is a high-pressure hydraulic oil as a detection target oil.

FIG. 7 is a waveform diagram showing a measurement result of an emission spectrum of a gas turbine oil as a detection target oil.

FIG. 8 is a waveform diagram showing a measurement result of an emission spectrum of steam turbine oil as a detection target oil.

FIG. 9 is a waveform diagram showing light emission time data of steam turbine oil as a detection target oil.

FIG. 10 is a waveform chart showing emission time data of gas turbine oil as a detection target oil.

FIG. 11 is a waveform diagram showing light emission time data of an electric hydraulic oil which is a high-pressure hydraulic oil as a detection target oil.

FIG. 12 is a configuration diagram showing a second embodiment of the oil detection device according to the present invention.

FIG. 13 is a configuration diagram showing a third embodiment of the oil detection device according to the present invention.

FIG. 14 is a configuration diagram showing a fourth embodiment of the oil detection device according to the present invention.

FIG. 15 is a configuration diagram showing a fifth embodiment of the oil detection device according to the present invention.

FIG. 16 is a configuration diagram showing a sixth embodiment of the oil detection device according to the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 10 irradiation device 11 pulse light source 12 pulse light 13 optical fiber 14 lens 15 irradiation head 16 irradiation wavelength selection device 17 light source deterioration correction device 18 irradiation lens 20 observation device 21 observation filter (wavelength selection element) 22 lens 23 photomultiplier tube (light) (Detection element) 24 signal transmission line 30 processing device 31 timing control device 32 timing signal transmission line 33 signal integration processing device 34 film thickness calculation device 35 output monitor device 36 warning device 37 signal transmission line 38 device 39 oil leakage 40 wavelength selection device 41 Avalanche photodiode (photodetector) 42 Film thickness calculator 43 Image intensifier (video intensifier) 44 Image fiber 45 CCD camera 46 Image integration processor 47 Film thickness distribution calculator 48 Oil amount calculator 49 Image monitor 50 Leak location Constant device 51 mist leakage oil 52 thin film leakage oil 53 reflection plate 54 support member 55 observation wavelength selection device 56 oil type discrimination apparatus

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Tetsuro Aikawa 8 Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa Prefecture Inside the Toshiba Yokohama Office (72) Inventor Kunihiko Yokoyama 1-1-1, Shibaura, Minato-ku, Tokyo Shares (72) Inventor Takashi Kokubo 4-1 Egasaki-cho, Tsurumi-ku, Yokohama-shi, Kanagawa Prefecture Inside the Energy and Environment Research Laboratory, Tokyo Electric Power Company (72) Inventor Masahiko Kuroki E, Tsurumi-ku, Yokohama-shi, Kanagawa Prefecture 4-1, Kasaki-cho, Energy and Environment Research Laboratory, Tokyo Electric Power Company (72) Inventor Hideaki Kurasawa 4-1, Egasaki-cho, Tsurumi-ku, Yokohama-shi, Kanagawa Prefecture, Tokyo

Claims (14)

[Claims] 1. An irradiation device that irradiates a pulse light including an absorption wavelength of an oil to be detected to excite and fluoresce molecules constituting the oil, and selects a fluorescence wavelength of the oil excited by the irradiation device. A wavelength selection element, and an observation device that selects and observes the time during which the oil emits fluorescence by the irradiation device,
A processing device for performing either image processing or signal processing on the output of the observation device. 2. The oil detecting device according to claim 1, wherein the irradiation device has a pulse light source and a wavelength selection element for selecting an irradiation wavelength of the pulse light from the pulse light source, and the wavelength selection element has a curved surface. An oil detection device formed in a shape. 3. The oil detection device according to claim 1, wherein the observation device has a light detection element having a gate function for observing light emission of the oil, and integrates an oil leakage detection signal observed by the light detection element. An oil detection device, wherein a signal integration processing device for processing is provided in the processing device. 4. The oil detection device according to claim 1, wherein the observation device has an image intensifier having a high-speed shutter and an image intensifier, and detects the fluorescence of the oil with the image intensifier. An oil detection device, wherein an image integration processing device for integrating images is provided in the processing device. 5. The oil detecting device according to claim 1, wherein the processing device includes a film thickness calculating device for calculating a film thickness of the leaked oil. 6. The oil detection device according to claim 1, wherein the irradiation device includes an irradiation wavelength selection device capable of selecting an irradiation wavelength of the pulse light and adjusting a film thickness range that can be measured. Oil detector. 7. The oil detection device according to claim 1, wherein the irradiation device includes a light source deterioration correction device that measures the irradiation intensity of the pulse light and corrects the measurement accuracy of the film thickness of the leaked oil. An oil detection device characterized by the above-mentioned. 8. The oil detection device according to claim 5, wherein the film thickness calculation device calculates the film thickness based on the fluorescence intensity of the oil observed by the observation device. 9. The oil detecting device according to claim 5, wherein the film thickness calculating device performs an integration process until the oil leakage detection signal observed by the observation device becomes a constant value, and calculates the oil film thickness from the number of times of integration. An oil detection device characterized by estimation. 10. The oil detection device according to claim 1, wherein
The processing device is characterized by comprising a film thickness distribution calculation device that corrects the fluorescence intensity of the detected image from the distance information with respect to the monitoring target to obtain a fluorescence intensity distribution, and calculates the oil film thickness distribution from the fluorescence intensity distribution. Oil detector. 11. The oil detecting device according to claim 1, wherein the observation device has a high-speed shutter and an image intensifier having an image intensifying function, and the processing device detects an oil fluorescent region from the detected image. An oil detection device, comprising: an oil amount calculation device for extracting and calculating a leakage amount from the extracted result and the calculation result of the film thickness by the film thickness distribution calculation device. 12. The oil detecting device according to claim 1, wherein
The observation device has a high-speed shutter and an image intensifier having an image intensifier. An oil detection device comprising the device. 13. The oil detecting device according to claim 1, wherein
An oil detecting device comprising: an irradiating device having an irradiating head for irradiating a target monitoring area with pulsed light; and a reflector attached to a front portion of the irradiating head at a predetermined interval. 14. The oil detecting device according to claim 1, wherein
An oil detection device characterized in that an oil type discrimination device is provided in a processing device, wherein the observation device observes oil at two or more types of observation wavelengths and discriminates the oil type from the ratio of the fluorescence intensities.