JPH0810195Y2 - 半導体ウエハ収納箱 - Google Patents

半導体ウエハ収納箱

Info

Publication number
JPH0810195Y2
JPH0810195Y2 JP1989148181U JP14818189U JPH0810195Y2 JP H0810195 Y2 JPH0810195 Y2 JP H0810195Y2 JP 1989148181 U JP1989148181 U JP 1989148181U JP 14818189 U JP14818189 U JP 14818189U JP H0810195 Y2 JPH0810195 Y2 JP H0810195Y2
Authority
JP
Japan
Prior art keywords
holder
document
storage box
semiconductor wafer
run card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989148181U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0388343U (enExample
Inventor
晃次 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP1989148181U priority Critical patent/JPH0810195Y2/ja
Publication of JPH0388343U publication Critical patent/JPH0388343U/ja
Application granted granted Critical
Publication of JPH0810195Y2 publication Critical patent/JPH0810195Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Packaging Frangible Articles (AREA)
JP1989148181U 1989-12-22 1989-12-22 半導体ウエハ収納箱 Expired - Lifetime JPH0810195Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989148181U JPH0810195Y2 (ja) 1989-12-22 1989-12-22 半導体ウエハ収納箱

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989148181U JPH0810195Y2 (ja) 1989-12-22 1989-12-22 半導体ウエハ収納箱

Publications (2)

Publication Number Publication Date
JPH0388343U JPH0388343U (enExample) 1991-09-10
JPH0810195Y2 true JPH0810195Y2 (ja) 1996-03-27

Family

ID=31694642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989148181U Expired - Lifetime JPH0810195Y2 (ja) 1989-12-22 1989-12-22 半導体ウエハ収納箱

Country Status (1)

Country Link
JP (1) JPH0810195Y2 (enExample)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109147U (ja) * 1983-01-12 1984-07-23 富士通株式会社 ウエハ収納ケ−ス
JPS618913A (ja) * 1984-06-25 1986-01-16 Hitachi Ltd 収容箱
JPS61153789U (enExample) * 1985-03-15 1986-09-24
JPS6364631U (enExample) * 1986-10-17 1988-04-28

Also Published As

Publication number Publication date
JPH0388343U (enExample) 1991-09-10

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