JPH0798152A - Apparatus for heating fluid - Google Patents

Abstract

PURPOSE:To embody a high output, high efficiency, compactness, and long service life in the use of a plurality of high-output lamp heaters for heating a fluid by specifying the distances between the opposed surfaces of each two adjacent inner tubes in a heating vessel and between the inner surface of the heating vessel and the surface opposed thereto of each inner tube. CONSTITUTION:A lamp heater is inserted in each of inner tubes 7 placed inside a heating vessel 2a consisting of quartz glass. Each two adjacent inner tubes 7 in the heating vessel 2a are disposed mutually at distances L1, L2 of 15-30mm in terms of distance between two opposed surfaces. The distance L3 between the inner surface of the heating vessel 2a and the surface opposed thereto of each inner tube 7 is set in the range of 7.5-15mm. A fluid inside the heating vessel 2a is heated by lamp heaters inserted in the respective inner tubes 7. The lamp heater produces heat in a wavelength band which can be absorbed efficiently by a fluid. As a result, when a fluid is heated by the use of a plurality of high-output lamp heaters, such as a halogen lamp, the heating results in high output, high efficiency, compactness, and long service life.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is applied to a semiconductor manufacturing cleaning liquid temperature control device, a chemical liquid temperature control device, a plating liquid temperature control device, a liquid temperature control device for food production, etc., and mainly heats pure water or a chemical liquid. The present invention relates to a fluid heating device used in.

[0002]

2. Description of the Related Art The above fluid heating device is as shown in FIGS. In the figure, 1 is a box of the fluid heating device,
Inside the box body 1, there is a heating section 2 formed by connecting a plurality of heating containers 2a, 2a in series in the vertical direction on one side of the box body 1 in the horizontal direction, and on the other side of the heating section 2. Heating container 2
A fluid supply adjusting unit 3 for supplying and circulating a fluid to a and 2a is arranged. A heat shield plate 4 is interposed between the two. Further, another heat shield plate 4a is interposed between this and the box body.

The heating vessel 2a of the heating section 2 is as shown in FIGS. 3 to 4, and has a cylindrical outer tube 6 having both ends closed by side plates 5 and 5, and an outer tube 6 of the outer tube 6. Both side plates 5,
A plurality of inner pipes 7 penetrating the outer pipe 6 and arranged axially in parallel with the outer pipes 6, and an inflow pipe 8 continuously provided on the lower lower surface of the outer pipe 6.
And an outflow pipe 9 continuously provided on the outer upper surface of the outer pipe 6. All the constituent members of the heating container 2a are made of transparent quartz glass, and are joined by welding. The number of the inner pipes 7 is appropriately selected according to the diameter of the outer pipes 6, and the inner pipes 7 are arranged so that the fluid thicknesses covering the inner pipes 7 are substantially the same.

A lamp heater 10 using a halogen lamp is inserted and supported in each inner tube 7 of the heating container 2a. The support structure of the lamp heater 10 is as shown in FIG. 5, and the seal portions 11 at both ends of the heater 10 are completely exposed from the inner tube 7.
The pipe wall near the is supported by the spring-like support 12 on the axial center portion of the inner pipe 7. For example, a leaf spring is used as the spring-like support 12, a heater support 12a for sandwiching the tube wall of the heater 10 is provided in the middle of the bending, and the bending base end and both tips contact the inner surface of the inner pipe 7. The projection 12 has a shape and engages with the notch 7a provided in the inner pipe 7 at one end.
b is provided.

[0005]

In the fluid heater in the conventional fluid heating apparatus as described above, (1) when the heaters 10 are densely arranged, the lamp heaters heat each other by overheating of the heaters 10 and the lamps. The life of the heater 10 is shortened, and (2) when the lamp heater 10 is sparsely arranged, the heating efficiency is low outside the reach of light, and (3) especially when a high output heater (halogen lamp) is used, When realizing a fluid heater with high output, high efficiency, compact size, and long life, the optimum shape of the heater arrangement in the heating container 2a becomes important.

The present invention has been made in view of the above, and is a fluid capable of achieving high output, high efficiency, compactness and long life when a plurality of high output lamp heaters such as halogen lamps are used. It is intended to provide a heating device.

[0007]

In order to achieve the above object, a fluid heating apparatus according to the present invention comprises a heating section 2 and a fluid supply adjusting section 3, and the heating section 2 has both side plates 5 at both ends.
A tubular outer tube 6 closed at 5 is provided with an inner tube 7 penetrating the side plates 5 and 5, and further an outer tube 6 is provided with an inflow tube 8 and an outflow tube 9 and is made of quartz glass. In a fluid heating device having a configuration in which a lamp heater is inserted into the inner tube 7 of the container 2a, the distance L ₁ and L ₂ between the facing surfaces of the adjacent inner tubes of the heating container 2a is set to 15 to 30 mm. 2a
The distance L ₃ between the inner surface of the inner tube 7 and the inner surface of the inner tube 7 is 7.5 to 15
It is configured to be mm.

[0008]

[Operation] The fluid in the heating container 2a is heated by the lamp heater inserted in the inner tube 7. At this time, the emission wavelength band from the lamp heater has a band that is efficiently absorbed by the fluid.

[0009]

[Examples] Examples of the present invention are shown in FIGS. 4 and 6 (a),
(B), It demonstrates based on FIG. When a halogen lamp having an output of 3 to 4 KW is inserted and arranged in each inner tube 7 of the heating container 2a, the relationship between the number, the heating efficiency 3 and the lamp terminal temperature T is as shown in FIG. In this case, an experiment was carried out with the outer diameter of the heating vessel 2a being constant and the number of halogen lamps being 3, 4, and 6.

In FIG. 7, a and a'are three lamps.
, B and b ′ are four, and c and c ′ are six, heating efficiency η and terminal temperature T, respectively. Re is the heating container 2
The flow velocity of the fluid flowing through a is shown. The heating efficiency η is higher when the number of lamp heaters is larger because the thickness of the water layer between the lamps (between the inner tubes 7) is smaller, but when the number is 6 or more, the lamp terminal temperature is 350 ° C. Since the permissible temperature is exceeded, the life of the halogen lamp is shortened, which is not preferable. Therefore, in this embodiment, as shown in FIG.
The number of halogen lamps is 3, 4, and 6.

In this embodiment, FIG. 4 and FIG.
As shown in (a) and (b), the distances L ₁ and L ₂ between the facing wall surfaces of adjacent inner pipes 7 are in the range of 15 to 30 mm, and the distances between the outer pipe 6 and the inner wall surfaces of the inner pipe 7 are opposite to each other. The distance L ₃ was set in the range of 7.5 to 15 mm. As a result, as is clear from FIG. 7, a high heating efficiency of 95% or more was achieved.

The distances L ₁ , L ₂ and L ₃ between the adjacent inner pipes 7 and between the facing wall surfaces of the outer pipe 6 and the inner pipe 7 which are adjacent to each other are set to 15 to 15.
The reason for setting the length to 30 mm and 7.5 to 15 mm is that the heat radiation from the light source is all when the thickness of the water layer is about 7.5 to 10 mm when using a lamp heater with a wavelength of the light source of 1.3 μm or more. Since it was found that water was absorbed, it is appropriate that the thickness of the water layer by one heat source is about 7.5 to 15 mm.

In the above embodiment, the outer tube 6 having the same inner diameter
In, the distances L ₁ , L ₂ and L ₃ between the opposing wall surfaces are changed by changing the number of the inner tubes 7 to 3, 4 and 6, but all are 7.5 mm or more and are not more than 30 mm. . The number of the inner tubes 7 is changed by changing the size of the outer tube 6. Further, in the embodiment shown in FIG. 6B, the facing surface tube distance L ₁ ′ inside the four inner tubes 7
Is as large as about 30 mm due to this arrangement.

[0014]

According to the present invention, when a plurality of high-power lamp heaters such as halogen lamps are used to heat a fluid, high output, high efficiency, compactness, and long life can be obtained.

[Brief description of drawings]

FIG. 1 is a cutaway side view showing a schematic configuration of an example of a fluid heating device.

FIG. 2 is a cutaway side view showing a schematic configuration of an example of a fluid heating device.

FIG. 3 is a partially cutaway front view of a heating container used in the fluid heating device.

FIG. 4 is a view on arrow A in FIG.

FIG. 5 is a cross-sectional view showing a support structure of a lamp heater.

6 (a) and 6 (b) are three inner tubes in an outer tube having the same diameter.
It is sectional drawing which shows the Example which shows the example which arrange | positioned four books.

FIG. 7 is a diagram showing the heating efficiency and the terminal temperature with respect to the flow velocity of the fluid when the number of lamp heaters is changed to 3, 4 and 5 while the outer diameter of the heating container is the same.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Box body, 2 ... Heating part, 2a, 2a ... Heating container, 3 ... Fluid supply adjusting part, 4 ... Heat shield plate, 5 ... Side plate, 6 ... Outer tube, 7 ...
Inner pipe, 7a ... Notch, 8 ... Inflow pipe, 9 ... Outflow pipe, 10 ... Lamp heater, 11 ... Seal part, 12 ... Spring-like support, 1
2a ... Heater support, 12b ... Projection.

Claims (1)

[Claims] 1. A heating part 2 comprising a heating part 2 and a fluid supply adjusting part 3, and the heating part 2 penetrates the side plates 5, 5 into a cylindrical outer tube 6 whose both ends are closed by the side plates 5, 5. In the fluid heating device, the inner tube 7 is provided, the outer tube 6 is provided with the inflow tube 8 and the outflow tube 9, and the lamp heater is inserted into the inner tube 7 of the heating container 2a made of quartz glass. , Distances L ₁ and L ₂ between facing inner tubes of the heating container 2a.
To 15 to 30 mm, a fluid heating apparatus, characterized in that the opposing plane distance L ₃ between the inner surface and the inner tube 7 in the heating vessel 2a was 7.5～15Mm.