JP3043543U - Liquid heating device - Google Patents

Abstract

(57) Abstract: [PROBLEMS] To provide a liquid heating device that is small in size, has a high heating capacity, is easy to manufacture, has a low cost, and can change the heating capacity easily. SOLUTION: A transparent inner tube having an inlet and an outlet for passing a liquid to be heated, and arranged at a predetermined interval so as to surround the inner tube outside the inner tube, A light-transmitting outer tube having an inlet and an outlet, which is an annular tube that allows liquid to pass through, and a plurality of radiant heating bodies arranged in a space formed between the outer tube and the inner tube. A support plate disposed at an open end of the outer tube, the support plate including an inner tube, a radiant heating body, and
The outer tube and the outer tube are arranged so as to be spaced apart from each other by a predetermined distance, and each hole has at least a hole through which the radiant heating body is inserted.

Description

[Detailed description of the invention]

[0001]

[Field to which the invention belongs]

 The present invention relates to a liquid heating device, and more particularly to a liquid heating device used for temperature control of corrosive chemicals and the like.

[0002]

[Prior art]

 When using a strongly corrosive chemical solution for general industry, it is necessary to pay close attention to the control of the solution temperature at all times because the reaction rate greatly changes with the solution temperature. Therefore, various temperature control devices such as a constant temperature bath have been developed to control the liquid temperature.

Since a highly corrosive chemical liquid passes through the pipe portion of such a temperature control device, a fluororesin or the like, which is a corrosion-resistant material, is used for the pipe portion, and the heat exchange portion also has the chemical liquid. Various measures have been taken to make it resistant. Among them, the following proposals have been made for a liquid heating device using a halogen lamp as a heat source. As shown in FIG. 7, the liquid heating device 50 is entirely made of transparent quartz glass, and is made of a plurality of cylindrical transparent glass in an outer tube 53 having a treatment liquid inlet 51 and an outlet 52. The inner tube 54 is inserted, and a halogen lamp 55 as a heat source is installed in each inner tube 54.

[0004]

[Problems to be solved by the device]

 However, in this conventional liquid heating device 50, a plurality of cylindrical inner tubes 54 for installing halogen lamps 55 are inserted into an outer tube 53 having a treatment liquid inlet 51 and an outlet 52, and therefore, it is transparent. There is a problem that various difficult processes such as forming an inner tube insertion hole in the outer tube 53 made of a quartz glass tube and welding the inner tube 54 to the outer tube 53 are required. In particular, in order to increase the heating capacity, it is necessary to increase the number of halogen lamps 55 that are heat sources, but with the conventional structure, the number of inner tubes 54 must be increased, which makes processing difficult and requires high welding skill. As a result, this is a cause of rising costs. Further, since the liquid heating device 50 has a structure in which the halogen lamp 55 is arranged inside the outer tube 53, the number of installable lamps is limited by the relationship between the inner diameter of the outer tube 53 and the outer diameter of the inner tube 54. However, there is a limit to the increase in heating capacity, and downsizing is difficult.

Further, if it is desired to increase or decrease the number of halogen lamps 55, the number of inner tubes 54 cannot be increased or decreased later, so that waste is inevitable in terms of cost, and it is possible to flexibly meet various requirements. could not.

The present invention has been made in view of the above circumstances, and provides a liquid heating device that is small in size, has a high heating capacity, is easy to manufacture, has a low cost, and can easily change the heating capacity. To aim.

[0007]

[Means for Solving the Problems]

 Therefore, in the liquid heating device of the present invention, a translucent inner tube having an inlet and an outlet through which a liquid to be heated is passed, and a predetermined interval so as to surround the inner tube outside the inner tube. A plurality of light-transmitting outer tubes that have an inlet and an outlet and that allow the liquid to pass through, and a plurality of tubes disposed in a space formed between the outer tube and the inner tube. Of the radiant heating element and a supporting plate disposed at the open end of the outer tube, wherein the inner tube, the radiant heating element, and the outer tube are arranged so as to be separated from each other by a predetermined distance. At the same time, it is provided with at least a support plate having a hole through which the radiant heating body is inserted.

[0008]

[Embodiment of the invention]

 The liquid heating apparatus 11 of the embodiment of the present invention shown in FIG. 1 is used in a temperature control system of a chemical liquid processing apparatus in a wet cleaning process of semiconductor wafers. In this chemical liquid processing device 10, a pump 14 circulates the processing liquid 16 from a processing tank 12 filled with the processing liquid 16 through a pipe 13, heat exchange is performed by a liquid heating device 11, and a temperature is passed through a filter 15. The processing liquid 16 that has been subjected to control and particle removal is returned to the processing tank 12.

As shown in FIG. 2, a liquid heating device 11 shown as a first embodiment of the present invention has an inlet 7 and an outlet 8 and is a transparent material that allows a liquid 9 to be heated to pass therethrough. The tube 1 and a transparent tube, which is provided outside the inner tube 1 with a predetermined space therebetween so as to surround the inner tube 1, has an inlet 5 and an outlet 6, and is an annular tube through which the liquid 9 passes. A light-external outer tube 2, six halogen lamps 3 arranged in a space formed between the outer tube 2 and the inner tube 1, and an open end portion 2c, 2d of the outer tube 2. The support plates 4 and 18 are provided.

Of these, the inner tube 1 is inserted into holes 4c and 18c for inserting inner tubes formed in the central portions of the support plates 4 and 18, respectively, and the translucent light held by the support plates 4 and 18 is held. Is a transparent quartz glass tube, and an inlet 7 communicating with the outlet 6 of the outer tube 2 and an outlet 8 communicating with the outside of the liquid heating device 11 are provided at both ends through piping not shown. There is. On the other hand, the outer tube 2 has a light-transmitting property including an inner peripheral surface 2a arranged so as to surround the transparent glass tube 3a of the halogen lamp 3 and an outer peripheral surface 2b held by the support plates 4 and 18. It is a hollow ring-shaped tube made of quartz glass, and the outer peripheral surface 2b is inserted into an inlet insertion hole 4e formed in the outer fringe 4a of the support plate 4 to communicate with the outside of the liquid heating device 11. 5 and an outlet 6 which is inserted into an outlet insertion hole (not shown) formed in the outer fringe 18a of the support plate 18 and communicates with the inlet 7 of the inner pipe 1 through a pipe (not shown). ing.

Further, the halogen lamp 3 which constitutes the radiant heating element has a transparent glass tube 3a in which a halogen-containing gas is sealed, a filament 3b arranged in the transparent glass tube 3a, and a filament 3b arranged at both ends thereof. And an electrode terminal portion 3c for applying a voltage to the filament 3b. Each electrode terminal portion 3c is inserted into each of six insertion holes 4d and 18d formed in the support plates 4 and 18, respectively, and protrudes to the outside of the support plate 4 as shown in FIG. Next, the support plates 4 and 18 are metal plates that are arranged so as to close the openings 2e and 2f of the outer tube 2, respectively, and the inner surfaces of which are mirror-finished metal plates, and the outer fringes 4a that hold the outer tube 2 respectively. , 18a and inner fringes 4b, 18b for holding the inner pipe 1 are provided. Further, one support plate 4 has an outer fringe 4a formed with an inlet insertion hole 4e for inserting the inlet 5 of the outer tube 2, and the other support plate 18 has an outer fringe 18a and an outlet 6a. A hole (not shown) for inserting an outlet is formed.

The support plate 18, which is representative of the support plates 4 and 18, is shown in FIG. 3 which is an AA enlarged sectional view of FIG. Inner tube insertion holes 4c and 18c through which the tube 1 is inserted are formed, and at the outer circumferences of the inner tube insertion holes 4c and 18c, the electrode terminal portions 3c of the halogen lamp 3 are radially spaced at equal intervals. Six holes 4d and 18d for inserting halogen lamps are formed to insert the both ends.

According to the support plates 4 and 18, the inner pipe 1 can be positioned and fixed by inserting both ends of the inner pipe 1 into the inner pipe insertion holes 4c and 18c of the support plates 4 and 18, respectively. Further, by inserting the electrode terminal portions 3c at both ends of each halogen lamp 3 into the respective holes 4d and 18d for inserting the halogen lamps of the supporting plates 4 and 18, respectively, the BB enlarged cross-sectional view of FIGS. As shown in FIG. 4, each halogen lamp 3 can be positioned and fixed at a constant distance from the outer peripheral surface of the inner tube 1. As a result, a space S is formed between the transparent glass tube 3a of each halogen lamp 3 and the inner tube 1. Further, the inlet 5 of the outer tube 2 is inserted into the hole 4e for the inlet of the outer fringe 4a of the one supporting plate 4, and the outlet 6 of the outer tube 2 is an outlet (not shown) of the outer fringe 18a of the other supporting plate 18. The outer pipe 2 is inserted through the insertion hole, and the opening ends 2c, 2d of the outer pipe 2 are held by both outer fringes 4a, 18a, and the outer peripheral surface 2b of the outer pipe 2 is placed outside the supporting plates 4, 18. By holding the fringes 4a and 18a, the outer tube 2 can be positioned and fixed to the inner tube 1 and the halogen lamps 3 at fixed intervals. As a result, a space P is formed between the transparent glass tube 3a of each halogen lamp 3 and the inner peripheral surface 2a of the outer tube 2.

According to this liquid heating device 11, when the liquid 9 flowing from the inlet 5 of the outer tube 1 passes toward the outlet 6 of the outer tube 2, the liquid 9 is radiated from the halogen lamp 3 through the space P. The liquid 9 can be heated by radiant heat. Further, thereafter, when the liquid 9 heated in the outer tube 2 flows into the inlet 7 of the inner tube 1 and passes toward the outlet 8 of the inner tube 1, the liquid is radiated from the halogen lamp 3 through the space S. It can be further heated by radiant heat.

As described above, in the liquid heating device 11 of the present invention, the inner tube 1 and the outer tube 2 are disposed inside and outside the halogen lamp 3 which is the heat source, with the space S and the space P, respectively. Radiant heat of the lamp 3 can be absorbed on both the inside and outside of the halogen lamp 3, whereby heat loss can be reduced and heat exchange efficiency can be improved.

A pipe for passing the liquid 9 is composed of an inner pipe 1 and an outer pipe 2 surrounding the inner pipe 1 through a predetermined space, and each halogen lamp 3 is connected to the inner pipe 1 by supporting plates 4 and 18. Since the space S and the space P are provided separately from the outer tube 2, it is possible to avoid contact with the halogen lamp 3, which is a heating body, and to prevent damage due to local heating of the inner tube 1 and the outer tube 2. This can be avoided and the liquid 9 can be safely and efficiently heated only by radiant heat.

Further, since the inner surfaces of the support plates 4 and 18 are mirror-finished, halogen lamps that emit to the outside from the openings 2e and 2f at both ends of the outer tube 2 through the space S or the space P, respectively. The light of No. 3 is reflected by the mirror surfaces of the support plates 4 and 18 to suppress the heat dissipation to the outside of the device, and the reflected light is also guided to the liquid 9 in the inner tube 1 and the outer tube 2 to reduce loss and heat loss. The heat exchange efficiency can be improved.

Further, since the electrode terminal portion 3c of each halogen lamp 3 projects to the outside of the support plates 4 and 18, the electrode terminal portion 3c is cooled by the outside air, and therefore the halogen lamp 3 due to overheating of the electrode terminal portion 3c. It is possible to avoid shortening the life of the.

Further, in the present invention, the liquid heating device 11 is provided with the support plates 4 and 18 to form a space between the inner tube 1 and the outer tube 2, and the halogen lamp 3 is placed in the space. The number of the halogen lamps can be easily increased as compared with the conventional case where the halogen lamps are arranged inside the quartz glass tube because they are radially arranged at a predetermined interval from the outer tube 1 and the outer tube 2. Therefore, the heating capacity can be easily increased.

Further, unlike the conventional case, since it is not necessary to form an inner tube for inserting a radiant heating body inside the quartz glass tube, a halogen lamp to be installed at the stage of processing the inner tube during manufacturing is not required. It is not necessary to determine the number in advance. Therefore, in this structure, the number of halogen lamps can be changed by replacing only the support plate as needed, and the heating capacity can be easily changed appropriately.

Further, unlike the conventional device shown in FIG. 7, there is no need to perform a process for forming a hole for inserting a radiant heating body through which a halogen lamp is inserted in a quartz glass tube. The manufacturing cost can be reduced.

Further, although the six halogen lamps 3 are provided as the radiant heating bodies in the above-mentioned embodiment, the halogen lamps 3 can be appropriately changed if necessary. It is also possible to adjust the power by selecting a radiant heating body to be heated as necessary from among the plurality of radiant heating bodies and controlling power supply.

In the above-described embodiment, the pipes, that is, the inner pipe 1 and the outer pipe 2 are arranged at a predetermined distance from the heating means, and the structure for heating by radiant heat is adopted. It is composed of a halogen lamp 3 that outputs infrared light, and the inner tube 1 and outer tube 2 that are pipes use a transparent quartz glass tube that transmits near-infrared light, so the pipe itself absorbs light. Then, the temperature does not rise. Therefore, there is no risk that the piping will be damaged by a sudden temperature rise. Although the radiant heating element is the halogen lamp 3 in the above embodiment, the radiant heating element is not limited to this, and may be another radiant heating element, for example, an infrared heating element. Further, in the above-mentioned embodiment, the pipe is made of the quartz glass pipe, but any material may be used as long as it has chemical resistance, heat resistance and pressure resistance according to the purpose of use and can transmit radiant heat. Further, by wrapping the outside of the liquid heating device 11 of this embodiment with a heat insulating material, it is possible to suppress heat dissipation from the outer tube 2 to the outside due to heat conduction and radiation, and further improve the heat exchange efficiency of the liquid heating device. You can

In the above embodiment, the inner tube 1, the outer tube 2, and the support plates 4 and 18 are formed as separate bodies, and are supported by the outer fringes 4a and 18a, the inner fringes 4b and 18b, etc. of the support plate. However, the support plate may be made of glass and formed integrally with at least one of the inner tube 1 and the outer tube 2. For example, instead of the outer tube 2 and the support plates 4 and 18 of the liquid heating apparatus 11 of the first embodiment shown in FIG. 2, the same parts as those in FIG. As in the liquid heating device 21 shown as an example, a pipe 22 made of quartz glass in which a support plate and an outer tube are integrally formed may be arranged. Also, instead of the inner pipe 1, the outer pipe 2, the support plates 4 and 18 and the pipe (not shown) of the liquid heating device 11 of the first embodiment shown in FIG. 2, the same parts as those in FIG. In the sixth embodiment, like the liquid heating device 26 shown as the third embodiment of the present invention, the pipe 27 made of quartz glass is integrally formed with the supporting plate, the inner pipe, the outer pipe and the pipe not shown. Good. In the liquid heating device 21 of the second embodiment and the liquid heating device 26 of the third embodiment, the structure of the device is simple, the assembly process can be reduced, and the manufacturing cost can be reduced.

Further, in the liquid heating device 11 shown as the first embodiment, holes 4c and 18c for inserting the inner tube and holes 4d and 1 for inserting the radiant heating body are formed in the support plates 4 and 18 shown in FIG. 3, respectively. 8d is formed, the inner tube 1 is inserted into the holes 4c and 18c for inserting the inner tube, and the halogen lamp 3 is inserted into the holes 3d and 18d for inserting the radiant heating body. Is only required to have holes for inserting at least the halogen lamp 3 formed in the supporting plates 4 and 18, respectively. For example, the inlet 7 and the outlet 8 are arranged on the peripheral surface of the inner tube 1, and the halogen lamp 3 is inserted through the support plate having only the hole for inserting the halogen lamp, and both ends of the inner tube 1 are locked. You may do it. By doing so, since the inner tube 1 can be protected by the support plate and the inner tube 1 can be supported, the same effect as that of the liquid heating device 11 of the first embodiment can be obtained and the mechanical strength can be improved. It is possible to provide a highly stable liquid heating device.

[0026]

[Effect of the invention]

 As described above, according to the liquid heating device of the present invention, the pipe for passing the liquid is composed of the inner pipe and the outer pipe surrounding the inner pipe through a predetermined space, and the supporting plate is used. Since the halogen lamp is arranged with a space separate from the inner and outer tubes, it is not necessary to insert the cylindrical tube for installing the halogen lamp into the glass tube as in the conventional case, and the cylindrical tube is inserted into the glass tube. It is possible to manufacture at low cost without the need for various difficult processes such as forming a hole for inserting a through hole and welding a cylindrical pipe.

Even when the number of halogen lamps that are heat sources is increased in order to increase the heating capacity, the liquid heating device of the present invention forms a hole through which a cylindrical tube is inserted in the glass tube. It does not require various difficult processes such as welding cylindrical pipes, and the structure of the glass pipe, which is a pipe, is simple, so it does not require a high degree of glass welding skill in manufacturing. Therefore, the manufacturing cost can be reduced.

Further, in the liquid heating device of the present invention, the pipe for passing the liquid is composed of the inner pipe and the outer pipe surrounding the inner pipe through a predetermined space, and the halogen lamp is formed by the support plate into the outer pipe. Since the structure is arranged radially from the pipes with spaces in between, it is not necessary to determine the number of radiant heating elements in advance at the stage where the pipe is processed, and the number of radiant heating elements to be provided can be increased as necessary. It is also possible to select and use a radiant heating element to be heated from among the plurality of radiant heating elements provided, if necessary, so that the heating capacity can be appropriately changed.

Further, the liquid heating apparatus of the present invention has a structure in which the radiant heating element is arranged from the inner tube and the outer tube, which are piping, through a predetermined space, and is radially arranged on the outer circumference of the inner tube. However, unlike the conventional case, the number of radiant heaters to be installed is not limited by the inner diameter of the glass tube, which is the pipe, and the heating capacity can be increased.

Further, since the inner tube and the outer tube are arranged inside and outside the halogen lamp as a heat source with a space therebetween, the radiant heat of the halogen lamp can be absorbed inside and outside the halogen lamp. Therefore, the heat loss can be reduced and the heat exchange efficiency can be improved.

Further, according to the liquid heating device of the present invention, the liquid is heated by radiant heat, and the light escaping from the halogen lamp to the outside is reflected by the support plate to suppress the heat dissipation, so that the size is kept small. At the same time, the heat exchange efficiency can be increased. If the radiant heating element is composed of a lamp that emits near-infrared light, such as a halogen lamp, and a quartz glass tube that transmits this near-infrared light is used for the pipe, the pipe itself absorbs the light and the temperature rises. In addition, it is safe because there is no risk that the piping will be damaged by a sudden rise in temperature.

Therefore, according to the present invention, it is possible to provide a liquid heating apparatus that is small in size, has a high heating capacity, is easy to manufacture, has a low manufacturing cost, and can easily change the heating capacity.

[Brief description of the drawings]

FIG. 1 is a diagram showing a chemical liquid processing system in which a heating device according to an embodiment of the present invention is used.

FIG. 2 is a diagram showing a liquid heating apparatus according to a first embodiment of the present invention.

FIG. 3 is an enlarged cross-sectional view taken along line AA of FIG. 2;

FIG. 4 is an enlarged sectional view taken along line BB of FIG.

FIG. 5 is a view showing a liquid heating apparatus according to a second embodiment of the present invention.

FIG. 6 is a view showing a liquid heating apparatus according to a third embodiment of the present invention.

FIG. 7 is a diagram showing a conventional liquid heating device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Inner tube 2 ... Outer tube 2c, 2d ... Open end part 3 ... Halogen lamp 3a ... Quartz glass tube 3b ... Filament 3c ... Electrode terminal part 4, 18 ... Support plate 5 ... Outer tube inlet 6 ... Outer tube outlet 7 ... Inner pipe inlet 8 ... Inner pipe outlet 9 ... Liquid 11, 21, 26 ... Liquid heating device 22, 27 ... Piping S ... Space P ... Space

Claims (4)

[Utility model registration claims] 1. A translucent inner tube having an inlet and an outlet for allowing a liquid to be heated to pass therethrough, and arranged at a predetermined interval so as to surround the inner tube outside the inner tube. A translucent outer tube that is provided and has an inlet and an outlet that allows the liquid to pass through, and a plurality of radiant heating bodies that are arranged in a space formed between the outer tube and the inner tube. A support plate disposed at the open end of the outer tube, wherein the inner tube, the radiant heating body, and the outer tube are arranged so as to be separated from each other by a predetermined distance, and at least A liquid heating apparatus comprising: a support plate having a hole through which the radiant heating body is inserted. 2. The liquid heating apparatus according to claim 1, wherein the radiant heating body is a halogen lamp. 3. The liquid heating apparatus according to claim 1, wherein an inner surface of the support plate is made of a mirror-finished metal. 4. The liquid heating apparatus according to claim 1, wherein the support plate is made of glass and is integrally formed with at least one of the inner tube and the outer tube.