JP2901903B2 - Heating equipment for chemicals, etc. - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating apparatus for a chemical solution or the like which is used in conjunction with a cleaning apparatus for performing cleaning etching with a high temperature chemical solution or ultrapure water equivalent to the chemical solution.

[0002]

2. Description of the Related Art In this type of conventional apparatus, an inner cylinder having a diameter slightly smaller than that of an outer cylinder is inserted into a tubular outer cylinder to form a hollow annular cylinder. Alternatively, heating is performed by arranging a heater along the outer peripheral surface. (JP-A-4-353350, 6-0
No. 29275)

[0003]

However, in the case of such a conventional system, a chemical solution or the like is flowed in an annular cylindrical passage and heated only from the inside or / and outside thereof. And the heating was only on one side of the heater, which was not efficient. Furthermore, the inside of the inner cylinder is buried with a heat insulating material, and there is a problem that the apparatus becomes large for the exchanged heat.

The present invention has been made in view of the problems of the related art, and has as its object to improve the heat exchange efficiency of the apparatus and to provide a compact heating apparatus for chemicals and the like. .

[0005]

That is, the present invention relates to a heating apparatus for a chemical solution or the like in a hollow cylinder having an outer cylinder having an inlet pipe and an outlet pipe near a side end thereof. In addition to placing a small-diameter cylinder through the outer cylinder, and applying a total reflection coating to the outer circumference of the outer cylinder and the inner circumference of the central cylinder,
By inserting a heater into the cylinder on the concentric circle,
It is intended to achieve this purpose.

[0006]

According to the present invention, since the heaters are separated from each other and are in the chemical solution, the heat of the heated heater heats the chemical solution over the entire circumference. Furthermore, since a small-diameter hollow cylinder coated with a total reflection film is inserted in the center, heaters arranged concentrically do not interfere with each other, and uniform heating is performed.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to the embodiments shown in the drawings. 1 and 2 show an embodiment of a heating device for a chemical solution or the like according to the present invention.

The outer cylinder 2 of the heating device 1 of this embodiment comprises a heating chamber 5 composed of a side plate 3 made of quartz glass and a large-diameter cylinder 4.
In the vicinity of each side plate 3a, 3b, the inlet pipe 6 is located at a low position.
In addition, the outlet pipe 7 is provided at a high position. A total reflection film is applied to the outer periphery, and a heat insulating material 8 is further wound. A plurality of small-diameter pipes 9 are inserted between the side plates 3a and 3b. The small-diameter pipe 9 first penetrates the center of the outer cylinder 2 while maintaining the seals at both ends. Subsequently, a plurality of small diameter pipes 9 are arranged concentrically with respect to the center. The inner surface of the small-diameter tube 9a inserted at the center is coated with a total reflection film.
It is not applied to the tube 9b disposed around.

Reference numeral 10 denotes a semicircular partition plate which is attached alternately in the longitudinal direction in the heating chamber and through which the small-diameter pipe 9 penetrates. A small notch 11 is provided at the bottom of the bottom to allow the residual liquid to be discharged when the operation is stopped.

A cap 12 can be further attached to both side plates 3a and 3b, and an end of a halogen lamp heater 13 is fixed to the cap 12 at a position corresponding to the small-diameter tube 9 of the side plate 3. . Then, the halogen lamp heater 13 is inserted and fixed in the small-diameter tube 9b except for the center.

Next, the operation of the above embodiment will be described. The chemical liquid flowing from the inlet passes through the heating chamber 5 and passes through the outlet pipe 7.
From the cleaning tank (not shown). During this passage, the chemical liquid or the like is heated by radiant heat transfer by the halogen lamp heater 13.

In this embodiment, since the inlet pipe 6 and the outlet pipe 7 are arranged diagonally apart from each other, the chemical liquid exchanges heat while rotating inside the heating chamber 5 and is uniformly heated. In general, the central portion has a small flow velocity and stagnates, resulting in poor heat exchange efficiency. However, in the present invention, since a small-diameter tube is also arranged at the central portion, heat exchange is performed efficiently without stagnation. Further, the chemical liquid moves and meanders in the diameter direction by the partition plate 10, so that the uniformity and the heat exchange efficiency are further improved.

Since the heater 13 is arranged concentrically within the flow path in which the chemical solution rotates and meanders as described above, heating is performed more reliably and efficiently. In addition, since the inner circumference of the small-diameter tube 9 at the center is coated with a total reflection film, a plurality of small-diameter tubes 9 do not interfere with each other and only the inner diameter side is heated. Uniform heating is promoted.

[0014]

As described above, according to the apparatus for heating a chemical solution according to the present invention, heating can be performed efficiently and uniformly. At the same time, with this, if the performance is comparable to the conventional,
This has the effect of reducing the size of the device.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a first embodiment of the present invention.

FIG. 2 is a cross-sectional view showing the first embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Heating apparatus of chemical | medical solution etc. 2 Outer cylinder 3 Side plate 4 Large diameter cylinder 5 Heating chamber 6 Inlet pipe 7 Outlet pipe 8 Insulation material 9 Small diameter pipe 10 Partition plate 11 Notch 12 Cap 13 Halogen lamp heater

Claims (5)

(57) [Claims] 1. A heating device for a chemical solution of a hollow cylinder provided with an outer cylinder having an inlet pipe and an outlet pipe near a side end, wherein a small-diameter cylinder is provided on a side plate of the outer cylinder at a central portion and concentric circles of the outer cylinder. A heating device for a chemical liquid or the like, wherein the outer peripheral surface of the outer cylinder and the inner peripheral surface of the central cylinder are subjected to total reflection coating, and a heater is inserted into the concentric cylinder. 2. The heating device for chemicals according to claim 1, wherein the outlet pipe is mounted at a position higher than the inlet pipe. 3. The apparatus for heating a chemical solution or the like according to claim 1, wherein semicircular partition plates are alternately provided up and down at a predetermined pitch in the hollow cylinder. 4. The heating device for a chemical solution or the like according to claim 1, wherein the hollow cylinder is attached to be inclined so that the outlet side is higher than the inlet side. 5. The heating device for a chemical solution according to claim 1, wherein the heater inserted into the hollow cylinder is a halogen lamp heater.