JP2020134060A - Multiplex coil type heat exchanger - Google Patents

Abstract

To provide a multiplex coil type heat exchanger in which even a corrosive liquid such as sulfuric acid, hydrochloric acid or ozone water is heated by heat exchange and even a liquid medicine of semiconductor manufacture application is heated without metal ion elution.SOLUTION: A multiplex coil type heat exchanger comprises: an inner cylinder 2b filled with a first liquid L1 consisting of a heat medium; a heater 32 provided within the inner cylinder 2b and heating the first liquid L1; and a number of heat transfer tubes 5 wound around the inner cylinder 2b in a multiplex coil shape and constituted of fluorine resins. A second liquid L2 introduced to the heat transfer tubes 5 is heat-exchanged with the first liquid L1 which is heated by the heater 32, and discharged from the heat transfer tubes 5 thereafter.SELECTED DRAWING: Figure 1

Description

According to the present invention, even corrosive fluids such as sulfuric acid, hydrochloric acid, and ozone water can be heated by heat exchange, and even chemical solutions for semiconductor manufacturing can be heated without elution of metal ions. Regarding a multi-coil heat exchanger that can be used.

As a fluid heating device for heating a fluid, the invention described in Patent Document 1 is known. The invention described in Patent Document 1 is to heat a fluid flowing through a case by a spiral heater provided in the case.

Japanese Unexamined Patent Publication No. 2014-053288

By the way, when heating a corrosive fluid such as sulfuric acid, hydrochloric acid, ozone water, etc., a thermoplastic fluororesin such as PFA (perfluoroalkoxy ethylene) or PTFE (polytetrafluoroethylene) is used so as not to damage the heater. Need to be coated.

However, if the coating is thin, the heater will be damaged by the corrosive fluid, while if the coating is thick, there is a problem that the thermal efficiency will deteriorate, and the corrosive fluid such as sulfuric acid, hydrochloric acid, or ozone water will be heated. There was a problem that it was very difficult. Further, when heating a chemical solution for semiconductor manufacturing, there is a problem that it is more difficult to heat such a chemical solution because metal ion elution occurs.

Therefore, in view of the above problems, the present invention can heat corrosive fluids such as sulfuric acid, hydrochloric acid, ozone water, etc. by heat exchange, and even chemical solutions for semiconductor manufacturing, metal. It is an object of the present invention to provide a multi-coil type heat exchanger capable of heating without ion elution.

The above object of the present invention is achieved by the following means. In addition, although the reference numerals of the embodiments described later are added in parentheses, the present invention is not limited thereto.

According to the invention of claim 1, a cylinder (inner cylinder 2b) filled with a first fluid (L1) made of a heat medium and a cylinder (inner cylinder 2b).
A heater (32) provided in the cylinder (inner cylinder 2b) to heat the first fluid (L1), and
It has a large number of heat transfer tubes (5) made of fluororesin wound around the cylinder (inner cylinder 2b) in a multiple coil shape.
The second fluid (L2) introduced into the heat transfer tube (5) exchanges heat with the first fluid (L1) heated by the heater (32), and then is discharged from the heat transfer tube (5). It is characterized by being made.

Further, according to the invention of claim 2, in the multiple coil type heat exchanger according to claim 1, the tubular body (inner cylinder 2b) is an inner cylinder (2b).
Further having an outer cylinder (2a) in which the inner cylinder (2b) is housed,
The outer cylinder (2a) and the inner cylinder (2b) are filled with the first fluid (L1).
A heater (32) for heating the first fluid (L1) is provided in the outer cylinder (2a) and the inner cylinder (2b).

Next, the effects of the present invention will be described with reference to the drawings. In addition, although the reference numerals of the embodiments described later are added in parentheses, the present invention is not limited thereto.

According to the invention of claim 1, the first fluid (L1) made of a heat medium filled in the cylinder (inner cylinder 2b) is heated by the heater (32) and around the cylinder (inner cylinder 2b). The second fluid (L2) is introduced into a large number of heat transfer tubes (5) made of fluororesin wound in a multi-coil shape. As a result, even if the second fluid (L2) is a corrosive fluid such as sulfuric acid, hydrochloric acid, ozone water, or a chemical solution for semiconductor manufacturing, the heater (32) and the second fluid (L2) can be changed. Since there is no contact, the heater (32) is not damaged. Further, the first fluid (L1) filled in the cylinder (inner cylinder 2b) is heated by the heater (32), and the cylinder (inner cylinder 2b) filled with the heated first fluid (L1). The second fluid (L2) was heated by introducing the second fluid (L2) into a large number of heat transfer tubes (5) made of fluororesin wound around the above. It will exchange heat with the first fluid (L1). As a result, heat exchange can be performed efficiently.

However, according to the present invention, even corrosive fluids such as sulfuric acid, hydrochloric acid, and ozone water can be heated by heat exchange, and even chemical solutions for semiconductor manufacturing are metal ions. It can be heated without elution.

Further, according to the invention of claim 2, by providing the inner cylinder (2b) in the outer cylinder (2a), the heated first fluid (L1) and the second fluid (L2) flow in the opposite direction. Become. As a result, heat exchange can be performed more efficiently.

It is a partial longitudinal side view of the multiple coil type heat exchanger which concerns on one Embodiment of this invention. It is a top view of the multi-coil type heat exchanger which concerns on the same embodiment. It is a partial cross-sectional view of the multi-coil type heat exchanger according to the same embodiment. It is a schematic longitudinal side view which shows the overall flow of the 1st fluid and the 2nd fluid in the multi-coil type heat exchanger which concerns on this embodiment.

Hereinafter, an embodiment of the multi-coil heat exchanger according to the present invention will be specifically described with reference to the drawings. In the following description, when the directions of up, down, left, and right are shown, it means up, down, left, and right when viewed from the front of the illustration.

As shown in FIG. 1, the multi-coil heat exchanger 1 includes a tank body 2, an electric heater portion 3 provided in the tank body 2, a mounting body 4, and a large number of mounting bodies 4. It is mainly composed of a heat exchange section 6 formed by the heat transfer tube 5 of the above. The heat transfer tube 5 is made of a thermoplastic fluororesin such as PFA (perfluoroalkoxy ethylene) or PTFE (polytetrafluoroethylene).

The tank body 2 is made of stainless steel such as SUS304, and as shown in FIGS. 1 to 3, a large-diameter cylindrical outer cylinder 2a having an open upper portion and a cylindrical outer cylinder having a smaller diameter than the outer cylinder 2a are formed. At the same time, it is composed of an inner cylinder 2b having a height lower than that of the outer cylinder 2a arranged in the central portion on the bottom side of the outer cylinder 2a. The inside of the tank body 2 configured in this way is filled with the first fluid L1 made of a heat medium such as hot water. Inlet headers 2A and outlet headers 2B for the corrosive second fluid L2 such as sulfuric acid, hydrochloric acid, and ozone water are provided at both sides of the outer cylinder 2a of the tank body 2 in the circumferential direction on the upper side. The inlet header 2A and the outlet header 2B each have a tubular pipe 20 that is integrally projected from the upper peripheral direction of the outer cylinder 2a of the tank body 2, and a seal plate 21 is attached to the pipe 20. The upper plate 22 having a substantially convex cross-sectional view and the lower plate 23 having a rectangular cross-sectional view are arranged and fixed by bolting. Both ends of each heat transfer tube 5 are communicated with each other in the inlet header 2A and the outlet header 2B.

On the other hand, the upper part of the outer cylinder 2a of the tank body 2 is closed by the lid plate 2C as shown in FIG. As shown in FIG. 1, a tubular pipe 2Ca is provided at the center of the lid plate 2C so as to integrally project upward. An electric heater unit 3 is attached to the pipe 2Ca.

More specifically, the electric heater portion 3 is made of stainless steel such as SUS304, and is provided in the circular heater mounting base 30 and the center of the lower surface of the heater mounting base 30 as shown in FIGS. 1 and 2. It is composed of a thermometer 31 and a rod-shaped heater 32 provided on the lower surface of the heater mounting base 30 so as to surround the thermometer 31. As shown in FIGS. 1 and 2, the heater mounting base 30 is arranged and fixed to the upper surface of the tubular pipe 2Ca by bolting. As a result, the thermometer 31 provided in the center of the lower surface of the heater mounting base 30 and the heater 32 are arranged in the outer cylinder 2a and the inner cylinder 2b as shown in FIGS. 1 and 3. .. The thermometer 31 measures the temperature of the first fluid L1 filled inside the tank body 2 heated by the heater 32. As shown in FIGS. 1 and 3, a large number of heaters 32 for heating the first fluid L1 are provided, and are provided in the circumferential direction so as to surround the thermometer 31.

As shown in FIG. 1, the mounting body 4 has a substantially vertically long rectangular shape provided with a large number of tube insertion holes 40, and is mounted on the outer periphery of the inner cylinder 2b. More specifically, as shown in FIGS. 1 and 3, four horizontally long rectangular upper support plates 2b1 in a plan view are radially arranged and fixed at equal intervals on the upper end of the outer circumference of the inner cylinder 2b. Also on the lower end of the outer circumference of the inner cylinder 2b, four horizontally long rectangular lower support plates 2b2 in a plan view are radially arranged and fixed at equal intervals. As shown in FIG. 1, the lower support plate 2b2 is provided with an upward notch 2b2a, and the notch 2b2a is provided with an L-shape protruding from the inner wall on the bottom side of the outer cylinder 2a. The locking projection pieces 2a1 of the above are fitted together. As a result, the inner cylinder 2b is arranged and fixed at the bottom side central portion in the outer cylinder 2a. Then, as shown in FIG. 1, by bolting to one upper support plate 2b1 and one lower support plate 2b2 which are attached and fixed to the inner cylinder 2b which is arranged and fixed in the outer cylinder 2a in this way. One mounting body 4 is fixed, and four mounting bodies 4 are fixedly arranged. Further, the locking projecting piece 41 (see also FIG. 3) provided inside the upper end of the mounting body 4 is inserted and locked in the slit-shaped locking hole 2b3 provided in the intermediate portion of the inner cylinder 2b. There is. As a result, the four mounting bodies 4 and the inner cylinder 2b are integrated. However, in this way, the mounting body 4 is mounted on the outer periphery of the inner cylinder 2b.

The heat exchange unit 6 uses four substantially vertically elongated rectangular mounting bodies 4 to coil each heat transfer tube 5 from the bottom to the top in a large number of tube insertion holes 40 provided in the mounting bodies 4. By inserting the coil, the number of overlapping coils inside and outside is set to 7 layers, and the innermost heat transfer tube group 60 from the innermost first coil portion C1 to the fourth coil portion C4 and the fifth coil portion C5 It is divided into an outer heat transfer tube group 61 up to the outermost seventh coil portion C7. Then, between the inner heat transfer tube group 60 and the outer heat transfer tube group 61, that is, between the fourth coil portion C4 and the fifth coil portion C5, a width substantially corresponding to the outer diameter of the heat transfer tube 5. A gap d for arranging the tubes is provided. As shown in FIG. 3, all the heat transfer tubes 5 hanging from the inlet header 2A are passed through the tube arrangement gap d, and the heat transfer tube 5 passing through the tube arrangement gap d is passed through. , As shown in FIG. 1, it is drawn to the lower part of the heat exchange unit 6 in a form of distributing in the circumferential direction.

More specifically, as shown in FIGS. 1 and 3, each heat transfer tube 5 hanging from the inlet header 2A utilizes the opening of the adjacent attachment 4, that is, the interval of 1/4 lap. Insert it into the lowermost tube insertion hole 40 in each coil portion of one mounting body 4 in a shape that draws a gentle curve in a nearly horizontal direction, and thereafter, the tube insertion holes of the four mounting bodies 4 40 is sequentially passed through and wound up to the upper part of the heat exchange unit 6 in a coil shape, and the upper end side thereof is communicated and connected to the outlet header 2B. The winding operation of each heat transfer tube 5 in the assembly of the heat exchange section 6 is started from the innermost first coil section C1.

Thus, in this way, the heat exchange section 6 is formed by the large number of heat transfer tubes 5 attached to the mounting body 4, and thus the heat exchange section 6 is formed around the inner cylinder 2b. Become.

Thus, the multi-coil heat exchanger 1 configured as described above is used as follows.

First, the first fluid L1 made of a heat medium such as hot water filled inside the tank body 2 is heated to, for example, about 65 ° C. by the heater 32 of the electric heater unit 3. After that, a corrosive fluid such as sulfuric acid, hydrochloric acid, or ozone water or a second fluid L2 composed of a chemical solution for semiconductor manufacturing is continuously introduced into the inlet header 2A. The second fluid L2 is distributed to a large number of heat transfer tubes 5 communicating with the inlet header 2A, spirally rises in each heat transfer tube 5 from the lower end of the heat exchange section 6, and then the heat exchange section thereof. It flows into the outlet header 2B from the upper end of No. 6 and is derived from the outlet header 2B in a merged state. However, in the heat exchange section 6 formed around the inner cylinder 2b, the second fluid L2 flows in a large number of heat transfer tubes 5 wound in a multiple coil shape. That is, the second fluid L2 passes through the heat transfer tube 5 around the inner cylinder 2b filled with the heated first fluid L1 and spirally rises from the lower end. As a result, the second fluid L2 is heat-exchanged with the heated first fluid L1, so that the temperature of the second fluid L2 is increased (for example, 60 ° C.).

Therefore, according to the present embodiment described above, the first fluid L1 made of a heat medium such as hot water filled in the inner cylinder 2b is heated by the heater 32 of the electric heater unit 3 and around the inner cylinder 2b. The second fluid L2 is passed through a large number of heat transfer tubes 5 made of fluororesin wound in a multi-coil shape. As a result, the heater 32 does not come into contact with a corrosive fluid such as sulfuric acid, hydrochloric acid, ozone water, or the second fluid L2 made of a chemical solution for semiconductor manufacturing, so that the heater is not damaged. Further, the first fluid L1 in the inner cylinder 2b is heated by the heater 32, and a large number of fluororesins are wound around the inner cylinder 2b filled with the heated first fluid L1 in a multi-coil shape. By passing the second fluid L2 through the heat transfer tube 5 of the book, the second fluid L2 exchanges heat with the heated first fluid L1, so that heat exchange can be performed efficiently.

Therefore, according to the present embodiment, even corrosive fluids such as sulfuric acid, hydrochloric acid, and ozone water can be heated by heat exchange, and even chemical solutions for semiconductor manufacturing are metal. It can be heated without ion elution.

Further, according to the present embodiment, by providing the inner cylinder 2b in the outer cylinder 2a, as shown in FIG. 4, the first fluid L1 heated by the heater 32 of the electric heater unit 3 swirls from top to bottom. Will be done. As a result, when the second fluid L2 is passed through a large number of heat transfer tubes 5, the second fluid L2 rises spirally (see the direction of arrow Y1), so that the first fluid L1 and the second fluid L2 will flow forward. Therefore, heat exchange can be performed more efficiently.

Further, according to the present embodiment, since each heat transfer tube 5 in the heat exchange unit 6 is maintained in a stable wound state by the mounting body 4, high heat exchange efficiency without fluctuation is maintained, while heat is maintained. When constructing the exchange portion 6, there is an advantage that the same winding pitch and a constant winding diameter can be easily set by simply passing each heat transfer tube 5 through the tube insertion hole 40 of the mounting body 4 in sequence.

The shape and the like shown in the present embodiment are merely examples, and various modifications and changes can be made within the scope of the gist of the present invention described in the claims. For example, the number of coil stacks inside and outside the large number of heat transfer tubes 5 forming the heat exchange section 6, the number of coil turns of each coil section, and the number of tube threads can be appropriately set in addition to the embodiment.

Further, the positions of the inlet header 2A and the exit header 2B shown in the present embodiment can be appropriately changed to positions other than those of the embodiment.

Further, in the present embodiment, an example in which the mounting bodies 4 are arranged at equal intervals is shown, but the present invention is not limited to this, and the mounting bodies 4 may be arranged at appropriate intervals.

1 Multiple coil type heat exchanger 2 Tank body 2a Outer cylinder 2b Inner cylinder (cylinder body)
3 Electric heater 32 Heater 4 Mounting body 5 Heat transfer tube L1 First fluid L2 Second fluid

Claims (2)

A cylinder filled with a first fluid made of a heat medium and
A heater provided inside the cylinder to heat the first fluid, and
It has a large number of heat transfer tubes made of fluororesin, which are wound around the cylinder in a multiple coil shape.
A multi-coil type heat exchanger in which the second fluid introduced into the heat transfer tube exchanges heat with the first fluid heated by the heater and then is discharged from the heat transfer tube. The cylinder is an inner cylinder,
Further having an outer cylinder in which the inner cylinder is housed,
The outer cylinder and the inner cylinder are filled with the first fluid.
The multi-coil heat exchanger according to claim 1, wherein a heater for heating the first fluid is provided in the outer cylinder and the inner cylinder.

Images