JP2007101048A - Gas heater - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive gas heater with high heat efficiency not causing metal contamination by using quartz glass on a face contacting fluid to be heated, and not having risk of failure even when used in high temperature. <P>SOLUTION: The gas heater is arranged in a gas communication part, and it has a coil part wound regularly along an outer face of a partition pipe. It is provided with a sheathed heater having a sheathed tubing composition formed by quartz glass, having lead-out parts respectively piercing side plates on both sides of an apparatus body and led out to the outside, and the lead-out parts are fixed by welding to penetrating parts of the apparatus body. In the sheathed heater, an electric heater, and electrical insulation powder filled so as to contact the electric heater and an inner face of the sheathed tubing are arranged in the sheathed tubing. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a gas heating apparatus used in a process that must be processed in a clean environment such as a drying process performed after cleaning a semiconductor device.

  A sheathed heater is formed using an electric heater, a gas heater that heats and discharges gas is formed, and is used in a drying process of a semiconductor device.

  An example in which a metal pipe is used as a pipe for housing an electric heater is described in Patent Document 1, and an example in which stainless steel is used is described in Patent Document 2.

  Patent Document 3 has an adsorption layer having at least activated alumina, silica, and zeolite on the whole or a part of the surface of the effective heat generating portion of the glass tube heater incorporating electric resistance, and a white metal on the surface of the adsorption layer. A deodorizing heater provided with a catalyst coating layer and provided with a catalyst concentration gradient is described.

  Patent Document 4 is characterized in that a fluid heating tube is disposed on the outer periphery of the electric heater, an inward reflecting member is disposed on the outer periphery of the fluid heating tube 1, and the fluid heating tube is a transparent member. A fluid heater is described.

  In Patent Document 5, a quartz heater pipe having both ends sealed and a resistance heater disposed therein, and an outer peripheral surface of the heater pipe are inserted and inserted at predetermined intervals in the longitudinal direction. A plurality of quartz ring machines arranged adjacent to each other so that the notches formed in the opposite directions are opposite to each other, and both ends are sealed and contacted with the circumferential surface of the ring machine Fluid heating provided with a quartz outer tube enclosing a heater pipe, and a quartz inlet pipe and an outlet pipe connected to both ends of the outer cylinder and connected to a fluid passage between the outer cylinder and the heater pipe The vessel is described.

Japanese Patent No. 2952499 JP 2004-134106 A JP-A-6-300307 Japanese Patent Laid-Open No. 5-231712 JP-A-6-23242

  There are the following problems in installing a fluid heater as described in Patent Documents 1 to 5 in a clean environment such as a drying process performed after cleaning a semiconductor device.

  Although the sheathed heater shown in Patent Document 1 is often adopted, a small amount of an inorganic oxide having a specific particle size range is added to the magnesia powder of the electrical insulating material to be packed inside to prevent a decrease in insulation resistance at high temperature. However, since the heater outer cylinder is a metal body, metal contamination cannot be avoided as described above.

  The sheathed heater and the heater using the sheathed heater disclosed in Patent Document 2 are often employed. However, the heater outer cylinder (seeds) is made of stainless steel with a specified chemical component, and the heater outer cylinder is a metal body. Inability to avoid metal contamination.

  Although the deodorizing heater shown in Patent Document 3 uses a glass tube heater, it has a deodorizing catalyst coating layer to constitute a deodorizing heater, and contamination cannot be avoided for use in a semiconductor device processing process. .

  In the heating device shown in Patent Document 4, an expensive halogen lamp is used as a heating element, and the fluid is heated by the radiant heat, but the gas hardly absorbs the radiant heat. The radiant heat is reflected infinitely between the halogen lamp and the reflective material to absorb the radiant heat in the gas. Actually, there is no reflecting material having a reflectance of 100%, and gold foil and gold plating are close to this, but they are expensive. Therefore, even a reflective material absorbs radiant heat and becomes high temperature. In addition, the hollow tube in which the halogen lamp is housed is high in temperature, and a seal member is provided to escape thermal expansion due to a temperature difference from the outer tube (the first hollow tube in the specification). However, when the heat resistance temperature is at most several hundred degrees C. and the heating temperature is high, sealing cannot be performed. There is a metal ferrule as such a high-temperature seal, but metal contamination cannot be avoided.

  In the fluid heating device disclosed in Patent Document 5, the surface in contact with the fluid to be heated is made of quartz for the heater pipe, the outer periphery, and the ring disk, and is not contaminated with metal, but is in contact with the fluid to be heated. All surfaces are quartz and do not contaminate the metal, but radiant heat can escape easily, and many ring machines are welded to the heater pipe to increase thermal efficiency, but the welding work takes time and is expensive. . Also, with such a configuration, the thermal expansion of quartz is small, but in gas heating, the temperature difference between the high-temperature heater pipe and the outer cylinder is large, and the more the gas is heated to a higher temperature, the more the thermal expansion difference may cause damage. There is.

  In view of this point, the present invention provides an inexpensive gas heating device with high thermal efficiency, in which quartz glass is used on the surface in contact with the fluid to be heated, there is no metal contamination, and there is no risk of damage even when used at high temperatures. The purpose is to provide.

The present invention is a gas heater that heats and discharges gas by incorporating a sheathed heater into the container body,
The vessel body has a tubular portion formed of quartz glass, a gas inlet is formed in part, and a gas outlet is formed in the other part,
A septum that is formed of quartz glass and has an opening that extends in the longitudinal direction of the cylindrical space in the container body, is welded and fixed to a part of the plate of the container body, and opens in the cylindrical space. And a gas flow part narrowed by the diaphragm along the outer peripheral surface of the diaphragm is formed in communication with the inlet, the outlet and the opening,
A lead that is disposed in the gas flow part and has a coil part that is regularly wound along the outer surface of the diaphragm, and is led out through each part of the vessel body. And the lead-out portion is welded and fixed to the penetrating portion of the main body of the container body, and has a sheathed capillary structure formed of quartz glass. A heating heater, and the heating heater and the sheathed capillary tube are formed in the sheathed capillary tube. There is provided a gas heater comprising a sheathed heater in which an electrically insulating powder filled so as to be in contact with an inner surface is disposed.

  Further, in the above-described gas heater, a portion of the longitudinal direction of the cylindrical space portion of the main body that extends outside the separation pipe and is opposite to the welded side of the main body. The gas flow that is fixed by welding to the cylindrical space, has an opening that opens in the cylindrical space, is provided with another diaphragm formed of quartz glass, and is narrowed between the diaphragm and the other diaphragm A gas heater is provided in which a portion is formed.

  In the above-mentioned gas heater, an inflow conduit and an exhaust conduit are welded and fixed to each of the inlet and the outlet by quartz glass.

  In the gas heating device according to the present invention, the portion constituting the surface in contact with the fluid to be heated as described above is formed of quartz glass, and in this case, a partition tube formed of quartz glass is provided, and the outer surface of the partition tube The sheathed heater is configured to have a coil portion that is regularly wound along the sheathed heater, and the sheathed heater is filled in the sheathed thin tube so as to be in contact with the inner surface of the electrical heater and the sheathed capillary. Therefore, there is no metal contamination, there is no risk of damage even when used at a high temperature, and the heat efficiency can be high and inexpensive.

In the gas heater that heats and discharges gas by incorporating a sheathed heater into the main body of the container body according to the embodiment of the present invention,
The main body is composed of a tubular portion made of quartz glass, and side plates that are made of quartz glass and block both sides of the tubular portion, with a gas inlet in part and a gas in the other part. An outlet is formed,
An opening that extends in the longitudinal direction of the cylindrical space in the container body so that the inside communicates with the discharge port, is welded and fixed to a side plate on one side of the container body, and opens in the cylindrical space. Having a septum formed of quartz glass,
In the longitudinal direction of the cylindrical space portion of the main body, it is located outside the separation tube, and is welded and fixed to the side plate opposite to the one side plate of the main body. An opening that opens, and includes another diaphragm formed of quartz glass, and the gas circulation portion narrowed between the diaphragm and the other diaphragm is the inlet, the outlet, and Forming a fluid return flow from the inlet to the outlet in communication with the two openings;
In the gas flow part, having a coil part that is regularly wound along the outer surface of the diaphragm, and having a lead-out part that is led out to the outside through the side plates on both sides of the body body, The lead-out part is welded and fixed to the penetrating part of the main body of the vessel body, and has a sheathed capillary structure formed of quartz glass so that the sheathed heater is in contact with the heater and the inner surface of the heater and the sheathed capillary. A sheathed heater is provided in which filled electrical insulating powder is disposed.

  The side plates are fixed to the tubular portions by welding.

In addition, in a gas heater that heats and discharges gas by incorporating an electric heater into the main body of the embodiment of the present invention,
The main body is composed of a tubular portion made of quartz glass, and side plates that are made of quartz glass and block both sides of the tubular portion, with a gas inlet in part and a gas in the other part. An outlet is formed,
The inside extends in the longitudinal direction of the cylindrical space in the main body so as to communicate with the inflow port, one side is welded and fixed to a side plate on one side of the main body, the other side is closed, and the cylindrical space In the section, there is an opening that opens close to the side plate on the one side, and includes a diaphragm formed of quartz glass, and a gas flow section narrowed by the diaphragm along the outer peripheral surface of the diaphragm. Communicating with the inlet, outlet and the opening to form a one-way flow of fluid from the inlet to the outlet;
In the gas flow part, having a coil part that is regularly wound along the outer surface of the diaphragm, and having a lead-out part that is led out to the outside through the side plates on both sides of the body body, The lead-out part is welded and fixed to the penetrating part of the main body of the vessel body and has a sheathed capillary structure formed of quartz glass, and the sheathed capillary tube is in contact with the heating heater and the inner surface of the heating heater and the sheathed capillary tube. A sheathed heater is provided in which filled electrical insulating powder is disposed.

  Embodiments of the present invention will be described below with reference to the drawings.

  1 is a cross-sectional view of a gas heater 100 according to a first embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along the line XX ′ of FIG. In these drawings, the gas heater 100 is configured as a heating device that incorporates a sheathed heater (that is, an electric heater) 2 into the main body 1 to heat and discharge the heated gas 101.

The main body 1 is composed of a tubular portion 21 made of quartz glass and side plates 22 and 23 that are made of quartz glass and block portions on both sides of the tubular portion 21, respectively. And the gas outlet 25 is formed in the other part.
It extends in the longitudinal direction (left and right in the figure) of the cylindrical space 31 in the main body 1, is welded and fixed to a part of the main body 1, that is, one side plate 23, and opens in the cylindrical space 31. And a gas flow part 33 narrowed by the partition 5 along the outer peripheral surface of the partition 5 is provided with an inlet 24, an outlet 25, and an outlet 32. It is formed in communication with the opening 32.

  The coil portion 41 is disposed in the gas flow portion 33 and is regularly wound along the outer surface of the diaphragm 5, and the portions on both sides of the body body 1, that is, the side plates 22 and 23 are respectively provided. There are linear lead-out portions 42 and 43 that pass through and lead out to the outside, and these lead-out portions 42 and 43 are welded and fixed to the through-portions 44 and 45 of the main body 1 and are formed of quartz glass. A sheathed heater having a narrow tube or sheath 9 configuration, in which a heat generating heater (ie, a heat generating coil) 10 and an electrically insulating powder 11 filled so as to contact the inner surface of the heat generating heater 10 and the thin tube 9 are disposed. 2 is provided.

  In the longitudinal direction of the cylindrical space portion 31 of the main body 1, it is located outside the separation tube 5 and extends and is welded and fixed to the side plate 22 on the opposite side of the side plate 23 on the one side of the main body 1. The gas flow part 33 having an opening 34 opened in the part 31, including another separation pipe 4 made of quartz glass, and being narrowed between the separation pipe 5 and the other separation pipe 4, Further, another gas flow part 35 is formed between the separation tube 4 and the tubular part 32. Here, the other separation tube 4 is referred to as a first separation tube, and the separation tube 5 is referred to as a second separation tube.

  The inflow conduit 6 and the exhaust conduit 7 are welded and fixed to the inflow port 24 and the exhaust port 25 by quartz glass, respectively.

  In the gas heater 100, the tubular main body 1 and the side plates 22 and 23 are integrally welded. A gas inflow conduit 6 is attached to one end of the main body 1, and a discharge conduit 7 is attached to the other side plate 23 by welding. The first separator 4 is welded and fixed at one end to the side plate 22 inside the vessel body 1, and the other end is separated from the side plate 23 to form an opening 34 to form a gas passage.

  The second diaphragm 5 is welded and fixed at one end to the side plate 23 inside the first diaphragm 4, and the other end is separated from the side plate 22 to form an opening 32 to form a gas passage.

  A discharge conduit 7 is welded to the side plate 23. The sheathed heater 2 is disposed between the first and second separation tubes 4 and 5.

  The sheathed heater 2 has a structure in which a heater 10 is placed inside a sheathed thin tube 9 formed of a quartz glass tube in a coil shape, and the gap is filled with a powder as an electrical insulating material, that is, an electrical insulating powder 11. Yes. The difference in thermal expansion caused by the temperature difference can be absorbed by forming the coil shape. Both ends of the heater 10 are connected to power terminals 12a and 12b. Spot welding or TIG welding is employed for connection between the heater 10 and the power terminals 12a and 12b. The power terminals 12a and 12b are fixed at both ends of the sheathed thin tube 9 with sealing materials 13a and 13b and sealed so that the electric insulating powder 11 does not come out.

  Both ends of the sheath thin tube 9 are welded to the side plates 22 and 23 and are integrated with the main body 1, the side plates 22 and 23, the first separation tube 4, the second separation tube 5, the inflow conduit 6, and the discharge conduit 7. The heated gas 101 enters from the inflow conduit 6 and is in the cylindrical space 31, and has a donut-like shape in the gas circulation part 35, which is a gap formed in the tubular part 21 of the container body 1 and the first separation pipe 4. It flows through the flow path and flows from the opening 34 of the first partition 4 into the gas flow part 33 that is a gap formed by the first partition 4 and the second partition 5. The heated gas is heated by the electric heater 2 disposed in the gas flow part 33.

  When a power source is connected to the power supply terminals 12a and 12b and energized, the heater 10 generates resistance, and heat is transferred to the electrically insulating powder 11 filled with the heat by contact heat conduction. The sheath tubule 9 is heated by heat conduction in the electrical insulating powder 11 to become a high temperature, and heat is applied from the surface of the sheath tubule 9 to the heated gas by convection. The heated gas to be heated flows into the inside of the second partition 5 from the opening 32 of the second partition 5 and is discharged from the discharge port 25 to the discharge conduit 7.

  As described above, the gas to be heated is heated by receiving heat from the surface of the sheathed thin tube 9 having a high temperature by convection. In this way, even if the power density (power load) on the surface of the heater is increased by transferring the heat of the heater 10 to the electrical insulating powder 11 by contact heat conduction, the temperature of the heater is directly radiated without the electrical insulating powder 11. Lower than the method. This is because the heat generating heater 10 is more likely to transfer heat when it is in contact with the solid than the gas, so that the life of the heat generating heater 10 can be extended.

  When the fluid to be heated is heated directly by heat radiation from the heater 10, the liquid absorbs radiant heat if it is liquid, but the gas hardly absorbs heat radiation, so the heating efficiency is poor. The present embodiment has a feature that the electric insulating material 11 is filled so as to be in contact with the inner surfaces of the heater 10 and the sheathed thin tube 9. FIG. 3 shows an example of the relationship between the wavelength of radiant heat and the transmittance of quartz glass. Quartz glass has a wavelength range in which heat radiation is not absorbed as shown in FIG. 3, so heat flows out to the outside and the thermal efficiency is poor. However, when the heat of the heater is transmitted to the insulating powder, the temperature of the seeds The heat efficiency is increased because heat is transferred from the quartz glass tube to the heated gas by convection.

  FIG. 4 is an explanatory diagram of the model described above.

  (A) shows a case where a transparent quartz glass tube is used for the sheathed thin tube and is not filled with the insulating material powder, (b) shows a case where an opaque quartz glass tube is used and is not filled with the insulating material powder, and (c) shows this case. The case where an insulating material powder is filled in a quartz sheath capillary by the method of the example is shown. (D) shows the case where metal is used for seeds and the insulating material powder is filled.

  In (a), the radiant heat emitted from the heating wire is transmitted except for the non-transparent wavelength of the quartz glass, and the transmitted radiant heat is not absorbed by the gas but released to the outside. Therefore, heat loss is large and the temperature of the heating wire is high. In (b), the radiant heat emitted from the heating wire is absorbed by the opaque quartz glass more than in (a), but the temperature of the heating wire becomes higher because the surroundings of the heating wire are gas. In (c) of this embodiment, the heat from the heating wire is not radiated but transmitted to the quartz glass tube by the heat conduction of the insulating powder, so the temperature of the heating wire is lower than that of (a) and (b) and the heat loss is small. Become. In (d), the temperature of the heating wire is low as in (c), but since the seeds are metal, the heated gas is contaminated.

  Eventually (a) is clean but heat efficiency is poor and the life of the heating wire is short, (b) is clean and heat loss is less than (a), but the life of the heating wire is short, and (d) is low in heat loss. The life of the heating wire can be extended, but it is contaminated by metal seeds.

  (C) is clean, has good thermal efficiency, and can extend the life of the heating wire.

  FIG. 5 shows the results when each case is used. It can be seen that the case (c) of this example is excellent in any of the amount of heat absorbed by the gas, heat loss, temperature of the heater, the life of the heater, and contamination of the heated gas.

  As described above, the gas heater 100 according to the present embodiment has the following configuration.

  The vessel body 1 is composed of a tubular portion 21 made of quartz glass and side plates 22 and 23 made of quartz glass and blocking the both sides of the tubular portion 21, respectively. A gas discharge port 25 is formed in the other part.

  An opening that extends in the longitudinal direction of the cylindrical space portion 31 in the main body so that the inside communicates with the discharge port 25, is welded and fixed to the side plate 23 on one side of the main body 1, and opens in the cylindrical space portion A second diaphragm 5 having a portion 32 and made of quartz glass is provided.

  In the longitudinal direction of the cylindrical space portion 31 of the main body 1, it is located outside the second septum and is welded and fixed to the side plate 22 opposite to the side plate 23 on one side of the main body 1. A gas flow part having an opening 34 opened in the space part, including a first diaphragm 4 made of quartz glass, and narrowed between the second diaphragm 5 and the first diaphragm 4 33 communicates with the inlet 24, the outlet 25, and the two openings 34, 32, and a flow of fluid is formed from the inlet 24 toward the outlet 25.

  The coil portion 41 is regularly wound along the outer surface of the second separation tube 5 in the gas circulation portion, and is led out through the side plates 22 and 23 on both sides of the main body 1. It has lead-out portions 42 and 43, the lead-out portions 42 and 43 are welded and fixed to the penetrating portions 44 and 45 of the main body 1, and has a sheathed thin tube 9 structure formed of quartz glass. A sheathed heater in which electrically insulating powder 11 filled so as to be in contact with the inner surface of the heater 10 and the heater 10 and the sheathed thin tube 9 is provided.

  The side plates 22 and 23 are fixed to the tubular portion 41 by welding.

  As the material used, the heater 10 is made of an inexpensive nichrome wire and the insulating powder is usually made of magnesia. As the sealing materials 13a and 13b, glass or epoxy resin is used depending on the temperature of the sealing portion when a general sheathed tube 9 is a metal heater, but when the sheathed tubes 13a and 13b are quartz glass, the thermal conductivity of quartz glass is metal. Therefore, it is possible to use an inexpensive and easy-to-implement silicon rubber for the sealing materials 13a and 13b.

  Further, when the sheath thin tube 9 is made of metal, if the heater 10 and the sheath thin tube 9 come into contact with each other, there is a risk of electric leakage, and since the insulating material powder is likely to absorb moisture, the sealing is surely performed so as not to cause insulation deterioration due to moisture absorption.

  On the other hand, since quartz glass has excellent insulation properties even at high temperatures, when quartz glass is used as a seed, there is no risk of leakage even if it contacts with the heater 10, and even if the insulating material powder absorbs moisture, the insulation is lowered. Therefore, it is sufficient to simply seal for the purpose of preventing the insulating powder from coming out and fixing the power terminal, and the operation becomes extremely simple.

  As described above, the main body 1 and the side plates 22 and 23 welded to the main body 1, the first separator 4, the second separator 5, the inlet 24, the outlet 25, and the sheathed capillary 9 are made of quartz glass. Is used.

  As the quartz glass, either fused silica glass or synthetic quartz glass can be used, and not only transparent quartz glass but also opaque quartz glass can be used. In either case, the quartz glass tube is filled with insulating powder such as magnesia. Gases used in the process of semiconductor devices are required to be strictly cleaned, and those having a very high degree of cleanliness defined by the particle size of contaminants and the number of particles in a unit volume are required.

  Quartz glass has very few impurities, so there is no risk of contaminating the heated gas, and a high cleanliness can be achieved.

  FIG. 6 is a cross-sectional view of Embodiment 2 of the present invention. The same configurations as those in the first embodiment are denoted by the numbers used in the first embodiment, and the description made in the first embodiment is used for the description of those configurations.

  The gas heater 100 is integrally formed by welding and joining the tubular main body 1 and the side plates 22 and 23. A gas inflow conduit 6 is attached to the side plate 22 and a discharge conduit 7 is attached to the side plate 23 by welding. The inner cylinder 16 closed by welding the closing plate 17 to the tip is welded and fixed to a side plate 22 on the opposite side of the closing plate 17, and an opening 18 that is a vent hole is provided close to the inlet 24 on the inlet side. Is provided. The sheathed heater 2 is disposed in the gas flow part 33 between the main body 1 and the inner cylinder 16, and the sheathed capillary 9 is welded to the side plates 22 and 23 on both sides. The heated gas 101 flows in from the inflow conduit 6, enters the cylindrical space 31 where the electric heater 2 is disposed, and is heated and discharged from the discharge port 7 through the opening 18 of the inner cylinder 16.

  In this example, the cylindrical space part 31 and the gas circulation part 33 have the same configuration and are narrowed. In this case, as in the embodiment shown in FIGS. 1 and 2, it is impossible to prevent the waste heat flowing out to the outside due to the provision of the first separation pipe 4, but the other effects are the same. In addition, the number of diaphragms is reduced by one, and the structure becomes simpler and cheaper.

  As described above, the gas heater 100 according to the present embodiment has the following configuration.

  The main body 1 is composed of a tubular portion 21 made of quartz glass, and side plates 22 and 23 made of quartz glass that respectively close both sides of the tubular portion 21, and a gas inlet 24 is formed in a part thereof, and A gas discharge port 25 is formed in the other part.

  It extends in the longitudinal direction of the cylindrical space 31 in the container body so that the inside communicates with the inlet 24, one side is welded and fixed to the side plate 22 on one side of the container body 1, and the other side is closed by the closing plate 17. It is closed, and has an opening 18 that opens close to the side plate 22 on one side in the cylindrical space 31, and includes an inner cylinder 16 diaphragm formed of quartz glass, along the outer peripheral surface of the diaphragm The gas flow part 33 narrowed by the separation pipe communicates with the inlet 24, the outlet 25 and the opening 18, and a one-way flow of fluid is formed in the longitudinal direction from the inlet 24 toward the outlet 25. .

  A lead-out part which is in the gas circulation part and has a coil part 41 regularly wound along the outer surface of the diaphragm, and is led out through the side plates 22 and 23 on both sides of the main body 1. 42, 43, the lead-out portions 42, 43 are fixed to the through portions 44, 45 of the main body 1 by welding and have a sheathed thin tube 9 configuration made of quartz glass. 10 and the heater 10 and the sheathed heater in which the electrically insulating powder 11 filled so as to come into contact with the inner surface of the sheathed thin tube 9 is provided.

  FIG. 7 is an explanatory diagram illustrating a method for manufacturing the gas heater according to the first embodiment.

Operation 1: (a-1) is a cross-sectional view of an integrated body of the second diaphragm 5, the side plate 23 and the discharge conduit 7.
(A-2) is a cross-sectional view (a-3) of the main body 1 provided with the inflow conduit 6;
Sectional drawing of the integrated object of the pipe | tube 4 and the side plate 22, (a-4) is an external view of the sheath thin tube 9.
Thus, these parts and parts are first manufactured as shown in these drawings. (A-4)
The rod-shaped quartz glass tube is bent and softened at a high temperature to form a coil.
Shape. As a result, the sheath portion with the coil portion 41 and the lead-out portions 42 and 43 is provided.
A tube 9 is formed.
Work 2: Connect the power supply terminal 12a to one side of the heater 10 as shown in (b).
Work 3: (a-1) (a-2) (a-3) (a-4) gathered together as shown by the arrows,
(C) The sheath thin tube 9 formed into a coil shape, the container body 1, the side plate 22,
23, the inflow conduit 6, the exhaust conduit 7, the first septum 4, and the second septum 5 are welded into an integrated structure
To do.
Work 4: Heat generation in which the power supply terminal 12a is connected to one end inside the sheathed thin tube 9 as shown in FIG.
The heater 10 is inserted and the heater 10 is heated from the end of the sheathed capillary 9 opposite to the insertion side.
Let's go out.
Work 5: Connect the power terminal 12b to the other end where the power terminal is not welded, as shown in (e)
Return to the specified position.
Operation 6: Insulating powder 11 is poured into the sheathed thin tube 9 and filled as shown in (f).
Operation 7: Seal both ends of the sheathed thin tube 9 with the sealing material 13. As a result, the gas shown in FIG.
The heater 100 is manufactured. In addition, in the gas heater 100 of Example 2,
It is manufactured in the same way.

The gas heater 100 configured as described above has the following characteristics.
(1) The heated gas is in contact with only quartz glass, and contamination of the heated gas can be completely prevented.
(2) In addition, the sheathed heater is filled with insulating powder, mainly magnesia, in the quartz glass tube, which is a sheathed capillary, so heat flows from the red-heated heater to the insulating powder first, and then the insulating powder. Heat flows into the quartz glass tube of the sheathed tube, and the temperature of the quartz glass tube rises. Heat is heated to the heated gas by convection from the quartz glass tube surface that has become high temperature (lower temperature than the heater), so it is wasted outside the heater compared to heating directly from the heater with heat radiation. Outflowing radiant heat can be reduced.
(3) Since the quartz glass tube, which is the sheathed thin tube of the sheathed heater, is formed in a coil shape, the difference in thermal expansion due to the temperature difference is absorbed as torsional deformation like a coil spring, resulting in a large temperature difference. There is no risk of damage.
(4) In addition, since the gas heater of this embodiment does not use sealing parts and has an integrated welded structure of quartz glass, there is no risk of leakage from the sealing part.
(5) Nichrome wire can be used as a normal heating element, and can be remarkably inexpensive compared to halogen lamps.
(6) When the electric insulation powder is not filled, since the surroundings of the heat generating heater is a gas, the heat of the heat generating heater is first transferred to the gas, so the surface power density cannot be increased.
Although it is about 13 W / cm ² , in this embodiment, the heat of the heat generating heater is transferred to the electrically insulating powder by contact heat conduction, so that the surface power density can be increased several times, and the same heating capacity can be downsized.
(7) In addition, since heat flows through the electrically insulating powder by contact heat conduction, the temperature of the heat generating heater can be lowered and the life of the heat generating heater is extended.
(8) If the heater is broken, the heater body can be easily replaced without changing the main body, and the replacement work will not contaminate.

  According to the present embodiment, since all the portions in contact with the heated gas are quartz glass, the heated gas can be heated without being contaminated, and heat is transferred from the heating heater to the heated gas by convection instead of direct heat radiation. A heater that is small, has a long life, and is compact is provided.

Sectional drawing of the Example of this invention. X-X 'sectional drawing of FIG. The figure which shows an example of the relationship between the wavelength of a radiant heat, and the transmittance | permeability. Model explanatory drawing. An example figure which shows the result of a model example. Sectional drawing of the other Example of this invention. The figure which shows a manufacturing method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Container body, 2 ... Seeds heater (electric heater), 4 ... 1st septum, 5 ... 2nd septum, 6 ... Inflow conduit, 7 ... Discharge conduit, 9 ... Seeds capillary (seeds), 10 ... Heat generation Heater (heat generating coil), 11 ... electric insulating powder, 12a, 12b ... power supply terminal, 13a, 13b ... sealing material, 16 ... inner cylinder, 17 ... blocking plate, 18 ... ventilation hole (opening), 32,34 ... opening Part, 22, 23 ... side plate, 100 ... gas heater.

Claims (6)

In a gas heater that heats and discharges gas by incorporating a sheathed heater in the main body,
The vessel body has a tubular portion formed of quartz glass, a gas inlet is formed in part, and a gas outlet is formed in the other part,
A septum that is formed of quartz glass and has an opening that extends in the longitudinal direction of the cylindrical space in the container body, is welded and fixed to a part of the plate of the container body, and opens in the cylindrical space. And a gas flow part narrowed by the diaphragm along the outer peripheral surface of the diaphragm is formed in communication with the inlet, the outlet and the opening,
A lead that is disposed in the gas flow part and has a coil part that is regularly wound along the outer surface of the diaphragm, and is led out through each part of the vessel body. And the lead-out portion is welded and fixed to the penetrating portion of the main body of the container body, and has a sheathed capillary structure formed of quartz glass. A heating heater, and the heating heater and the sheathed capillary tube are formed in the sheathed capillary tube. A gas heater comprising: a sheathed heater in which electrically insulating powder filled so as to be in contact with an inner surface is disposed.   2. The longitudinal direction of the cylindrical space portion of the main body of the container body according to claim 1, extending outside the separation pipe and being welded and fixed to a portion of the main body opposite to the side where the welding is fixed. The gas flow part having an opening part opened in the cylindrical space part, provided with another separation pipe formed of quartz glass, and being narrowed between the separation pipe and the other separation pipe. A gas heater characterized by that.   3. The gas heater according to claim 1, wherein an inflow conduit and an exhaust conduit are welded and fixed to the inflow port and the exhaust port by quartz glass, respectively. In a gas heater that heats and discharges gas by incorporating a sheathed heater in the main body,
The main body is composed of a tubular portion made of quartz glass, and side plates that are made of quartz glass and block both sides of the tubular portion, with a gas inlet in part and a gas in the other part. An outlet is formed,
An opening that extends in the longitudinal direction of the cylindrical space in the container body so that the inside communicates with the discharge port, is welded and fixed to a side plate on one side of the container body, and opens in the cylindrical space. Having a septum formed of quartz glass,
In the longitudinal direction of the cylindrical space portion of the main body, it is located outside the separation tube, and is welded and fixed to the side plate opposite to the one side plate of the main body. An opening that opens, and includes another diaphragm formed of quartz glass, and the gas circulation portion narrowed between the diaphragm and the other diaphragm is the inlet, the outlet, and Forming a fluid return flow from the inlet to the outlet in communication with the two openings;
In the gas flow part, having a coil part that is regularly wound along the outer surface of the diaphragm, and having a lead-out part that is led out to the outside through the side plates on both sides of the body body, The lead-out part is welded and fixed to the penetrating part of the main body of the vessel body, and has a sheathed capillary structure formed of quartz glass so that the sheathed heater is in contact with the heater and the inner surface of the heater and the sheathed capillary. A gas heater, comprising: a sheathed heater in which filled electric insulating powder is disposed.   5. The gas heater according to claim 4, wherein the side plates are fixed to the tubular portion by welding. In a gas heater that heats and discharges gas by incorporating a sheathed heater in the main body,
The main body is composed of a tubular portion made of quartz glass, and side plates that are made of quartz glass and block both sides of the tubular portion, with a gas inlet in part and a gas in the other part. An outlet is formed,
The inside extends in the longitudinal direction of the cylindrical space in the main body so as to communicate with the inflow port, one side is welded and fixed to a side plate on one side of the main body, the other side is closed, and the cylindrical space In the section, there is an opening that opens close to the side plate on the one side, and includes a diaphragm formed of quartz glass, and a gas flow section narrowed by the diaphragm along the outer peripheral surface of the diaphragm. Communicating with the inlet, outlet and the opening to form a one-way flow of fluid from the inlet to the outlet;
In the gas flow part, having a coil part that is regularly wound along the outer surface of the diaphragm, and having a lead-out part that is led out to the outside through the side plates on both sides of the body body, The lead-out part is welded and fixed to the penetrating part of the main body of the vessel body and has a sheathed capillary structure formed of quartz glass, and the sheathed capillary tube is in contact with the heating heater and the inner surface of the heating heater and the sheathed capillary tube. A gas heater, comprising: a sheathed heater in which filled electric insulating powder is disposed.

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