JPH0787158B2 - Method for manufacturing laminated ceramic element - Google Patents

Description

TECHNICAL FIELD The present invention relates to a method for producing a laminated ceramic element that is effective when applied to the production of a laminated ceramic electrostrictive element or a laminated ceramic capacitor element.

"Prior Art" For example, as shown in FIGS. 4A and 4B, a method of manufacturing a laminated electrostrictive element is performed by using a ceramic such as lead zirconate titanate whose surface is coated with a conductive layer 2 to be an internal electrode in a predetermined pattern. After preparing a raw sheet 1 and a protective raw sheet 1'of the same quality having no conductive layer, these are laminated as shown in FIG.
As shown in FIG. 3, the laminated electrostrictive element is cut into individual pieces S of the laminated electrostrictive element and baked at 950 to 1100 ° C. as shown in FIG.

[Conventional Problems] According to the above-mentioned conventional technique, since the laminated surface of each ceramic green sheet is simply in contact with each other, the ceramics are fired with a positional deviation due to the pressure at the time of crimping, which often causes defective products. Was unavoidable. Further, there is a drawback that delamination is likely to occur.

[Means for Solving the Problem] When laminating each ceramic green sheet, the ceramic green sheets are laminated and adhered via a resin adhesive layer containing the same ceramic powder as that used for the green sheets.

"Operation" Since the laminated surface of each ceramic green sheet is adhered by the resin adhesive layer, there is no positional deviation due to the pressure applied during pressure bonding. Further, since the resin adhesive layer contains the ceramic powder of the same material as the ceramic green sheet, the difference in thermal expansion between the ceramic green sheet and the conductive layer is relaxed and peeling (delamination) during firing is prevented.

[Example] A 0.25 mm thick sheet was formed from a ceramic paste made of lead zirconate titanate by a doctor blade method, and an Ag-Pd-based metallized ink was formed on the surface by a screen to form a conductive layer having a predetermined pattern (internal electrode). ) 2 printed ceramic green sheets 1 (FIG. 1A) and 1 protective sheet 1 '(FIG. 1B) made of the same quality ceramic green sheets on which the conductive layer 2 is not printed. Next, a mixture of the same lead zirconate thiconate powder used in the ceramic paste and a resin adhesive was formed as an adhesive layer 3 on the surface of each ceramic green sheet 1 to a thickness of 10 μm. The green sheets 1 are sequentially laminated and adhered via the, and the protective sheet 1'is laminated and adhered to the uppermost portion (second
Figure). Subsequently, the bonded laminated body was heated at a temperature of 80 ° C. and a pressure of 8 Kg /
Thermocompression bonding under the condition of cm ² . Further, this crimped body is cut into a single piece S as shown in FIG. 3 and fired at 950 to 1100 ° C. After firing, a conductive paint (not shown) such as silver is applied to both side surfaces and wiring is performed so as to be electrically parallel to each other, whereby the laminated electrostrictive element is completed.

Next, for the laminated electrostrictive element obtained by the method of the present invention and the electrostrictive element obtained by a conventional method that does not use an adhesive layer, the results of measuring delamination and voltage-displacement characteristics are shown in the following table. As described above, the laminated electrostrictive element according to the method of the present invention has a smaller defect occurrence rate than the conventional method,
It was also confirmed that the voltage-displacement characteristics were excellent.

In the above example, the thickness of the adhesive layer 3 is preferably half or less of the thickness of the ceramic green sheet to be laminated, and if it is thicker than this, delamination easily occurs after firing, and the amount of the ceramic powder filled in the resin adhesive is large. Is 20-60
It was also confirmed by experiments that the range of 20% by weight is preferable and the strain due to thermal expansion between the laminated surfaces of the green sheets cannot be sufficiently relaxed when the weight is less than 20% by weight, and the adhesive force is remarkably lowered when the weight exceeds 60% by weight.

Further, in the above example, the laminated electrostrictive element which is displaced in the longitudinal direction (lamination direction) by applying a voltage is symmetrical, but it goes without saying that the present invention can be applied to a laminated capacitor element used as a high capacity element.

[Effect] According to the method of the present invention, since each ceramic green sheet can be adhered and laminated, the stacking work is easier than the conventional method, and the positional deviation does not occur due to the pressure at the time of crimping. Since the occurrence of lamination can be suppressed, there is an advantage that the yield can be improved and the laminated ceramic element of this kind having excellent reliability can be provided at low cost.

[Brief description of drawings]

1A and 1B are explanatory views showing a ceramic green sheet having an adhesive layer adhered on the upper surface and a protective sheet used in the example of the present invention, and FIG.
1A and 1B are explanatory views showing a laminated state of a plurality of green sheets and a protective sheet, and FIG. 3 is a perspective view of a laminated ceramic element obtained by cutting the laminated body shown in FIG. The figure is shown. 4A, 4B and 5 relate to the conventional example, respectively, and are explanatory views similar to FIGS. 1A, 1B and 2 described above.
The same numbers in the drawings indicate the same parts. 1 ... Ceramic green sheet, 1 '... Protective ceramic green sheet, 2 ... Conductive layer used as internal electrode, 3 ... Resin adhesive layer

Claims (1)

[Claims] 1. A plurality of ceramic green sheets each having a conductive layer coated on the surface thereof are laminated and adhered via a resin adhesive layer containing an appropriate amount of the same ceramic powder as that used for the sheets, and pressed. Manufacturing method of multilayer ceramic element.