JPH076610Y2 - イオン注入装置 - Google Patents
イオン注入装置Info
- Publication number
- JPH076610Y2 JPH076610Y2 JP5823088U JP5823088U JPH076610Y2 JP H076610 Y2 JPH076610 Y2 JP H076610Y2 JP 5823088 U JP5823088 U JP 5823088U JP 5823088 U JP5823088 U JP 5823088U JP H076610 Y2 JPH076610 Y2 JP H076610Y2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- lens
- ion
- electrode
- amplifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005468 ion implantation Methods 0.000 claims description 31
- 238000010884 ion-beam technique Methods 0.000 claims description 27
- 230000005856 abnormality Effects 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 15
- 150000002500 ions Chemical class 0.000 description 20
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5823088U JPH076610Y2 (ja) | 1988-04-27 | 1988-04-27 | イオン注入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5823088U JPH076610Y2 (ja) | 1988-04-27 | 1988-04-27 | イオン注入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01160651U JPH01160651U (enrdf_load_stackoverflow) | 1989-11-08 |
| JPH076610Y2 true JPH076610Y2 (ja) | 1995-02-15 |
Family
ID=31284054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5823088U Expired - Lifetime JPH076610Y2 (ja) | 1988-04-27 | 1988-04-27 | イオン注入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH076610Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-04-27 JP JP5823088U patent/JPH076610Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01160651U (enrdf_load_stackoverflow) | 1989-11-08 |
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