JPH01160651U - - Google Patents

Info

Publication number
JPH01160651U
JPH01160651U JP5823088U JP5823088U JPH01160651U JP H01160651 U JPH01160651 U JP H01160651U JP 5823088 U JP5823088 U JP 5823088U JP 5823088 U JP5823088 U JP 5823088U JP H01160651 U JPH01160651 U JP H01160651U
Authority
JP
Japan
Prior art keywords
voltage
lens
amplifier
setting device
threshold voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5823088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH076610Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5823088U priority Critical patent/JPH076610Y2/ja
Publication of JPH01160651U publication Critical patent/JPH01160651U/ja
Application granted granted Critical
Publication of JPH076610Y2 publication Critical patent/JPH076610Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP5823088U 1988-04-27 1988-04-27 イオン注入装置 Expired - Lifetime JPH076610Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5823088U JPH076610Y2 (ja) 1988-04-27 1988-04-27 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5823088U JPH076610Y2 (ja) 1988-04-27 1988-04-27 イオン注入装置

Publications (2)

Publication Number Publication Date
JPH01160651U true JPH01160651U (enrdf_load_stackoverflow) 1989-11-08
JPH076610Y2 JPH076610Y2 (ja) 1995-02-15

Family

ID=31284054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5823088U Expired - Lifetime JPH076610Y2 (ja) 1988-04-27 1988-04-27 イオン注入装置

Country Status (1)

Country Link
JP (1) JPH076610Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH076610Y2 (ja) 1995-02-15

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