JPH0766095A - Clean truck - Google Patents

Abstract

PURPOSE:To suppress dust generated from a truck by providing an electrostatic eliminator at an air exhaust side of a filter, providing a mechanism for vertically moving a substrate cassette input/output door along a side of the clean truck, and forming a cassette base plate in a drawer type. CONSTITUTION:The air introduced from an air intake port 8 by a motor fan 14 is supplied to a clean room 16 through a filter 15. Further, deelectrified air is supplied to a panel 2 by an electrostatic eliminator 13 adjacent to the filter 15, and exhausted from an air exhaust port 9. A door is formed in a mechanism for vertically sliding. In addition, a cassette base plate for placing a cassette 3 is formed in a drawer type. Thus, adherence of dust to a substrate in the case of step-to-step transfer is suppressed, an electrostatic destruction is prevented, and further a quantity of generating dusts generated during operating is reduced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean carriage for an insulating substrate which prevents electrostatic charge on the substrate and reduces dust, and a glass substrate or resin used for a display panel such as a liquid crystal or plasma display. The present invention relates to a clean carriage that conveys an insulating substrate such as a substrate.

As an example, a liquid crystal display is used in various fields from a small one such as a wristwatch to a large one such as an image display panel of a television. Since there are many display systems, it is necessary to suppress the occurrence of defective pixels.

That is, a liquid crystal display (LCD) adopting an active matrix display system is formed by including a thin film transistor (TFT) in each pixel region formed by three-dimensionally intersecting a data bus line and a drain bus line. Therefore, it is necessary to form TFTs with an extremely high yield, and therefore, LCDs are manufactured in a tightly controlled clean room.

[0004]

2. Description of the Related Art A display panel (hereinafter abbreviated as "panel") that constitutes a large LCD such as a TV is 400 mm x 300 mm.
A large glass plate with a size of 1.1 mm (horizontal x vertical x thickness) is used as a substrate. By applying thin film formation technology and photolithography technology (photolithography) to this, a fine pattern that forms pixels is created. However, since it is necessary to manufacture a large number of pixels without defects, at least Class 10
Work is carried out in a clean room of 0 or less (100 or less 0.5 μm dust per cubic foot). Next, it is necessary to transfer panels from one process to another in various processes performed in a clean room, but for this inter-process transfer, multiple panels are stored in a cassette as a lot, and this cassette is Although it is transported, the weight of the cassette containing the panel is 10 to 20 kg.
Therefore, cassettes are transported using a clean trolley.

That is, although the work is carried out by a worker wearing a dustproof garment in a clean room, dust is easily generated by the movement of an object or a person and easily adheres to the panel. Also supplies clean air to the panel to prevent dust from adhering.

FIG. 2 is a perspective view showing the structure of a generally used clean carriage 1. A plurality of panels 2 are housed in a cassette 3 at regular intervals, and the cassette 3 is mounted on a cassette base plate. Placed on top of 4, clean trolley 1
The handle 5 provided on the side surface of the is pushed, and the caster 6 conveys it.

There are various types of clean trolleys. The structure of FIG. 2 will be described. A clean room in which the cassette 3 is mounted is located above the clean trolley, and a motor for supplying clean air to the clean room. It is composed of a region composed of a fan and a filter. In the lower part, the power supply 7 for driving the motor fan, that is,
Batteries and chargers are provided.

The air taken in from the air intake port 8 is pressurized by a motor fan to remove dust through a filter, and clean air is supplied between the panels inside the cassette 3 and discharged from the air take-out port 9 to remove the dust. 2 has a structure that prevents dust from adhering to it.

[0009]

As described above, the panel is manufactured in a clean room, and a method of using a clean trolley to prevent dust from adhering is used in the transfer between steps. It is not perfect, and the occurrence of defects due to dust adhesion cannot be avoided. This is because dust removal by the filter is incomplete, and dust is generated due to the movement of objects and people in the clean room.

Further, in the conventional clean carriage, the air supplied from the filter is directly supplied onto the substrate. However, the air may be charged due to dust removal by the filter. By supplying to the substrate, the substrate was sometimes charged and electrostatically adsorbed dust.

Therefore, it is an object to improve the performance of the filter so that the air to be supplied is not charged and to suppress dust generation from the clean carriage when the substrate cassette is taken in and out.

[0012]

The above-mentioned problems are solved by providing a static elimination device on the air extraction side of the filter provided in the clean carriage, and moving the door for loading and unloading the substrate cassette up and down along the side surface of the clean carriage. It is possible to solve the problem by adopting a mechanism, which is a slide type or a winding type, and a cassette base plate on which the substrate cassette is placed is a pull-out type to form a clean carriage for an insulating substrate.

[0013]

At present, the high-performance filter provided for supplying clean air to the clean room is made of a group of glass fibers having a small diameter and is commercially available under the trade names of HEPA and ULPA. The feature of this filter is that, in addition to trapping dust larger than the gap by letting air pass through the gap between fine glass fibers, the friction of the air causes the glass fibers to be charged and electrostatic attraction of dust occurs. .

However, the inventor presumed that charged air was present and was the cause of the breakage because breakage due to electric discharge sometimes occurred between the minute gaps of the electronic circuit patterned on the panel. That is, the glass is charged by the friction between the air and the glass fiber, and at the same time the air is charged,
Therefore, the object hit by the air is electrostatically charged to cause electrostatic attraction of dust, and electrostatic breakdown may occur in some cases.

As a countermeasure against this, the present invention provides a static electricity removing device on the output side of the filter. Here, the static eliminator is a device that uses the corona discharge phenomenon to generate positively and negatively charged air, and is a device that discharges by applying a high voltage between needle-shaped or linear electrodes. High voltage application method, positive and negative DC high voltage application method,
Various methods such as a method of applying a pulse voltage are known.

In the present invention, this static electricity removing device is provided adjacent to the filter, and the charged air generated by friction with the glass fiber of the filter is neutralized by positive or negative air ions. Although there is concern about the influence of the positive and negative ions that remain, since the life of the ions is extremely short, electrostatic adsorption due to this does not occur.

Next, dust is generated by the movement of an object or a person, but this is due to the turbulence of the air. Therefore, the inventor examined the suppression of dust generation from this viewpoint in the clean carriage. As a result, in the conventional clean trolley, as shown in FIG. 2, when the cassette 3 is loaded and unloaded, the lid 11 is opened and closed, or a door is provided on the side surface of the trolley at a position above the handle 5 and this door is provided on one side. After opening, the operator leaned out and carried in and out the cassette 3. Therefore, air turbulence is generated and dust is generated.

Therefore, according to the present invention, as a method for carrying in and out the cassette 3 while suppressing the turbulence of the air, the method of moving the lid or the door along the side surface of the carriage is used to prevent the turbulent flow of the air. Suppress. The cassette base plate on which the cassette is placed is of a drawer type, which reduces the movement of the operator and prevents the generation of dust. By adopting the above method, dust generation is suppressed in the step of carrying between steps.

[0019]

EXAMPLE 1 (corresponding to claim 1 and FIG. 1) FIG. 1 is a sectional view of an upper portion of a clean truck to which the present invention is applied. The difference is that a static electricity removing device 13 is added. That is, the air that has entered from the air intake port 8 by the motor fan 14 is supplied to the clean room 16 through the filter 15. In this case, the ULPA filter is used as the filter. Also, as the static eliminator 13 provided adjacent to the filter 15, the product name DC type ionizer (model 430,
(Huggle Electronics Co.) was used.

The size of the cassette 3 is 400 mm × 30.
Panel 2 with 0 mm (horizontal x vertical) with 11 mm spacing
10 sheets are placed. The air thus discharged by the static eliminator 13 was supplied to the panel 2 and discharged from the air outlet 9 as in the conventional case. As a result, electrostatic breakdown between the fine patterns of the panel 2 was eliminated, and the panel yield could be improved. Embodiment 2 (corresponding to claim 2 and FIGS. 3 and 4) FIG. 3 shows a door 17 provided with a lock mechanism 18 and a slide frame 19 provided with the lock mechanism 18 as a method for reducing dust generation when the cassette is taken in and out. The rail 20 is formed so as to be slidable in the vertical direction. As a result, when the door 17 was opened and closed, it was possible to suppress the occurrence of turbulence and suppress dust generation.

FIG. 4 is a sectional view of another dolly,
The door is a roll-up shutter 22 and the roll-up mechanism 23
The handle 24 is provided so that it can be moved up and down. Further, the cassette base plate 26 on which the cassette 3 is placed is formed by the pull-out method. When the cassette 3 is carried out, the cassette base plate 26 is extended to the position indicated by the broken line so that the cassette 3 can be taken out. As a result, the amount of movement of the operator is reduced, and as a result, dust generation can be reduced more than before.

[0022]

By using the clean carriage according to the present invention, it is possible to prevent dust from adhering to the substrate and prevent electrostatic breakdown during the movement between steps in a manufacturing process using an insulating substrate. It is possible to reduce the amount of dust generated during the work of loading and unloading the cassette from the clean carriage.

[Brief description of drawings]

FIG. 1 is a sectional view of an upper portion of a clean truck to which the present invention is applied.

FIG. 2 is a perspective view of a generally used clean carriage.

FIG. 3 is a front view of a clean truck to which the present invention is applied.

FIG. 4 is a sectional view of another clean truck to which the present invention is applied.

[Explanation of symbols]

 1 Clean Cart 2 Panel 3 Cassette 4, 26 Cassette Base Plate 7 Power Supply Unit 8 Air Inlet 9 Air Outlet 11 Lid 13 Static Electricity Remover 14 Motor Fan 15 Filter 16 Clean Room 17 Door 18 Lock Mechanism 22 Roll-up Shutter

Claims (4)

[Claims] 1. A motor fan (14) for taking in air through at least an air intake port (8) and a filter (15), wherein the air introduced through the air intake port (8) is supplied to the filter to clean the air. An area for producing air, a static electricity removing device provided on the clean air extraction side of the filter (15), and a substrate cassette (3) having a plurality of insulating substrates mounted thereon, and the static electricity removing device. A clean room (16) that receives the supply of clean air that has passed through (13) to keep the insulating substrate clean, a region for providing a power supply unit (7) that supplies power to the motor fan (14), and a floor A clean carriage, comprising: a moving mechanism provided on a bottom surface facing the surface. 2. A motor fan (14) for taking in air through at least the air intake port (8) and a filter (15), wherein the air introduced through the air intake port (8) is supplied to the filter for cleaning. An area for producing air and a substrate cassette (3) on which a plurality of insulating substrates are mounted, and a cassette loading mechanism that can be pulled out and moved in the mounting direction are provided. A clean room (16) for keeping the substrate clean, and a surface provided with the filter (15) of the clean room (16) so that the cassette loading mechanism can be moved in and out of the clean room (16). Are provided on different side surfaces and move along the side surfaces, an area where the power supply unit (7) for supplying electric power to the motor fan (14) is provided, and a floor surface. Clean carriage, characterized in that it comprises a moving mechanism provided in that bottom portion. 3. The clean room (16), wherein the opening / closing part is the clean room (16).
A door that is moved by a slide mechanism provided on one side surface, and is configured to move up and down along the side surface by the slide mechanism to open and close the clean room (16). The clean trolley described in 2. 4. The clean room (16), wherein the opening / closing part is the clean room (16).
A door that is moved by a hoisting mechanism provided on one side surface, and is configured to move up and down along the side surface by the slide mechanism to open and close the clean room (16). The clean trolley described in 2.