JPH0759364A - 静電型マイクロモータ - Google Patents

静電型マイクロモータ

Info

Publication number
JPH0759364A
JPH0759364A JP3216696A JP21669691A JPH0759364A JP H0759364 A JPH0759364 A JP H0759364A JP 3216696 A JP3216696 A JP 3216696A JP 21669691 A JP21669691 A JP 21669691A JP H0759364 A JPH0759364 A JP H0759364A
Authority
JP
Japan
Prior art keywords
rotor
stator
ring
hub
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3216696A
Other languages
English (en)
Japanese (ja)
Inventor
Lionel Paratte
ライオネル パラッテ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asulab AG
Original Assignee
Asulab AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asulab AG filed Critical Asulab AG
Publication of JPH0759364A publication Critical patent/JPH0759364A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/004—Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path

Landscapes

  • Micromachines (AREA)
JP3216696A 1990-02-09 1991-02-12 静電型マイクロモータ Pending JPH0759364A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH415/90A CH680322A5 (US06650917-20031118-M00005.png) 1990-02-09 1990-02-09
CH00415/90-3 1990-02-09

Publications (1)

Publication Number Publication Date
JPH0759364A true JPH0759364A (ja) 1995-03-03

Family

ID=4186514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3216696A Pending JPH0759364A (ja) 1990-02-09 1991-02-12 静電型マイクロモータ

Country Status (3)

Country Link
US (1) US5191251A (US06650917-20031118-M00005.png)
JP (1) JPH0759364A (US06650917-20031118-M00005.png)
CH (1) CH680322A5 (US06650917-20031118-M00005.png)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5378954A (en) * 1990-04-16 1995-01-03 Fujitsu Limited Electrostatic actuator
JP2946793B2 (ja) * 1991-03-19 1999-09-06 ブラザー工業株式会社 光偏向器
US5206983A (en) * 1991-06-24 1993-05-04 Wisconsin Alumni Research Foundation Method of manufacturing micromechanical devices
US6472794B1 (en) * 1992-07-10 2002-10-29 Matsushita Electric Industrial Co., Ltd. Microactuator
US5412265A (en) * 1993-04-05 1995-05-02 Ford Motor Company Planar micro-motor and method of fabrication
US5417801A (en) * 1993-06-29 1995-05-23 Xerox Corporation Process to manufacture bushings for micromechanical elements
US5729074A (en) * 1994-03-24 1998-03-17 Sumitomo Electric Industries, Ltd. Micro mechanical component and production process thereof
JPH09501820A (ja) * 1994-05-26 1997-02-18 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ 半径方向磁界電気マイクロモータ、このマイクロモータに用いる円筒状本体、このマイクロモータの製造方法及び軸線方向電気マイクロモータ
US5510299A (en) * 1994-06-03 1996-04-23 United Microelectronics Corp. Method for the manufacture of IC-processed micro electro-static motors
US5631514A (en) * 1994-06-09 1997-05-20 The United States Of America As Represented By The United States Department Of Energy Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
US5685062A (en) * 1994-07-05 1997-11-11 Ford Motor Company Self-assembly fabrication method for planar micro-motor
US5539267A (en) * 1994-07-21 1996-07-23 International Business Machines Corporation Microfabricated rotary motion wobble motor and disk drive incorporating it
US6430001B1 (en) 1995-03-16 2002-08-06 International Business Machines Corporation Integrated data storage disk and disk drive
US6208485B1 (en) 1995-03-16 2001-03-27 International Business Machines Corporation Microfile
US5836150A (en) * 1995-05-31 1998-11-17 The United States Of America As Represented By The United States Department Of Energy Micro thrust and heat generator
US5943223A (en) * 1997-10-15 1999-08-24 Reliance Electric Industrial Company Electric switches for reducing on-state power loss
US6137206A (en) * 1999-03-23 2000-10-24 Cronos Integrated Microsystems, Inc. Microelectromechanical rotary structures
DE19949611B4 (de) * 1999-10-14 2007-05-31 Infineon Technologies Ag Drehratensensor
US6351051B1 (en) * 2000-04-07 2002-02-26 Microsoft Corporation Microelectromechanical systems actuttor using a time-varying magnetic field
US6757093B2 (en) * 2001-05-21 2004-06-29 Jds Uniphase Corporation MEMS reflectors having tail portions that extend inside a recess and head portions that extend outside the recess and methods of forming same
US6832383B2 (en) 2002-06-19 2004-12-14 Agere Systems Inc. MEMS disk drive and method of manufacture therefor
US8037777B2 (en) * 2004-10-22 2011-10-18 Rochester Institute Of Technology Structurally compliant microbearing devices and methods thereof
US8220777B2 (en) * 2005-04-29 2012-07-17 Georgia Tech Research Corporation Compliant rotary mechanism and method
TW200940437A (en) * 2008-03-27 2009-10-01 Sunonwealth Electr Mach Ind Co Miniaturized motor
DE102011109129A1 (de) * 2011-07-14 2013-01-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Elektrischer Energiewandler und Verfahren zu seiner Herstellung
WO2019161256A2 (en) 2018-02-15 2019-08-22 The Charles Stark Draper Laboratory, Inc. Electrostatic motor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US791310A (en) * 1904-12-31 1905-05-30 Baker Electric Company Stationary plate for static machines.
US3392293A (en) * 1964-12-29 1968-07-09 Teletype Corp Electromagnetic stepping motor
US3984709A (en) * 1974-02-25 1976-10-05 Kabushiki Kaisha Tokai Rika Denki Seisakusho Miniature electric motor
DE2730041C2 (de) * 1977-07-02 1986-05-07 Teldix Gmbh, 6900 Heidelberg Taumelscheibenschrittmotor
DE3065427D1 (en) * 1979-10-18 1983-12-01 Sealed Motor Const Co Ltd Axial gap squirrel cage induction electric motor
US4394597A (en) * 1980-09-15 1983-07-19 Allied Corporation Multiple pole axial field electromagnetic devices
JPS6395867A (ja) * 1986-10-13 1988-04-26 Canon Inc 静電アクチユエ−タ
US4754185A (en) * 1986-10-16 1988-06-28 American Telephone And Telegraph Company, At&T Bell Laboratories Micro-electrostatic motor
US4943750A (en) * 1987-05-20 1990-07-24 Massachusetts Institute Of Technology Electrostatic micromotor
US4740410A (en) * 1987-05-28 1988-04-26 The Regents Of The University Of California Micromechanical elements and methods for their fabrication
JPH078149B2 (ja) * 1989-06-16 1995-01-30 松下電器産業株式会社 静電型マイクロモータの駆動力伝達装置

Also Published As

Publication number Publication date
CH680322A5 (US06650917-20031118-M00005.png) 1992-07-31
US5191251A (en) 1993-03-02

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