JPH0755000Y2 - 熱処理装置 - Google Patents
熱処理装置Info
- Publication number
- JPH0755000Y2 JPH0755000Y2 JP10119389U JP10119389U JPH0755000Y2 JP H0755000 Y2 JPH0755000 Y2 JP H0755000Y2 JP 10119389 U JP10119389 U JP 10119389U JP 10119389 U JP10119389 U JP 10119389U JP H0755000 Y2 JPH0755000 Y2 JP H0755000Y2
- Authority
- JP
- Japan
- Prior art keywords
- combustion
- nozzle
- fluid
- heat treatment
- hydrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 title claims description 13
- 238000002485 combustion reaction Methods 0.000 claims description 65
- 239000012530 fluid Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 40
- 239000001257 hydrogen Substances 0.000 description 19
- 229910052739 hydrogen Inorganic materials 0.000 description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 239000001301 oxygen Substances 0.000 description 13
- 229910052760 oxygen Inorganic materials 0.000 description 13
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 12
- 229910001882 dioxygen Inorganic materials 0.000 description 12
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 3
- 239000002360 explosive Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000011491 glass wool Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10119389U JPH0755000Y2 (ja) | 1989-08-31 | 1989-08-31 | 熱処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10119389U JPH0755000Y2 (ja) | 1989-08-31 | 1989-08-31 | 熱処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0341931U JPH0341931U (enrdf_load_stackoverflow) | 1991-04-22 |
| JPH0755000Y2 true JPH0755000Y2 (ja) | 1995-12-18 |
Family
ID=31650156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10119389U Expired - Lifetime JPH0755000Y2 (ja) | 1989-08-31 | 1989-08-31 | 熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0755000Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-08-31 JP JP10119389U patent/JPH0755000Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0341931U (enrdf_load_stackoverflow) | 1991-04-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |