JPH0754917Y2 - イオン注入装置 - Google Patents

イオン注入装置

Info

Publication number
JPH0754917Y2
JPH0754917Y2 JP2676790U JP2676790U JPH0754917Y2 JP H0754917 Y2 JPH0754917 Y2 JP H0754917Y2 JP 2676790 U JP2676790 U JP 2676790U JP 2676790 U JP2676790 U JP 2676790U JP H0754917 Y2 JPH0754917 Y2 JP H0754917Y2
Authority
JP
Japan
Prior art keywords
substrate
beam current
ion
trigger signal
current measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2676790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03118546U (enrdf_load_stackoverflow
Inventor
潤一 立道
靖典 安東
秀樹 西出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP2676790U priority Critical patent/JPH0754917Y2/ja
Publication of JPH03118546U publication Critical patent/JPH03118546U/ja
Application granted granted Critical
Publication of JPH0754917Y2 publication Critical patent/JPH0754917Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP2676790U 1990-03-16 1990-03-16 イオン注入装置 Expired - Lifetime JPH0754917Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2676790U JPH0754917Y2 (ja) 1990-03-16 1990-03-16 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2676790U JPH0754917Y2 (ja) 1990-03-16 1990-03-16 イオン注入装置

Publications (2)

Publication Number Publication Date
JPH03118546U JPH03118546U (enrdf_load_stackoverflow) 1991-12-06
JPH0754917Y2 true JPH0754917Y2 (ja) 1995-12-18

Family

ID=31529647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2676790U Expired - Lifetime JPH0754917Y2 (ja) 1990-03-16 1990-03-16 イオン注入装置

Country Status (1)

Country Link
JP (1) JPH0754917Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH03118546U (enrdf_load_stackoverflow) 1991-12-06

Similar Documents

Publication Publication Date Title
US4219719A (en) Method and apparatus for automatically positioning a workpiece relative to a scanning field or mask
US4816693A (en) Apparatus and method for uniform ion dose control
JPH0754917Y2 (ja) イオン注入装置
GB762432A (en) Improvements in or relating to the testing of solid material for determining specific radiation absorption capacity and apparatus therefor
WO1988005535A3 (en) Ion mobility detector
JP2000306540A (ja) イオン注入装置におけるビーム電流測定装置
JPH0574185B2 (enrdf_load_stackoverflow)
GB1044026A (en) Grazing incidence vacuum spectrometer
Lam et al. An automated dose mapping system for the TRIUMF biomedical pion beam
JP3052436B2 (ja) イオン処理装置
JPS5887746A (ja) イオン注入装置における入射ビ−ム量測定値補正方法
JPS5911402Y2 (ja) 質量分析計の質量数ピ−クトツプ自動判別設定装置
JPS6068542A (ja) イオン注入装置
JPS5833643Y2 (ja) 質量分析装置におけるイオンビ−ム電流検出装置
JPS5823704B2 (ja) 電離性放射線ビ−ムの位置、強度、一様性および指向性の監視装置
JPH0355239Y2 (enrdf_load_stackoverflow)
JPS5217886A (en) Multikind ion detector
JP2663749B2 (ja) イオン処理装置
JPH0119110B2 (enrdf_load_stackoverflow)
SU1291913A1 (ru) Способ калибровки оптической системы многозазорного трекового детектора
JP2805812B2 (ja) イオン注入装置
SU1517574A1 (ru) Способ определени чувствительности вакуумных ионизационных камер
JPH04262355A (ja) イオン注入装置
JP2706478B2 (ja) イオン注入方法及び装置
JPS637655B2 (enrdf_load_stackoverflow)