JPH0754582B2 - Flexible magnetic disk - Google Patents

Flexible magnetic disk

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Publication number
JPH0754582B2
JPH0754582B2 JP61240620A JP24062086A JPH0754582B2 JP H0754582 B2 JPH0754582 B2 JP H0754582B2 JP 61240620 A JP61240620 A JP 61240620A JP 24062086 A JP24062086 A JP 24062086A JP H0754582 B2 JPH0754582 B2 JP H0754582B2
Authority
JP
Japan
Prior art keywords
magnetic disk
thin film
flexible magnetic
magnetic
flexible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61240620A
Other languages
Japanese (ja)
Other versions
JPS6394433A (en
Inventor
嘉啓 本村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61240620A priority Critical patent/JPH0754582B2/en
Publication of JPS6394433A publication Critical patent/JPS6394433A/en
Publication of JPH0754582B2 publication Critical patent/JPH0754582B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は薄膜型の可撓性磁気ディスク(フレキシブル磁
気ディスク)に関する。
TECHNICAL FIELD The present invention relates to a thin film type flexible magnetic disk (flexible magnetic disk).

〔従来の技術〕[Conventional technology]

近年、可撓性磁気ディスクを記録媒体として用いるフレ
キシブル磁気ディスク装置は、媒体交換、ランダムアク
セスが可能で安価であるため小型コンピュータの外部記
憶装置を始めとして広く用いられ、さらに高記録密度
化、高信頼性化が進められている。磁気記録における高
記録密度化は主として磁気記録媒体の磁性層の高保磁力
化と薄層化とによって実現されるが、従来使用されてい
る磁性体微粒子を高分子バインダ中に分散させたものを
基体上に塗布した構造のいわゆる塗布型磁気記録媒体に
比べて、高保磁力化が容易で薄層化に適したCo-Ni合金
の蒸着膜やスパッタ膜、或いはCo-Pt合金スパッタ膜等
を用いる金属薄膜型磁気記録媒体が注目されている。一
方、このような磁気記録媒体の面内方向に記録を行なう
従来の長手記録方式とは異なり、磁気記録媒体の厚さ方
向に残留磁化を形成して信号の記録を行なう垂直磁気記
録方式は、高い記録密度が得られる点で注目され、その
記録媒体としてCo-Cr合金の蒸着膜またはスパッタ膜が
研究されている。
In recent years, a flexible magnetic disk device using a flexible magnetic disk as a recording medium has been widely used as an external storage device of a small computer since it can exchange media, can be randomly accessed, and is inexpensive. Reliability is being promoted. Higher recording density in magnetic recording is realized mainly by increasing the coercive force and thinning of the magnetic layer of the magnetic recording medium, but a base material is one in which conventionally used magnetic fine particles are dispersed in a polymer binder. Compared to the so-called coating type magnetic recording medium with the structure coated above, a metal that uses a Co-Ni alloy vapor deposition film or sputtered film, or a Co-Pt alloy sputtered film that is easy to achieve high coercive force and suitable for thinning A thin film magnetic recording medium has been attracting attention. On the other hand, unlike the conventional longitudinal recording method of recording in the in-plane direction of such a magnetic recording medium, the perpendicular magnetic recording method of recording a signal by forming residual magnetization in the thickness direction of the magnetic recording medium is Attention has been paid to the fact that a high recording density can be obtained, and a vapor-deposited film or a sputtered film of a Co—Cr alloy is being researched as the recording medium.

これら高記録密度用薄膜媒体をフレキシブル磁気ディス
クとする事が試みられている。この時には、可撓性の高
分子フィルムを基体として、上記の強磁性薄膜をその両
面に蒸着スパッタリング等の方法で形成したものをディ
スク形状に成形する。
Attempts have been made to use these high recording density thin film media as flexible magnetic disks. At this time, a flexible polymer film is used as a substrate, and the ferromagnetic thin film is formed on both surfaces thereof by a method such as vapor deposition sputtering to form a disk shape.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

しかしながら従来の薄膜型のフレキシブル磁気ディスク
には磁気ヘッドとの摺動に対する機械的耐久性が実用上
充分でないという問題点があった。
However, the conventional thin film type flexible magnetic disk has a problem that mechanical durability against sliding with a magnetic head is not practically sufficient.

フレキシブル磁気ディスク装置においては信号の記録再
生時、媒体は磁気ヘッドに押し付けらるが、媒体自身の
可撓性によって磁気ヘッド表面に密着するように変形
し、ディスクの回転に伴い接触摺動する。この為、媒体
と磁気ヘッドとの間隙は小さくなり、優れた記録再生特
性が得られるのである。しかし逆に、装置作動状態では
この様な変形と接触摺動を繰り返すため、媒体は磁気ヘ
ッドとの摺動に対する機械的耐久性に優れていることが
要求される。
In the flexible magnetic disk device, the medium is pressed against the magnetic head when recording / reproducing a signal. However, the flexibility of the medium deforms the medium so that it closely adheres to the surface of the magnetic head, and the contact magnetically slides as the disk rotates. Therefore, the gap between the medium and the magnetic head becomes small, and excellent recording / reproducing characteristics can be obtained. However, conversely, such deformation and contact sliding are repeated in the operating state of the apparatus, and therefore the medium is required to have excellent mechanical durability against sliding with the magnetic head.

従来の塗布型媒体では磁性層の厚さが数μmと厚く、し
かも磁性体微粒子を高分子バインダ中に分散させた構造
であるため繰り返しの変形、摺動に対しても実用上充分
な耐久性を実現出来た。これに対して薄膜型媒体では磁
性層の厚さが1μm以下と薄く、連続薄膜であるため実
用上必要な機械的耐久性を実現するのが困難であった。
In conventional coating media, the magnetic layer is as thick as several μm, and magnetic fine particles are dispersed in the polymer binder, so it is practically durable against repeated deformation and sliding. Was realized. On the other hand, in the thin-film medium, the thickness of the magnetic layer is as thin as 1 μm or less, and since it is a continuous thin film, it is difficult to realize the mechanical durability required for practical use.

フレキシブル磁気ディスクのような可撓性の材料の耐久
性には材料全体の柔軟性もしくは剛性が大きな影響を及
ぼす事が知られている(例えば、社団法人 日本潤滑学
会発行「潤滑」、第30巻、第8号、554ページ)。しか
し、その最適値は個々の機械システムによって異なるた
め、一般的には決められない。
It is known that the flexibility or rigidity of the entire material has a great influence on the durability of a flexible material such as a flexible magnetic disk (for example, "Lubrication", Volume 30 issued by the Japan Society of Lubrication). , No. 8, p. 554). However, the optimum value cannot be generally determined because it depends on each mechanical system.

本発明者は、薄膜型フレキシブル磁気ディスクの機械的
耐久性を向上させるため、種々の曲げ剛性の媒体を試作
し、それらの摺動耐久性に対して曲げ剛性の大きさに或
る最適値がある事を見出し、本発明に至ったものであ
る。
In order to improve the mechanical durability of the thin film type flexible magnetic disk, the present inventor prototyped media having various bending rigidity, and for the sliding durability thereof, there was a certain optimum value for the bending rigidity. The present invention has been discovered and has led to the present invention.

〔問題を解決するための手段〕[Means for solving problems]

本発明の可撓性磁気ディスクは、可撓性の基体の両面に
強磁性薄膜を形成して磁気記録層とする可撓性磁気ディ
スクにおいて、曲げ剛性が1×10-5N・m以上1×10-4
N・m以下である事を特徴とする。
The flexible magnetic disk of the present invention is a flexible magnetic disk in which ferromagnetic thin films are formed on both sides of a flexible substrate to form a magnetic recording layer, and the bending rigidity is 1 × 10 −5 N · m or more. × 10 -4
It is characterized by being Nm or less.

〔実施例〕〔Example〕

次に、実施例を挙げて本発明を詳細に説明する。 Next, the present invention will be described in detail with reference to examples.

次の第1表の試料1〜12に示す材質、厚さの異なる基体
を用いてフレキシブル磁気ディスクを試作した。基体の
材質はポリイミド(PI)とポリエチレンテレフタレート
(PET)である。
Flexible magnetic disks were manufactured by trial using substrates having different materials and thicknesses shown in Samples 1 to 12 in Table 1 below. The material of the substrate is polyimide (PI) and polyethylene terephthalate (PET).

磁性層構成が単層の試料は基体の両面にCoCr合金をター
ゲットとしたArガス中のスパッタリングによりそれぞれ
厚さ3000ÅのCoCr薄膜を形成したものである。磁性層構
成が二層の試料は基体の両面にNiFe合金をターゲットと
したArガス中のスパッタリングにより厚さ5000ÅのNiFe
薄膜を形成し、この上にCoCr合金をターゲットとしたAr
ガス中でのスパッタリングにより厚さ3000ÅのCoCr薄膜
を形成したものである。単層、二層共、これら磁性層の
上にさらにSiO2をターゲットとしたArガス中のスパッタ
リングにより厚さ200ÅのSiO2保護膜を形成した。これ
らを3.5インチ径のマイクロフロッピーディスクの形状
に加工した後、潤滑剤としてパーフロロアルキルポリエ
ーテル(デュポン社製、商品名クライトックス)を塗布
して潤滑層を形成し、フレキシブル磁気ディスク媒体と
した。
The sample with a single magnetic layer structure has a CoCr thin film with a thickness of 3000 liters formed on both sides of the substrate by sputtering in a CoCr alloy targeting Ar gas. The sample with a two-layer magnetic layer was prepared by sputtering NiFe alloy on both sides of the substrate in Ar gas to a thickness of 5000Å.
A thin film is formed on top of which a CoCr alloy target Ar
A CoCr thin film with a thickness of 3000Å was formed by sputtering in gas. For both the single layer and the two layers, a SiO 2 protective film having a thickness of 200 Å was further formed on these magnetic layers by sputtering in Ar gas with SiO 2 as a target. After processing these into the shape of a 3.5 inch diameter micro floppy disk, perfluoroalkyl polyether (DuPont Co., trade name Crytox) was applied as a lubricant to form a lubricating layer, which was used as a flexible magnetic disk medium. .

この他に試料13として従来使われている塗布型の媒体
(日本電気(株)、マイクロフロッピーディスク、商品
番号PC-FD802-10)も同時に評価した。
In addition, the coating type medium (NEC Corporation, Micro Floppy Disk, product number PC-FD802-10) that has been conventionally used as Sample 13 was also evaluated.

また、これらの試料の曲げ剛性を測定した。第1図は曲
げ剛性の測定装置の概要を示したものである。測定対象
の試料1を間隔Lのナイフエッジ2.2′で支持し、その
中央部にナイフエッジ3で荷重Wを加え、試料1の中央
部が撓みyだけたわんだとすると、試料1の曲げ剛性D
は試料1の幅をbとすると第1式で与えられる。
In addition, the flexural rigidity of these samples was measured. FIG. 1 shows an outline of a bending stiffness measuring device. If the sample 1 to be measured is supported by a knife edge 2.2 'with a distance L and a load W is applied to the center of the sample 1 by the knife edge 3 and the center of the sample 1 is bent by a deflection y, the bending rigidity D of the sample 1 is
Is given by the first equation, where b is the width of the sample 1.

ここに、E及びIはそれぞれ試料1の弾性係数及び断面
二次モーメントである。
Here, E and I are the elastic modulus and the second moment of area of the sample 1, respectively.

このようにして測定した各試料の曲げ剛性を第1表にま
とめた。
The bending stiffness of each sample thus measured is summarized in Table 1.

これらの試料を市販のマイクロフロッピーディスク駆動
装置に装着して15KFRPIの信号を記録した後、ヘッドロ
ード状態で信号の読みだしを行ない、再生出力が初期出
力の70%に低下するまでの摺動回数を摺動耐久性とし、
結果を第2図にまとめた。測定は温度25℃、相対湿度50
%の環境で行なった。
After mounting these samples on a commercially available micro floppy disk drive and recording a signal of 15KFRPI, the signal was read in the head-loaded state, and the number of slides until the playback output dropped to 70% of the initial output Is the sliding durability,
The results are summarized in Fig. 2. The temperature is 25 ℃ and the relative humidity is 50.
% Environment.

第2図からわかるように、薄膜型可撓性磁気ディスクの
摺動耐久性は基体の材質、磁性層の構成には依存せず媒
体全体の曲げ剛性に依存する。JIS C6291に従ってフレ
キシブル磁気ディスクの実用可能な摺動耐久性を300万
回以上とすると、実用可能な薄膜型媒体はその曲げ剛性
が値が1×10-5N・m以上1×10-4N・m以下の範囲の
ものであることがわかる。従来の塗布型媒体の曲げ剛性
はこの範囲よりも大きな値となっており、これは薄膜型
媒体では従来の塗布型媒体と同程度の曲げ剛性では充分
な耐久性が得られないことを示している。
As can be seen from FIG. 2, the sliding durability of the thin film type flexible magnetic disk does not depend on the material of the substrate and the structure of the magnetic layer but depends on the bending rigidity of the entire medium. According to JIS C 6291, if the practicable sliding durability of the flexible magnetic disk is set to 3 million times or more, the practicable thin film medium has a bending rigidity of 1 × 10 −5 N · m or more and 1 × 10 −4 N or more. -It can be seen that the range is m or less. The flexural rigidity of conventional coated media is greater than this range, which indicates that the thin film media cannot achieve sufficient durability at the same flexural rigidity as conventional coated media. There is.

薄膜型フレキシブル磁気ディスクの摺動耐久性がその曲
げ剛性に大きく依存し、しかもその値の最適範囲が1×
10-5N・m以上1×10-4N・m以下である理由は未だ明
確ではない。しかし、あまりに曲げ剛性が高い時には媒
体が磁気ヘッド表面に沿う形にうまく変形できず、磁気
ヘッドとの接触面積が小さくなり、結果として単位面積
当りの荷重が大きくなり耐久性が低下すると考えられ
る。逆に、曲げ剛性があまりに小さい時には磁気ヘッド
との摩擦力によって媒体全体が大きく変形して、薄膜の
変形限界を越えてしまうと考えられる。
The sliding durability of a thin film type flexible magnetic disk greatly depends on its bending rigidity, and the optimum range of the value is 1x.
The reason why it is 10 −5 N · m or more and 1 × 10 −4 N · m or less is not yet clear. However, when the bending rigidity is too high, the medium cannot be deformed well along the surface of the magnetic head, the contact area with the magnetic head becomes small, and as a result, the load per unit area becomes large and the durability is lowered. On the contrary, when the bending rigidity is too small, it is considered that the entire medium is largely deformed by the frictional force with the magnetic head, and the deformation limit of the thin film is exceeded.

なお、本発明を実施する可撓性磁気ディスクの基体は上
述のポリイミドまたはポリエチレンテレフタレートに限
られず、そのほかに例えば、酢酸セルロース、ニトロセ
ルロース、ポリアミド、ポリメチルメタクリレート、ポ
リテトラフルオロエチレン、ポリトリフルオルエチレ
ン、エチレン、プロピレン等α−オレフィンの重合体あ
るいは共重合体、ポリ塩化ビニルの重合体あるいは共重
合体、ポリ塩化ビニリデン、ポリカーボネート、ポリエ
チレンナフタレート、等の有機高分子フィルムも用いら
れる。
The substrate of the flexible magnetic disk for carrying out the present invention is not limited to the above-mentioned polyimide or polyethylene terephthalate, but may be, for example, cellulose acetate, nitrocellulose, polyamide, polymethylmethacrylate, polytetrafluoroethylene, polytrifluoroethylene. Also usable are organic polymer films such as polymers or copolymers of α-olefins such as ethylene and propylene, polymers or copolymers of polyvinyl chloride, polyvinylidene chloride, polycarbonate, polyethylene naphthalate.

また、強磁性薄膜は上述のCoCrまたはNiFeに限られず、
例えば、Fe、Co、Niその他の強磁性金属、あるいはこれ
らの酸化物、あるいはFe-Co、Co-Ni、Fe-Ti、Fe-Cr、Fe
-Si、Co-V、Co-Sm、Co-Pt、Co-P、Co-Ni-P、Fe-Cr-Co等
の強磁性合金あるいはこれらに添加物を加えたものを真
空蒸着、スパッタリング法、イオンプレーティング法、
電気メッキ法、無電解メッキ法、等によって薄膜状に形
成したものでもよい。強磁性薄膜の厚さは0.01〜2μm
の範囲が好ましい。
Further, the ferromagnetic thin film is not limited to the above CoCr or NiFe,
For example, Fe, Co, Ni and other ferromagnetic metals or their oxides, or Fe-Co, Co-Ni, Fe-Ti, Fe-Cr, Fe
-Si, Co-V, Co-Sm, Co-Pt, Co-P, Co-Ni-P, Fe-Cr-Co and other ferromagnetic alloys or those with additives added are vacuum deposited and sputtered , Ion plating method,
It may be formed into a thin film by an electroplating method, an electroless plating method, or the like. The thickness of the ferromagnetic thin film is 0.01-2 μm
Is preferred.

また上述のSiO2保護膜は、必ずしも必要ではない。また
SiO2保護膜のほかに例えば、Ti、Cr、Mo、W、Al2O3、S
iO2、TiO2、ZrO2、Cr2O3、B4C、SiC、TiC、WC、BN、Si3
N4等の保護膜を設けても良い。
Further, the above-mentioned SiO 2 protective film is not always necessary. Also
In addition to the SiO 2 protective film, for example, Ti, Cr, Mo, W, Al 2 O 3 , S
iO 2 , TiO 2 , ZrO 2 , Cr 2 O 3 , B 4 C, SiC, TiC, WC, BN, Si 3
A protective film such as N 4 may be provided.

さらに強磁性薄膜上、もしくは上記保護覆を設けた場合
は保護膜上に潤滑層を形成する。潤滑層としては脂肪
酸、金属石鹸等の炭化水素系の潤滑剤、シリコーンオイ
ル、フロロシリコンオイル、パーフロロアルキルポリエ
ーテル等の潤滑油、テトラフロロエチレン低重合体、カ
ーボン、二硫化モリブデン等の固体潤滑剤、もしくはこ
れらの混合物を直接、または適当な溶剤に溶解もしくは
分散させたものを強磁性薄膜上もしくは被覆上に真空蒸
着法、浸漬法スプレー法、蒸着法、ローラーコート法、
スピンコート法等の塗布方法によって塗布して形成す
る。
Further, a lubricating layer is formed on the ferromagnetic thin film, or on the protective film when the protective cover is provided. As a lubricating layer, hydrocarbon-based lubricants such as fatty acids and metal soaps, lubricating oils such as silicone oils, fluorosilicone oils, perfluoroalkyl polyethers, low-polymer tetrafluoroethylene, carbon, solid lubricants such as molybdenum disulfide Agent, or a mixture of these directly or dissolved or dispersed in a suitable solvent on the ferromagnetic thin film or coating vacuum deposition method, immersion method spray method, vapor deposition method, roller coating method,
It is formed by coating by a coating method such as a spin coating method.

〔発明の効果〕〔The invention's effect〕

以上のように、本発明によれば、可撓性基体上に形成し
た強磁性薄膜を磁気記録層とする可撓性磁気ディスクに
おいて、磁気ヘッドとの摺動に対して優れた耐久性を得
ることができる。
As described above, according to the present invention, a flexible magnetic disk having a ferromagnetic thin film formed on a flexible substrate as a magnetic recording layer has excellent durability against sliding with a magnetic head. be able to.

【図面の簡単な説明】[Brief description of drawings]

第1図は試料の曲げ剛性の測定方法を示す図、第2図は
試料の曲げ剛性と摺動耐久性との関係を示すグラフであ
る。 1……試料、2,2′,3……エッジ。
FIG. 1 is a diagram showing a method for measuring bending rigidity of a sample, and FIG. 2 is a graph showing a relationship between bending rigidity of a sample and sliding durability. 1 ... Sample, 2,2 ', 3 ... edge.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】可撓性の基体の両面に強磁性薄膜を形成し
て磁気記録層とする可撓性磁気ディスクにおいて、曲げ
剛性が1×10-5N・m以上1×10-4N・m以下である事
を特徴とする可撓性磁気ディスク。
1. A flexible magnetic disk in which ferromagnetic thin films are formed on both sides of a flexible substrate to form a magnetic recording layer, and the flexural rigidity is 1 × 10 −5 N · m or more and 1 × 10 −4 N. -A flexible magnetic disk characterized by being m or less.
JP61240620A 1986-10-08 1986-10-08 Flexible magnetic disk Expired - Lifetime JPH0754582B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61240620A JPH0754582B2 (en) 1986-10-08 1986-10-08 Flexible magnetic disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61240620A JPH0754582B2 (en) 1986-10-08 1986-10-08 Flexible magnetic disk

Publications (2)

Publication Number Publication Date
JPS6394433A JPS6394433A (en) 1988-04-25
JPH0754582B2 true JPH0754582B2 (en) 1995-06-07

Family

ID=17062200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61240620A Expired - Lifetime JPH0754582B2 (en) 1986-10-08 1986-10-08 Flexible magnetic disk

Country Status (1)

Country Link
JP (1) JPH0754582B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6470913A (en) * 1987-09-11 1989-03-16 Toshiba Corp Magnetic recording medium

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0760503B2 (en) * 1985-04-17 1995-06-28 ティーディーケイ株式会社 video tape

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JPS6394433A (en) 1988-04-25

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