JPH0753695Y2 - ファンフィルターユニット - Google Patents
ファンフィルターユニットInfo
- Publication number
- JPH0753695Y2 JPH0753695Y2 JP1986029646U JP2964686U JPH0753695Y2 JP H0753695 Y2 JPH0753695 Y2 JP H0753695Y2 JP 1986029646 U JP1986029646 U JP 1986029646U JP 2964686 U JP2964686 U JP 2964686U JP H0753695 Y2 JPH0753695 Y2 JP H0753695Y2
- Authority
- JP
- Japan
- Prior art keywords
- wall
- exterior body
- filter unit
- fan filter
- blower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000011144 upstream manufacturing Methods 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000000428 dust Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986029646U JPH0753695Y2 (ja) | 1986-02-28 | 1986-02-28 | ファンフィルターユニット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986029646U JPH0753695Y2 (ja) | 1986-02-28 | 1986-02-28 | ファンフィルターユニット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62140917U JPS62140917U (enExample) | 1987-09-05 |
| JPH0753695Y2 true JPH0753695Y2 (ja) | 1995-12-13 |
Family
ID=30833716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986029646U Expired - Lifetime JPH0753695Y2 (ja) | 1986-02-28 | 1986-02-28 | ファンフィルターユニット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0753695Y2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5386830B2 (ja) * | 2008-02-14 | 2014-01-15 | パナソニック株式会社 | ファンフィルターユニット |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60176226U (ja) * | 1984-05-04 | 1985-11-21 | ニッタ株式会社 | エアフイルタ−装置 |
| JPS60173837U (ja) * | 1984-04-23 | 1985-11-18 | 富士電機株式会社 | 簡易式空気清浄装置 |
-
1986
- 1986-02-28 JP JP1986029646U patent/JPH0753695Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62140917U (enExample) | 1987-09-05 |
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