JPH0752640Y2 - 電子線照射装置 - Google Patents
電子線照射装置Info
- Publication number
- JPH0752640Y2 JPH0752640Y2 JP1988107740U JP10774088U JPH0752640Y2 JP H0752640 Y2 JPH0752640 Y2 JP H0752640Y2 JP 1988107740 U JP1988107740 U JP 1988107740U JP 10774088 U JP10774088 U JP 10774088U JP H0752640 Y2 JPH0752640 Y2 JP H0752640Y2
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- cathode
- electron beam
- vacuum chamber
- beam irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 9
- 239000012212 insulator Substances 0.000 claims description 31
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988107740U JPH0752640Y2 (ja) | 1988-08-16 | 1988-08-16 | 電子線照射装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988107740U JPH0752640Y2 (ja) | 1988-08-16 | 1988-08-16 | 電子線照射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0230100U JPH0230100U (enrdf_load_stackoverflow) | 1990-02-26 |
JPH0752640Y2 true JPH0752640Y2 (ja) | 1995-11-29 |
Family
ID=31342425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988107740U Expired - Lifetime JPH0752640Y2 (ja) | 1988-08-16 | 1988-08-16 | 電子線照射装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0752640Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5962995A (en) * | 1997-01-02 | 1999-10-05 | Applied Advanced Technologies, Inc. | Electron beam accelerator |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE371707B (enrdf_load_stackoverflow) * | 1973-03-21 | 1974-11-25 | Record Taxameter Ab | |
JPS6344198U (enrdf_load_stackoverflow) * | 1986-09-08 | 1988-03-24 |
-
1988
- 1988-08-16 JP JP1988107740U patent/JPH0752640Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0230100U (enrdf_load_stackoverflow) | 1990-02-26 |
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