JPH0752640Y2 - 電子線照射装置 - Google Patents

電子線照射装置

Info

Publication number
JPH0752640Y2
JPH0752640Y2 JP1988107740U JP10774088U JPH0752640Y2 JP H0752640 Y2 JPH0752640 Y2 JP H0752640Y2 JP 1988107740 U JP1988107740 U JP 1988107740U JP 10774088 U JP10774088 U JP 10774088U JP H0752640 Y2 JPH0752640 Y2 JP H0752640Y2
Authority
JP
Japan
Prior art keywords
insulator
cathode
electron beam
vacuum chamber
beam irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988107740U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0230100U (enrdf_load_stackoverflow
Inventor
弘道 江尻
寿男 木村
Original Assignee
日新ハイボルテージ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新ハイボルテージ株式会社 filed Critical 日新ハイボルテージ株式会社
Priority to JP1988107740U priority Critical patent/JPH0752640Y2/ja
Publication of JPH0230100U publication Critical patent/JPH0230100U/ja
Application granted granted Critical
Publication of JPH0752640Y2 publication Critical patent/JPH0752640Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988107740U 1988-08-16 1988-08-16 電子線照射装置 Expired - Lifetime JPH0752640Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988107740U JPH0752640Y2 (ja) 1988-08-16 1988-08-16 電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988107740U JPH0752640Y2 (ja) 1988-08-16 1988-08-16 電子線照射装置

Publications (2)

Publication Number Publication Date
JPH0230100U JPH0230100U (enrdf_load_stackoverflow) 1990-02-26
JPH0752640Y2 true JPH0752640Y2 (ja) 1995-11-29

Family

ID=31342425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988107740U Expired - Lifetime JPH0752640Y2 (ja) 1988-08-16 1988-08-16 電子線照射装置

Country Status (1)

Country Link
JP (1) JPH0752640Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5962995A (en) * 1997-01-02 1999-10-05 Applied Advanced Technologies, Inc. Electron beam accelerator

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE371707B (enrdf_load_stackoverflow) * 1973-03-21 1974-11-25 Record Taxameter Ab
JPS6344198U (enrdf_load_stackoverflow) * 1986-09-08 1988-03-24

Also Published As

Publication number Publication date
JPH0230100U (enrdf_load_stackoverflow) 1990-02-26

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