JPH0747865Y2 - ウエハ貼付装置 - Google Patents

ウエハ貼付装置

Info

Publication number
JPH0747865Y2
JPH0747865Y2 JP1989131256U JP13125689U JPH0747865Y2 JP H0747865 Y2 JPH0747865 Y2 JP H0747865Y2 JP 1989131256 U JP1989131256 U JP 1989131256U JP 13125689 U JP13125689 U JP 13125689U JP H0747865 Y2 JPH0747865 Y2 JP H0747865Y2
Authority
JP
Japan
Prior art keywords
wafer
heater
heat medium
wax
reinforcing plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989131256U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0369226U (enrdf_load_stackoverflow
Inventor
巌 早瀬
乾一郎 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1989131256U priority Critical patent/JPH0747865Y2/ja
Publication of JPH0369226U publication Critical patent/JPH0369226U/ja
Application granted granted Critical
Publication of JPH0747865Y2 publication Critical patent/JPH0747865Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
  • Adhesives Or Adhesive Processes (AREA)
JP1989131256U 1989-11-10 1989-11-10 ウエハ貼付装置 Expired - Lifetime JPH0747865Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989131256U JPH0747865Y2 (ja) 1989-11-10 1989-11-10 ウエハ貼付装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989131256U JPH0747865Y2 (ja) 1989-11-10 1989-11-10 ウエハ貼付装置

Publications (2)

Publication Number Publication Date
JPH0369226U JPH0369226U (enrdf_load_stackoverflow) 1991-07-09
JPH0747865Y2 true JPH0747865Y2 (ja) 1995-11-01

Family

ID=31678775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989131256U Expired - Lifetime JPH0747865Y2 (ja) 1989-11-10 1989-11-10 ウエハ貼付装置

Country Status (1)

Country Link
JP (1) JPH0747865Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI573662B (zh) * 2011-03-25 2017-03-11 不二越機械工業股份有限公司 工作件之貼附方法以及貼附裝置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007150132A (ja) * 2005-11-30 2007-06-14 Toshiba Mitsubishi-Electric Industrial System Corp 均熱装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62252945A (ja) * 1986-04-25 1987-11-04 Mitsubishi Heavy Ind Ltd 被加工材の仮止め着脱方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI573662B (zh) * 2011-03-25 2017-03-11 不二越機械工業股份有限公司 工作件之貼附方法以及貼附裝置

Also Published As

Publication number Publication date
JPH0369226U (enrdf_load_stackoverflow) 1991-07-09

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