JPH0746870Y2 - クリーンルームにおける精密機器支持構造 - Google Patents

クリーンルームにおける精密機器支持構造

Info

Publication number
JPH0746870Y2
JPH0746870Y2 JP1990033112U JP3311290U JPH0746870Y2 JP H0746870 Y2 JPH0746870 Y2 JP H0746870Y2 JP 1990033112 U JP1990033112 U JP 1990033112U JP 3311290 U JP3311290 U JP 3311290U JP H0746870 Y2 JPH0746870 Y2 JP H0746870Y2
Authority
JP
Japan
Prior art keywords
support
clean room
precision equipment
vibration
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990033112U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03124098U (US20100154141A1-20100624-C00001.png
Inventor
允和 山形
幹男 広瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanki Engineering Co Ltd
Original Assignee
Sanki Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanki Engineering Co Ltd filed Critical Sanki Engineering Co Ltd
Priority to JP1990033112U priority Critical patent/JPH0746870Y2/ja
Publication of JPH03124098U publication Critical patent/JPH03124098U/ja
Application granted granted Critical
Publication of JPH0746870Y2 publication Critical patent/JPH0746870Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Floor Finish (AREA)
JP1990033112U 1990-03-29 1990-03-29 クリーンルームにおける精密機器支持構造 Expired - Lifetime JPH0746870Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990033112U JPH0746870Y2 (ja) 1990-03-29 1990-03-29 クリーンルームにおける精密機器支持構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990033112U JPH0746870Y2 (ja) 1990-03-29 1990-03-29 クリーンルームにおける精密機器支持構造

Publications (2)

Publication Number Publication Date
JPH03124098U JPH03124098U (US20100154141A1-20100624-C00001.png) 1991-12-17
JPH0746870Y2 true JPH0746870Y2 (ja) 1995-10-25

Family

ID=31536505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990033112U Expired - Lifetime JPH0746870Y2 (ja) 1990-03-29 1990-03-29 クリーンルームにおける精密機器支持構造

Country Status (1)

Country Link
JP (1) JPH0746870Y2 (US20100154141A1-20100624-C00001.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4527146B2 (ja) * 2007-11-12 2010-08-18 幸雄 広瀬 美容用シート
JP4995981B1 (ja) * 2011-10-19 2012-08-08 進一 塚本 パック用シート及びその用法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62149686U (US20100154141A1-20100624-C00001.png) * 1986-03-17 1987-09-22
JPS6314025A (ja) * 1986-06-30 1988-01-21 Hitachi Plant Eng & Constr Co Ltd 防振基礎構造

Also Published As

Publication number Publication date
JPH03124098U (US20100154141A1-20100624-C00001.png) 1991-12-17

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