JPH0744424Y2 - XYθテーブル - Google Patents
XYθテーブルInfo
- Publication number
- JPH0744424Y2 JPH0744424Y2 JP1989061543U JP6154389U JPH0744424Y2 JP H0744424 Y2 JPH0744424 Y2 JP H0744424Y2 JP 1989061543 U JP1989061543 U JP 1989061543U JP 6154389 U JP6154389 U JP 6154389U JP H0744424 Y2 JPH0744424 Y2 JP H0744424Y2
- Authority
- JP
- Japan
- Prior art keywords
- linear motor
- armature
- guide tube
- driving
- driven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Machine Tool Units (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989061543U JPH0744424Y2 (ja) | 1989-05-26 | 1989-05-26 | XYθテーブル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989061543U JPH0744424Y2 (ja) | 1989-05-26 | 1989-05-26 | XYθテーブル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH031729U JPH031729U (en:Method) | 1991-01-09 |
| JPH0744424Y2 true JPH0744424Y2 (ja) | 1995-10-11 |
Family
ID=31589881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989061543U Expired - Fee Related JPH0744424Y2 (ja) | 1989-05-26 | 1989-05-26 | XYθテーブル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0744424Y2 (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005224865A (ja) * | 2002-01-18 | 2005-08-25 | Takemasa:Kk | 超音波スピンドル加工機およびこれに用いる先端ユニット |
| JP5184135B2 (ja) * | 2008-02-20 | 2013-04-17 | 日特エンジニアリング株式会社 | 製造装置 |
| JP6001356B2 (ja) * | 2012-06-29 | 2016-10-05 | 株式会社ヴァレオジャパン | 電動圧縮機 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49124977A (en:Method) * | 1973-04-02 | 1974-11-29 | ||
| JPS60177894A (ja) * | 1984-02-21 | 1985-09-11 | 豊田工機株式会社 | ロボツトの配線構造 |
-
1989
- 1989-05-26 JP JP1989061543U patent/JPH0744424Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH031729U (en:Method) | 1991-01-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |