JPH0744424Y2 - ＸＹθテーブル - Google Patents

ＸＹθテーブル

Info

Publication number
JPH0744424Y2
JPH0744424Y2 JP1989061543U JP6154389U JPH0744424Y2 JP H0744424 Y2 JPH0744424 Y2 JP H0744424Y2 JP 1989061543 U JP1989061543 U JP 1989061543U JP 6154389 U JP6154389 U JP 6154389U JP H0744424 Y2 JPH0744424 Y2 JP H0744424Y2
Authority
JP
Japan
Prior art keywords
linear motor
armature
guide tube
driving
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989061543U
Other languages
English (en)
Japanese (ja)
Other versions
JPH031729U (enrdf_load_stackoverflow
Inventor
健生 鈴木
政彦 龍
修一 重畠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP1989061543U priority Critical patent/JPH0744424Y2/ja
Publication of JPH031729U publication Critical patent/JPH031729U/ja
Application granted granted Critical
Publication of JPH0744424Y2 publication Critical patent/JPH0744424Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1989061543U 1989-05-26 1989-05-26 ＸＹθテーブル Expired - Fee Related JPH0744424Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989061543U JPH0744424Y2 (ja) 1989-05-26 1989-05-26 ＸＹθテーブル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989061543U JPH0744424Y2 (ja) 1989-05-26 1989-05-26 ＸＹθテーブル

Publications (2)

Publication Number Publication Date
JPH031729U JPH031729U (enrdf_load_stackoverflow) 1991-01-09
JPH0744424Y2 true JPH0744424Y2 (ja) 1995-10-11

Family

ID=31589881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989061543U Expired - Fee Related JPH0744424Y2 (ja) 1989-05-26 1989-05-26 ＸＹθテーブル

Country Status (1)

Country Link
JP (1) JPH0744424Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005224865A (ja) * 2002-01-18 2005-08-25 Takemasa:Kk 超音波スピンドル加工機およびこれに用いる先端ユニット
JP5184135B2 (ja) * 2008-02-20 2013-04-17 日特エンジニアリング株式会社 製造装置
JP6001356B2 (ja) * 2012-06-29 2016-10-05 株式会社ヴァレオジャパン 電動圧縮機

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49124977A (enrdf_load_stackoverflow) * 1973-04-02 1974-11-29
JPS60177894A (ja) * 1984-02-21 1985-09-11 豊田工機株式会社 ロボツトの配線構造

Also Published As

Publication number Publication date
JPH031729U (enrdf_load_stackoverflow) 1991-01-09

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