JPH0742481Y2 - 蒸発器 - Google Patents

蒸発器

Info

Publication number
JPH0742481Y2
JPH0742481Y2 JP1989064670U JP6467089U JPH0742481Y2 JP H0742481 Y2 JPH0742481 Y2 JP H0742481Y2 JP 1989064670 U JP1989064670 U JP 1989064670U JP 6467089 U JP6467089 U JP 6467089U JP H0742481 Y2 JPH0742481 Y2 JP H0742481Y2
Authority
JP
Japan
Prior art keywords
raw material
pipe
liquid raw
liquid
teos
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989064670U
Other languages
English (en)
Japanese (ja)
Other versions
JPH033734U (cs
Inventor
明 吉野
鼎士 渡部
健治 奥村
Original Assignee
大同ほくさん株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大同ほくさん株式会社 filed Critical 大同ほくさん株式会社
Priority to JP1989064670U priority Critical patent/JPH0742481Y2/ja
Publication of JPH033734U publication Critical patent/JPH033734U/ja
Application granted granted Critical
Publication of JPH0742481Y2 publication Critical patent/JPH0742481Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP1989064670U 1989-06-01 1989-06-01 蒸発器 Expired - Lifetime JPH0742481Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989064670U JPH0742481Y2 (ja) 1989-06-01 1989-06-01 蒸発器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989064670U JPH0742481Y2 (ja) 1989-06-01 1989-06-01 蒸発器

Publications (2)

Publication Number Publication Date
JPH033734U JPH033734U (cs) 1991-01-16
JPH0742481Y2 true JPH0742481Y2 (ja) 1995-10-04

Family

ID=31595821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989064670U Expired - Lifetime JPH0742481Y2 (ja) 1989-06-01 1989-06-01 蒸発器

Country Status (1)

Country Link
JP (1) JPH0742481Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291601A (ja) * 1987-05-21 1988-11-29 Mitsubishi Electric Corp 液体材料制御装置

Also Published As

Publication number Publication date
JPH033734U (cs) 1991-01-16

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