JPH0742130B2 - Method for manufacturing rod-shaped base material for optical transmission line - Google Patents
Method for manufacturing rod-shaped base material for optical transmission lineInfo
- Publication number
- JPH0742130B2 JPH0742130B2 JP15918186A JP15918186A JPH0742130B2 JP H0742130 B2 JPH0742130 B2 JP H0742130B2 JP 15918186 A JP15918186 A JP 15918186A JP 15918186 A JP15918186 A JP 15918186A JP H0742130 B2 JPH0742130 B2 JP H0742130B2
- Authority
- JP
- Japan
- Prior art keywords
- glass tube
- quartz glass
- optical transmission
- transmission line
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
- C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は光通信やイメージガイド等において使用する光
伝送路を製造するための棒状母材を、プラズマ炎を用い
て製造する方法に関する。Description: TECHNICAL FIELD The present invention relates to a method for manufacturing a rod-shaped base material for manufacturing an optical transmission line used in optical communication, an image guide or the like by using a plasma flame.
（従来技術） この種の光伝送路用棒状母材は、第２図に示すように、
中心軸を軸にして回転するガラス管Ａの一端から他端に
向けてSicl4、Ticl4、Gecl4、酸素等からなるガラス形
成用の気体状原料Ｂを導入するとともに、石英ガラス管
の外側から石英ガラス管の長手方向に沿って往復移動す
る酸水素炎Ｃにより石英ガラス管内に導入された原料を
酸化反応させ、これにより得られたガラスを石英ガラス
管Ａに順次堆積させることにより製造していた。(Prior Art) A rod-shaped base material for an optical transmission line of this type is as shown in FIG.
Introducing a gaseous raw material B for forming glass consisting of SiCl 4 , Ticl 4 , Gecl 4 , oxygen, etc. from one end to the other end of the glass tube A rotating around the central axis, and outside the quartz glass tube. Produced by oxidizing the raw material introduced into the quartz glass tube by an oxyhydrogen flame C that reciprocates along the longitudinal direction of the quartz glass tube, and sequentially depositing the glass thus obtained on the quartz glass tube A. Was there.
他方、前記堆積の速度を高めるために、前記酸水素炎の
代わりに高周波エネルギ供給装置を用いて、石英ガラス
管内にプラズマ炎を発生させ、これにより前記原料を酸
化反応させて製造することも試みられている。On the other hand, in order to increase the deposition rate, it is also attempted to produce a plasma flame in the quartz glass tube by using a high-frequency energy supply device instead of the oxyhydrogen flame, and thereby to oxidize the raw material to produce the raw material. Has been.
（本発明が解決する問題点） しかしながら後者の方法はプラズマ炎の温度が高すぎる
ため、沈積速度の制御や屈折率を調整するためのドーパ
ント含有量を適切に制御することが困難であった。さら
に同様の理由により石英ガラス管中に含有するOH基が沈
積形成されたガラス中に浸透し、伝送損失を悪化させる
などの欠点があった。(Problems solved by the present invention) However, in the latter method, since the temperature of the plasma flame is too high, it is difficult to appropriately control the deposition rate and the dopant content for adjusting the refractive index. Further, for the same reason, there was a defect that the OH group contained in the quartz glass tube penetrated into the glass formed by deposition, and the transmission loss was aggravated.
（発明の目的） 本発明の的は上記点に鑑み、石英ガラス管内に発生する
プラズマ熱を間接的に用いることにより、プラズマ炎の
温度を適宜に調整し、前記欠点の少ない特性の優れた光
伝送路を得ることにある。(Object of the invention) In view of the above points, the object of the present invention is to indirectly adjust the temperature of the plasma flame by indirectly using plasma heat generated in the quartz glass tube, and to provide a light having excellent characteristics with few defects described above. To obtain a transmission line.
（問題点を解決するための構成） 本発明は中心軸を軸にして回転する石英ガラス管の一端
から他端に向けてガラス形成用の気体状原料を導入する
とともに、石英ガラス管の外側から供給する高周波エネ
ルギにより石英ガラス管内にプラズマ炎を発生させ、こ
のプラズマ炎の熱により前記原料を酸化反応させ、これ
により得られたガラスを石英ガラス管内面に沈積させて
光伝送路用棒状母材を製造する方法において、前記ガラ
ス管内に第２の石英ガラス管を配置して第２の石英ガラ
ス管内にプラズマ炎を発生させることを特徴とする光伝
送路用棒状母材の製造方法である。(Structure for Solving Problems) The present invention introduces a gaseous raw material for glass formation from one end to the other end of a quartz glass tube rotating about a central axis, and from the outside of the quartz glass tube. A plasma flame is generated in the quartz glass tube by the high-frequency energy supplied, the raw material is oxidized by the heat of the plasma flame, and the glass thus obtained is deposited on the inner surface of the quartz glass tube to form a rod-shaped base material for an optical transmission line. The method for producing a rod-shaped base material for an optical transmission line, characterized in that a second quartz glass tube is arranged in the glass tube and a plasma flame is generated in the second quartz glass tube.
（実施例１） 第１図において、（１）は外径3mmΦ、内径30mmΦの石
英ガラス管、（２）は外径20mmΦの第２の石英ガラス
管、（３）は石英ガラス管（１）の外側に配置された高
周波コイルル、（４）は高周波発生源である。石英ガラ
ス管（１）及び第２の石英ガラス管（２）はそれぞれ両
端部において図示しないガラス旋盤により、両ガラス管
（１）（２）が互いに同軸的に配置され、しかも両ガラ
ス管は同期又は非同期して回転可能に構成されている。
石英ガラス管（１）と第２の石英ガラス管（２）とに間
には一端から他端に向けてSicl4、Gecl4及び酸素等の混
合気体によるガラス原料（５）が供給されている。第２
の石英ガラス管（２）は図示しない真空装置に接続さ
れ、その管内を減圧状態可能に構成されている。また高
周波コイル（３）は高周波発生源（４）から高周波エネ
ルギが供給されて、第２の石英ガラス管（２）内にプラ
ズマ炎を発生させる。(Example 1) In FIG. 1, (1) is a quartz glass tube having an outer diameter of 3 mmΦ and an inner diameter of 30 mmΦ, (2) is a second quartz glass tube having an outer diameter of 20 mmΦ, and (3) is a quartz glass tube (1). A high-frequency coil arranged outside of, and (4) is a high-frequency generation source. Both ends of the quartz glass tube (1) and the second quartz glass tube (2) are arranged coaxially with each other by glass lathes (not shown), and both glass tubes are synchronized. Alternatively, it is configured to be rotatable asynchronously.
A glass raw material (5) made of a mixed gas of SiCl 4 , Gecl 4 and oxygen is supplied from one end to the other between the quartz glass tube (1) and the second quartz glass tube (2). . Second
The quartz glass tube (2) is connected to a vacuum device (not shown) so that the inside of the tube can be depressurized. Further, the high-frequency coil (3) is supplied with high-frequency energy from the high-frequency generation source (4) to generate a plasma flame in the second quartz glass tube (2).
このようにして第２の石英ガラス管（２）内にプラズマ
炎が発生すると、その熱により、石英ガラス管（１）内
に導入されたガラス原料（５）は酸化反応を起こし、こ
れにより得られたガラスが石英ガラス管（１）の内壁に
沈積する。この沈積ガラスは後に光伝送路のコア（又は
クラット）になる。プラズマ炎は高周波コイル（３）が
石英ガラス管の長手方向に移動するに従って石英ガラス
管（１）の長手方向に移動し、これによって石英ガラス
管（１）の長手方向にガラスが均一に沈積する。高周波
コイル（３）は石英ガラス管（１）の長手方向に複数回
往復移動し、これによって前記石英ガラスが石英ガラス
管（１）の内壁に複数層形成される。この際、プラズマ
炎の温度は第２の石英ガラス管（２）の内圧を調整する
ことにより適切な値に調整できる。またこの際のプラズ
マ炎の温度調整は第２の石英ガラス管（２）内にアルゴ
ン等のガスを導入することによっても行うことができ
る。このようにして石英ガラス管（１）内にガラスを所
定層、所定厚形成させた後は、第２の石英ガラス管
（２）を除去して、従来と同様に石英ガラス管（１）を
コラプスし、光伝送路用の棒状母材を得る。この後はこ
の棒状母材を加熱紡糸し、外径125μｍΦの光伝送繊維
等に構成する。When a plasma flame is generated in the second quartz glass tube (2) in this way, the heat of the plasma flame causes the glass raw material (5) introduced into the quartz glass tube (1) to undergo an oxidative reaction. The obtained glass is deposited on the inner wall of the quartz glass tube (1). This deposited glass will later become the core (or clat) of the optical transmission line. The plasma flame moves in the longitudinal direction of the quartz glass tube (1) as the high frequency coil (3) moves in the longitudinal direction of the quartz glass tube, whereby the glass is uniformly deposited in the longitudinal direction of the quartz glass tube (1). . The high frequency coil (3) reciprocates a plurality of times in the longitudinal direction of the quartz glass tube (1), whereby a plurality of layers of the quartz glass are formed on the inner wall of the quartz glass tube (1). At this time, the temperature of the plasma flame can be adjusted to an appropriate value by adjusting the internal pressure of the second quartz glass tube (2). The temperature of the plasma flame at this time can also be adjusted by introducing a gas such as argon into the second quartz glass tube (2). After forming a predetermined layer and a predetermined thickness of glass in the quartz glass tube (1) in this way, the second quartz glass tube (2) is removed, and the quartz glass tube (1) is replaced with a conventional one. Collapse to obtain a rod-shaped base material for an optical transmission line. After this, the rod-shaped base material is heated and spun to form an optical transmission fiber having an outer diameter of 125 μmΦ.
なお上記実施例において、必要により石英ガラス管
（１）の外径を水や空気等により冷却するようにしても
よく、また酸水素炎を併用するようにしてもよい。In the above embodiment, the outer diameter of the quartz glass tube (1) may be cooled with water, air, etc., if necessary, or an oxyhydrogen flame may be used together.
（発明の効果） 本発明は上述のように、石英ガラス管内に発生するプラ
ズマをさらに他のガラス管内で発生させ、そのプラズマ
熱を間接的に用いて、石英ガラス管内に導入したガラス
形成用の気体状原料を酸化反応させるようにしたので、
プラズマ熱による酸化反応温度を低下させることがで
き、これにより屈折率を調整するためのドーパント量を
適切に制御でき、伝送特性のすぐれた光伝送路用棒状母
材を製造することができる効果を有する。(Effects of the Invention) As described above, the present invention allows plasma generated in a quartz glass tube to be further generated in another glass tube, and indirectly uses the plasma heat to introduce plasma into the quartz glass tube. Since the gaseous raw material was made to undergo an oxidation reaction,
It is possible to lower the oxidation reaction temperature due to plasma heat, which makes it possible to appropriately control the amount of dopant for adjusting the refractive index, and to manufacture the rod-shaped base material for optical transmission lines with excellent transmission characteristics. Have.
第１図は本願発明の一実施例を示す説明図、第２図は従
来の一例を示す概念図である。 （１）は石英ガラス管、（２）は第２の石英ガラス管、
（３）は高周波コイル、（４）は高周波発生源、（５）
はガラス原料である。FIG. 1 is an explanatory view showing an embodiment of the present invention, and FIG. 2 is a conceptual view showing an example of the conventional art. (1) is a quartz glass tube, (2) is a second quartz glass tube,
(3) is a high frequency coil, (4) is a high frequency source, (5)
Is a glass raw material.
Claims (3)
一端から他端に向けてガラス形成用の気体状原料を導入
するとともに、石英ガラス管の外側から供給する高周波
エネルギにより石英ガラス管内にプラズマ炎を発生さ
せ、このプラズマ炎の熱により前記原料を酸化反応さ
せ、これにより得られたガラスを石英ガラス管内面に沈
積させて光伝送路用棒状母材を製造する方法において、
前記ガラス管内に第２の石英ガラス管を配置して第２の
石英ガラス管内にプラズマ炎を発生させることを特徴と
する光伝送路用棒状母材の製造方法。Claim: What is claimed is: 1. A gaseous raw material for forming glass is introduced from one end to the other end of a quartz glass tube rotating about a central axis, and the inside of the quartz glass tube is supplied by high-frequency energy supplied from the outside of the quartz glass tube. In the method of producing a rod-shaped base material for an optical transmission line by causing a plasma flame to be generated, and oxidizing the raw material by the heat of the plasma flame to deposit the glass thus obtained on the inner surface of the quartz glass tube,
A method for manufacturing a rod-shaped base material for an optical transmission line, wherein a second quartz glass tube is arranged in the glass tube and a plasma flame is generated in the second quartz glass tube.
許請求の範囲第１項記載の光伝送路用棒状母材の製造方
法。2. The method for producing a rod-shaped base material for an optical transmission line according to claim 1, wherein the inside of the second quartz glass tube is depressurized.
装置が配置された特許請求の範囲第１項または第２項記
載の光伝送路用棒状母材の製造方法。3. The method for producing a rod-shaped base material for an optical transmission line according to claim 1 or 2, wherein an auxiliary heating device using a flame is arranged outside the quartz glass tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15918186A JPH0742130B2 (en) | 1986-07-07 | 1986-07-07 | Method for manufacturing rod-shaped base material for optical transmission line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15918186A JPH0742130B2 (en) | 1986-07-07 | 1986-07-07 | Method for manufacturing rod-shaped base material for optical transmission line |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6317233A JPS6317233A (en) | 1988-01-25 |
| JPH0742130B2 true JPH0742130B2 (en) | 1995-05-10 |
Family
ID=15688075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15918186A Expired - Lifetime JPH0742130B2 (en) | 1986-07-07 | 1986-07-07 | Method for manufacturing rod-shaped base material for optical transmission line |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0742130B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1154294B1 (en) | 1999-01-18 | 2012-08-29 | Sumitomo Electric Industries, Ltd. | Optical fiber and method of manufacture thereof |
-
1986
- 1986-07-07 JP JP15918186A patent/JPH0742130B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6317233A (en) | 1988-01-25 |
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