JPH085688B2 - Method for manufacturing rod-shaped base material for optical transmission line - Google Patents
Method for manufacturing rod-shaped base material for optical transmission lineInfo
- Publication number
- JPH085688B2 JPH085688B2 JP61159180A JP15918086A JPH085688B2 JP H085688 B2 JPH085688 B2 JP H085688B2 JP 61159180 A JP61159180 A JP 61159180A JP 15918086 A JP15918086 A JP 15918086A JP H085688 B2 JPH085688 B2 JP H085688B2
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- glass tube
- transmission line
- optical transmission
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
- C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は光通信やイメージガイド等において使用する
光伝送路を製造するための棒状母材を、プラズマ炎を用
いて製造する方法に関する。Description: TECHNICAL FIELD The present invention relates to a method for manufacturing a rod-shaped base material for manufacturing an optical transmission line used in optical communication, an image guide or the like by using a plasma flame.
（従来の技術） この種の光伝送路用棒状母材は、中心軸を軸にして回
転するガラス管の一端から他端に向けてSiCl4、TiCl4、
酸素等からなるガラス形成用の気体状原料を導入すると
ともに、石英ガラス管の外側から石英ガラス管の長手方
向に沿って往復移動する酸水素炎により石英ガラス管内
に導入された原料を酸化反応させ、これにより得られた
ガラスを石英ガラス管に順次堆積させることにより製造
していた。(Prior Art) This kind of rod-shaped base material for optical transmission lines is composed of SiCl 4 , TiCl 4 , from one end to the other end of a glass tube that rotates about its central axis.
A gaseous raw material for forming glass, such as oxygen, is introduced, and the raw material introduced into the quartz glass tube is oxidized by an oxyhydrogen flame that reciprocates from the outside of the quartz glass tube along the longitudinal direction of the quartz glass tube. The glass thus obtained was manufactured by sequentially depositing the glass on a quartz glass tube.
他方、前記堆積の速度を高めるために、前記酸水素炎
の代わりに高周波エネルギ供給装置を用いて、石英ガラ
ス管内にプラズマ炎を発生させ、これにより前記原料を
酸化反応させて製造することも試みられている。On the other hand, in order to increase the deposition rate, it is also attempted to produce a plasma flame in the quartz glass tube by using a high-frequency energy supply device instead of the oxyhydrogen flame, and thereby to oxidize the raw material to produce the raw material. Has been.
（本発明が解決する問題点） しかしながら、後者の方法はプラズマ炎の温度が高す
ぎるため、沈積速度の制御や屈折率を調整するためのド
ーパント含有量を適切に制御することが困難であった。
さらに同様の理由により石英ガラス管内に含有するOH基
が沈積形成されたガラス管中に浸透し、伝送損失を悪化
させるなどの欠点があった。(Problems Solved by the Present Invention) However, in the latter method, the temperature of the plasma flame is too high, and thus it was difficult to appropriately control the dopant content for controlling the deposition rate and adjusting the refractive index. .
Further, for the same reason, there was a drawback that the OH group contained in the quartz glass tube penetrated into the glass tube formed by deposition, and the transmission loss was aggravated.
（発明の目的） 本発明の目的は上記点に鑑み、石英ガラス管内に発生
させるプラズマ熱をより低温にし、前記欠点の少ない特
性の優れた光伝送路を得ることにある。(Object of the Invention) In view of the above points, an object of the present invention is to lower the plasma heat generated in a quartz glass tube to obtain an optical transmission line having the above-mentioned drawbacks and excellent characteristics.
（問題点を解決するための構成） 本発明は中心軸を軸にして回転する石英ガラス管の一
端から他端に向けてガラス形成用の気体状原料を導入す
るとともに、石英ガラス管の外側に配置されしかもその
管の長手方向に移動する高周波エネルギにより石英ガラ
ス管内にプラズマ炎を発生させ、このプラズマ炎の熱に
より前記原料を酸化反応させ、これにより得られたガラ
スを石英ガラス管内面に沈積させて光伝送路用棒状母材
を製造する方法において、前記ガラス管内にその管の長
手方向に移動自在な石英ガラス製の補助部材を配置し、
前記プラズマを石英ガラス製の補助部材の端部において
発生させることを特徴とする光伝送路用棒状母材の製造
方法である。(Structure for Solving Problems) The present invention introduces a gaseous raw material for glass formation from one end to the other end of a quartz glass tube rotating about a central axis, and at the outside of the quartz glass tube. The plasma flame is generated in the quartz glass tube by the high frequency energy that is arranged and moves in the longitudinal direction of the tube, and the heat of this plasma flame causes the raw material to undergo an oxidation reaction, and the resulting glass is deposited on the inner surface of the quartz glass tube. In the method for producing a rod-shaped base material for an optical transmission line, an auxiliary member made of quartz glass, which is movable in the longitudinal direction of the glass tube, is arranged in the glass tube,
In the method of manufacturing a rod-shaped base material for an optical transmission line, the plasma is generated at an end of an auxiliary member made of quartz glass.
（実施例１） 図において、（１）は外径35mmΦ、内径30mmΦの石英
ガラス管、（２）は外径20mmΦの管状の石英ガラス製の
補助部材、（３）は石英ガラス管（１）の外側に配置さ
れ、しかもその管の長手方向に移動する高周波コイル、
（４）は高周波発生源である。石英ガラス管（１）は両
端部において図示しないガラス旋盤により支持され、回
転可能に構成されている。石英ガラス製の補助部材
（２）は、図示しない装置により石英ガラス管（１）内
でその長手方向に移動自在に構成され、高周波コイル
（３）が石英ガラス管（１）の長手方向に移動するのと
連動して高周波コイル（３）との所定の位置関係を保つ
ように移動するよう構成されている。石英ガラス管
（１）と石英ガラス製の補助部材（２）との間には一端
から他端に向けてSiCl4、GeCl4及び酸素等の混合気体に
よるガラス原料（５）が供給されている。また高周波コ
イル（３）は高周波発生源（４）から高周波エネルギが
供給されて、石英ガラス製の補助部材（２）の端部にお
いてプラズマ炎（６）を発生させる。(Example 1) In the drawings, (1) is a quartz glass tube having an outer diameter of 35 mmΦ and an inner diameter of 30 mmΦ, (2) is a tubular quartz glass auxiliary member having an outer diameter of 20 mmΦ, and (3) is a quartz glass tube (1). A high-frequency coil that is placed outside of, and that moves in the longitudinal direction of the tube,
(4) is a high frequency generation source. The quartz glass tube (1) is rotatably supported by glass lathes (not shown) at both ends. The quartz glass auxiliary member (2) is configured to be movable in the longitudinal direction of the quartz glass tube (1) by a device (not shown), and the high frequency coil (3) is moved in the longitudinal direction of the quartz glass tube (1). It is configured to move so as to maintain a predetermined positional relationship with the high frequency coil (3) in conjunction with this. A glass raw material (5) made of a mixed gas of SiCl 4 , GeCl 4 and oxygen is supplied from one end to the other between the quartz glass tube (1) and the auxiliary member (2) made of quartz glass. . Further, the high-frequency coil (3) is supplied with high-frequency energy from the high-frequency generation source (4) to generate a plasma flame (6) at the end of the auxiliary member (2) made of quartz glass.
このようにして石英ガラス製の補助部材（２）の端部
においてプラズマ炎（６）が発生すると、その熱によ
り、石英ガラス管（１）内に導入されたガラス原料
（５）は酸化反応を起こし、これにより得られたガラス
が石英ガラス管（１）の内壁に沈積する。この沈積ガラ
スは後に光伝送路のコア（又はクラッド）になる。プラ
ズマ炎（６）は高周波コイル（３）が石英ガラス管の長
手方向に移動するに従って石英ガラス管（１）の長手方
向に移動し、これによって石英ガラス管（１）の長手方
向にガラスが均一に沈積する。この際、石英ガラス製の
補助部材（２）は前述のように高周波コイル（３）の移
動と連動して高周波コイル（３）と所定の位置関係を保
つように移動し、プラズマ炎の発生を容易にする。高周
波コイル（３）は石英ガラス管（１）の長手方向に複数
回往復移動し、これによって前記ガラスが石英ガラス管
（１）の内壁に複数層形成される。この際、プラズマ炎
（６）は石英ガラス製の補助部材（２）の存在によって
低温で発生する。このようにして石英ガラス管（１）内
にガラスを所定層、所定厚形成させた後は、石英ガラス
製の補助部材（２）を除去して、従来と同様に石英ガラ
ス管（１）をコラプスし、光伝送用の棒状母材を得る。
この後はこの棒状母材を加熱紡糸し、外径125μｍΦの
光伝送繊維等に構成する。When the plasma flame (6) is generated at the end portion of the auxiliary member (2) made of quartz glass in this way, the heat of the plasma flame causes the glass raw material (5) introduced into the quartz glass tube (1) to undergo an oxidation reaction. Raised, and the glass thus obtained is deposited on the inner wall of the quartz glass tube (1). This deposited glass will later become the core (or clad) of the optical transmission line. The plasma flame (6) moves in the longitudinal direction of the quartz glass tube (1) as the high-frequency coil (3) moves in the longitudinal direction of the quartz glass tube, so that the glass becomes uniform in the longitudinal direction of the quartz glass tube (1). Deposit on. At this time, the auxiliary member (2) made of quartz glass moves so as to maintain a predetermined positional relationship with the high frequency coil (3) in association with the movement of the high frequency coil (3) as described above, and the generation of plasma flame is prevented. make it easier. The high frequency coil (3) reciprocates a plurality of times in the longitudinal direction of the quartz glass tube (1), whereby a plurality of layers of the glass is formed on the inner wall of the quartz glass tube (1). At this time, the plasma flame (6) is generated at a low temperature due to the presence of the auxiliary member (2) made of quartz glass. After forming a predetermined layer and a predetermined thickness of glass in the quartz glass tube (1) in this way, the auxiliary member (2) made of quartz glass is removed, and the quartz glass tube (1) is replaced with a conventional one. Collapse to obtain a rod-shaped base material for optical transmission.
After this, the rod-shaped base material is heated and spun to form an optical transmission fiber having an outer diameter of 125 μmΦ.
なお、上記実施例において、必要により石英ガラス管
（１）の外径を水（７）や空気等により冷却するように
してもよく、また酸水素炎（８）を併用するようにして
もよい。In the above embodiment, if necessary, the outer diameter of the quartz glass tube (1) may be cooled with water (7), air or the like, or an oxyhydrogen flame (8) may be used together. .
（発明の効果） 本発明は上述のように、石英ガラス管内にその管の長
手方向に移動自在な石英ガラス製の補助部材を配置し、
前記プラズマを石英ガラス製の補助部材の端部において
発生させるようにしたので、プラズマ熱の温度を低下さ
せることができ、これにより屈折率を調整するためのド
ーパント量を適切に制御でき、伝送特性の優れた光伝送
路用棒状母材を製造することができる効果を有する。(Effect of the invention) As described above, the present invention arranges an auxiliary member made of quartz glass, which is movable in the longitudinal direction of the quartz glass tube,
Since the plasma is generated at the end portion of the auxiliary member made of quartz glass, the temperature of plasma heat can be lowered, whereby the amount of dopant for adjusting the refractive index can be appropriately controlled, and the transmission characteristics can be improved. It has an effect that the excellent rod-shaped base material for an optical transmission line can be manufactured.
第１図及び第２図はそれぞれ本願発明の異なる実施例を
示す説明図である。 （１）は石英ガラス管、（２）は石英ガラス製の補助部
材、（３）は高周波コイル、（４）は高周波発生源、
（５）はガラス原料、（６）はプラズマ炎、（７）は
水、（８）は酸水素炎である。1 and 2 are explanatory views showing different embodiments of the present invention. (1) is a quartz glass tube, (2) is an auxiliary member made of quartz glass, (3) is a high frequency coil, (4) is a high frequency generation source,
(5) is a glass raw material, (6) is a plasma flame, (7) is water, and (8) is an oxyhydrogen flame.
Claims (3)
一端から他端に向けてガラス形成用の気体状原料を導入
するとともに、石英ガラス管の外側に配置されしかもそ
の管の長手方向に移動する高周波エネルギにより石英ガ
ラス管内にプラズマ炎を発生させ、このプラズマ炎の熱
により前記原料を酸化反応させ、これにより得られたガ
ラスを石英ガラス管内面に沈積させて光伝送路用棒状母
材を製造する方法において、前記ガラス管内にその管の
長手方向に移動自在な石英ガラス製の補助部材を配置
し、前記プラズマを石英ガラス製の補助部材の端部にお
いて発生させることを特徴とする光伝送路用棒状母材の
製造方法。1. A gaseous raw material for forming glass is introduced from one end to the other end of a quartz glass tube rotating about a central axis, and the glass raw material is arranged outside the quartz glass tube and the longitudinal direction of the tube. A plasma flame is generated in the quartz glass tube by the high-frequency energy moving to the quartz glass tube, the heat of the plasma flame causes the raw material to undergo an oxidation reaction, and the glass thus obtained is deposited on the inner surface of the quartz glass tube to form a rod-shaped matrix for an optical transmission line. In the method for producing a material, a quartz glass auxiliary member movable in the longitudinal direction of the glass tube is arranged in the glass tube, and the plasma is generated at an end portion of the quartz glass auxiliary member. A method for manufacturing a rod-shaped base material for an optical transmission line.
波エネルギと所定の関係を保つように移動することを特
徴とする特許請求の範囲第１項記載の光伝送路用棒状母
材の製造方法。2. The manufacture of a rod-shaped base material for an optical transmission line according to claim 1, wherein the auxiliary member made of quartz glass moves so as to maintain a predetermined relationship with the high frequency energy. Method.
装置が配置された特許請求の範囲第１項または第２項記
載の項伝送路用棒状母材の製造方法。3. A method for producing a rod-shaped base material for a transmission line according to claim 1 or 2, wherein an auxiliary heating device using a flame is arranged outside the quartz glass tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61159180A JPH085688B2 (en) | 1986-07-07 | 1986-07-07 | Method for manufacturing rod-shaped base material for optical transmission line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61159180A JPH085688B2 (en) | 1986-07-07 | 1986-07-07 | Method for manufacturing rod-shaped base material for optical transmission line |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6317232A JPS6317232A (en) | 1988-01-25 |
| JPH085688B2 true JPH085688B2 (en) | 1996-01-24 |
Family
ID=15688048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61159180A Expired - Fee Related JPH085688B2 (en) | 1986-07-07 | 1986-07-07 | Method for manufacturing rod-shaped base material for optical transmission line |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH085688B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1033763C2 (en) * | 2007-04-26 | 2008-10-28 | Draka Comteq Bv | Device and method for manufacturing an optical preform. |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5743534A (en) * | 1980-08-28 | 1982-03-11 | Honda Motor Co Ltd | Generator driving device in autobicycle |
-
1986
- 1986-07-07 JP JP61159180A patent/JPH085688B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6317232A (en) | 1988-01-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |