JPS6317233A - Production of rod-like preform for optical transmission line - Google Patents
Production of rod-like preform for optical transmission lineInfo
- Publication number
- JPS6317233A JPS6317233A JP15918186A JP15918186A JPS6317233A JP S6317233 A JPS6317233 A JP S6317233A JP 15918186 A JP15918186 A JP 15918186A JP 15918186 A JP15918186 A JP 15918186A JP S6317233 A JPS6317233 A JP S6317233A
- Authority
- JP
- Japan
- Prior art keywords
- glass tube
- quartz glass
- rod
- optical transmission
- transmission line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 title claims abstract description 19
- 230000003287 optical effect Effects 0.000 title claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 55
- 239000011521 glass Substances 0.000 claims abstract description 22
- 239000002994 raw material Substances 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010276 construction Methods 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
- C03B37/01823—Plasma deposition burners or heating means
- C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は光通信やイメージガイド等において使用する光
伝送路を製造するための棒状母材を、プラズマ炎を用い
て製造する方法に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing a rod-shaped base material for manufacturing an optical transmission line used in optical communication, image guides, etc. using a plasma flame.
（従来技術）
この種の光伝送路用棒状母材は、第２図に示すように、
中心軸を軸にして回転するガラス管Ａの一端から他端に
向けて５ｉｃｌいＴｉｃｌｎ、酸素等からなるガラス形
成用の気体状原料Ｂを導入するとともに、石英ガラス管
の外側から石英ガラス管の長手方向に沿って往復移動す
る酸水素炎Ｃにより石英ガラス管内に導入された原料を
酸化反応させ、これにより得られたガラスを石英ガラス
管Ａに順次堆積させることにより製造していた。(Prior art) This type of rod-shaped base material for optical transmission line is as shown in Fig. 2.
A gaseous raw material B for glass formation consisting of 5icl of Ticln, oxygen, etc. is introduced from one end of the glass tube A rotating around the central axis to the other end, and at the same time, a gaseous raw material B for glass formation consisting of 5icl of Ticln, oxygen, etc. is introduced from the outside of the quartz glass tube. The raw material introduced into the quartz glass tube is oxidized by an oxyhydrogen flame C that reciprocates along the longitudinal direction, and the resulting glass is sequentially deposited in the quartz glass tube A.
他方、前記堆積の速度を高めるために、前記酸水素炎の
代わりに高周波エネルギ供給装置を用いて、石英ガラス
管内にプラズマ炎を発生させ、これにより前記原料を酸
化反応させて製造することも試みられている。On the other hand, in order to increase the speed of the deposition, an attempt has also been made to generate a plasma flame in the quartz glass tube using a high-frequency energy supply device instead of the oxyhydrogen flame, thereby causing the raw material to undergo an oxidation reaction. It is being
（本発明が解決する問題点）
しかしながら後者の方法はプラズマ炎の温度が高すぎる
ため、沈積速度の制御や屈折率を調整するためのドーパ
ント含有量を適切に制御することが困難であった。さら
に同）兼の理由により石英ガラス管中に含有するＯＨ基
が沈積形成されたガラス中に浸透し、伝送損失を悪化さ
せるなどの欠点があった。(Problems to be solved by the present invention) However, in the latter method, since the temperature of the plasma flame is too high, it is difficult to appropriately control the dopant content for controlling the deposition rate and adjusting the refractive index. Furthermore, due to the same reason, OH groups contained in the quartz glass tube penetrate into the deposited glass, worsening transmission loss.
（発明の目的）
本発明の目的は上記点に鑑み、石英ガラス管内に発生す
るプラズマ熱を間接的に用いることにより、プラズマ炎
の温度を適宜に調整し、前記欠点の少ない特性の優れた
光伝送路を得ることにある。(Object of the Invention) In view of the above-mentioned points, the object of the present invention is to indirectly use the plasma heat generated in the quartz glass tube to appropriately adjust the temperature of the plasma flame, thereby producing light with excellent characteristics without the above-mentioned drawbacks. The purpose is to obtain a transmission line.
（問題点を解決するための構成）
本発明は中心軸を軸にして回転する石英ガラス管の一端
から他端に向けてガラス形成用の気体状原料を導入する
とともに、石英ガラス管の外側から供給する高周波エネ
ルギにより石英ガラス管内にプラズマ炎を発生させ、こ
のプラズマ炎の熱により前記原料を酸化反応させ、これ
により得られたガラスを石英ガラス管内面に沈積させて
光伝送路用棒状母材を製造する方法において、前記ガラ
ス管内に第２の石英ガラス管を配置して第２の石英ガラ
ス管内にプラズマ炎を発生させることを特徴とする光伝
送路用棒状母材の製造方法である。(Configuration for Solving Problems) The present invention introduces a gaseous raw material for glass formation from one end of a quartz glass tube rotating around a central axis toward the other end, and also introduces a gaseous raw material for glass formation from the outside of the quartz glass tube. Plasma flame is generated within the quartz glass tube by the supplied high-frequency energy, and the heat of the plasma flame oxidizes the raw material, and the resulting glass is deposited on the inner surface of the quartz glass tube to form a rod-shaped base material for an optical transmission line. A method for manufacturing a rod-shaped base material for an optical transmission line, characterized in that a second quartz glass tube is disposed within the glass tube and a plasma flame is generated within the second quartz glass tube.
（実施例１）
第１図において、（１）は外径３５０Φ、内径３０ｔｍ
Φの石英ガラス管、（２）は外径２０龍Φの第２の石英
ガラス管、（３）は石英ガラス管（１１の外側に配置さ
れた高周波コイル、（４）は高周波発生源である６石英
ガラス管（１）及び第２の石英ガラス管（２）はそれぞ
れ両端部において図示しないガラス旋盤により、両ガラ
ス管ｆｌｌ ＋２１が互いに同軸的に配置され、しかも
両ガラス管は同期又は非同期して回転可能に構成されて
いる０石英ガラス管（１）と第２の石英ガラス管（２）
とに間には一端から他端に向けて５ｉｃｌいＧｅｃ１４
及び酸素等の混合気体によるガラス原料（５）が供給さ
れている。第２の石英ガラス管（２）は図示しない真空
装置に接続され、その管内を減圧状態可能に構成されて
いる。また高周波コイル（３）は高周波発生源（４）か
ら高周波エネルギが供給されて、第２の石英ガラス管（
２）内にプラズマ炎を発生させる。(Example 1) In Fig. 1, (1) has an outer diameter of 350Φ and an inner diameter of 30t.
Φ quartz glass tube, (2) is a second quartz glass tube with an outer diameter of 20 mm, (3) is a high frequency coil placed outside the quartz glass tube (11), (4) is a high frequency generation source 6 quartz glass tube (1) and the second quartz glass tube (2) are arranged coaxially with each other by a glass lathe (not shown) at both ends, and both glass tubes are arranged synchronously or asynchronously. 0 quartz glass tube (1) and a second quartz glass tube (2) configured to be rotatable.
There is a 5icl Gec14 from one end to the other.
A glass raw material (5) is supplied with a mixed gas such as oxygen and oxygen. The second quartz glass tube (2) is connected to a vacuum device (not shown) and is configured to be able to maintain a reduced pressure inside the tube. Further, the high frequency coil (3) is supplied with high frequency energy from the high frequency generation source (4), and the second quartz glass tube (
2) Generate plasma flame inside.
このようにして第２の石英ガラス管（２）内にプラズマ
炎が発生すると、その熱により、石英ガラス管（１）内
に導入されたガラス原料（５）は酸化反応を起こし、こ
れにより得られたガラスが石英ガラス管（１＋の内壁に
沈積する。この沈積ガラスは後に光伝送路のコア（又は
クラフト）になる、プラズマ炎は高周波コイル（３）が
石英ガラス管の長手方向に移動するに従って石英ガラス
管（１）の長手方向に移動し、これによって石英ガラス
管＋１１の長手方向にガラスが均一に沈積する。高周波
コイル（３）は石英ガラス管（１）の長手方向に複数回
往復移動し、これによって前記石英ガラスが石英ガラス
管（１）の内壁に複数層形成される。この際、プラズマ
炎の温度は第２の石英ガラス管（２）の内圧を調整する
ことにより適切な値に調整できる。またこの際のプラズ
マ炎の温度調整は第２の石英ガラス管（２）内にアルゴ
ン等のガスを導入することによっても行うことができる
。このようにして石英ガラス管（１）内にガラスを所定
層、所定厚形成させた後は、第２の石英ガラス管（２）
を除去して、従来と同様に石英ガラス管（１）をコラプ
スし、光伝送路用の棒状母材を得る。When a plasma flame is generated in the second quartz glass tube (2) in this way, the heat causes an oxidation reaction in the glass raw material (5) introduced into the quartz glass tube (1), resulting in the The glass deposited on the inner wall of the quartz glass tube (1+) will later become the core (or craft) of the optical transmission line. The high frequency coil (3) moves back and forth in the longitudinal direction of the quartz glass tube (1) several times. As a result, multiple layers of the quartz glass are formed on the inner wall of the quartz glass tube (1). At this time, the temperature of the plasma flame is adjusted to an appropriate level by adjusting the internal pressure of the second quartz glass tube (2). The temperature of the plasma flame at this time can also be adjusted by introducing a gas such as argon into the second quartz glass tube (2). ) After forming a predetermined layer of glass with a predetermined thickness in the second quartz glass tube (2)
is removed, and the quartz glass tube (1) is collapsed in the same manner as before to obtain a rod-shaped base material for an optical transmission path.
この後はこの棒状母材を加熱紡糸し、外径１２５−Φの
光伝送繊維等に構成する。Thereafter, this rod-shaped base material is heated and spun to form a light transmission fiber or the like having an outer diameter of 125-Φ.
なお上記実施例において、必要により石英ガラス管（１
１の外径を水や空気等により冷却するようにしてもよく
、また酸水素炎を併用するようにしてもよい。In the above embodiment, a quartz glass tube (1
The outer diameter of 1 may be cooled with water, air, etc., or an oxyhydrogen flame may be used in combination.
（発明の効果）
本発明は上述のように、石英ガラス管内に発生するプラ
ズマをさらに他のガラス管内で発生させ、そのプラズマ
熱を間接的に用いて、石英ガラス管内に導入したガラス
形成用の気体状原料を酸化反応させるようにしたので、
プラズマ熱による酸化反応温度を低下させることができ
、これにより屈折率を調整するためのドーパント量を適
切に制御でき、伝送特性のすぐれた光伝送路用棒状母材
を製造することができる効果を有する。(Effects of the Invention) As described above, the present invention generates plasma generated in a quartz glass tube in another glass tube, and indirectly uses the plasma heat to generate a glass forming material introduced into the quartz glass tube. Since we made the gaseous raw material undergo an oxidation reaction,
The oxidation reaction temperature due to plasma heat can be lowered, and the amount of dopant used to adjust the refractive index can be appropriately controlled, making it possible to manufacture rod-shaped base materials for optical transmission lines with excellent transmission characteristics. have
第１図は本願発明の一実施例を示す説明図、第２図は従
来の一例を示す概念図である。
（１）は石英ガラス管、（２）は第２の石英ガラス管、
（３）は高周波コイル、（４）は高周波発生源、（５）
はガラス原料である。
特許出願人 古河電気工業株式会社
第２図
手続補正書（践）
昭和６２年 ２月２ζ日FIG. 1 is an explanatory diagram showing an embodiment of the present invention, and FIG. 2 is a conceptual diagram showing a conventional example. (1) is a quartz glass tube, (2) is a second quartz glass tube,
(3) is a high frequency coil, (4) is a high frequency source, (5)
is a glass raw material. Patent Applicant: Furukawa Electric Co., Ltd. Figure 2 Procedural Amendment (Practice) February 2, 1986
Claims (3)
ら他端に向けてガラス形成用の気体状原料を導入すると
ともに、石英ガラス管の外側から供給する高周波エネル
ギにより石英ガラス管内にプラズマ炎を発生させ、この
プラズマ炎の熱により前記原料を酸化反応させ、これに
より得られたガラスを石英ガラス管内面に沈積させて光
伝送路用棒状母材を製造する方法において、前記ガラス
管内に第２の石英ガラス管を配置して第２の石英ガラス
管内にプラズマ炎を発生させることを特徴とする光伝送
路用棒状母材の製造方法。(1) Gaseous raw materials for glass formation are introduced from one end of a quartz glass tube rotating around its central axis to the other, and plasma is generated inside the quartz glass tube by high-frequency energy supplied from the outside of the quartz glass tube. In the method of producing a rod-shaped base material for an optical transmission line by generating a flame, causing the raw material to undergo an oxidation reaction with the heat of the plasma flame, and depositing the resulting glass on the inner surface of a quartz glass tube, 1. A method of manufacturing a rod-shaped base material for an optical transmission line, which comprises arranging a second quartz glass tube and generating a plasma flame within the second quartz glass tube.
の範囲第１項記載の光伝送路用棒状母材の製造方法。(2) The method for manufacturing a rod-shaped base material for an optical transmission line according to claim 1, wherein the inside of the second quartz glass tube is brought into a reduced pressure state.
配置された特許請求の範囲第１項または第２項記載の光
伝送路用棒状母材の製造方法。(3) The method for manufacturing a rod-shaped base material for an optical transmission line according to claim 1 or 2, wherein an auxiliary heating device using flame is disposed outside the quartz glass tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15918186A JPH0742130B2 (en) | 1986-07-07 | 1986-07-07 | Method for manufacturing rod-shaped base material for optical transmission line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15918186A JPH0742130B2 (en) | 1986-07-07 | 1986-07-07 | Method for manufacturing rod-shaped base material for optical transmission line |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6317233A true JPS6317233A (en) | 1988-01-25 |
| JPH0742130B2 JPH0742130B2 (en) | 1995-05-10 |
Family
ID=15688075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15918186A Expired - Lifetime JPH0742130B2 (en) | 1986-07-07 | 1986-07-07 | Method for manufacturing rod-shaped base material for optical transmission line |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0742130B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6343175B1 (en) | 1999-01-18 | 2002-01-29 | Sumitomo Electric Industries, Ltd. | Optical fiber with core containing chlorine and cladding containing fluorine and a method of manufacturing the same |
-
1986
- 1986-07-07 JP JP15918186A patent/JPH0742130B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6343175B1 (en) | 1999-01-18 | 2002-01-29 | Sumitomo Electric Industries, Ltd. | Optical fiber with core containing chlorine and cladding containing fluorine and a method of manufacturing the same |
| US6449415B1 (en) | 1999-01-18 | 2002-09-10 | Sumitomo Electric Industries, Ltd. | Optical fiber and method of manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0742130B2 (en) | 1995-05-10 |
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