JPH0740521Y2 - 真空成膜装置の基板反転構造 - Google Patents
真空成膜装置の基板反転構造Info
- Publication number
- JPH0740521Y2 JPH0740521Y2 JP12533490U JP12533490U JPH0740521Y2 JP H0740521 Y2 JPH0740521 Y2 JP H0740521Y2 JP 12533490 U JP12533490 U JP 12533490U JP 12533490 U JP12533490 U JP 12533490U JP H0740521 Y2 JPH0740521 Y2 JP H0740521Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film forming
- substrate holder
- vacuum film
- reversing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 57
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000002441 reversible effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12533490U JPH0740521Y2 (ja) | 1990-11-28 | 1990-11-28 | 真空成膜装置の基板反転構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12533490U JPH0740521Y2 (ja) | 1990-11-28 | 1990-11-28 | 真空成膜装置の基板反転構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0481962U JPH0481962U (enrdf_load_stackoverflow) | 1992-07-16 |
| JPH0740521Y2 true JPH0740521Y2 (ja) | 1995-09-20 |
Family
ID=31872935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12533490U Expired - Lifetime JPH0740521Y2 (ja) | 1990-11-28 | 1990-11-28 | 真空成膜装置の基板反転構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740521Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100653468B1 (ko) * | 2000-05-31 | 2006-12-04 | 비오이 하이디스 테크놀로지 주식회사 | 액정 모듈의 반전 장치 |
-
1990
- 1990-11-28 JP JP12533490U patent/JPH0740521Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100653468B1 (ko) * | 2000-05-31 | 2006-12-04 | 비오이 하이디스 테크놀로지 주식회사 | 액정 모듈의 반전 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0481962U (enrdf_load_stackoverflow) | 1992-07-16 |
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