JPH0481962U - - Google Patents

Info

Publication number
JPH0481962U
JPH0481962U JP12533490U JP12533490U JPH0481962U JP H0481962 U JPH0481962 U JP H0481962U JP 12533490 U JP12533490 U JP 12533490U JP 12533490 U JP12533490 U JP 12533490U JP H0481962 U JPH0481962 U JP H0481962U
Authority
JP
Japan
Prior art keywords
substrate
forming apparatus
film forming
vacuum film
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12533490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0740521Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12533490U priority Critical patent/JPH0740521Y2/ja
Publication of JPH0481962U publication Critical patent/JPH0481962U/ja
Application granted granted Critical
Publication of JPH0740521Y2 publication Critical patent/JPH0740521Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP12533490U 1990-11-28 1990-11-28 真空成膜装置の基板反転構造 Expired - Lifetime JPH0740521Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12533490U JPH0740521Y2 (ja) 1990-11-28 1990-11-28 真空成膜装置の基板反転構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12533490U JPH0740521Y2 (ja) 1990-11-28 1990-11-28 真空成膜装置の基板反転構造

Publications (2)

Publication Number Publication Date
JPH0481962U true JPH0481962U (enrdf_load_stackoverflow) 1992-07-16
JPH0740521Y2 JPH0740521Y2 (ja) 1995-09-20

Family

ID=31872935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12533490U Expired - Lifetime JPH0740521Y2 (ja) 1990-11-28 1990-11-28 真空成膜装置の基板反転構造

Country Status (1)

Country Link
JP (1) JPH0740521Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100653468B1 (ko) * 2000-05-31 2006-12-04 비오이 하이디스 테크놀로지 주식회사 액정 모듈의 반전 장치

Also Published As

Publication number Publication date
JPH0740521Y2 (ja) 1995-09-20

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