JPH0455268Y2 - - Google Patents
Info
- Publication number
- JPH0455268Y2 JPH0455268Y2 JP1543989U JP1543989U JPH0455268Y2 JP H0455268 Y2 JPH0455268 Y2 JP H0455268Y2 JP 1543989 U JP1543989 U JP 1543989U JP 1543989 U JP1543989 U JP 1543989U JP H0455268 Y2 JPH0455268 Y2 JP H0455268Y2
- Authority
- JP
- Japan
- Prior art keywords
- getter pump
- chamber
- shield plate
- evaporation
- active metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001704 evaporation Methods 0.000 claims description 17
- 230000008020 evaporation Effects 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 14
- 238000001816 cooling Methods 0.000 claims description 4
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 4
- 238000005086 pumping Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000011109 contamination Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1543989U JPH0455268Y2 (enrdf_load_stackoverflow) | 1989-02-13 | 1989-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1543989U JPH0455268Y2 (enrdf_load_stackoverflow) | 1989-02-13 | 1989-02-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02147878U JPH02147878U (enrdf_load_stackoverflow) | 1990-12-14 |
| JPH0455268Y2 true JPH0455268Y2 (enrdf_load_stackoverflow) | 1992-12-25 |
Family
ID=31518744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1543989U Expired JPH0455268Y2 (enrdf_load_stackoverflow) | 1989-02-13 | 1989-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455268Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-02-13 JP JP1543989U patent/JPH0455268Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02147878U (enrdf_load_stackoverflow) | 1990-12-14 |
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