JPH0738806Y2 - 干渉計 - Google Patents

干渉計

Info

Publication number
JPH0738806Y2
JPH0738806Y2 JP460890U JP460890U JPH0738806Y2 JP H0738806 Y2 JPH0738806 Y2 JP H0738806Y2 JP 460890 U JP460890 U JP 460890U JP 460890 U JP460890 U JP 460890U JP H0738806 Y2 JPH0738806 Y2 JP H0738806Y2
Authority
JP
Japan
Prior art keywords
laser light
column
laser
arm
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP460890U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0397607U (enrdf_load_stackoverflow
Inventor
繁雄 水川
博 柴本
重徳 大井
正根 鈴木
Original Assignee
富士写真光機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士写真光機株式会社 filed Critical 富士写真光機株式会社
Priority to JP460890U priority Critical patent/JPH0738806Y2/ja
Priority to US07/642,451 priority patent/US5127734A/en
Publication of JPH0397607U publication Critical patent/JPH0397607U/ja
Application granted granted Critical
Publication of JPH0738806Y2 publication Critical patent/JPH0738806Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP460890U 1990-01-24 1990-01-24 干渉計 Expired - Lifetime JPH0738806Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP460890U JPH0738806Y2 (ja) 1990-01-24 1990-01-24 干渉計
US07/642,451 US5127734A (en) 1990-01-24 1991-01-17 Laser interferometer for inspecting the surface of a specimen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP460890U JPH0738806Y2 (ja) 1990-01-24 1990-01-24 干渉計

Publications (2)

Publication Number Publication Date
JPH0397607U JPH0397607U (enrdf_load_stackoverflow) 1991-10-08
JPH0738806Y2 true JPH0738806Y2 (ja) 1995-09-06

Family

ID=31508345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP460890U Expired - Lifetime JPH0738806Y2 (ja) 1990-01-24 1990-01-24 干渉計

Country Status (1)

Country Link
JP (1) JPH0738806Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0397607U (enrdf_load_stackoverflow) 1991-10-08

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