JPH0737309Y2 - 拡散炉 - Google Patents
拡散炉Info
- Publication number
- JPH0737309Y2 JPH0737309Y2 JP1985005643U JP564385U JPH0737309Y2 JP H0737309 Y2 JPH0737309 Y2 JP H0737309Y2 JP 1985005643 U JP1985005643 U JP 1985005643U JP 564385 U JP564385 U JP 564385U JP H0737309 Y2 JPH0737309 Y2 JP H0737309Y2
- Authority
- JP
- Japan
- Prior art keywords
- diffusion
- extension
- furnace
- cooling gas
- reaction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009792 diffusion process Methods 0.000 title claims description 25
- 239000000112 cooling gas Substances 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 description 10
- 238000001816 cooling Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 230000000171 quenching effect Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 241000406668 Loxodonta cyclotis Species 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985005643U JPH0737309Y2 (ja) | 1985-01-18 | 1985-01-18 | 拡散炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985005643U JPH0737309Y2 (ja) | 1985-01-18 | 1985-01-18 | 拡散炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61121737U JPS61121737U (enrdf_load_stackoverflow) | 1986-07-31 |
| JPH0737309Y2 true JPH0737309Y2 (ja) | 1995-08-23 |
Family
ID=30482335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985005643U Expired - Lifetime JPH0737309Y2 (ja) | 1985-01-18 | 1985-01-18 | 拡散炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737309Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH088220B2 (ja) * | 1988-09-05 | 1996-01-29 | 株式会社日立製作所 | 半導体ウェハの熱処理装置、及び熱処理方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57106119A (en) * | 1980-12-24 | 1982-07-01 | Hitachi Ltd | Heating furnace |
-
1985
- 1985-01-18 JP JP1985005643U patent/JPH0737309Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61121737U (enrdf_load_stackoverflow) | 1986-07-31 |
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