JPH0734923Y2 - マグネトロンスパッタ装置 - Google Patents

マグネトロンスパッタ装置

Info

Publication number
JPH0734923Y2
JPH0734923Y2 JP1989027017U JP2701789U JPH0734923Y2 JP H0734923 Y2 JPH0734923 Y2 JP H0734923Y2 JP 1989027017 U JP1989027017 U JP 1989027017U JP 2701789 U JP2701789 U JP 2701789U JP H0734923 Y2 JPH0734923 Y2 JP H0734923Y2
Authority
JP
Japan
Prior art keywords
yoke
backing plate
target
end surface
magnetic pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989027017U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02118751U (OSRAM
Inventor
岳雄 高橋
伸幸 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP1989027017U priority Critical patent/JPH0734923Y2/ja
Publication of JPH02118751U publication Critical patent/JPH02118751U/ja
Application granted granted Critical
Publication of JPH0734923Y2 publication Critical patent/JPH0734923Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP1989027017U 1989-03-09 1989-03-09 マグネトロンスパッタ装置 Expired - Lifetime JPH0734923Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989027017U JPH0734923Y2 (ja) 1989-03-09 1989-03-09 マグネトロンスパッタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989027017U JPH0734923Y2 (ja) 1989-03-09 1989-03-09 マグネトロンスパッタ装置

Publications (2)

Publication Number Publication Date
JPH02118751U JPH02118751U (OSRAM) 1990-09-25
JPH0734923Y2 true JPH0734923Y2 (ja) 1995-08-09

Family

ID=31249160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989027017U Expired - Lifetime JPH0734923Y2 (ja) 1989-03-09 1989-03-09 マグネトロンスパッタ装置

Country Status (1)

Country Link
JP (1) JPH0734923Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102672094B1 (ko) * 2018-09-27 2024-06-05 가부시키가이샤 알박 마그네트론 스퍼터링 장치용 자석 유닛

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917896U (ja) * 1982-07-27 1984-02-03 三菱重工業株式会社 高速増殖炉の炉心構成要素
JPS6338576A (ja) * 1986-08-01 1988-02-19 Anelva Corp スパツタリング装置

Also Published As

Publication number Publication date
JPH02118751U (OSRAM) 1990-09-25

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