JPH0734399Y2 - 電子線照射装置 - Google Patents
電子線照射装置Info
- Publication number
- JPH0734399Y2 JPH0734399Y2 JP1988012335U JP1233588U JPH0734399Y2 JP H0734399 Y2 JPH0734399 Y2 JP H0734399Y2 JP 1988012335 U JP1988012335 U JP 1988012335U JP 1233588 U JP1233588 U JP 1233588U JP H0734399 Y2 JPH0734399 Y2 JP H0734399Y2
- Authority
- JP
- Japan
- Prior art keywords
- window
- window foil
- electron beam
- irradiation
- foil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 23
- 239000011888 foil Substances 0.000 claims description 52
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 20
- 238000001816 cooling Methods 0.000 claims description 16
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 3
- 230000001133 acceleration Effects 0.000 description 12
- 238000003825 pressing Methods 0.000 description 9
- 229910052757 nitrogen Inorganic materials 0.000 description 8
- 239000000498 cooling water Substances 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988012335U JPH0734399Y2 (ja) | 1988-02-01 | 1988-02-01 | 電子線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988012335U JPH0734399Y2 (ja) | 1988-02-01 | 1988-02-01 | 電子線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01118399U JPH01118399U (en, 2012) | 1989-08-10 |
| JPH0734399Y2 true JPH0734399Y2 (ja) | 1995-08-02 |
Family
ID=31221689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988012335U Expired - Lifetime JPH0734399Y2 (ja) | 1988-02-01 | 1988-02-01 | 電子線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0734399Y2 (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6323880B1 (en) | 1996-09-25 | 2001-11-27 | Nec Corporation | Gray scale expression method and gray scale display device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5346598A (en) * | 1976-10-07 | 1978-04-26 | Ebara Corp | Cooling system and device of particle accelerator irradiation aperture |
-
1988
- 1988-02-01 JP JP1988012335U patent/JPH0734399Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6323880B1 (en) | 1996-09-25 | 2001-11-27 | Nec Corporation | Gray scale expression method and gray scale display device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01118399U (en, 2012) | 1989-08-10 |
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