JPH07336002A - Wiring board and manufacture thereof - Google Patents

Wiring board and manufacture thereof

Info

Publication number
JPH07336002A
JPH07336002A JP12623394A JP12623394A JPH07336002A JP H07336002 A JPH07336002 A JP H07336002A JP 12623394 A JP12623394 A JP 12623394A JP 12623394 A JP12623394 A JP 12623394A JP H07336002 A JPH07336002 A JP H07336002A
Authority
JP
Japan
Prior art keywords
wiring
epoxy resin
weight epoxy
wiring board
molecular weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12623394A
Other languages
Japanese (ja)
Inventor
Koichi Tsuyama
宏一 津山
Akishi Nakaso
昭士 中祖
Kazuhisa Otsuka
和久 大塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP12623394A priority Critical patent/JPH07336002A/en
Publication of JPH07336002A publication Critical patent/JPH07336002A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To manufacture simply and conveniently a wiring board being excellent in migration resistance by a method wherein a base is constructed of a layer formed by impregnating glass cloth with thermosetting resin and by setting it and of a layer of high-molecular-weight epoxy resin and an insulating material coming into contact with a wiring is constituted of the high-molecular-weight epoxy resin. CONSTITUTION:This wiring board is composed of a base and a wiring 4 and the base is constructed of a layer 1 formed by impregnating glass cloth with thermosetting resin and by setting it and of a high-molecular-weight epoxy resin layer 2, while an insulating material coming into contact with the wiring 4 is constituted of high- molecular-weight epoxy resin. In this wiring board, the wiring 4 may be provided on either one or both surfaces of the base and also it may be provided in one or more layers on both surfaces of the base and at least inside of it. The viscosity of the high-molecular-weight epoxy resin is very high and the fluidity thereof is low even at a temperature at the time of lamination bonding. Even when the resin is laminated adjacently to a prepreg and subjected to pressure and heat, therefore, no mutual mixing of the resin takes place and fibers of the glass cloth are prevented from coming into contact with a copper leaf.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、耐マイグレーション性
に優れた配線板とその製造法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wiring board having excellent migration resistance and a method for manufacturing the same.

【0002】[0002]

【従来の技術】配線板の代表的な製造法として、金属箔
を絶縁基材に貼り合わせた金属張り積層板を出発材料と
し、エッチングによって配線を形成するサブトラクティ
ブ法がある。この方法は、エッチングだけで配線形成が
でき、製造が容易である。また、多層配線の形成の場合
も、複数の両面配線形成物である内層板を作り、プリプ
レグ等を介して多層化接着を行うことによって容易に形
成できる。ガラス布入り基材の積層板を用いた配線板
が、支持体の高い強度を得られること、比較的低コスト
であることから多用されている。
2. Description of the Related Art As a typical method for manufacturing a wiring board, there is a subtractive method in which wiring is formed by etching using a metal-clad laminate having a metal foil attached to an insulating base material as a starting material. In this method, wiring can be formed only by etching, and the manufacturing is easy. Further, also in the case of forming a multi-layer wiring, it can be easily formed by forming an inner layer plate which is a plurality of double-sided wiring formed products and performing multi-layer bonding through a prepreg or the like. A wiring board using a laminated plate of a base material containing a glass cloth is widely used because it can obtain high strength of the support and is relatively low in cost.

【0003】[0003]

【発明が解決しようとする課題】ところで、印刷配線板
は、電子機器の発達に伴い、軽薄短小化が進み、配線間
隔が狭くなるなど、電気絶縁性に不利な状況となってき
ている。特に、配線間隔が狭いところで、配線材料であ
る金属が電位によって移動するマイグレーション現象が
起こり、絶縁性が低下するという課題が起こってきてい
る。このマイグレーションの発生のしやすさは、配線間
隔と相互の配線間の電位差との関係から決まるものであ
り、ガラス布が基材中に用いられていると、その界面で
のマイグレーション速度が特に速く、絶縁劣化を加速す
ることが知られている。このため、相互にある程度の電
位差のある配線の場合、配線間隔をあまり狭くできない
こと、設計段階で相互の配線の電位差まで考慮し、これ
を回避することが行われてきた。
By the way, printed wiring boards have become disadvantageous in terms of electrical insulation such as lighter, thinner, shorter and smaller, and narrower wiring intervals with the development of electronic equipment. In particular, in a place where the wiring interval is narrow, a migration phenomenon in which a metal, which is a wiring material, moves due to an electric potential occurs, and there is a problem that the insulating property is lowered. The easiness of occurrence of the migration is determined by the relationship between the wiring interval and the potential difference between the wirings. When glass cloth is used in the substrate, the migration speed at the interface is particularly high. , Is known to accelerate insulation degradation. Therefore, in the case of wirings having a certain potential difference from each other, it has been attempted that the wiring interval cannot be made too narrow and the potential difference between the wirings is taken into consideration in the design stage.

【0004】また、このような対策が行えない場合に
は、マイグレーションの起こりにくい金属、例えば、ニ
ッケルめっきなどを行い、その上に、銅配線を行う等の
対策が行われてきた。
If such measures cannot be taken, measures have been taken such as plating a metal that is unlikely to cause migration, such as nickel plating, and then providing copper wiring thereon.

【0005】しかし、これらの方法は、配線の自由度を
奪ってしまうことや、金属張り積層板をエッチングする
だけで配線形成できるというサブトラクティブ法のメリ
ットを減じるものであった。
However, these methods reduce the merits of the subtractive method in that the degree of freedom of the wiring is lost and the wiring can be formed only by etching the metal-clad laminate.

【0006】その他の方法として、積層板にガラス布な
どを用いないことも考えられるが、支持体強度が不十分
なだけでなく、高密度配線板の場合、特に重要な寸法安
定性を損なうという課題があった。そこで、支持体強度
や寸法安定性を確保するために、ガラス布などを用いた
基材とし、金属箔との間に、樹脂のみの層を設けること
も考えられる。この方法の場合、ガラス布がないので、
耐マイグレーション性が向上するものの、一般の樹脂を
含浸したガラス布入りのプリプレグと、未硬化の樹脂層
を設けた金属箔を積層接着すると、プリプレグの樹脂と
金属箔に設けた樹脂層の樹脂が混ざってしまい、当初の
目的を達成できない。目的達成のためには、金属箔に設
ける樹脂層を予め硬化させておけばよいが、エポキシ樹
脂など、耐熱性にすぐれた樹脂は、硬化させると固くて
脆くなり、ロールへの巻き取り時や取り扱い時に樹脂層
にクラックが発生したり、剥離するという課題がある。
As another method, it is conceivable not to use glass cloth or the like for the laminated plate, but not only the strength of the support is insufficient, but also in the case of a high-density wiring board, particularly important dimensional stability is impaired. There were challenges. Therefore, in order to secure the strength and dimensional stability of the support, it may be possible to use a substrate made of glass cloth or the like and provide a layer of only resin between the substrate and the metal foil. With this method, there is no glass cloth,
Although the migration resistance is improved, when a prepreg containing a glass cloth impregnated with a general resin and a metal foil provided with an uncured resin layer are laminated and bonded, the resin of the prepreg resin and the resin of the resin layer provided on the metal foil are It is mixed and cannot achieve the original purpose. To achieve the purpose, the resin layer provided on the metal foil may be pre-cured, but a resin having excellent heat resistance, such as an epoxy resin, becomes hard and brittle when cured, and when wound on a roll or There are problems that the resin layer is cracked or peeled off during handling.

【0007】本発明は、耐マイグレーション性に優れた
配線板とその配線板を簡便に製造する方法を提供するこ
とを目的とするものである。
It is an object of the present invention to provide a wiring board having excellent migration resistance and a method for easily manufacturing the wiring board.

【0008】[0008]

【課題を解決するための手段】本発明の配線板は、基材
と配線4とからなり、基材がガラス布に熱硬化性樹脂を
含浸・硬化させた層1と高分子量エポキシ樹脂層2から
なり、配線と接する絶縁材料が高分子量エポキシ樹脂で
あることを特徴とする。
The wiring board of the present invention comprises a base material and wiring 4, and the base material is a layer 1 in which a glass cloth is impregnated and cured with a thermosetting resin and a high molecular weight epoxy resin layer 2. The insulating material in contact with the wiring is a high molecular weight epoxy resin.

【0009】この配線板には、図1に示すように、配線
4を基材の片面に設けることもでき、図2に示すよう
に、配線を基材の両面に設けることや、図3〜図5に示
すように、配線を基材の両面及び少なくとも内部に1層
以上を設けることもできる。本発明に用いるガラス布に
含浸させる熱硬化性樹脂は、実質的にエポキシ樹脂であ
ることが好ましい。
In this wiring board, the wiring 4 can be provided on one side of the base material as shown in FIG. 1, and the wiring can be provided on both sides of the base material as shown in FIG. As shown in FIG. 5, the wiring may be provided on both sides and at least inside of the base material in one or more layers. The thermosetting resin with which the glass cloth used in the present invention is impregnated is preferably substantially an epoxy resin.

【0010】このような配線板を製造するためには、ガ
ラス布に熱硬化性樹脂を含浸・硬化させた層と高分子量
エポキシ樹脂層からなる基材と、金属箔とを、その接着
面側が高分子量エポキシ樹脂層となるように積層接着す
る工程と、該積層板に配線を形成する工程とからなる方
法を用いることができる。
In order to manufacture such a wiring board, a base material composed of a layer obtained by impregnating and curing a glass cloth with a thermosetting resin, a high molecular weight epoxy resin layer, and a metal foil are bonded to each other on the side of the adhesive surface. A method including a step of laminating and adhering so as to form a high molecular weight epoxy resin layer and a step of forming wiring on the laminated plate can be used.

【0011】片面や両面の配線板を製造するには、ガラ
ス布に熱硬化性樹脂を含浸したプリプレグの片面又は両
面に、高分子量エポキシ樹脂フィルムと金属箔とを加圧
加熱して積層一体化したものに配線を形成すればよく、
多層配線板を製造するには、基材がガラス布に熱硬化性
樹脂を含浸、硬化させた層と高分子量エポキシ樹脂層か
らなり、金属箔との接着面側が高分子量エポキシ樹脂層
である金属張り積層板を製造する工程と、該積層板に配
線を形成する工程と、高分子量エポキシ樹脂フィルム、
金属箔に形成された高分子量エポキシ樹脂層、プリプレ
グの中から選択された材料と少なくとも1以上の前記積
層板と、必要な場合に金属箔と、を重ね、積層接着する
工程と、積層接着物に配線を形成する工程とを有し、か
つ、積層接着時に、配線または金属箔には必ず高分子量
エポキシ樹脂層または高分子量エポキシ樹脂フィルムが
接触するように構成することによって製造することがで
きる。
In order to produce a single-sided or double-sided wiring board, a high molecular weight epoxy resin film and a metal foil are pressure-heated and laminated on one or both sides of a prepreg obtained by impregnating a glass cloth with a thermosetting resin. You can form wiring on the
In order to manufacture a multilayer wiring board, a base material is composed of a glass cloth impregnated with a thermosetting resin and cured, and a high molecular weight epoxy resin layer, and a metal foil whose adhesive surface is a high molecular weight epoxy resin layer. A step of producing a laminated laminate, a step of forming wiring on the laminate, a high molecular weight epoxy resin film,
A step of laminating a high molecular weight epoxy resin layer formed on a metal foil, a material selected from prepregs, at least one or more of the above laminated plates, and a metal foil if necessary, and laminating and adhering the same; And a step of forming a wiring on the wiring, and the wiring or the metal foil is always brought into contact with the high molecular weight epoxy resin layer or the high molecular weight epoxy resin film at the time of lamination and adhesion.

【0012】また、配線の形成工程において、穴開けと
穴壁の金属化を行うことによって、各層の配線の電気的
接続を行うことができ、この穴開けと穴壁の金属化を行
うときに、少なくとも、ガラス布と接触する部分ではニ
ッケルを主成分とするめっきを形成すれば、マイグレー
ションの抑制をより行うことができ好ましい。
Further, in the step of forming the wiring, the holes and the metalization of the hole wall can be performed to electrically connect the wirings of the respective layers. It is preferable that at least the portion that comes into contact with the glass cloth is plated with nickel as a main component because migration can be further suppressed.

【0013】さらにまた、穴開けを行うときに、少なく
とも、ガラス布と接触する部分において、一旦穴開け
後、樹脂埋めを行い、再度、径の小さい穴を開けると、
穴内壁にガラス布の端部が露出することがなく、これも
マイグレーションの抑制の上で好ましい。
Furthermore, at the time of making a hole, at least at a portion which comes into contact with the glass cloth, the hole is once filled with resin, and then a hole having a small diameter is made again,
The edge of the glass cloth is not exposed on the inner wall of the hole, which is also preferable in terms of suppressing migration.

【0014】さらに詳しくは、まず、ガラス織布あるい
はガラス不織布と熱硬化性樹脂からなるプリプレグを用
意する。熱硬化性樹脂は、耐熱性、電気特性、価格など
から選択され、これらのバランスから、エポキシ樹脂が
特に適している。厚さは特に制限はなく、目的に応じ
て、厚さや、枚数を決めればよい。
More specifically, first, a prepreg made of glass woven cloth or glass nonwoven cloth and a thermosetting resin is prepared. The thermosetting resin is selected from heat resistance, electric characteristics, price, etc., and from the balance of these, epoxy resin is particularly suitable. The thickness is not particularly limited, and the thickness and the number of sheets may be determined according to the purpose.

【0015】次に、高分子量エポキシ樹脂層付き金属
箔、もしくは、高分子量エポキシ樹脂フィルムと金属箔
を用意する。金属箔は、電気的特性から、一般的に銅箔
が好適である。その厚さは、特に制限はしないが、一般
的には、5から70ミクロンであり、特に高密度配線の
形成には、5から18ミクロンが適している。高分子量
エポキシ樹脂フィルムには、市販のものではエポキシ樹
脂フィルムAS3000(日立化成工業株式会社製、商
品名)等を用いることができる。高分子量エポキシ樹脂
層付き金属箔を用いる場合には、AS3000(日立化
成工業株式会社製、商品名)等の樹脂ワニスを、直接金
属箔に塗工して用いることができる。この高分子量エポ
キシ樹脂フィルムまたは高分子量エポキシ樹脂層の厚さ
は、効果とコストから、10から50ミクロンが適して
いる。
Next, a metal foil with a high molecular weight epoxy resin layer, or a high molecular weight epoxy resin film and a metal foil are prepared. Generally, copper foil is suitable for the metal foil because of its electrical characteristics. The thickness is not particularly limited, but is generally 5 to 70 microns, and particularly 5 to 18 microns is suitable for forming high density wiring. As the high molecular weight epoxy resin film, a commercially available epoxy resin film AS3000 (manufactured by Hitachi Chemical Co., Ltd., trade name) can be used. When a metal foil with a high molecular weight epoxy resin layer is used, a resin varnish such as AS3000 (manufactured by Hitachi Chemical Co., Ltd.) can be used by directly coating the metal foil. The thickness of the high molecular weight epoxy resin film or the high molecular weight epoxy resin layer is preferably 10 to 50 μm because of its effect and cost.

【0016】ガラス布/樹脂製プリプレグの片面もしく
は両面に、高分子量エポキシ樹脂、金属箔となるよう
に、上記の材料を積層して、加圧加熱して接着し、金属
張り積層板を得る。エポキシ樹脂含浸のプリプレグを使
用した時の加圧加熱条件は、使用した樹脂によって若干
異なるが、圧力20〜50kgf/cm2、160〜1
70℃、50〜90分が適している。なお、この条件
は、例示であり、制限するものではない。
On one or both sides of the glass cloth / resin prepreg, the above materials are laminated so as to be a high molecular weight epoxy resin and a metal foil, and they are heated and pressure-bonded to obtain a metal-clad laminate. The pressure and heating conditions when using the epoxy resin-impregnated prepreg vary slightly depending on the resin used, but the pressure is 20 to 50 kgf / cm 2 , 160 to 1
70 ° C and 50 to 90 minutes are suitable. Note that this condition is an example, and is not a limitation.

【0017】片面配線板の場合は、この金属張り積層板
に、配線形成を行うことによって得られる。両面配線板
の場合には、貫通穴を開け、めっきなどにより穴壁の金
属化、エッチングなどによって、配線形成を行う。多層
配線板の場合には、配線形成を行った1以上の金属張り
積層板と、絶縁層材料を積層した積層接着物に、配線形
成を行う。最外層には、金属張り積層板を用いてもよい
し、金属箔を用いてもよい。絶縁層材料には、ガラス布
入りのプリプレグと高分子量エポキシ樹脂を選択できる
が、少なくとも、配線層や金属箔と接する絶縁材料に
は、高分子量エポキシ樹脂層が形成されるように構成す
る。
In the case of a single-sided wiring board, it can be obtained by forming wiring on this metal-clad laminate. In the case of a double-sided wiring board, a wiring is formed by forming a through hole, metalizing the hole wall by plating, etching, etc. In the case of a multilayer wiring board, wiring is formed on one or more metal-clad laminates on which wiring has been formed and a laminated adhesive in which insulating layer materials are laminated. As the outermost layer, a metal-clad laminate or a metal foil may be used. As the insulating layer material, a prepreg containing glass cloth and a high molecular weight epoxy resin can be selected, but a high molecular weight epoxy resin layer is formed at least on the insulating material in contact with the wiring layer or the metal foil.

【0018】すなわち、配線形成済みの積層板どうしや
金属箔との接着層は、高分子量エポキシ樹脂のみでもよ
いし、また、プリプレグの両面に高分子量エポキシ樹脂
となるように構成してもよい。なお、配線層や金属箔と
接する面が高分子量エポキシ樹脂となる構成であれば、
プリプレグの間に高分子量エポキシ樹脂が含まれるよう
な構成でもよい。
That is, the adhesive layer between wiring-formed laminated plates and the metal foil may be only a high molecular weight epoxy resin, or may be a high molecular weight epoxy resin on both surfaces of the prepreg. Incidentally, if the surface in contact with the wiring layer or the metal foil is a high molecular weight epoxy resin,
A high molecular weight epoxy resin may be included between the prepregs.

【0019】両面板や、多層配線板の場合、貫通穴や層
間接続穴は、従来の方法により設けることができる。穴
間隔が狭く、穴間の電位差がある場合には、穴壁の金属
が、ガラス布と樹脂の界面でマイグレーションを起こ
し、電気絶縁性が劣化するので、穴間のマイグレーショ
ンの対策を行うことが望ましい。この方法の一つとし
て、図3乃至図5に示すように、穴壁に、マイグレーシ
ョン性の低い金属をめっきすることがある。具体的に
は、ニッケルを主成分とするめっきがあり、ニッケルめ
っき、ニッケル−リンめっきなどをあげることができ
る。また、別の方法として、一旦穴開け後、熱硬化性樹
脂などで穴埋めを行い、再度一回り小さい穴径で、穴を
開ける方法によって、図2に示すように、ガラス基剤が
孔内壁に露出しないようにすることができる。これらの
対策を行うことによって、スルーホールまで含めて、耐
マイグレーション性を容易に向上できる。
In the case of a double-sided board or a multilayer wiring board, the through hole and the interlayer connection hole can be provided by a conventional method. If the hole spacing is narrow and there is a potential difference between the holes, the metal on the hole walls will migrate at the interface between the glass cloth and the resin, and the electrical insulation will deteriorate. desirable. As one of the methods, as shown in FIGS. 3 to 5, the hole wall is plated with a metal having a low migration property. Specifically, there is plating containing nickel as a main component, and nickel plating, nickel-phosphorus plating and the like can be mentioned. Alternatively, as another method, once the holes are filled, the holes are filled with a thermosetting resin, and then the holes are made again with a slightly smaller hole diameter. You can prevent it from being exposed. By taking these measures, the migration resistance including the through holes can be easily improved.

【0020】[0020]

【作用】高分子量エポキシ樹脂は、積層接着時の温度に
おいても、粘度が極めて高く、流動性が低いので、プリ
プレグと隣り合わせて、積層し、加圧加熱しても、樹脂
どうしが混ざりあうこともなく、ガラス布の繊維が銅箔
と接することがない。したがって、配線形成時にも、配
線とガラス布が接することがない。
[Function] Since the high molecular weight epoxy resin has extremely high viscosity and low fluidity even at the time of laminating and bonding, the resins may be mixed with each other even if they are laminated next to the prepreg and heated under pressure. And the fibers of the glass cloth do not come into contact with the copper foil. Therefore, even when the wiring is formed, the wiring does not come into contact with the glass cloth.

【0021】[0021]

【実施例】【Example】

実施例1 (1)厚さ0.1ミリのガラス織布/ポリイミド樹脂製
プリプレグであるGEA−671(日立化成工業株式会
社製、商品名)に、厚さ50ミクロンのエポキシ樹脂フ
ィルムAS3000(日立化成工業株式会社製、商品
名)と、厚さ18ミクロンの銅箔TSTO(古河サーキ
ットフォイル株式会社製、商品名)を積層して25kg
f/cm2、180℃、0.5Torr、95分の条件
で加圧加熱し積層板を作成した。 (2)この積層板の銅箔の不要な箇所を、エッチング除
去して回路を形成し、ソルダーレジストをスクリーン印
刷して片面配線板を得た。
Example 1 (1) A glass woven cloth / polyimide resin prepreg having a thickness of 0.1 mm, GEA-671 (manufactured by Hitachi Chemical Co., Ltd., trade name), has a 50-micron thick epoxy resin film AS3000 (Hitachi). 25 kg by stacking 18 micron thick copper foil TSTO (Furukawa Circuit Foil Co., Ltd., trade name) with Kasei Kogyo Co., Ltd. (trade name)
A laminated plate was prepared by heating under pressure under the conditions of f / cm 2 , 180 ° C., 0.5 Torr, and 95 minutes. (2) An unnecessary portion of the copper foil of this laminate was removed by etching to form a circuit, and a solder resist was screen-printed to obtain a single-sided wiring board.

【0022】実施例2 (1)厚さ0.1ミリのガラス織布/ポリイミド樹脂製
プリプレグであるGEA−671(日立化成工業株式会
社製、商品名)の両面に、厚さ50ミクロンのエポキシ
樹脂フィルムAS3000(日立化成工業株式会社製、
商品名)と、厚さ18ミクロンの銅箔TSTO(古河サ
ーキットフォイル株式会社製、商品名)を積層して25
kgf/cm2、180℃、0.5Torr、95分の
条件で加圧加熱し積層板を作成した。 (2)この積層板に穴をあけ、CUST−201(日立
化成工業株式会社製、商品名)で無電解銅めっき後、電
気硫酸銅めっきを用いて厚さ約7ミクロンのめっき層を
形成した。 (3)厚さ50ミクロンの感光性ドライフィルムである
フォテックH−K450(日立化成工業株式会社製、商
品名)をラミネート後、露光、現像してエッチング用レ
ジストパターンを形成し、エッチングして配線形成を行
った。
Example 2 (1) On both sides of 0.1 mm thick glass woven cloth / polyimide resin prepreg, GEA-671 (trade name, manufactured by Hitachi Chemical Co., Ltd.), 50 μm thick epoxy Resin film AS3000 (manufactured by Hitachi Chemical Co., Ltd.,
(Trade name) and copper foil TSTO (trade name, manufactured by Furukawa Circuit Foil Co., Ltd.) having a thickness of 18 microns are laminated to form 25
A laminated plate was prepared by heating under pressure under the conditions of kgf / cm 2 , 180 ° C., 0.5 Torr, and 95 minutes. (2) A hole was made in this laminated plate, and after electroless copper plating with CUST-201 (manufactured by Hitachi Chemical Co., Ltd., trade name), a plating layer having a thickness of about 7 microns was formed using electro copper sulfate plating. . (3) After laminating Phototec H-K450 (trade name, manufactured by Hitachi Chemical Co., Ltd.), which is a photosensitive dry film having a thickness of 50 microns, it is exposed and developed to form a resist pattern for etching, and etching is performed to form wiring. Formed.

【0023】実施例3 (1)厚さ0.1ミリのガラス織布/ポリイミド樹脂製
プリプレグであるGEA−671(日立化成工業株式会
社製、商品名)に、厚さ50ミクロンのエポキシ樹脂フ
ィルムAS3000(日立化成工業株式会社製、商品
名)と、厚さ18ミクロンの銅箔TSTO(古河サーキ
ットフォイル株式会社製、商品名)を積層して25kg
f/cm2、180℃、0.5Torr、95分の条件
で加圧加熱し積層板を作成し、銅箔の不要な箇所をエッ
チング除去して、内層回路板を3枚それぞれ別の配線パ
ターンを形成したものを作成した。 (2)この3枚の内層回路板と、2枚の厚さ50ミクロ
ンのエポキシ樹脂フィルムAS3000(日立化成工業
株式会社製、商品名)とを交互に重ね、最外層にも2枚
の厚さ50ミクロンのエポキシ樹脂フィルムAS300
0(日立化成工業株式会社製、商品名)を重ね、さらに
その外側に、2枚の厚さ18ミクロンの銅箔TSTO
(古河サーキットフォイル株式会社製、商品名)を重
ね、25kgf/cm2、180℃、0.5Torr、
95分の条件で加圧加熱し積層板を作成した。 (3)この積層板に穴をあけ、CUST−201(日立
化成工業株式会社製、商品名)で無電解銅めっき後、電
気硫酸銅めっきを用いて厚さ約7ミクロンのめっき層を
形成した。 (4)厚さ50ミクロンの感光性ドライフィルムである
フォテックH−K450(日立化成工業株式会社製、商
品名)をラミネート後、露光、現像してエッチング用レ
ジストパターンを形成し、エッチングして配線形成を行
った。
Example 3 (1) A glass woven cloth / polyimide resin prepreg having a thickness of 0.1 mm, GEA-671 (manufactured by Hitachi Chemical Co., Ltd., trade name), was coated with a 50 micron thick epoxy resin film. 25 kg by stacking AS3000 (Hitachi Chemical Co., Ltd., trade name) and 18 micron thick copper foil TSTO (Furukawa Circuit Foil Co., Ltd. trade name)
F / cm 2 , 180 ℃, 0.5 Torr, pressurize and heat under conditions of 95 minutes to create a laminated board, remove unnecessary portions of the copper foil by etching, and three inner layer circuit boards with different wiring patterns Was formed. (2) The three inner-layer circuit boards and two 50-micron-thick epoxy resin films AS3000 (manufactured by Hitachi Chemical Co., Ltd., trade name) are alternately laminated, and the outermost layer has two thicknesses. 50 micron epoxy resin film AS300
0 (manufactured by Hitachi Chemical Co., Ltd., product name) is stacked, and two 18-micron-thick copper foil TSTOs are further placed on the outside.
(Furukawa Circuit Foil Co., Ltd., trade name) is overlaid, 25 kgf / cm 2 , 180 ° C., 0.5 Torr,
A laminated plate was prepared by heating under pressure for 95 minutes. (3) A hole was made in this laminated plate, and after electroless copper plating with CUST-201 (Hitachi Chemical Co., Ltd., trade name), a plating layer having a thickness of about 7 microns was formed using electro copper sulfate plating. . (4) Phototec H-K450 (trade name, manufactured by Hitachi Chemical Co., Ltd.), which is a photosensitive dry film having a thickness of 50 microns, is laminated, exposed and developed to form a resist pattern for etching, and etching is performed to form wiring. Formed.

【0024】実施例4 (1)厚さ0.1ミリのガラス織布/ポリイミド樹脂製
プリプレグであるGEA−671(日立化成工業株式会
社製、商品名)に、厚さ50ミクロンのエポキシ樹脂フ
ィルムAS3000(日立化成工業株式会社製、商品
名)と、厚さ18ミクロンの銅箔TSTO(古河サーキ
ットフォイル株式会社製、商品名)を積層して25kg
f/cm2、180℃、0.5Torr、95分の条件
で加圧加熱し積層板を作成し、銅箔の不要な箇所をエッ
チング除去して、内層回路板を3枚それぞれ別の配線パ
ターンを形成したものを作成した。このときに、プリプ
レグには予め直径0.5mmの穴をあけておいたので、
穴内部にはエポキシ樹脂フィルムが充填されている。 (2)先の加圧加熱工程で樹脂が充填されている、プリ
プレグに形成した穴部分に、0.2ミリ径のドリルであ
るMUS020(三菱マテリアル株式会社製、商品名)
を用いて、80krpm、送り速度1.5m/分、基板
の重ね枚数5枚の条件で穴開けしたのち、厚さ50ミク
ロンの感光性ドライフィルムであるフォテックH−K4
50(日立化成工業株式会社製、商品名)をラミネート
後、露光、現像してエッチング用レジストパターンを形
成し、エッチングして配線形成を行い3枚の内層回路板
を作成した。 (3)この3枚の内層回路板と、2枚の厚さ50ミクロ
ンのエポキシ樹脂フィルムAS3000(日立化成工業
株式会社製、商品名)とを交互に重ね、最外層にも2枚
の厚さ50ミクロンのエポキシ樹脂フィルムAS300
0(日立化成工業株式会社製、商品名)を重ね、さらに
その外側に、2枚の厚さ18ミクロンの銅箔TSTO
(古河サーキットフォイル株式会社製、商品名)を重
ね、25kgf/cm2、180℃、0.5Torr、
95分の条件で加圧加熱し積層板を作成した。 (4)この積層板に穴をあけ、CUST−201(日立
化成工業株式会社製、商品名)で無電解銅めっき後、電
気硫酸銅めっきを用いて厚さ約7ミクロンのめっき層を
形成した。 (5)厚さ50ミクロンの感光性ドライフィルムである
フォテックH−K450(日立化成工業株式会社製、商
品名)をラミネート後、露光、現像してエッチング用レ
ジストパターンを形成し、エッチングして配線形成を行
った。
Example 4 (1) A glass woven cloth / polyimide resin prepreg having a thickness of 0.1 mm, GEA-671 (trade name, manufactured by Hitachi Chemical Co., Ltd.), and an epoxy resin film having a thickness of 50 μm were used. 25 kg by stacking AS3000 (Hitachi Chemical Co., Ltd., trade name) and 18 micron thick copper foil TSTO (Furukawa Circuit Foil Co., Ltd. trade name)
F / cm 2 , 180 ℃, 0.5 Torr, pressurize and heat under conditions of 95 minutes to create a laminated board, remove unnecessary portions of the copper foil by etching, and three inner layer circuit boards with different wiring patterns Was formed. At this time, a hole with a diameter of 0.5 mm was previously drilled in the prepreg,
An epoxy resin film is filled inside the hole. (2) MUS020 (manufactured by Mitsubishi Materials Co., Ltd.), which is a 0.2 mm diameter drill in the hole formed in the prepreg, which is filled with resin in the previous pressure and heating step.
After making a hole under the conditions of 80 krpm, feed speed of 1.5 m / min, and stacking of 5 substrates, Fotec H-K4 which is a photosensitive dry film with a thickness of 50 μm.
After laminating 50 (manufactured by Hitachi Chemical Co., Ltd., trade name), exposure and development were carried out to form a resist pattern for etching, and etching was performed to form wiring to form three inner layer circuit boards. (3) These three inner-layer circuit boards and two 50-micron-thick epoxy resin films AS3000 (manufactured by Hitachi Chemical Co., Ltd., trade name) are alternately laminated, and the outermost layer also has two thicknesses. 50 micron epoxy resin film AS300
0 (manufactured by Hitachi Chemical Co., Ltd., product name) is stacked, and two 18-micron-thick copper foil TSTOs are further placed on the outside.
(Furukawa Circuit Foil Co., Ltd., trade name) is overlaid, 25 kgf / cm 2 , 180 ° C., 0.5 Torr,
A laminated plate was prepared by heating under pressure for 95 minutes. (4) A hole was made in this laminated plate, and after electroless copper plating with CUST-201 (manufactured by Hitachi Chemical Co., Ltd., trade name), a plating layer having a thickness of about 7 microns was formed using electro copper sulfate plating. . (5) Phototec H-K450 (trade name, manufactured by Hitachi Chemical Co., Ltd.), which is a photosensitive dry film having a thickness of 50 μm, is laminated, exposed and developed to form a resist pattern for etching, and wiring is performed by etching. Formed.

【0025】(試験) (1)電食試験 85℃、85%RHの条件下でDC100Vの電圧をギ
ャップを、0.5ミリの間隔(穴壁間隔は0.2ミリ)
で開いているスルーホール相互間に印加し、接続抵抗が
10の6乗オーム以下になる時間を調べた。その結果、
いずれの実施例の基板も、500時間後でも絶縁劣化し
なかった。
(Test) (1) Electrolytic Corrosion Test Under conditions of 85 ° C. and 85% RH, a voltage of DC 100 V was applied with a gap of 0.5 mm (hole wall interval was 0.2 mm).
It was applied between the through-holes opened at, and the time when the connection resistance became 10 6 ohm or less was examined. as a result,
In the substrates of all the examples, the insulation did not deteriorate even after 500 hours.

【0026】(2)接続信頼性 熱衝撃試験(125℃/30分と−65℃/30分の交
互繰り返し)を行った結果、いずれの実施例も、300
サイクル後の接続抵抗の変化率は10%以下で異常がな
いことがわかった。
(2) Connection reliability As a result of a thermal shock test (alternate repetition of 125 ° C./30 minutes and −65 ° C./30 minutes), in each of the examples, 300
It was found that the change rate of the connection resistance after the cycle was 10% or less and there was no abnormality.

【0027】(3)耐熱性 260℃のはんだ浴に30秒間フロートした結果、いず
れの実施例も、剥離などの異常がないことがわかった。
(3) Heat resistance As a result of being floated in a solder bath at 260 ° C. for 30 seconds, it was found that there was no abnormality such as peeling in any of the examples.

【0028】[0028]

【発明の効果】本発明により、耐マイグレーション性に
優れた配線板が、低コストで提供できる。
According to the present invention, a wiring board having excellent migration resistance can be provided at low cost.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す断面図である。FIG. 1 is a sectional view showing an embodiment of the present invention.

【図2】本発明の他の実施例を示す断面図である。FIG. 2 is a sectional view showing another embodiment of the present invention.

【図3】本発明のさらに他の実施例を示す断面図であ
る。
FIG. 3 is a sectional view showing still another embodiment of the present invention.

【図4】本発明のさらに他の実施例の一態様を示す断面
図である。
FIG. 4 is a sectional view showing an aspect of still another embodiment of the present invention.

【図5】本発明のさらに他の実施例の他の一態様を示す
断面図である。
FIG. 5 is a cross-sectional view showing another aspect of still another embodiment of the present invention.

Claims (12)

【特許請求の範囲】[Claims] 【請求項1】基材と配線とからなり、基材がガラス布に
熱硬化性樹脂を含浸・硬化させた層と高分子量エポキシ
樹脂層からなり、配線と接する絶縁材料が高分子量エポ
キシ樹脂であることを特徴とする配線板。
1. A base material and wiring, a base material comprising a layer obtained by impregnating and curing a glass cloth with a thermosetting resin and a high molecular weight epoxy resin layer, and the insulating material in contact with the wiring is a high molecular weight epoxy resin. A wiring board characterized by being present.
【請求項2】配線層を基材部の片面に設けたことを特徴
とする請求項1に記載の配線板。
2. The wiring board according to claim 1, wherein the wiring layer is provided on one surface of the base material portion.
【請求項3】配線層を基材部の両面に設けたことを特徴
とする請求項1に記載の配線板。
3. The wiring board according to claim 1, wherein wiring layers are provided on both sides of the base material portion.
【請求項4】配線層を基材部の両面及び少なくとも内部
に1層以上を設けたことを特徴とする請求項1に記載の
配線板。
4. The wiring board according to claim 1, wherein one or more wiring layers are provided on both sides and at least inside of the base material portion.
【請求項5】ガラス布に含浸させる熱硬化性樹脂が、実
質的にエポキシ樹脂であることを特徴とする請求項1か
ら4のうちいずれかに記載の配線板。
5. The wiring board according to claim 1, wherein the thermosetting resin with which the glass cloth is impregnated is substantially an epoxy resin.
【請求項6】ガラス布に熱硬化性樹脂を含浸・硬化させ
た層と高分子量エポキシ樹脂層からなる基材と、金属箔
とを、その接着面側が高分子量エポキシ樹脂層となるよ
うに積層接着する工程と、該積層板に配線を形成する工
程とからなることを特徴とする配線板の製造法。
6. A base material comprising a layer obtained by impregnating and curing a glass cloth with a thermosetting resin and a high molecular weight epoxy resin layer, and a metal foil are laminated so that the adhesive surface side becomes the high molecular weight epoxy resin layer. A method of manufacturing a wiring board, comprising a step of adhering and a step of forming wiring on the laminated board.
【請求項7】ガラス布に熱硬化性樹脂を含浸したプリプ
レグの片面又は両面に、高分子量エポキシ樹脂フィルム
と金属箔とを加圧加熱して積層一体化したものに配線を
形成することを特徴とする請求項6に記載の配線板の製
造法。
7. A wiring is formed by pressing and heating a high molecular weight epoxy resin film and a metal foil on one side or both sides of a prepreg obtained by impregnating a glass cloth with a thermosetting resin, and laminating and integrating them. The method for manufacturing a wiring board according to claim 6.
【請求項8】基材がガラス布に熱硬化性樹脂を含浸、硬
化させた層と高分子量エポキシ樹脂層からなり、金属箔
との接着面側が高分子量エポキシ樹脂層である金属張り
積層板を製造する工程と、該積層板に配線を形成する工
程と、高分子量エポキシ樹脂フィルム、金属箔に形成さ
れた高分子量エポキシ樹脂層、プリプレグの中から選択
された材料と少なくとも1以上の前記積層板と、必要な
場合に金属箔と、を重ね、積層接着する工程と、積層接
着物に配線を形成する工程とを有し、かつ、積層接着時
に、配線または金属箔には必ず高分子量エポキシ樹脂層
または高分子量エポキシ樹脂フィルムが接触するように
構成することを特徴とする配線板の製造法。
8. A metal-clad laminate comprising a glass cloth impregnated with a thermosetting resin and cured, and a high molecular weight epoxy resin layer, the adhesive side of which is a high molecular weight epoxy resin layer. A manufacturing step, a step of forming wiring on the laminate, a high molecular weight epoxy resin film, a high molecular weight epoxy resin layer formed on a metal foil, a material selected from prepregs, and at least one or more of the laminates And a metal foil, if necessary, and a step of laminating and laminating, and a step of forming wiring on the laminating adhesive, and at the time of laminating and adhering, the wiring or the metal foil must be made of a high molecular weight epoxy resin. A method for manufacturing a wiring board, wherein the layer or the high molecular weight epoxy resin film is configured so as to be in contact with each other.
【請求項9】配線の形成工程において、穴開けと穴壁の
金属化を行うことを特徴とする請求項6から8のうちい
ずれかに記載の配線板の製造法。
9. The method for manufacturing a wiring board according to claim 6, wherein in the wiring forming step, a hole is formed and the hole wall is metallized.
【請求項10】穴開けと穴壁の金属化を行うときに、少
なくとも、ガラス布と接触する部分ではニッケルを主成
分とするめっきの形成であることを特徴とする請求項9
に記載の配線板の製造法。
10. The plating containing nickel as a main component is formed at least in a portion in contact with the glass cloth when the hole is formed and the wall of the hole is metallized.
The method for manufacturing a wiring board according to.
【請求項11】穴開けが、少なくとも、ガラス布と接触
する部分において、一旦穴開け後、樹脂埋めを行い、再
度、径の小さい穴を開けることを特徴とする請求項11
に記載の配線板の製造法。
11. The method of forming a hole, wherein at least at a portion in contact with the glass cloth, the hole is once made, resin filling is performed, and then a hole having a small diameter is made again.
The method for manufacturing a wiring board according to.
【請求項12】金属箔が銅箔であることを特徴とする請
求項6から11のうちいずれかに記載の配線板の製造
法。
12. The method for manufacturing a wiring board according to claim 6, wherein the metal foil is a copper foil.
JP12623394A 1994-06-08 1994-06-08 Wiring board and manufacture thereof Pending JPH07336002A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12623394A JPH07336002A (en) 1994-06-08 1994-06-08 Wiring board and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12623394A JPH07336002A (en) 1994-06-08 1994-06-08 Wiring board and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH07336002A true JPH07336002A (en) 1995-12-22

Family

ID=14930086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12623394A Pending JPH07336002A (en) 1994-06-08 1994-06-08 Wiring board and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH07336002A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008159860A (en) * 2006-12-25 2008-07-10 Kyocera Corp Mounting structure of semiconductor element
CN103228103A (en) * 2012-01-27 2013-07-31 京瓷Slc技术株式会社 Wiring board and mounting structure using the same
CN104112715A (en) * 2013-04-17 2014-10-22 瑞萨电子株式会社 Semiconductor Device And Method Of Manufacturing Same
CN108990322A (en) * 2018-08-16 2018-12-11 鹤山市得润电子科技有限公司 A kind of double-sided PCB and its manufacturing method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008159860A (en) * 2006-12-25 2008-07-10 Kyocera Corp Mounting structure of semiconductor element
CN103228103A (en) * 2012-01-27 2013-07-31 京瓷Slc技术株式会社 Wiring board and mounting structure using the same
US8890001B2 (en) 2012-01-27 2014-11-18 Kyocera Slc Technologies Corporation Wiring board and mounting structure using the same
CN104112715A (en) * 2013-04-17 2014-10-22 瑞萨电子株式会社 Semiconductor Device And Method Of Manufacturing Same
US20140312498A1 (en) * 2013-04-17 2014-10-23 Renesas Electronics Corporation Semiconductor device and method of manufacturing same
CN108990322A (en) * 2018-08-16 2018-12-11 鹤山市得润电子科技有限公司 A kind of double-sided PCB and its manufacturing method

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