JPH0730680Y2 - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPH0730680Y2
JPH0730680Y2 JP1987190167U JP19016787U JPH0730680Y2 JP H0730680 Y2 JPH0730680 Y2 JP H0730680Y2 JP 1987190167 U JP1987190167 U JP 1987190167U JP 19016787 U JP19016787 U JP 19016787U JP H0730680 Y2 JPH0730680 Y2 JP H0730680Y2
Authority
JP
Japan
Prior art keywords
ionization
sample
shutter
plate
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987190167U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0194452U (enrdf_load_stackoverflow
Inventor
真 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1987190167U priority Critical patent/JPH0730680Y2/ja
Publication of JPH0194452U publication Critical patent/JPH0194452U/ja
Application granted granted Critical
Publication of JPH0730680Y2 publication Critical patent/JPH0730680Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987190167U 1987-12-14 1987-12-14 真空蒸着装置 Expired - Lifetime JPH0730680Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987190167U JPH0730680Y2 (ja) 1987-12-14 1987-12-14 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987190167U JPH0730680Y2 (ja) 1987-12-14 1987-12-14 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH0194452U JPH0194452U (enrdf_load_stackoverflow) 1989-06-21
JPH0730680Y2 true JPH0730680Y2 (ja) 1995-07-12

Family

ID=31481159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987190167U Expired - Lifetime JPH0730680Y2 (ja) 1987-12-14 1987-12-14 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH0730680Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6096759A (ja) * 1983-11-01 1985-05-30 Mitsubishi Electric Corp 薄膜蒸着装置
JPS6199670A (ja) * 1984-10-19 1986-05-17 Jeol Ltd イオンプレ−テイング装置

Also Published As

Publication number Publication date
JPH0194452U (enrdf_load_stackoverflow) 1989-06-21

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