JPH0194452U - - Google Patents

Info

Publication number
JPH0194452U
JPH0194452U JP19016787U JP19016787U JPH0194452U JP H0194452 U JPH0194452 U JP H0194452U JP 19016787 U JP19016787 U JP 19016787U JP 19016787 U JP19016787 U JP 19016787U JP H0194452 U JPH0194452 U JP H0194452U
Authority
JP
Japan
Prior art keywords
ionizing
sample
plate
applying
potential difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19016787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0730680Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987190167U priority Critical patent/JPH0730680Y2/ja
Publication of JPH0194452U publication Critical patent/JPH0194452U/ja
Application granted granted Critical
Publication of JPH0730680Y2 publication Critical patent/JPH0730680Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987190167U 1987-12-14 1987-12-14 真空蒸着装置 Expired - Lifetime JPH0730680Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987190167U JPH0730680Y2 (ja) 1987-12-14 1987-12-14 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987190167U JPH0730680Y2 (ja) 1987-12-14 1987-12-14 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH0194452U true JPH0194452U (enrdf_load_stackoverflow) 1989-06-21
JPH0730680Y2 JPH0730680Y2 (ja) 1995-07-12

Family

ID=31481159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987190167U Expired - Lifetime JPH0730680Y2 (ja) 1987-12-14 1987-12-14 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH0730680Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6096759A (ja) * 1983-11-01 1985-05-30 Mitsubishi Electric Corp 薄膜蒸着装置
JPS6199670A (ja) * 1984-10-19 1986-05-17 Jeol Ltd イオンプレ−テイング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6096759A (ja) * 1983-11-01 1985-05-30 Mitsubishi Electric Corp 薄膜蒸着装置
JPS6199670A (ja) * 1984-10-19 1986-05-17 Jeol Ltd イオンプレ−テイング装置

Also Published As

Publication number Publication date
JPH0730680Y2 (ja) 1995-07-12

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