JPH0194452U - - Google Patents
Info
- Publication number
- JPH0194452U JPH0194452U JP19016787U JP19016787U JPH0194452U JP H0194452 U JPH0194452 U JP H0194452U JP 19016787 U JP19016787 U JP 19016787U JP 19016787 U JP19016787 U JP 19016787U JP H0194452 U JPH0194452 U JP H0194452U
- Authority
- JP
- Japan
- Prior art keywords
- ionizing
- sample
- plate
- applying
- potential difference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims 2
- 230000000903 blocking effect Effects 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987190167U JPH0730680Y2 (ja) | 1987-12-14 | 1987-12-14 | 真空蒸着装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987190167U JPH0730680Y2 (ja) | 1987-12-14 | 1987-12-14 | 真空蒸着装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0194452U true JPH0194452U (enrdf_load_stackoverflow) | 1989-06-21 |
JPH0730680Y2 JPH0730680Y2 (ja) | 1995-07-12 |
Family
ID=31481159
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987190167U Expired - Lifetime JPH0730680Y2 (ja) | 1987-12-14 | 1987-12-14 | 真空蒸着装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0730680Y2 (enrdf_load_stackoverflow) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6096759A (ja) * | 1983-11-01 | 1985-05-30 | Mitsubishi Electric Corp | 薄膜蒸着装置 |
JPS6199670A (ja) * | 1984-10-19 | 1986-05-17 | Jeol Ltd | イオンプレ−テイング装置 |
-
1987
- 1987-12-14 JP JP1987190167U patent/JPH0730680Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6096759A (ja) * | 1983-11-01 | 1985-05-30 | Mitsubishi Electric Corp | 薄膜蒸着装置 |
JPS6199670A (ja) * | 1984-10-19 | 1986-05-17 | Jeol Ltd | イオンプレ−テイング装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0730680Y2 (ja) | 1995-07-12 |