JPH01177265U - - Google Patents

Info

Publication number
JPH01177265U
JPH01177265U JP7150688U JP7150688U JPH01177265U JP H01177265 U JPH01177265 U JP H01177265U JP 7150688 U JP7150688 U JP 7150688U JP 7150688 U JP7150688 U JP 7150688U JP H01177265 U JPH01177265 U JP H01177265U
Authority
JP
Japan
Prior art keywords
grid
filament
evaporation source
evaporated
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7150688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523567Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7150688U priority Critical patent/JPH0523567Y2/ja
Publication of JPH01177265U publication Critical patent/JPH01177265U/ja
Application granted granted Critical
Publication of JPH0523567Y2 publication Critical patent/JPH0523567Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7150688U 1988-05-30 1988-05-30 Expired - Lifetime JPH0523567Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7150688U JPH0523567Y2 (enrdf_load_stackoverflow) 1988-05-30 1988-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7150688U JPH0523567Y2 (enrdf_load_stackoverflow) 1988-05-30 1988-05-30

Publications (2)

Publication Number Publication Date
JPH01177265U true JPH01177265U (enrdf_load_stackoverflow) 1989-12-18
JPH0523567Y2 JPH0523567Y2 (enrdf_load_stackoverflow) 1993-06-16

Family

ID=31296712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7150688U Expired - Lifetime JPH0523567Y2 (enrdf_load_stackoverflow) 1988-05-30 1988-05-30

Country Status (1)

Country Link
JP (1) JPH0523567Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0523567Y2 (enrdf_load_stackoverflow) 1993-06-16

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