JPH0728690Y2 - イオン処理装置 - Google Patents

イオン処理装置

Info

Publication number
JPH0728690Y2
JPH0728690Y2 JP1987121607U JP12160787U JPH0728690Y2 JP H0728690 Y2 JPH0728690 Y2 JP H0728690Y2 JP 1987121607 U JP1987121607 U JP 1987121607U JP 12160787 U JP12160787 U JP 12160787U JP H0728690 Y2 JPH0728690 Y2 JP H0728690Y2
Authority
JP
Japan
Prior art keywords
holder
rotation
wafer
vacuum container
support arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987121607U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6427954U (cs
Inventor
司 野上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1987121607U priority Critical patent/JPH0728690Y2/ja
Publication of JPS6427954U publication Critical patent/JPS6427954U/ja
Application granted granted Critical
Publication of JPH0728690Y2 publication Critical patent/JPH0728690Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987121607U 1987-08-08 1987-08-08 イオン処理装置 Expired - Lifetime JPH0728690Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987121607U JPH0728690Y2 (ja) 1987-08-08 1987-08-08 イオン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987121607U JPH0728690Y2 (ja) 1987-08-08 1987-08-08 イオン処理装置

Publications (2)

Publication Number Publication Date
JPS6427954U JPS6427954U (cs) 1989-02-17
JPH0728690Y2 true JPH0728690Y2 (ja) 1995-06-28

Family

ID=31368768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987121607U Expired - Lifetime JPH0728690Y2 (ja) 1987-08-08 1987-08-08 イオン処理装置

Country Status (1)

Country Link
JP (1) JPH0728690Y2 (cs)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56128555A (en) * 1980-03-13 1981-10-08 Hitachi Ltd Ion implantation device
JPS58142751A (ja) * 1982-02-18 1983-08-24 Nec Corp イオン注入装置
JPS5932198U (ja) * 1982-08-23 1984-02-28 石川島播磨重工業株式会社 ポンプの回転数制御装置

Also Published As

Publication number Publication date
JPS6427954U (cs) 1989-02-17

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