JPH07283455A - Manufacture of laminated piezoelectric element and electrode board used for the same - Google Patents

Abstract

PURPOSE:To provide the connecting method of electrode boards without using the welding step by facilitating the alignment of the electrode boards in order to manufacture the title laminated piezoelectric element comprising the alternately laminated electrode boards and piezoelectric elements wherein even and odd numbered electrode boards are connected electrically and respectively. CONSTITUTION:Two each of connecting conductive boards 11 wherein electrode parts 11a in planar shape corresponding to the planar shape of piezoelectric electrode board in the numbers at least to be laminated are continued in the same number to be laminated through the intermediary of the connecting parts in a specific length are prepared. Next, the piezoelectric boards 13a-13c are also prepared. Finally, these connecting conductive boards 11 are bent to laminate the electrode parts 11 and piezoelectric boards 13a, 13c so that respective electrode boards of the first connecting conductive boards may succuessively become the odd numbered electrodes likewise respective electrode parts of the second connecting conductive boards may successively become even numbered electrodes.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a laminated piezoelectric element and an electrode plate suitable for use in the method.

[0002]

2. Description of the Related Art A laminated piezoelectric element has a structure in which electrode plates and piezoelectric plates are alternately laminated and every other electrode plate is electrically connected to each other. This element is
It is used for devices that require minute positioning, for example, piezoelectric actuators such as semiconductor manufacturing devices and optical devices, and for controlling automobiles and machine tools.

As a conventional example of a method for manufacturing such a laminated piezoelectric element, there is a method disclosed in, for example, Japanese Patent Laid-Open No. 3-156986. In this method, first, a piezoelectric plate made of a piezoelectric material and a metal electrode plate having the same shape and protrusions for external extraction are arranged such that every other protrusion is opposite to the other, Stack alternately. Next, the tips of the protrusions are bent so that the protrusions protruding to the same side are sequentially connected. Next, the protrusions are welded by spot welding at a portion where the protrusions overlap in the connection of the protrusions. Thereby, a laminated piezoelectric element is obtained. Further, JP-A-5-48169 discloses a method of performing the welding by a laser.

[0004]

However, in any of the above-mentioned conventional methods, since the projections of every other electrode plate are welded to each other, the projections of every other electrode plate are arranged at the same position. It is necessary to stack while aligning. Therefore, there is a problem that a jig for alignment is required and a work for alignment is required.
Further, since it is desirable that the material of the electrode plate is an iron-based material from the viewpoint of ease of welding, there is a restriction on using a copper-based material having good electric conductivity. In addition, since the thickness of the electrode plate and the projections themselves is generally as thin as about 50 μm or less, it is difficult to set good spot welding conditions. Therefore, defective connection of the projections due to defective spot welding is likely to occur. Further, in spot welding, since it is necessary to perform a welding operation for each connection point, it cannot be said that productivity is good. On the other hand, in the case of laser welding, it is considered that the condition control is easier than that of spot welding, but in this case as well, it is necessary to perform welding at each welding point, so it cannot be said that productivity is good.

[0005]

Therefore, according to the present invention, the electrode plates and the piezoelectric plates are alternately laminated, and the even-numbered electrode plates and the odd-numbered electrode plates are electrically connected to each other. In manufacturing the laminated piezoelectric element having the structure described above, an electrode portion having a planar shape corresponding to the planar shape of the electrodes of the piezoelectric plate is at least connected to the piezoelectric plate through a connecting portion having a predetermined length. The number that is the same as the number of consecutive pieces (this is referred to as a "connection conductive plate") is 2
Prepare the number of sheets and the number of piezoelectric plates to be laminated. Then, the electrode parts of the first connecting conductive plate are sequentially arranged on the odd-numbered electrode plates, and the electrode parts of the second connecting conductive plate are arranged on the even-numbered electrode plate in sequence. The electrode portion and the piezoelectric plate are laminated while bending these connecting conductive plates. In addition, instead of stacking the electrode portion and the piezoelectric plate while bending the first and second connection conductive plates, a manufacturing method that takes the following method is also claimed. That is, instead of stacking the electrode portion and the piezoelectric plate while bending the first and second connecting conductive plates, each electrode portion of the first connecting conductive plate is sequentially arranged on the odd-numbered electrodes, Further, the connecting conductive plates are bent in advance so that the respective electrode portions of the second connecting conductive plate are sequentially arranged on the even-numbered electrodes. Then, the bent first and second connection conductive plates are arranged so as to maintain the insertion gap of the piezoelectric plate. Then, the piezoelectric plate is inserted into the insertion gap of these piezoelectric plates to stack the electrode portion and the piezoelectric plate.

The following method is also claimed as another method. That is, in order to connect an electrode portion having a planar shape corresponding to the planar shape of the piezoelectric plate and a connection terminal portion extending from the electrode portion to a connection terminal portion of another conductive plate to the connection terminal portion. And a connecting terminal portion having a second hooking portion for connecting the connecting terminal portion to a connecting terminal portion of another conductive plate. And the number of piezoelectric plates to be stacked. Then, the conductive plates and the piezoelectric plates are alternately laminated, and the odd-numbered conductive plates are connected to each other and the even-numbered conductive plates are connected to each other by sequentially hooking the hook portions of the connection terminals of the respective conductive plates. It is a method of doing by.

In this application, the term piezoelectric plate means not only a piezoelectric plate that has been fired and polarized, but also a green body processed from a green sheet itself, that is, the green sheet is fired later to become the original piezoelectric plate. Also includes intermediates.
This is because there is also a laminated piezoelectric element manufactured by alternately laminating a molded body with an electrode plate and then performing firing or polarization, and the inventions of this application can be applied to the production of such a piezoelectric element.

[0008]

In the invention using the connecting conductive plate in this application, the electrode parts of the electrode plate of the laminated piezoelectric element are electrically connected by the connecting parts from the beginning, and therefore the positioning of the electrode parts is naturally performed. In addition, it is possible to eliminate the work of connecting every other electrode plate after stacking the piezoelectric plate and the electrode plate (electrode portion).

Further, in the structure using the conductive plate having the connection terminals having the first and second hooking portions, the first hooking portion and the lower side of the first hooking portion when the conductive plate is placed on or after the piezoelectric element is placed. Second of another conductor already laminated
The conductive plates are naturally positioned by engaging with the hooking stop portion. Also, the electrical connection between the conductive plates is made by hooking the catching portions.

[0010]

Embodiments of the method for manufacturing a laminated piezoelectric element and the embodiments of electrode plates according to the present invention will be described below with reference to the drawings. It should be noted that the drawings used in the description merely schematically show the dimensions, shapes, and arrangement relationships of the respective constituent components to the extent that the present invention can be understood. In addition, in each drawing, the same components may be denoted by the same reference numerals, and duplicate description thereof may be omitted.

1. Description of first method 1-1. Description of First Example of First Method FIGS. 1A and 1B are explanatory views of a first example of a method of manufacturing a laminated piezoelectric element. In particular, FIG. 1A is an explanatory diagram of the connecting conductive plate 11, and FIG. 1B is an explanatory diagram of a work procedure in the manufacturing method of the embodiment. Further, FIG. 2 is a side view showing a state of the laminated piezoelectric element 20 formed by the first method. In these figures, 13a, 13b, 13c,
Reference numeral 13n is an individual piezoelectric plate to be laminated.

First, each of the piezoelectric plates 13a to 13n may have any shape, thickness and material according to the design of the piezoelectric element. The method for manufacturing the piezoelectric plate is also not particularly limited.
In this example, a calcined powder of a piezoelectric material containing PZT (lead zirconate titanate) as a main component is dispersed in an organic solvent to prepare a slurry. Next, the slurry is applied onto the film with a doctor blade device to a thickness of 1.1 mm, for example, and then dried. The dried material is peeled from the film to obtain a green sheet of piezoelectric material. This green sheet has a predetermined shape, such as a diameter of 27
Cut out a large number of mm disks. As a result, a large number of disks of uniform size made of piezoelectric material are obtained. A predetermined number of these discs are stacked. However, these discs are stacked while inserting a release material such as zirconia powder between the discs. Then 50
Remove the binder in the disc at 0 ° C. Next, 1250 ° C
Bake at the temperature of 4 hours. One disc after firing 1
Flat polishing and uniform outer diameter polishing were performed to finally obtain a disk having a diameter of 17 mm and a thickness of 0.5 mm. Ag (silver) paste is applied to the front and back planes of this disk and then baked to form electrodes of about 0.005 mm thickness on each of the disk front and back. A high voltage is applied to this disk in insulating oil to polarize it. In this way, the piezoelectric plates 13a to 13n are obtained.

In the case of this embodiment, the connecting conductive plate 11 has an electrode portion 11a having a planar shape, here a circular shape, which corresponds to the planar shape of the electrodes of the laminated piezoelectric element 20, and the connecting portion 11b having a predetermined length. At least the same number as the number of piezoelectric plates to be laminated and linearly continuous. Here, the predetermined length of the connecting portion 11b having a predetermined length means at least the piezoelectric plate 2 here.
The size is the same as or slightly longer than the size obtained by adding the thickness of one sheet, the thickness of one electrode part, and the bending allowance required when the connecting part is bent. Such a connecting conductive plate 11 can be easily formed by, for example, a photolithography technique and an etching technique. Further, the material of the connecting conductive plate can be any suitable one. In particular, since the present invention does not require welding, there is no restriction of selecting a material in consideration of ease of welding. For example, a connection conductive plate made of a material considering important parameters as an electrode plate such as electric conductivity. 11
Can be configured. For example, it is preferable that the connecting conductive plate 11 is made of copper or a copper alloy. The thickness of the connecting conductive plate 11 can be set according to the design of the laminated piezoelectric element. When the overall thickness of the laminated piezoelectric element is reduced to reduce the size, it is preferable to reduce the thickness of the electrode plate itself.

Next, the procedure for manufacturing the laminated piezoelectric element will be described mainly with reference to FIG. Note that FIG. 1 (B)
The circled numbers in the figure correspond to the order of the manufacturing work procedure.

First, two connecting conductive plates 11 are prepared. For the convenience of the following explanation, these two connecting conductive plates are first
And the second connecting conductive plate. Moreover, the number of piezoelectric plates corresponding to the number of stacked layers is prepared.

Next, the piezoelectric plate 13a is placed on the outermost electrode portion of the first connecting conductive plate 11.

Next, the electrode portion at the end of the second connecting conductive plate 11 is placed on the piezoelectric plate 13a. However, the position of the second connecting conductive plate with respect to the first connecting conductive plate is considered so that the second connecting conductive plate and the first connecting conductive plate do not overlap. In this embodiment, which is not limited to this, the first and second connection conductive plates are arranged so as to be substantially orthogonal to each other.

Next, the piezoelectric plate 13b is placed on the outermost electrode portion of the second connecting conductive plate.

Next, the connecting portion of the first connecting conductive plate which is in contact with the endmost electrode portion is bent, and then the electrode portion adjacent to the endmost electrode portion is on the piezoelectric plate 13b. Bend the connection further so that it comes to.

Next, the piezoelectric plate 13c is placed on the electrode portion which overlaps the piezoelectric plate due to the bending.

Next, the connecting portion of the second connecting conductive plate which is in contact with the endmost electrode portion is bent, and then the electrode portion adjacent to the endmost electrode portion is on the piezoelectric plate 13c. Bend the connection further so that it comes to.

After that, the above-described steps 1 to 3 are repeated in order to alternately stack the remaining electrode portions and piezoelectric plates. The laminated piezoelectric element obtained as a result of this series of operations is as shown in FIG. That is, the electrode parts of the first connecting conductive plate constitute odd-numbered electrode plates of the laminated piezoelectric element,
Further, the electrode portions of the second connection conductive plate constitute the even-numbered electrode plates of the laminated piezoelectric element, and the odd-numbered electrode portions and the even-numbered electrode portions are connected to each other by the connection portions 11b.
Thus, a laminated piezoelectric element having a configuration of being connected by is obtained. Here, each piezoelectric plate and the electrode portion in the laminated structure may be fixed, for example, in a state of being pressed by a spring from the top and bottom of the laminated body, fixed in a predetermined case, or In the first place, the piezoelectric body and the electrode portion can be fixed by various methods such as sequentially bonding with a conductive adhesive to fix. In addition, since the linear connecting conductive plate is used in the first embodiment, the bending work of the connecting portion can be easily performed as compared with the case where the connecting conductive plate other than the linear connecting conductive plate is used.

1-2. Description of Second Embodiment of First Method In the above-described first embodiment, bending of the connecting portion of the connecting conductive plate and stacking of the piezoelectric plates are performed while weaving them in a predetermined order. . However, the connecting conductive plate may be bent in advance. This second embodiment is such an example. However, when the first and second connecting conductive plates are linear as in the first embodiment when the second embodiment is carried out, the connecting conductive plates which are bent in advance are predetermined. Can't stack on the street. This is because when the first and second connection conductors that have been bent are attempted to overlap with each other, the bent portions of both will collide. Therefore, the connecting conductive plate is, for example, in the shape of a series of S-shapes as shown in the plan view of FIG. This Figure 3
The structure obtained by bending the connecting conductive plate 21 shown in FIG. 3A in advance is as shown in FIG. That is, the connecting portion 1 is moved toward the other upper and lower electrode portions from two positions that are offset by 90 degrees in the electrode portion 11a.
A structure in which 1b is bent is obtained. This Figure 3
With the structure shown in (B), another structure similar to this structure can be superposed on this structure while maintaining the insertion gap of the piezoelectric body. After that, the piezoelectric plates are sequentially inserted into this insertion gap. The method of the second embodiment can be applied to the case of manufacturing a laminated piezoelectric element in which it is advantageous to bend the connecting conductor in advance.

2. Description of Second Method In each of the above-described embodiments, an example in which a connecting conductive plate is used has been described, but instead of this, the following method (second method) can provide the same effect as the first method. This explanation is shown in FIG.
This will be described with reference to (A) to (C) and FIGS. 5 (A) and (B).

First, the number of piezoelectric plates 13a to be laminated is set.
13n are prepared, for example, by the method described in the embodiment of the first method. In the second method, the electrode portion having a planar shape corresponding to the planar shape of the electrode of the piezoelectric plate, and the connection terminal portion extending from the electrode portion, the connection terminal portion having another conductive property A connection terminal portion having a first hooking portion for connecting the connection terminal portion of the plate and a second hooking portion for connecting the connection terminal portion to the connection terminal portion of another conductive plate. A required number of conductive plates composed of and are prepared (the number of electrode plates of the laminated piezoelectric element). Here, a required number of conductive plates 31 (predetermined conductive plates 31) as shown in FIG. 4A are prepared. That is, a conductive plate 31 including an electrode portion 31a having a circular shape similar to that of a piezoelectric plate and a connection terminal portion 31b extending from the electrode portion 31a is prepared. However, the connection terminal portion 31b includes a first slit 31x as a first hooking portion for connecting a connection terminal portion of another conductive plate to the connection terminal portion 31b, and the connection terminal portion 3
1b is provided with a second slit 31y as a second hooking portion for connecting to the connection terminal portion of another conductive plate. In addition, in this embodiment, the first slit 31x is provided on the base side of the connection terminal portion 31b, and the second slit portion 31y is provided on the tip side of the connection terminal portion 31b. Moreover, the first slits 31x and the second slits 31y are notched to about half the width of the connection terminal portion 31b, and both slits 31x
Each of x and 31y is formed by cutting out a part of the connection terminal portion from different sides of the connection terminal portion 31b. Providing the first and second slits 31x and 31y in this manner is preferable because the first slit 31x of a conductive plate and the second slit 31y of another conductive plate are easily caught. However, the length of the connection terminal portion 31b and the positions where both slits 31x and 31y are provided may be appropriately determined according to the thickness and pitch of the piezoelectric plate. Further, the thickness of the conductive plate 31 and the material forming the conductive plate may be any suitable ones. For example, also in this case, it is preferable that the conductive plate 31 is made of copper or a copper alloy.

Next, as shown in FIGS. 4B and 4C, the conductive plate 31 and the piezoelectric plates 13a to 13n are alternately stacked. At this time, the following procedure is taken. First, the first piezoelectric plate 13a is placed on the first conductive plate 31, and then the second conductive plate 31 is placed on the piezoelectric plate 13a. However, the second conductive plate is placed on the piezoelectric plate so that the connection terminal portion of the second conductive plate and the connection terminal portion of the first conductive plate do not overlap. Not limited to this,
In the example of FIGS. 4B and 4C, an example in which conductive plates are overlapped so that the connection terminal portion of the second conductive plate and the connection terminal portion of the first conductive plate are pulled out in opposite directions Shows. next,
The second piezoelectric plate is placed on the second conductive plate, and then the third conductive plate is placed on the second piezoelectric plate. However, when the third conductive plate is placed, the connection terminal portion of the first conductive plate is bent to the third conductive plate side, and the second slit 31y of the third conductive plate is the first slit of the third conductive plate. The third conductive plate is placed on the second piezoelectric plate while being caught by the slit 31x. In this way, the conductive plates can be aligned with each other without a special jig, and the conductive plates can be electrically connected without any work such as welding. After that, even-numbered conductive plates are sequentially connected and stacked while hooking the slits, and similarly, odd-numbered conductive plates are connected and stacked while sequentially hooking the slits. Of course, this work is performed while inserting the piezoelectric plates between the conductive plates. After that, the lead wire 35 (see FIG. 5A) connected to the positive electrode or the negative electrode of the power source (not shown) is connected to, for example, the end of the even-numbered conductive plate 31 and the odd-numbered conductive plate 31. To, for example, the final end of each of them by, for example, soldering. FIG. 5 (A) shows a side view of the laminated piezoelectric element manufactured in this manner. In the laminated piezoelectric element manufactured in this way, some odd-numbered (even-numbered)
5 is an enlarged perspective view of a connecting portion P (FIG. 5A) of the conductive plates 31 formed by the first and second slits.
It is shown in (B).

In the embodiment of the second method described above, an example is described in which one conductive plate is set and sequentially stacked while being hooked on the conductor below, but first, the connection terminal portion of the conductive plate is All of the conductive plates and piezoelectric plates are laminated until the pull-out directions are roughly aligned in the desired direction (roughly roughly so that they can be aligned without using a jig), and then each conductive plate is an even-numbered one. It is also possible to adjust so that comrades and odd comrades are connected to each other through the first and second slits. Also in this case, the conductive plates can be aligned without using a jig, and even-numbered comrades and odd-numbered comrades can be electrically connected without welding. In the second method, the conventional electrode plates can be basically used except for changing the shape of the connection terminal portion, but the electrode plates can be aligned without using a jig and the like. The feature is that the electrodes can be electrically connected to each other without welding.

When the laminated piezoelectric element manufactured by the second method is used in a more severe operating environment, the first
Also, the connecting portion formed by engaging the second slits may be further reinforced by another connecting method such as soldering. Even when reinforcing by soldering or the like, in the second method, the two conductors do not separate even if an external force is applied to the connecting portion formed by engaging the first and second slits, Easy soldering work.

In carrying out the second method, the conductor to which the lead wire 35 from the external power source is connected has a shape such that the lead wire can be easily fixed,
For example, a device may be devised such as having a hole 31z (see FIG. 5A) into which a lead wire is inserted.

Further, the electrode portion 31a of the odd-numbered (even) conductive plate and the connection terminal portion 31b of the even-numbered (odd) conductive plate.
In order to prevent the contact with the side surface portion (the portion indicated by Q in FIG. 5A) of the piezoelectric plate, the conductive plate 31
Prepare a band-shaped insulating sheet having openings corresponding to the width and thickness of the connection terminal part, and pass the connection terminal part of the conductive plate through these openings so that the insulation sheet contacts the side surface of the piezoelectric plate. You may install it.

Further, in the embodiment of the second method, the hook-stop portion of the connection terminal portion of the conductive plate is constituted by the linear slit, but the shape of the hook-stop portion is not limited to this, and the conductive plates may be connected to each other. Various modifications are possible so that the connection is secured.

In addition, it is apparent that in both the first method and the second method, mounting such as resin molding the outer periphery of the laminated piezoelectric element or covering with a heat shrinkable tube can be further performed.

Further, in each of the above-mentioned embodiments, the molded plate obtained from the green sheet is fired, polished, electrode-attached and polarized (piezoelectric plate in the examples) is used as a connecting conductive plate or a predetermined conductive plate. , The molded plate obtained from the green sheet (also considered as a piezoelectric plate in this application) is laminated with the connection conductive plate or the predetermined conductive plate.
Thereafter, the laminated body may be fired and polarized. Also in this case, the electrode plates can be aligned without using a special jig, and the electrode plates can be connected with each other without welding or the like. However, in this configuration, when the connecting conductive plate or the predetermined conductive plate is made of a material that is easily oxidized during firing, such as a copper-based one, the firing atmosphere is preferably a non-oxidizing atmosphere, or the connecting conductive plate is It is preferable that the predetermined conductive plate itself is made of a noble metal such as Pt (platinum) or Pd (palladium).

[0034]

As is apparent from the above description, according to the method of manufacturing a laminated piezoelectric element of the present invention, in the first method, a predetermined connecting conductive plate is used to perform a predetermined work,
Further, in the second method, the conductive plate having the predetermined hooking portion is used to perform the predetermined work. Therefore, in any case, the electrode plate can be positioned without using a special jig. Therefore, improvement in productivity can be expected. In addition, every other electrode plate can be connected without welding. Therefore, a decrease in reliability due to poor welding does not occur, and a decrease in productivity due to welding can be avoided.
Also, because it becomes possible to escape from the restriction that it was necessary to select an electrode plate in consideration of ease of welding,
For example, the electrode plate can be made of copper or a copper alloy having excellent electric conductivity. For this reason, the contact with the electrode formed by firing the Ag paste on the surface of the piezoelectric plate becomes good, and the reliability and characteristics of the piezoelectric element can be expected to improve.

[Brief description of drawings]

1A and 1B are explanatory views of a first embodiment of a first method.

FIG. 2 is an explanatory view of the first embodiment of the first method continued from FIG. 1;

3A and 3B are explanatory views of a second embodiment of the first method.

4A to 4C are diagrams for explaining an example of a second method.

5 (A) and 5 (B) are views following FIG. 4 for explaining an embodiment of the second method.

[Explanation of symbols]

 11: Connection conductive plate 11a: Electrode part 11b: Connection part 13a-13n: Piezoelectric plate 20: Multilayer piezoelectric element 21: Connection conductive plate in 2nd Example 31: Predetermined conductive plate 31a: Electrode part 31b: Connection terminal Part 31x: First latching portion (first slit) 31y: Second latching portion (second slit)

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroyo Kato 1-7-12 Toranomon, Minato-ku, Tokyo Oki Electric Industry Co., Ltd.

Claims (5)

[Claims] 1. A laminated piezoelectric element having a structure in which electrode plates and piezoelectric plates are alternately stacked, and even-numbered electrode plates and odd-numbered electrode plates are electrically connected to each other. In this connection, the connecting conductive plate having a configuration in which the electrode portion having a planar shape corresponding to the planar shape of the electrodes of the piezoelectric plate is continuous at least by the number of piezoelectric plates to be stacked through the connecting portion having a predetermined length. And two piezoelectric plates to be laminated, so that each electrode portion of the first connecting conductive plate is sequentially arranged on the odd-numbered electrodes, and each electrode of the second connecting conductive plate is arranged. A method of manufacturing a laminated piezoelectric element, characterized in that an electrode part and a piezoelectric plate are laminated while bending the connecting conductive plates so that the parts are sequentially arranged on the even-numbered electrodes. 2. The method for manufacturing a laminated piezoelectric element according to claim 1, wherein instead of stacking the electrode part and the piezoelectric plate while bending the connecting conductive plate, each electrode part of the first connecting conductive plate is used. Are bent in advance so that the odd-numbered electrodes are sequentially arranged, and the electrode portions of the second connection conductive plate are sequentially arranged in the even-numbered electrodes. The first and second connection conductive plates that are bent are arranged with the insertion gap of the piezoelectric plates maintained, and the piezoelectric plates are inserted into the insertion gaps of these piezoelectric plates to laminate the electrode portion and the piezoelectric plate. And a method for manufacturing a laminated piezoelectric element. 3. An electrode section having a planar shape corresponding to that of an electrode of a piezoelectric plate, at least the same number of electrode sections as the number of piezoelectric plates to be laminated, and these electrode sections are sequentially connected. , At least the piezoelectric plate 2
An electrode plate for manufacturing a laminated piezoelectric element, comprising an electrically conductive plate having a thickness corresponding to one sheet, a thickness of the electrode portion, and a connecting portion having a length in consideration of a bending margin. 4. A laminated piezoelectric element having a structure in which electrode plates and piezoelectric plates are alternately laminated, and even-numbered electrode plates and electrically odd-numbered electrode plates are electrically connected to each other. At this time, an electrode part having a planar shape corresponding to the planar shape of the electrode of the piezoelectric plate and a connection terminal part extending from the electrode part and connecting the connection terminal part of another conductive plate to the connection terminal part And a connecting terminal portion having a second hooking portion for connecting the connecting terminal portion to a connecting terminal portion of another conductive plate. Prepare the required number of sheets, prepare the number of piezoelectric plates to be laminated, alternately laminating the conductive plates and the piezoelectric plates, connection between the odd-numbered conductive plates, and connection between the even-numbered conductive plates , The hooks of the connection terminals of the conductive plates are hooked in sequence. Method for producing a multilayer piezoelectric element and performing the Rukoto. 5. An electrode portion having a planar shape corresponding to the planar shape of an electrode of a piezoelectric plate, and a connection terminal portion extending from the electrode portion, the connection terminal portion being a connection terminal of another conductive plate. And a connection terminal portion having a second hooking portion for connecting the connection terminal portion to a connection terminal portion of another conductive plate. An electrode plate for manufacturing a laminated piezoelectric element, characterized by comprising a conductive plate.