JPH08250778A - Multilayer piezoelectric element, electrode plate of multilayer piezoelectric element and manufacture of multilayer piezoelectric element - Google Patents

Abstract

PURPOSE: To provide a multilayer piezoelectric element of a constitution, wherein electrode plates and piezoelectric plates are alternately stacked, the even- numbered electrode plates and the odd-numbered electrode plates are respectively connected electrically with each other and the yield of the manufacture of the piezoelectric element and the reliability of the piezoelectric element are improved without applying thermal damage to the piezoelectric plates. CONSTITUTION: Each electrode plate 12 is provided with an electrode part 12a, which has the same shape as that of each piezoelectric plate 14, in short, a circle, a projected part 12b, which is projected toward the outside of the electrode part 12a, and a cylindrical connection terminal 12c, provided on the point of the projected part 12b in the direction perpendicular to the contacting surface of the electrode part 12a with the piezoelectric plate 14, and the electrode plates are connected with each other through conductor wires caulked by the connection terminals 12c.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated piezoelectric element, an electrode plate for the laminated piezoelectric element, and a method for manufacturing the laminated piezoelectric element.

[0002]

2. Description of the Related Art A laminated piezoelectric element has a structure in which electrode plates and piezoelectric plates are alternately laminated and every other electrode plate is electrically connected to each other. This element is
It is used for devices that require minute positioning, for example, piezoelectric actuators such as semiconductor manufacturing devices and optical devices, and for controlling automobiles and machine tools.

As a conventional example of a method of manufacturing such a laminated piezoelectric element, there is a method disclosed in, for example, Japanese Patent Laid-Open No. 5-48169. In this method, first, piezoelectric plates made of a piezoelectric material and metal electrode plates having protruding connection terminals on the outer peripheral portion are alternately laminated. In this case, the connection terminals of the electrode plates adjacent to each other across the piezoelectric plate are located in different directions, and the connection terminals of every other electrode plate are stacked so as to face the same direction. Then, a side surface electrode is arranged outside each connection terminal in the same direction, and both are connected by welding using a laser. In this way, a laminated piezoelectric element is obtained.

Also disclosed is a method of welding adjacent connecting terminals in the same direction to each other by using a laser without using side electrodes. In this case, the connection terminals have a long piece shape so that the adjacent connection terminals overlap each other.

[0005]

However, in any of the above-mentioned conventional methods, welding is used to electrically connect the connection terminals of the electrode plates, so that the adjacent piezoelectric plates are thermally damaged. I couldn't avoid it. Therefore, the manufacturing yield and reliability of the laminated piezoelectric element could not be improved.

[0006]

Therefore, in the laminated piezoelectric element of the present invention, a plurality of electrode plates and a plurality of piezoelectric plates alternate between one outermost electrode plate and the other outermost electrode plate. In the laminated piezoelectric element having a structure in which the even-numbered electrode plates counted from any of the outermost electrode plates and the odd-numbered electrode plates are electrically connected to each other, The plate includes an electrode portion that is in contact with the piezoelectric plate, a protruding portion that protrudes outward from the electrode portion, and a connection terminal that is provided at the tip of the protruding portion, and the even-numbered electrode plates are The electrode plates are connected to each other by a first conductor wire which is swaged at the connection terminals, and the odd-numbered electrode plates are mutually connected by a second wire wire which is swaged at the connection terminals of the electrode plates. It is characterized by being connected.

Further, in the electrode plate of the laminated piezoelectric element, an electrode portion that comes into contact with the piezoelectric plate, a protruding portion that protrudes outward from the electrode portion, and a connection terminal provided at the tip of the protruding portion are provided. It is characterized by having.

Further, in the method of manufacturing a laminated piezoelectric element, a plurality of electrode plates and a plurality of piezoelectric plates are alternately laminated between one outermost electrode plate and the other outermost electrode plate, and In manufacturing a laminated piezoelectric element having a configuration in which even-numbered electrode plates counted from any one of the outermost electrode plates and odd-numbered electrode plates are electrically connected to each other, contact with the piezoelectric plates Prepare a required number of electrode plates each having an electrode portion, a protrusion protruding outward from the electrode portion, and a connection terminal provided at the tip of the protrusion, and stack the piezoelectric plates. And two conductors are prepared, the electrode plates and the piezoelectric plates are alternately laminated, and the first conductors are arranged in contact with or close to the connection terminals of the odd-numbered electrode plates. , The second conductor to the even-numbered A step of arranging in contact with or in proximity to a connection terminal of a plate; and crimping the first conductor wire and the second conductor wire with the connection terminal in contact with or in proximity to the first conductor wire and the odd number, respectively. And connecting the second conductive wire and the even-numbered electrode plates while connecting the second electrode plate.

In the method of manufacturing a laminated piezoelectric element, preferably, the connection terminal is a tubular body, the electrode plates and the piezoelectric plates are alternately laminated, and the first
Through the cylindrical body of the odd-numbered electrode plate, the second conductive wire through the cylindrical body of the even-numbered electrode plate, and the first conductive wire and the second conductive wire, respectively. And a step of crimping with the tubular body to connect the first conductive wire to the odd-numbered electrode plates and to connect the second conductive wire to the even-numbered electrode plates. .

In this application, the term piezoelectric plate means not only a piezoelectric plate that has been fired and polarized, but also a green body processed from a green sheet itself, that is, the green sheet is fired later to become the original piezoelectric plate. Also includes intermediates.
This is because there is also a laminated piezoelectric element manufactured by alternately laminating a molded body with an electrode plate and then performing firing or polarization, and the inventions of this application can be applied to the production of such a piezoelectric element.

In this application, the tubular body includes a cylindrical tubular body, a polygonal tubular body, that is, a polygonal column having no upper and lower surfaces and a hollow interior. To do.

[0012]

As described above, the electrode plate includes, as the electrode plate, the electrode portion that comes into contact with the piezoelectric plate, the protrusion portion that protrudes outward from the electrode portion, and the connection terminal provided at the tip of the protrusion portion. When using, the even-numbered electrode plates are electrically connected by crimping the first conducting wire at the connection terminals of these electrodes, and the odd-numbered electrode plates are the connecting terminals of these electrodes at the second conducting wire. Electrically connect by swaging.

[0013]

Embodiments of the laminated piezoelectric element, the electrode plate of the laminated piezoelectric element, and the method for manufacturing the laminated piezoelectric element according to the present invention will be described below with reference to the drawings.
It should be noted that the drawings used in the description merely schematically show the dimensions, shapes, and arrangement relationships of the respective constituent components to the extent that the present invention can be understood. Further, in each drawing, the same constituent components are designated by the same reference numerals. Numerical conditions such as materials used, forming method, and film thickness described in the following description are only preferred examples of the present invention. Therefore, it should be understood that the present invention is not limited to only these conditions.

FIG. 1 is a side view of the laminated piezoelectric element of this embodiment. Further, FIG. 2 is a schematic diagram showing a state in which the laminated piezoelectric element is connected to a driving power supply. FIG. 3 is a diagram for explaining the electrode plate of the laminated piezoelectric element of this example.
In addition, FIGS. 4A to 4C are perspective views showing the manufacturing process of the electrode plate. Further, FIG. 5 is a diagram for explaining the method of manufacturing the laminated piezoelectric element.

As shown in FIG. 1, the laminated piezoelectric element 10 of this embodiment has a plurality of electrode plates 12 and a plurality of piezoelectric plates 14 between one outermost electrode plate and the other outermost electrode plate. Are alternately stacked, and even-numbered electrode plates counted from any outermost electrode plate and odd-numbered electrode plates are electrically connected to each other. That is, 1
This is a structure in which alternate electrode plates are electrically connected to each other. The electrode plate 12 includes an electrode portion 12a that is in contact with the piezoelectric plate 14, a protruding portion 12b protruding outward from the electrode portion 12a, and a connection terminal 12c provided at the tip of the protruding portion 12b. The even-numbered electrode plates are electrically connected to each other by a conducting wire (also referred to as a first conducting wire) 16 ₁ that is crimped at the connection terminals 12c of these electrode plates, and the odd-numbered electrode plates are connected to each other. The two are electrically connected to each other by a conductive wire (also referred to as a second conductive wire) 16 ₂ which is crimped by the connection terminal 12c of these electrode plates. Although FIG. 1 shows a laminated piezoelectric element including eight electrode plates and seven piezoelectric plates, the number of piezoelectric plates and electrode plates to be laminated is not limited to this case. Further, reference numerals 12, 12a, 12b, 12c and 1
4 is attached only to one electrode plate and one piezoelectric plate.

In the laminated piezoelectric element having such a structure, since the electrode plates are electrically connected to each other via the conductor wire which is crimped by the connection terminal, the piezoelectric plate is not thermally damaged. Therefore, the reliability of the device is improved.

As shown in FIG. 2, the first conductor 16
_{If 1} is a conducting wire for connecting to the positive pole 20 of the driving power source 18 and the second conducting wire 16 ₂ is a conducting wire for connecting to the negative pole 22 of the driving power source, the laminated piezoelectric element 10
Since the step of connecting the drive power source 18 to the drive power source 18 can be omitted, the cost can be reduced. The first conductor 16 ₁
The same effect can be obtained by using as a conducting wire for connecting to the minus pole 20 of the driving power source 18 and as a conducting wire for connecting the second conducting wire 16 ₂ to the plus pole 22 of the driving power source.

Piezoelectric plate 1 used in this laminated piezoelectric element 10.
Reference numeral 4 can be of any shape, thickness and material depending on the design of the piezoelectric element. The method for manufacturing the piezoelectric plate is also not particularly limited. In this example, PZT (lead zirconate titanate)
A calcined powder of a piezoelectric material containing as a main component is dispersed in an organic solvent to prepare a slurry. Next, this slurry is applied onto the film by, for example, 1.1 mm with a doctor blade device.
To a thickness of 1 and then dried. The dried material is peeled from the film to obtain a green sheet of piezoelectric material. A large number of discs having a predetermined shape, for example, a disc having a diameter of 27 mm are cut out from this green sheet. As a result, a large number of disks of uniform size made of piezoelectric material are obtained. A predetermined number of these discs are stacked. However, these discs are stacked while inserting a release material such as zirconia powder between the discs. Then, the binder in the disk is removed at 500 ° C. Then 1
Bake at a temperature of 250 ° C. for 4 hours. The fired discs were subjected to flat polishing one by one and polishing with uniform outer diameter to finally obtain a disc having a diameter of 17 mm and a thickness of 0.5 mm. After coating Ag (silver) paste on the front and back planes of this disc, baking is performed to obtain a thickness of about 0.005 on each of the front and back faces of the disc.
mm electrodes are formed. A high voltage is applied to this disk in insulating oil to polarize it. In this way, the piezoelectric plate 14 is obtained.

Further, as shown in FIG. 3, the electrode plate 12 is
The electrode portion 12a that is in contact with the piezoelectric plate 14, the protruding portion 12b protruding outward from the electrode portion 12a, and the protruding portion 12
It has a connection terminal 12c provided at the tip of b.
In this embodiment, the electrode plate 12 includes an electrode portion 12a having a shape similar to that of the piezoelectric plate 14 and a circular shape here, and the electrode portion 12a.
From the protruding portion 12 that protrudes outward from the electrode portion 12a
b, and the electrode portion 12a provided at the tip of the protruding portion 12b.
It has a cylindrical connection terminal 12c provided in the direction orthogonal to the contact surface with the piezoelectric plate 14, that is, in the direction of laminating the electrode plate and the piezoelectric plate. In this case, the connection terminal 12c and the electrode portion 12a are the long piece-shaped protruding portion 12 provided on the same plane as the electrode portion 12a.
It is connected via b. Further, the shape and size of the connection terminal 12c may be appropriately determined according to the thickness and pitch of the piezoelectric plate. In this case, the length of the connection terminal 12c in the stacking direction is preferably smaller than that of two piezoelectric plates. In this way, the connection terminals of every other electrode plate that are electrically connected do not come into direct contact with each other. Further, in this embodiment, the shape of the protrusion 12b is a long piece, but the electrode portion 1
The shape of the protrusion 12b is not limited to this as long as the 2a and the connection terminal 12c are electrically connected. The electrode unit 1
2a, the protrusion 12b, and the connection terminal 12c are electrically connected.

When the laminated piezoelectric element 10 is manufactured by using the electrode plate having such a structure, after the conductor wire is arranged at the connection terminal of one electrode plate and the connection terminal of another electrode plate, the conductor wire is connected at the connection terminal. By caulking, one electrode plate and another electrode plate can be electrically connected. Therefore, the piezoelectric plate is not thermally damaged. Therefore, the manufacturing yield of the device can be improved, and the reliability of the manufactured device can be improved. Further, when the connection terminal is formed in a tubular shape, the conductor wire is passed through the connection terminal and then the conductor wire is crimped at the connection terminal, so that the conductor wire does not come off from the connection terminal at that time.

When manufacturing the electrode plate 12 having such a structure, first, as shown in FIGS. 4 (A) to 4 (C), a planar conductive plate 24 is prepared (FIG. 4 (A)). The conductive plate 24 has a shape similar to that of the piezoelectric plate 14 and here is a circular conductive plate main portion 24a.
And a T-shaped conductive plate protruding portion 24b protruding outward from the conductive plate main portion 24a. The conductive plate main portion 24a and the conductive plate projecting portion 24b are on the same plane. Next, of the T-shaped conductive plate projecting portion 24b, a portion 24b ₁ (a portion to be the protrusion 12b later) connected to the conductive plate main portion 24a and a portion 24b ₂ (a portion to be the connection terminal 12c later) orthogonal thereto. ) Is bent (FIG. 4 (B)). Next, the bent portion is deformed into a cylindrical shape (FIG. 4C). Then, the seam portion 24c generated in the cylindrical shape is firmly adhered by silver brazing or phosphor copper brazing if necessary. In this way, the electrode plate 12 is manufactured. In this case, the conductive plate 24 can be easily formed by, for example, the photolithography technique and the etching technique. Further, the material of the conductive plate may be any suitable one. In particular, since the present invention does not require welding, there is no restriction of selecting a material in consideration of ease of welding. Therefore, for example, the conductive plate 24 is made of a material in consideration of important parameters such as electric conductivity as an electrode plate. Can be configured. Considering later that the connection terminal is to be caulked and connected to the conductive wire, it is preferable to configure the conductive plate 24 with, for example, copper or a copper alloy. Further, the thickness of the conductive plate 24 can be set according to the design of the laminated piezoelectric element. When the overall thickness of the laminated piezoelectric element is reduced to reduce the size, it is preferable to reduce the thickness of the electrode plate itself.

Next, the procedure for manufacturing the laminated piezoelectric element will be described with reference to FIG. First, the number of piezoelectric plates 14 _{1 to} 14 _n to be stacked are prepared by, for example, the above method. In addition, electrode plates 12 _{1 to} 12 _{n + 1} having electrode parts that come into contact with the piezoelectric plate, protruding parts protruding outward from the electrode parts, and connection terminals provided at the tips of the protruding parts are prepared. . Here, one more electrode plate as shown in FIG. 2 is prepared than the number of piezoelectric plates. Also, prepare two conductors. For convenience of description below, these two conductors are connected to the first conductor 16
₁ and second conductor 16 ₂ respectively.

Next, as shown in FIG. 5, the electrode plate 12 ₁
.About.12 _{n + 1} and piezoelectric plates 14 _{1 to} 14 _n are alternately stacked.
At this time, the following procedure is taken. First, the first conducting wire 1
6 ₁ is placed in contact with or close to the connection terminal of the _first electrode plate 12 ₁ . In the case of this embodiment, since the connection terminal is cylindrical, the first conductor 16 _{1 is connected} to the first electrode plate 12 ₁
The first conducting wire 16 ₁ is arranged at the connection terminal of the _first electrode plate 12 ₁ by passing it through the connection terminal. Then, by crimping the connection terminal, the first conducting wire 16 ₁ and the first electrode plate 12
Connect with ₁ . When the connection terminal is made of copper or a copper alloy, general crimping pliers can be used to crimp the lead wire at the connection terminal. It is to be noted that FIG. 6 shows an enlarged view of a portion where the conductor wire 16 is swaged with the cylindrical connection terminal 12c. In FIG. 6, reference numeral 26 denotes a hollow formed by caulking.

Next, the first piezoelectric plate 14 ₁ is placed on the first electrode plate 12 ₁ , then the second electrode plate 12 ₂ is placed on the piezoelectric plate 14 ₁ , and Second conductor 1
6 ₂ is passed through the connection terminal of the _second electrode plate 12 ₂ . Then, the connection terminal is caulked to connect the second conducting wire 16 ₂ and the second electrode plate 12 ₂ . In this case, the second electrode plate 1
2 _second connection terminals and the piezoelectric plate 14 ₁ second sheet of the electrode plate 12 ₂ so as not to overlap with the first sheet of the connection terminals of the electrode plates 12 ₁
Put it on top. Although not limited to this, in the example of FIG. 4, an example of stacking the electrode plates so that the connection terminals of the _second electrode plate 12 _{2 and} the connection terminals of the first electrode plate 12 ₁ are pulled out in opposite directions. Is shown.

Next, ₂ is placed on the second electrode plate 12 2.
The second piezoelectric plate 14 ₂ is placed, and then the third electrode plate 12 ₃ is placed on the _second piezoelectric plate 14 ₂ while passing the first conducting wire 16 ₁ . Then, the connection terminal is caulked to connect the first conducting wire 16 ₁ to the third electrode plate 12 ₃ .
In this case, it is easiest to place the third sheet of the electrode plate 12 _third connection terminals first sheet of electrode plate 12 ₁ of the connection electrode plate 12 ₃ of the third sheet so as to be positioned on the upper side of the terminal.

Thereafter, the connection terminals of the even-numbered electrode plates are connected to the second
Conductors 16 ₂ through, and the second is connected to the conductor 16 ₂ sequentially laminated even-numbered electrode plate while the connection terminals caulked of, likewise, the connection terminals of the odd-numbered electrode plate first conductor 16 ₁ through and crimp the connection terminal to the first conductor 16
While connecting to ₁ , the odd-numbered electrode plates are sequentially laminated. Of course, this work is performed while inserting the piezoelectric plates between the conductive plates.

In this way, the conductive plates can be aligned with each other without a special jig, and the conductive plates can be electrically connected without any work such as welding. In particular, if the connecting terminal is tubular, after passing the conducting wire through the tubular connecting terminal,
Since the conductor wire is crimped at the connection terminal, the conductor wire does not come off from the connection terminal at that time.

In the above embodiment, the connection terminal is crimped every time one electrode plate is laminated to connect the electrode plate to the lead wire. However, first, the electrode plate and the piezoelectric plate are connected. After all the layers are stacked, the first conductive wire may be passed through the odd-numbered connection terminals and the second conductive wire may be passed through the even-numbered connection terminals, and then the connection terminals may be caulked. Also in this case, the electrode plates can be aligned without using a jig, and even-numbered ones and odd-numbered ones can be electrically connected to each other without welding or the like.

Further, in this embodiment, the connection terminal of the electrode plate is constituted by a cylindrical body, but the shape of the connection terminal is not limited to this, and the electrode plate can be crimped so as to be connected to the conductor. Various modifications are possible to ensure. FIG. 7 shows an example of the connection terminal. For example, the tubular body other than the cylindrical shape may be a quadrangular or triangular tubular body shown in FIGS. 7A and 7B, or a U-shaped connection shown in FIG. 7C. The terminal may be a semi-cylindrical connection terminal shown in FIG.

Further, it is apparent that the outer periphery of the laminated piezoelectric element can be further mounted by resin molding or covering with a heat shrinkable tube.

Further, in each of the above-mentioned embodiments, an example in which a molded plate obtained from a green sheet is fired, polished, electrode-attached and polarized (piezoelectric plate in the examples) to be laminated with the electrode plate However, a molded plate obtained from a green sheet (also considered as a piezoelectric plate in this application) may be laminated with an electrode plate, and then the laminated body may be fired and polarized. Also in this case, the electrode plates can be aligned without using a special jig, and the electrode plates can be connected with each other without welding or the like.
However, in this configuration, when the electrode plate is made of a material such as a copper-based material that is easily oxidized during firing, the firing atmosphere is preferably a non-oxidizing atmosphere.

[0032]

As is apparent from the above description, the electrode portion that comes into contact with the piezoelectric plate, the protruding portion that protrudes outward from the electrode portion, and the connection terminal provided at the tip of the protruding portion are provided. When electrode plates are used, even-numbered electrode plates are electrically connected by crimping the first conducting wire at the connection terminals of these electrodes, and odd-numbered electrode plates are connected at the connection terminals of these electrodes. It can be electrically connected by crimping the second conductor. Therefore, the piezoelectric plate is not thermally damaged when the electrode plates are electrically connected to each other. Therefore, the manufacturing yield of the device can be improved, and the reliability of the manufactured device can be improved.

[Brief description of drawings]

FIG. 1 is a side view for explaining a laminated piezoelectric element.

FIG. 2 is a schematic view showing a state in which the laminated piezoelectric element is connected to a driving power supply.

FIG. 3 is a diagram for explaining an electrode plate of a laminated piezoelectric element.

4 (A) to 4 (C) are views showing a manufacturing process of an electrode plate of a laminated piezoelectric element.

FIG. 5 is a diagram which is used for describing a method for manufacturing a laminated piezoelectric element.

FIG. 6 is an enlarged view of a portion in which a lead wire is crimped at a connection terminal.

7A to 7D are views showing examples of various shapes of connection terminals.

[Explanation of reference numerals] 10: laminated piezoelectric element 12, 12 _{1 to} 12 _{n + 1} : electrode plate 12a: electrode portion 12b: protruding portion 12c: connection terminal 14, 14 _{1 to} 14 _n : piezoelectric plate 16: conductive wire 16 ₁ : the first wire 16 _2: second wire 18: drive power source 20: positive electrode 22: negative electrode 24: conductive plate 24a: conductive plate main section 24b: conductive plate projecting portions 24b _1: connecting portion 24b _2: orthogonal portions 24c: seam part 26: hollow

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Toru Arai 1-7-12 Toranomon, Minato-ku, Tokyo Oki Electric Industry Co., Ltd. (72) Inventor ▲ Ayu ▼ Sawa 1 year Toranomon 1-chome, Minato-ku, Tokyo No. 12 Oki Electric Industry Co., Ltd. (72) Inventor Hiroyo Kato 1-7-12 Toranomon, Minato-ku, Tokyo Oki Electric Industry Co., Ltd. (72) Inventor Satoru Mizoguchi 3344 Iyohisa, Sakai-gun, Gunma Prefecture -1 Oki Ceramic Industry Co., Ltd.

Claims (6)

[Claims] 1. A plurality of electrode plates and a plurality of piezoelectric plates are alternately laminated between one outermost electrode plate and the other outermost electrode plate, and counting is performed from any of the outermost electrode plates. And even-numbered electrode plates, and odd-numbered electrode plates are electrically connected to each other, in the laminated piezoelectric element, the electrode plate is an electrode portion that is in contact with the piezoelectric plate, from the electrode portion A first conductor wire having a protrusion protruding outward and a connection terminal provided at a tip of the protrusion, wherein the even-numbered electrode plates are crimped by the connection terminals of these electrode plates. And the odd-numbered electrode plates are connected to each other by a second conductive wire which is crimped at the connection terminals of these electrode plates. 2. The multilayer piezoelectric element according to claim 1, wherein one of the first conducting wire and the second conducting wire is a conducting wire for connecting to a positive pole of a driving power source, and the other is A laminated piezoelectric element, which is a conductor for connecting to a negative pole of a driving power source. 3. A laminated type, comprising: an electrode portion that comes into contact with the piezoelectric plate; a protruding portion that protrudes outward from the electrode portion; and a connection terminal that is provided at a tip of the protruding portion. Electrode plate for piezoelectric element. 4. The electrode plate for a laminated piezoelectric element according to claim 3, wherein the connection terminal is a tubular body. 5. A plurality of electrode plates and a plurality of piezoelectric plates are alternately laminated between one outermost electrode plate and the other outermost electrode plate, and counting is performed from any of the outermost electrode plates. An even-numbered electrode plate, and an odd-numbered electrode plate are electrically connected to each other when manufacturing a laminated piezoelectric element, the electrode portion in contact with the piezoelectric plate, and the outer side from the electrode portion. Prepare a required number of the electrode plates each having a protruding portion protruding toward and a connection terminal provided at the tip of the protruding portion, prepare the number of the piezoelectric plates to be laminated, and use two conducting wires. Prepare, while alternately laminating the electrode plate and the piezoelectric plate,
Disposing a first conductive wire in contact with or in proximity to the connection terminals of the odd-numbered electrode plates, and disposing a second conductive wire in contact with or in proximity to the connection terminals of the even-numbered electrode plates; The first conducting wire and the second conducting wire are crimped by the connecting terminals which are in contact with or close to each other to connect the first conducting wire and the odd-numbered electrode plate, and at the same time, the second conducting wire. And a step of connecting the even-numbered electrode plates to each other. 6. The method for manufacturing a laminated piezoelectric element according to claim 5, wherein the connection terminal is a tubular body, and the electrode plates and the piezoelectric plates are alternately laminated,
Passing the first conducting wire through the tubular body of the odd-numbered electrode plate and passing the second conducting wire through the tubular body of the even-numbered electrode plate, the first conducting wire and the second conducting wire Each of which is crimped with the tubular body to connect the first conductor wire to the odd-numbered electrode plate and to connect the second conductor wire to the even-numbered electrode plate. A method for manufacturing a laminated piezoelectric element, comprising: