JPH0727646A - 容量式差圧センサ - Google Patents
容量式差圧センサInfo
- Publication number
- JPH0727646A JPH0727646A JP6160721A JP16072194A JPH0727646A JP H0727646 A JPH0727646 A JP H0727646A JP 6160721 A JP6160721 A JP 6160721A JP 16072194 A JP16072194 A JP 16072194A JP H0727646 A JPH0727646 A JP H0727646A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- pressure
- sensor
- forming
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims abstract description 40
- 239000003990 capacitor Substances 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 238000000354 decomposition reaction Methods 0.000 abstract 1
- 125000006850 spacer group Chemical group 0.000 description 19
- 238000000034 method Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 6
- 210000002105 tongue Anatomy 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000006060 molten glass Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH01911/93A CH688745A5 (fr) | 1993-06-25 | 1993-06-25 | Capteur de pression différentielle de type capacitif. |
| CH01911/93-8 | 1993-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0727646A true JPH0727646A (ja) | 1995-01-31 |
Family
ID=4221481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6160721A Pending JPH0727646A (ja) | 1993-06-25 | 1994-06-21 | 容量式差圧センサ |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0639761A1 (OSRAM) |
| JP (1) | JPH0727646A (OSRAM) |
| CH (1) | CH688745A5 (OSRAM) |
| FI (1) | FI943048A7 (OSRAM) |
| NO (1) | NO942410L (OSRAM) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11295176A (ja) * | 1998-04-14 | 1999-10-29 | Nagano Keiki Co Ltd | 差圧センサ |
| JP2004340576A (ja) * | 2003-03-17 | 2004-12-02 | Kyocera Corp | 圧力検出装置用パッケージ |
| JP2008008762A (ja) * | 2006-06-29 | 2008-01-17 | Denso Corp | 圧力センサ |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19750131C2 (de) * | 1997-11-13 | 2002-06-13 | Infineon Technologies Ag | Mikromechanische Differenzdrucksensorvorrichtung |
| ATE227423T1 (de) * | 1998-12-15 | 2002-11-15 | Fraunhofer Ges Forschung | Verfahren zum erzeugen einer mikromechanischen struktur für ein mikro-elektromechanisches element |
| WO2000036387A1 (de) * | 1998-12-15 | 2000-06-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum erzeugen eines mikro-elektromechanischen elements |
| IL151277A0 (en) | 2000-02-23 | 2003-04-10 | Nat Ct Scient Res Demokritos | Capacitive pressure-responsive devices and their fabrication |
| EP1128175A1 (en) * | 2000-02-23 | 2001-08-29 | Ethniko Kentro Erevnas Fisikon Epistimon "Dimokritos" | Long-term stable capacitive pressure sensor made with self-aligned process |
| DE10249238B4 (de) * | 2002-10-23 | 2006-09-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Sensorchip für einen Differenzdrucksensor mit beidseitigem Überlastschutz |
| FR2905461B1 (fr) * | 2006-08-31 | 2010-09-24 | Peuvedic Jean Marc Le | Dispositif de mesure des differences de pression dans des fluides. |
| ITUD20130145A1 (it) * | 2013-11-06 | 2015-05-07 | Eliwell Controls S R L Con Unico S Ocio | Sensore digitale di pressione per un elettrodomestico ed elettrodomestico provvisto di detto sensore |
| DE102014119407A1 (de) * | 2014-12-22 | 2016-06-23 | Endress + Hauser Gmbh + Co. Kg | Differenzdrucksensor und Differenzdruckmessaufnehmer mit einem solchen Differenzdrucksensor |
| CN112897450B (zh) * | 2021-01-19 | 2022-11-11 | 北京遥测技术研究所 | 一种mems绝压式压力传感器及其加工方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61500633A (ja) * | 1983-12-09 | 1986-04-03 | ロ−ズマウント インコ． | 圧力変換器 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4445383A (en) * | 1982-06-18 | 1984-05-01 | General Signal Corporation | Multiple range capacitive pressure transducer |
| DE3404262A1 (de) * | 1983-03-09 | 1984-09-13 | Fuji Electric Co., Ltd., Kawasaki | Kapazitiver messfuehler |
| US4730496A (en) * | 1986-06-23 | 1988-03-15 | Rosemount Inc. | Capacitance pressure sensor |
| US4879627A (en) * | 1988-12-30 | 1989-11-07 | United Technologies Corporation | Differential capacitive pressure sensor with over-pressure protection |
| DE4132391C1 (en) * | 1991-09-26 | 1992-10-01 | Siemens Ag, 8000 Muenchen, De | Pressure difference measurement transducer - has two electrically conducting diaphragms separated by insulating plate and has strain gauge connected to evaluation circuitry |
-
1993
- 1993-06-25 CH CH01911/93A patent/CH688745A5/fr not_active IP Right Cessation
-
1994
- 1994-06-15 EP EP94109142A patent/EP0639761A1/fr not_active Withdrawn
- 1994-06-21 JP JP6160721A patent/JPH0727646A/ja active Pending
- 1994-06-23 FI FI943048A patent/FI943048A7/fi unknown
- 1994-06-24 NO NO942410A patent/NO942410L/no not_active Application Discontinuation
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61500633A (ja) * | 1983-12-09 | 1986-04-03 | ロ−ズマウント インコ． | 圧力変換器 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11295176A (ja) * | 1998-04-14 | 1999-10-29 | Nagano Keiki Co Ltd | 差圧センサ |
| JP2004340576A (ja) * | 2003-03-17 | 2004-12-02 | Kyocera Corp | 圧力検出装置用パッケージ |
| JP2008008762A (ja) * | 2006-06-29 | 2008-01-17 | Denso Corp | 圧力センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0639761A1 (fr) | 1995-02-22 |
| CH688745A5 (fr) | 1998-02-13 |
| NO942410L (no) | 1994-12-27 |
| FI943048A0 (fi) | 1994-06-23 |
| NO942410D0 (OSRAM) | 1994-06-24 |
| FI943048A7 (fi) | 1994-12-26 |
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