JPH0726855Y2 - エキシマレーザ装置 - Google Patents
エキシマレーザ装置Info
- Publication number
- JPH0726855Y2 JPH0726855Y2 JP1987166297U JP16629787U JPH0726855Y2 JP H0726855 Y2 JPH0726855 Y2 JP H0726855Y2 JP 1987166297 U JP1987166297 U JP 1987166297U JP 16629787 U JP16629787 U JP 16629787U JP H0726855 Y2 JPH0726855 Y2 JP H0726855Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode pair
- laser
- main
- preionization
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Lasers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987166297U JPH0726855Y2 (ja) | 1987-10-30 | 1987-10-30 | エキシマレーザ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987166297U JPH0726855Y2 (ja) | 1987-10-30 | 1987-10-30 | エキシマレーザ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0171457U JPH0171457U (US20100223739A1-20100909-C00005.png) | 1989-05-12 |
JPH0726855Y2 true JPH0726855Y2 (ja) | 1995-06-14 |
Family
ID=31453555
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987166297U Expired - Lifetime JPH0726855Y2 (ja) | 1987-10-30 | 1987-10-30 | エキシマレーザ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0726855Y2 (US20100223739A1-20100909-C00005.png) |
-
1987
- 1987-10-30 JP JP1987166297U patent/JPH0726855Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0171457U (US20100223739A1-20100909-C00005.png) | 1989-05-12 |
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