JPH0725616Y2 - 表面形状計測装置 - Google Patents

表面形状計測装置

Info

Publication number
JPH0725616Y2
JPH0725616Y2 JP6039986U JP6039986U JPH0725616Y2 JP H0725616 Y2 JPH0725616 Y2 JP H0725616Y2 JP 6039986 U JP6039986 U JP 6039986U JP 6039986 U JP6039986 U JP 6039986U JP H0725616 Y2 JPH0725616 Y2 JP H0725616Y2
Authority
JP
Japan
Prior art keywords
measurement
surface shape
noise
sensor
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6039986U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62173012U (enrdf_load_stackoverflow
Inventor
尚登 赤羽
敏夫 川北
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Hitachi Maxell Energy Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Energy Ltd filed Critical Hitachi Maxell Energy Ltd
Priority to JP6039986U priority Critical patent/JPH0725616Y2/ja
Publication of JPS62173012U publication Critical patent/JPS62173012U/ja
Application granted granted Critical
Publication of JPH0725616Y2 publication Critical patent/JPH0725616Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP6039986U 1986-04-21 1986-04-21 表面形状計測装置 Expired - Lifetime JPH0725616Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6039986U JPH0725616Y2 (ja) 1986-04-21 1986-04-21 表面形状計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6039986U JPH0725616Y2 (ja) 1986-04-21 1986-04-21 表面形状計測装置

Publications (2)

Publication Number Publication Date
JPS62173012U JPS62173012U (enrdf_load_stackoverflow) 1987-11-04
JPH0725616Y2 true JPH0725616Y2 (ja) 1995-06-07

Family

ID=30892775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6039986U Expired - Lifetime JPH0725616Y2 (ja) 1986-04-21 1986-04-21 表面形状計測装置

Country Status (1)

Country Link
JP (1) JPH0725616Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000310527A (ja) * 1999-04-27 2000-11-07 Mitsutoyo Corp 表面性状測定機
DE102015203369B4 (de) * 2015-02-25 2020-02-20 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Bestimmen der Messbedingungen eines Rauheitssensors, Verfahren zum Vermessen der Rauheit einer Werkstückoberfläche, Computerprogrammprodukt sowie Messgerät eingerichtet zur Durchführung der Verfahren
CN117006998B (zh) * 2023-10-07 2024-01-16 深圳市中图仪器股份有限公司 具有保护系统的扫描机构

Also Published As

Publication number Publication date
JPS62173012U (enrdf_load_stackoverflow) 1987-11-04

Similar Documents

Publication Publication Date Title
US7047145B2 (en) Compensation method of resolver detected position
Zhong et al. Quasi-optical coherence vibration tomography technique for damage detection in beam-like structures based on auxiliary mass induced frequency shift
JPH0725616Y2 (ja) 表面形状計測装置
TW571507B (en) Resonance frequency detector of motor controller
CA2070359A1 (en) Scanning probe microscope
JP3373367B2 (ja) 3次元計測装置及び3次元計測方法
US20020130658A1 (en) Magnetic head measuring apparatus and measuring method applied to the same apparatus
JP4034906B2 (ja) 表面性状測定機
JP2000310527A (ja) 表面性状測定機
JPH07294500A (ja) 超音波映像検査装置
JPH11287859A (ja) レーザ距離計
JP3209111B2 (ja) 青果物の熟度測定方法及び測定装置
JP2010025767A (ja) 電磁波測定装置
JP2923385B2 (ja) 路面形状計測装置
JP2001013183A (ja) 電磁波妨害源探査方法、及び電磁波妨害源探査装置
TWI254122B (en) Automatic optical inspection apparatus with compensation function and focusing error compensation method therefor
JP3151652B2 (ja) 長い対象物の測定方法とその装置
JP3040051B2 (ja) 超音波映像検査装置
JPH0629834B2 (ja) 被検体の疲労状況の画像化方法
CN212227993U (zh) 一种轮廓检查传感器测试平台装置
JP2005300348A (ja) センサ信号回路および測定機
JP2879355B2 (ja) 形状測定方法
JPH10185661A (ja) 1自由度力学系のパラメータ推定装置および方法
JPH0540107A (ja) 超音波顕微鏡
JPH08338758A (ja) 振動計調整方法